JP3962929B2 - レーザ距離画像生成装置及び方法 - Google Patents

レーザ距離画像生成装置及び方法 Download PDF

Info

Publication number
JP3962929B2
JP3962929B2 JP2004147933A JP2004147933A JP3962929B2 JP 3962929 B2 JP3962929 B2 JP 3962929B2 JP 2004147933 A JP2004147933 A JP 2004147933A JP 2004147933 A JP2004147933 A JP 2004147933A JP 3962929 B2 JP3962929 B2 JP 3962929B2
Authority
JP
Japan
Prior art keywords
laser
laser beam
detection
distance image
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004147933A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005331273A5 (enExample
JP2005331273A (ja
Inventor
晃 秋山
至輝 柿本
和久 神田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2004147933A priority Critical patent/JP3962929B2/ja
Publication of JP2005331273A publication Critical patent/JP2005331273A/ja
Publication of JP2005331273A5 publication Critical patent/JP2005331273A5/ja
Application granted granted Critical
Publication of JP3962929B2 publication Critical patent/JP3962929B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/42Simultaneous measurement of distance and other co-ordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/10Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/89Lidar systems specially adapted for specific applications for mapping or imaging

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Measurement Of Optical Distance (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP2004147933A 2004-05-18 2004-05-18 レーザ距離画像生成装置及び方法 Expired - Lifetime JP3962929B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004147933A JP3962929B2 (ja) 2004-05-18 2004-05-18 レーザ距離画像生成装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004147933A JP3962929B2 (ja) 2004-05-18 2004-05-18 レーザ距離画像生成装置及び方法

Publications (3)

Publication Number Publication Date
JP2005331273A JP2005331273A (ja) 2005-12-02
JP2005331273A5 JP2005331273A5 (enExample) 2007-02-15
JP3962929B2 true JP3962929B2 (ja) 2007-08-22

Family

ID=35486044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004147933A Expired - Lifetime JP3962929B2 (ja) 2004-05-18 2004-05-18 レーザ距離画像生成装置及び方法

Country Status (1)

Country Link
JP (1) JP3962929B2 (enExample)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100811938B1 (ko) 2006-07-10 2008-03-10 현대자동차주식회사 원통형 반사기를 이용한 차량용 레이저 레이더 및 이의제어 방법
JP2010096574A (ja) * 2008-10-15 2010-04-30 Ihi Corp レーザレーダ及びレーザレーダによる計測方法
JP2011089874A (ja) * 2009-10-22 2011-05-06 Toyota Central R&D Labs Inc 距離画像データ取得装置
CN102884444B (zh) * 2010-05-07 2014-08-13 三菱电机株式会社 激光雷达装置
JP5858688B2 (ja) * 2011-08-30 2016-02-10 スタンレー電気株式会社 距離画像生成装置
JP2013113670A (ja) * 2011-11-28 2013-06-10 Mitsubishi Electric Corp レーザレーダシステム、レーザ測距装置および制御装置
EP2708914A1 (de) * 2012-09-18 2014-03-19 Sick Ag Optoelektronischer Sensor und Verfahren zur Erfassung einer Tiefenkarte
KR102372088B1 (ko) 2015-10-29 2022-03-08 삼성전자주식회사 영상 획득 장치 및 영상 획득 방법
US9841495B2 (en) * 2015-11-05 2017-12-12 Luminar Technologies, Inc. Lidar system with improved scanning speed for high-resolution depth mapping
DE102015226460A1 (de) 2015-12-22 2017-06-22 Robert Bosch Gmbh LIDAR-Abtasteinrichtung und LIDAR-Abtasteinrichtungssystem
US9933513B2 (en) 2016-02-18 2018-04-03 Aeye, Inc. Method and apparatus for an adaptive ladar receiver
US20170242102A1 (en) 2016-02-18 2017-08-24 Aeye, Inc. Ladar System with Dichroic Photodetector for Tracking the Targeting of a Scanning Ladar Transmitter
US10761195B2 (en) 2016-04-22 2020-09-01 OPSYS Tech Ltd. Multi-wavelength LIDAR system
US11092676B2 (en) 2017-02-17 2021-08-17 Aeye, Inc. Method and system for optical data communication via scanning ladar
WO2018169758A1 (en) 2017-03-13 2018-09-20 OPSYS Tech Ltd. Eye-safe scanning lidar system
JP2018205187A (ja) * 2017-06-06 2018-12-27 京セラ株式会社 電磁波検出装置、電磁波検出システム、およびプログラム
JP2018205285A (ja) * 2017-06-09 2018-12-27 京セラ株式会社 電磁波検出装置、電磁波検出システム、およびプログラム
DE102017113237A1 (de) * 2017-06-16 2018-12-20 Bea Sa Laserscanner zur Überwachung eines Überwachungsbereichs
JP6865492B2 (ja) 2017-07-28 2021-04-28 オプシス テック リミテッド 小角度発散を伴うvcselアレイlidar送信機
KR102634870B1 (ko) * 2017-11-15 2024-02-13 옵시스 테크 엘티디 잡음 적응형 솔리드-스테이트 lidar 시스템
EP3775979B1 (en) 2018-04-01 2024-01-17 Opsys Tech Ltd. Noise adaptive solid-state lidar system
EP3830602B1 (en) 2018-08-03 2025-02-26 Opsys Tech Ltd. Distributed modular solid-state lidar system
JP7275701B2 (ja) * 2019-03-19 2023-05-18 株式会社デンソー 測距装置および測距装置における異常判定方法
JP7535313B2 (ja) 2019-04-09 2024-08-16 オプシス テック リミテッド レーザ制御を伴うソリッドステートlidar送光機
CN110279406B (zh) * 2019-05-06 2022-07-15 苏宁金融服务(上海)有限公司 一种基于摄像头的无接触式的脉率测量方法及装置
EP3977159A4 (en) 2019-05-30 2023-03-01 Opsys Tech Ltd. EYE-SAFE LONG-RANGE LIDAR SYSTEM WITH ACTUATOR
US11513195B2 (en) 2019-06-10 2022-11-29 OPSYS Tech Ltd. Eye-safe long-range solid-state LIDAR system
WO2020263735A1 (en) 2019-06-25 2020-12-30 OPSYS Tech Ltd. Adaptive multiple-pulse lidar system
JP6879337B2 (ja) * 2019-07-05 2021-06-02 富士通株式会社 距離測定装置、距離測定方法、距離測定プログラムおよびテーブルの作成方法
WO2021021872A1 (en) 2019-07-31 2021-02-04 OPSYS Tech Ltd. High-resolution solid-state lidar transmitter
JP2021039069A (ja) * 2019-09-05 2021-03-11 株式会社東芝 光検出装置、電子装置及び光検出方法
CN113156459B (zh) * 2020-01-03 2023-10-13 华为技术有限公司 一种tof深度传感模组和图像生成方法
US11754680B2 (en) * 2020-04-20 2023-09-12 Raytheon Company Optical system that detects and blocks backscatter
US11630188B1 (en) 2021-03-26 2023-04-18 Aeye, Inc. Hyper temporal lidar with dynamic laser control using safety models
US11604264B2 (en) 2021-03-26 2023-03-14 Aeye, Inc. Switchable multi-lens Lidar receiver
US11460556B1 (en) 2021-03-26 2022-10-04 Aeye, Inc. Hyper temporal lidar with shot scheduling for variable amplitude scan mirror
US11500093B2 (en) 2021-03-26 2022-11-15 Aeye, Inc. Hyper temporal lidar using multiple matched filters to determine target obliquity
US11635495B1 (en) 2021-03-26 2023-04-25 Aeye, Inc. Hyper temporal lidar with controllable tilt amplitude for a variable amplitude scan mirror
US20220308218A1 (en) 2021-03-26 2022-09-29 Aeye, Inc. Hyper Temporal Lidar with Shot-Specific Detection Control
US11474214B1 (en) 2021-03-26 2022-10-18 Aeye, Inc. Hyper temporal lidar with controllable pulse bursts to resolve angle to target
JP2025131021A (ja) * 2024-02-28 2025-09-09 株式会社小糸製作所 測定装置、測定装置の制御プログラム、および、コンピュータプログラムを記録したコンピュータ読み取り可能な記録媒体

Also Published As

Publication number Publication date
JP2005331273A (ja) 2005-12-02

Similar Documents

Publication Publication Date Title
JP3962929B2 (ja) レーザ距離画像生成装置及び方法
KR102557713B1 (ko) 다중-빔 입자 빔 현미경 작동 방법
TWI657242B (zh) 圖案檢查方法及圖案檢查裝置
CN1934481B (zh) 根据共焦显微术的基本原理的高速测量设备和方法
JP6484072B2 (ja) 物体検出装置
KR101724266B1 (ko) 멀티 하전 입자빔 묘화 방법 및 멀티 하전 입자빔 묘화 장치
KR20180011735A (ko) 전자빔 검사 장치 및 전자빔 검사 방법
US20200104980A1 (en) Multi-electron beam image acquisition apparatus, and multi-electron beam image acquisition method
JP6750937B2 (ja) パターン検査装置
US10373798B2 (en) Multi charged particle beam inspection apparatus, and multi charged particle beam inspection method
US7075076B2 (en) Inspection system, inspection method, and process management method
KR20180010252A (ko) 치아 객체의 3차원 측정을 위한 카메라 및 방법
US20170243715A1 (en) Inspection apparatus and inspection method
KR20200063982A (ko) 전자 빔 화상 취득 장치 및 전자 빔 화상 취득 방법
JP6953324B2 (ja) 走査電子顕微鏡のオートフォーカス方法
KR20160146913A (ko) 공초점 라인 검사 광학 시스템
CN104483105B (zh) 一种像素间串扰检测系统及方法
JP5520562B2 (ja) 立体形状測定システム及び立体形状測定方法
JP2017224449A (ja) 電子顕微鏡および画像取得方法
JP2724502B2 (ja) 走査型顕微鏡装置
KR20080048394A (ko) 노광장치
KR20120106913A (ko) 자동 광학 검사기의 자동 초점 조절 장치.
JP6425522B2 (ja) 露光装置
JP5371663B2 (ja) パターン描画装置およびパターン描画方法
KR20180042798A (ko) 멀티빔 초점 조정 방법, 멀티빔 초점 측정 방법 및 하전 입자빔 묘화 장치

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20061101

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061222

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070131

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070327

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070425

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070508

R150 Certificate of patent or registration of utility model

Ref document number: 3962929

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100601

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110601

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110601

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120601

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120601

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130601

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term