JP3956447B2 - インジェクション・シーディングを用いた露光用レーザ装置 - Google Patents

インジェクション・シーディングを用いた露光用レーザ装置 Download PDF

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Publication number
JP3956447B2
JP3956447B2 JP28344097A JP28344097A JP3956447B2 JP 3956447 B2 JP3956447 B2 JP 3956447B2 JP 28344097 A JP28344097 A JP 28344097A JP 28344097 A JP28344097 A JP 28344097A JP 3956447 B2 JP3956447 B2 JP 3956447B2
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Japan
Prior art keywords
wavelength
laser
light
light source
incident
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JP28344097A
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Japanese (ja)
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JPH11121879A (ja
JPH11121879A5 (enExample
Inventor
昌宏 堀口
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Ushio Denki KK
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Ushio Denki KK
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Priority to JP28344097A priority Critical patent/JP3956447B2/ja
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Publication of JPH11121879A5 publication Critical patent/JPH11121879A5/ja
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  • Lasers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP28344097A 1997-10-16 1997-10-16 インジェクション・シーディングを用いた露光用レーザ装置 Expired - Fee Related JP3956447B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28344097A JP3956447B2 (ja) 1997-10-16 1997-10-16 インジェクション・シーディングを用いた露光用レーザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28344097A JP3956447B2 (ja) 1997-10-16 1997-10-16 インジェクション・シーディングを用いた露光用レーザ装置

Publications (3)

Publication Number Publication Date
JPH11121879A JPH11121879A (ja) 1999-04-30
JPH11121879A5 JPH11121879A5 (enExample) 2005-06-23
JP3956447B2 true JP3956447B2 (ja) 2007-08-08

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JP28344097A Expired - Fee Related JP3956447B2 (ja) 1997-10-16 1997-10-16 インジェクション・シーディングを用いた露光用レーザ装置

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11298083A (ja) * 1998-04-15 1999-10-29 Komatsu Ltd 注入同期型狭帯域レーザ
JP2002329911A (ja) * 2001-04-27 2002-11-15 Komatsu Ltd レーザ装置、増幅器、及び紫外線レーザ装置
JP4657103B2 (ja) * 2003-04-22 2011-03-23 株式会社小松製作所 露光用２ステージレーザ装置
US7599413B2 (en) 2006-05-19 2009-10-06 Pavilion Integration Corp. Self-contained module for injecting signal into slave laser without any modifications or adaptations to it
US9608399B2 (en) * 2013-03-18 2017-03-28 Kla-Tencor Corporation 193 nm laser and an inspection system using a 193 nm laser

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Publication number Publication date
JPH11121879A (ja) 1999-04-30

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