JP3934538B2 - 半導体装置の作製方法 - Google Patents

半導体装置の作製方法 Download PDF

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Publication number
JP3934538B2
JP3934538B2 JP2002350939A JP2002350939A JP3934538B2 JP 3934538 B2 JP3934538 B2 JP 3934538B2 JP 2002350939 A JP2002350939 A JP 2002350939A JP 2002350939 A JP2002350939 A JP 2002350939A JP 3934538 B2 JP3934538 B2 JP 3934538B2
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Japan
Prior art keywords
film
laser
region
tft
substrate
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Expired - Fee Related
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JP2002350939A
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English (en)
Japanese (ja)
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JP2003229434A5 (enExample
JP2003229434A (ja
Inventor
清 加藤
匡史 尾崎
浩平 牟田口
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to JP2002350939A priority Critical patent/JP3934538B2/ja
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Publication of JP2003229434A5 publication Critical patent/JP2003229434A5/ja
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  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Thin Film Transistor (AREA)
  • Recrystallisation Techniques (AREA)
JP2002350939A 2001-11-30 2002-12-03 半導体装置の作製方法 Expired - Fee Related JP3934538B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002350939A JP3934538B2 (ja) 2001-11-30 2002-12-03 半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-367994 2001-11-30
JP2001367994 2001-11-30
JP2002350939A JP3934538B2 (ja) 2001-11-30 2002-12-03 半導体装置の作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002349963A Division JP3934537B2 (ja) 2001-11-30 2002-12-02 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007030586A Division JP3993630B2 (ja) 2001-11-30 2007-02-09 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2003229434A JP2003229434A (ja) 2003-08-15
JP2003229434A5 JP2003229434A5 (enExample) 2006-01-19
JP3934538B2 true JP3934538B2 (ja) 2007-06-20

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Family Applications (1)

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JP2002350939A Expired - Fee Related JP3934538B2 (ja) 2001-11-30 2002-12-03 半導体装置の作製方法

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JP (1) JP3934538B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4633434B2 (ja) * 2004-10-18 2011-02-16 シャープ株式会社 半導体装置およびその製造方法
US7491559B2 (en) * 2005-11-08 2009-02-17 Au Optronics Corporation Low-temperature polysilicon display and method for fabricating same
CN104380367B (zh) * 2012-07-20 2017-03-08 夏普株式会社 显示装置

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Publication number Publication date
JP2003229434A (ja) 2003-08-15

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