JP3934538B2 - 半導体装置の作製方法 - Google Patents

半導体装置の作製方法 Download PDF

Info

Publication number
JP3934538B2
JP3934538B2 JP2002350939A JP2002350939A JP3934538B2 JP 3934538 B2 JP3934538 B2 JP 3934538B2 JP 2002350939 A JP2002350939 A JP 2002350939A JP 2002350939 A JP2002350939 A JP 2002350939A JP 3934538 B2 JP3934538 B2 JP 3934538B2
Authority
JP
Japan
Prior art keywords
film
laser
region
tft
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002350939A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003229434A5 (OSRAM
JP2003229434A (ja
Inventor
清 加藤
匡史 尾崎
浩平 牟田口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2002350939A priority Critical patent/JP3934538B2/ja
Publication of JP2003229434A publication Critical patent/JP2003229434A/ja
Publication of JP2003229434A5 publication Critical patent/JP2003229434A5/ja
Application granted granted Critical
Publication of JP3934538B2 publication Critical patent/JP3934538B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Thin Film Transistor (AREA)
  • Recrystallisation Techniques (AREA)
JP2002350939A 2001-11-30 2002-12-03 半導体装置の作製方法 Expired - Fee Related JP3934538B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002350939A JP3934538B2 (ja) 2001-11-30 2002-12-03 半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-367994 2001-11-30
JP2001367994 2001-11-30
JP2002350939A JP3934538B2 (ja) 2001-11-30 2002-12-03 半導体装置の作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002349963A Division JP3934537B2 (ja) 2001-11-30 2002-12-02 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007030586A Division JP3993630B2 (ja) 2001-11-30 2007-02-09 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2003229434A JP2003229434A (ja) 2003-08-15
JP2003229434A5 JP2003229434A5 (OSRAM) 2006-01-19
JP3934538B2 true JP3934538B2 (ja) 2007-06-20

Family

ID=27759613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002350939A Expired - Fee Related JP3934538B2 (ja) 2001-11-30 2002-12-03 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP3934538B2 (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4633434B2 (ja) * 2004-10-18 2011-02-16 シャープ株式会社 半導体装置およびその製造方法
US7491559B2 (en) * 2005-11-08 2009-02-17 Au Optronics Corporation Low-temperature polysilicon display and method for fabricating same
CN104380367B (zh) * 2012-07-20 2017-03-08 夏普株式会社 显示装置

Also Published As

Publication number Publication date
JP2003229434A (ja) 2003-08-15

Similar Documents

Publication Publication Date Title
US7935968B2 (en) Semiconductor device
JP4663799B2 (ja) アクティブマトリクス型表示装置
JP3913534B2 (ja) 表示装置及びこれを用いた表示システム
KR100794154B1 (ko) 반도체 장치의 제작방법
US6933184B2 (en) Method of manufacturing semiconductor device
US7602385B2 (en) Display device and display system using the same
US7459354B2 (en) Method for manufacturing a semiconductor device including top gate thin film transistor and method for manufacturing an active matrix device including top gate thin film transistor
JP2003152086A (ja) 半導体装置
JP3993630B2 (ja) 半導体装置の作製方法
JP4076720B2 (ja) 半導体装置の作製方法
JP4986332B2 (ja) 半導体装置の作製方法
JP3798370B2 (ja) 表示装置及びこれを用いた表示システム
JP4255681B2 (ja) パッシブマトリクス型表示装置
JP3934538B2 (ja) 半導体装置の作製方法
JP3934537B2 (ja) 半導体装置
JP4472082B2 (ja) 半導体装置の作製方法
JP3880919B2 (ja) 液晶表示装置
JP2003233326A (ja) アクティブマトリクス型表示装置及びその作製方法
JP2002353141A (ja) 半導体装置の作製方法
JP2001345454A (ja) 半導体装置およびその作製方法
JP2001274405A (ja) 半導体装置およびその作製方法
JP2004186215A6 (ja) 半導体装置の作製方法
JPWO2001048797A1 (ja) 半導体装置の作製方法
JP2004186215A (ja) 半導体装置の作製方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051124

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051124

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20061031

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061225

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070130

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070209

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070313

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070315

R150 Certificate of patent or registration of utility model

Ref document number: 3934538

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100330

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100330

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110330

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110330

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120330

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120330

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130330

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130330

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140330

Year of fee payment: 7

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees