JP3933544B2 - ワークの両面研磨方法 - Google Patents

ワークの両面研磨方法 Download PDF

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Publication number
JP3933544B2
JP3933544B2 JP2002245389A JP2002245389A JP3933544B2 JP 3933544 B2 JP3933544 B2 JP 3933544B2 JP 2002245389 A JP2002245389 A JP 2002245389A JP 2002245389 A JP2002245389 A JP 2002245389A JP 3933544 B2 JP3933544 B2 JP 3933544B2
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Japan
Prior art keywords
carrier
surface plate
polishing
holder
circular motion
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Expired - Lifetime
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JP2002245389A
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English (en)
Japanese (ja)
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JP2003080453A5 (enExample
JP2003080453A (ja
Inventor
文成 小田切
由夫 中村
康秀 傳田
春男 住澤
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Fujikoshi Machinery Corp
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Fujikoshi Machinery Corp
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Priority to JP2002245389A priority Critical patent/JP3933544B2/ja
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Publication of JP2003080453A5 publication Critical patent/JP2003080453A5/ja
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Publication of JP3933544B2 publication Critical patent/JP3933544B2/ja
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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2002245389A 2002-08-26 2002-08-26 ワークの両面研磨方法 Expired - Lifetime JP3933544B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002245389A JP3933544B2 (ja) 2002-08-26 2002-08-26 ワークの両面研磨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002245389A JP3933544B2 (ja) 2002-08-26 2002-08-26 ワークの両面研磨方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP832697A Division JPH10202511A (ja) 1997-01-21 1997-01-21 両面研磨装置

Publications (3)

Publication Number Publication Date
JP2003080453A JP2003080453A (ja) 2003-03-18
JP2003080453A5 JP2003080453A5 (enExample) 2004-12-16
JP3933544B2 true JP3933544B2 (ja) 2007-06-20

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ID=19196532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002245389A Expired - Lifetime JP3933544B2 (ja) 2002-08-26 2002-08-26 ワークの両面研磨方法

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JP (1) JP3933544B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107855900B (zh) * 2017-12-27 2024-01-16 中原工学院 一种两工位聚晶金刚石复合片类抛光机

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Publication number Publication date
JP2003080453A (ja) 2003-03-18

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