JP3931576B2 - 平行平板型マイクロ静電アクチュエータ、マイクロ光路スイッチ、マイクロメカニカルスイッチおよびそれらの駆動方法 - Google Patents

平行平板型マイクロ静電アクチュエータ、マイクロ光路スイッチ、マイクロメカニカルスイッチおよびそれらの駆動方法 Download PDF

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JP3931576B2
JP3931576B2 JP2001093927A JP2001093927A JP3931576B2 JP 3931576 B2 JP3931576 B2 JP 3931576B2 JP 2001093927 A JP2001093927 A JP 2001093927A JP 2001093927 A JP2001093927 A JP 2001093927A JP 3931576 B2 JP3931576 B2 JP 3931576B2
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movable electrode
electrode
substrate
electrodes
micro
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JP2002287045A (ja
JP2002287045A5 (enExample
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重男 野島
高司 武田
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Seiko Epson Corp
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Seiko Epson Corp
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JP2001093927A 2001-03-28 2001-03-28 平行平板型マイクロ静電アクチュエータ、マイクロ光路スイッチ、マイクロメカニカルスイッチおよびそれらの駆動方法 Expired - Fee Related JP3931576B2 (ja)

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JP2001093927A JP3931576B2 (ja) 2001-03-28 2001-03-28 平行平板型マイクロ静電アクチュエータ、マイクロ光路スイッチ、マイクロメカニカルスイッチおよびそれらの駆動方法

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JP2001093927A JP3931576B2 (ja) 2001-03-28 2001-03-28 平行平板型マイクロ静電アクチュエータ、マイクロ光路スイッチ、マイクロメカニカルスイッチおよびそれらの駆動方法

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JP2002287045A JP2002287045A (ja) 2002-10-03
JP2002287045A5 JP2002287045A5 (enExample) 2005-02-03
JP3931576B2 true JP3931576B2 (ja) 2007-06-20

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Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
JP4364565B2 (ja) 2003-07-02 2009-11-18 シャープ株式会社 静電アクチュエーター，マイクロスイッチ，マイクロ光スイッチ，電子機器および静電アクチュエーターの製造方法
JP4137872B2 (ja) 2004-03-31 2008-08-20 シャープ株式会社 静電アクチュエーター，マイクロスイッチ，マイクロ光スイッチ，マイクロ光スイッチシステム，通信装置および静電アクチュエーターの製造方法
JP4695956B2 (ja) * 2004-09-30 2011-06-08 富士フイルム株式会社 微小電気機械式変調素子及び微小電気機械式変調素子アレイ並びに画像形成装置
CA2641184C (en) 2006-01-12 2012-09-04 Nippon Telegraph And Telephone Corporation Mirror element and method for manufacturing mirror element
WO2007110928A1 (ja) * 2006-03-28 2007-10-04 Fujitsu Limited 可動素子
WO2008084520A1 (ja) * 2006-12-28 2008-07-17 Nikon Corporation 光学デバイス、パターン生成装置及びパターン生成方法、露光装置及び露光方法、並びにデバイス製造方法
JP4861216B2 (ja) * 2007-03-06 2012-01-25 株式会社トプコン 駆動電源回路
KR101458904B1 (ko) 2008-01-18 2014-11-07 삼성디스플레이 주식회사 표시 장치
JP4988655B2 (ja) * 2008-06-25 2012-08-01 パナソニック株式会社 半導体機械構造体
WO2012105055A1 (ja) 2011-02-04 2012-08-09 株式会社日立製作所 光学フィルタリング方法とそのデバイスおよび基板上欠陥検査方法とその装置
JP5867736B2 (ja) * 2011-02-04 2016-02-24 株式会社日立製作所 光学フィルタリングデバイス、並びに欠陥検査方法及びその装置

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