JP3914431B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP3914431B2 JP3914431B2 JP2001392970A JP2001392970A JP3914431B2 JP 3914431 B2 JP3914431 B2 JP 3914431B2 JP 2001392970 A JP2001392970 A JP 2001392970A JP 2001392970 A JP2001392970 A JP 2001392970A JP 3914431 B2 JP3914431 B2 JP 3914431B2
- Authority
- JP
- Japan
- Prior art keywords
- bump
- circuit board
- adhesive
- bare chip
- semiconductor bare
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H10W74/012—
-
- H10W72/00—
-
- H10W74/15—
-
- H10W90/00—
-
- H10W72/01225—
-
- H10W72/0711—
-
- H10W72/07178—
-
- H10W72/073—
-
- H10W72/07331—
-
- H10W72/07338—
-
- H10W72/251—
-
- H10W72/354—
-
- H10W72/856—
-
- H10W72/90—
-
- H10W72/9415—
-
- H10W90/724—
-
- H10W90/734—
Landscapes
- Wire Bonding (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001392970A JP3914431B2 (ja) | 2001-12-26 | 2001-12-26 | 半導体装置の製造方法 |
| US10/328,189 US6966964B2 (en) | 2001-12-26 | 2002-12-26 | Method and apparatus for manufacturing semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001392970A JP3914431B2 (ja) | 2001-12-26 | 2001-12-26 | 半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003197853A JP2003197853A (ja) | 2003-07-11 |
| JP2003197853A5 JP2003197853A5 (enExample) | 2005-07-28 |
| JP3914431B2 true JP3914431B2 (ja) | 2007-05-16 |
Family
ID=19188732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001392970A Expired - Fee Related JP3914431B2 (ja) | 2001-12-26 | 2001-12-26 | 半導体装置の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6966964B2 (enExample) |
| JP (1) | JP3914431B2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006154655A (ja) * | 2004-12-01 | 2006-06-15 | Bridgestone Corp | 情報表示用パネルの製造方法および情報表示装置 |
| KR100598459B1 (ko) | 2004-12-10 | 2006-07-11 | 주식회사 쎄크 | 칩 본딩장치 |
| CN100552948C (zh) * | 2004-12-28 | 2009-10-21 | 松下电器产业株式会社 | 半导体芯片的安装结构体和其制造方法 |
| JP2006210566A (ja) * | 2005-01-27 | 2006-08-10 | Akita Denshi Systems:Kk | 半導体装置 |
| US7170183B1 (en) * | 2005-05-13 | 2007-01-30 | Amkor Technology, Inc. | Wafer level stacked package |
| DE102007010731A1 (de) * | 2007-02-26 | 2008-08-28 | Würth Elektronik GmbH & Co. KG | Verfahren zum Einbetten von Chips und Leiterplatte |
| JP4952353B2 (ja) * | 2007-04-18 | 2012-06-13 | パナソニック株式会社 | チップモジュールおよびメモリカード |
| JP5179787B2 (ja) * | 2007-06-22 | 2013-04-10 | ラピスセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
| JP2009049051A (ja) * | 2007-08-14 | 2009-03-05 | Elpida Memory Inc | 半導体基板の接合方法及びそれにより製造された積層体 |
| JP2010062365A (ja) * | 2008-09-04 | 2010-03-18 | Hitachi Ltd | 半導体装置およびその製造方法 |
| US8710654B2 (en) | 2011-05-26 | 2014-04-29 | Kabushiki Kaisha Toshiba | Semiconductor device and manufacturing method thereof |
| US9252130B2 (en) * | 2013-03-29 | 2016-02-02 | Stats Chippac, Ltd. | Methods of manufacturing flip chip semiconductor packages using double-sided thermal compression bonding |
| FR3011679B1 (fr) * | 2013-10-03 | 2017-01-27 | Commissariat Energie Atomique | Procede ameliore d'assemblage par collage direct entre deux elements, chaque element comprenant des portions de metal et de materiaux dielectriques |
| JP6189181B2 (ja) | 2013-11-06 | 2017-08-30 | 東芝メモリ株式会社 | 半導体装置の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5366933A (en) * | 1993-10-13 | 1994-11-22 | Intel Corporation | Method for constructing a dual sided, wire bonded integrated circuit chip package |
| JP3266815B2 (ja) * | 1996-11-26 | 2002-03-18 | シャープ株式会社 | 半導体集積回路装置の製造方法 |
| US6071371A (en) * | 1998-02-02 | 2000-06-06 | Delco Electronics Corporation | Method of simultaneously attaching surface-mount and chip-on-board dies to a circuit board |
| JP2002198395A (ja) * | 2000-12-26 | 2002-07-12 | Seiko Epson Corp | 半導体装置及びその製造方法、回路基板並びに電子機器 |
-
2001
- 2001-12-26 JP JP2001392970A patent/JP3914431B2/ja not_active Expired - Fee Related
-
2002
- 2002-12-26 US US10/328,189 patent/US6966964B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US6966964B2 (en) | 2005-11-22 |
| JP2003197853A (ja) | 2003-07-11 |
| US20030138993A1 (en) | 2003-07-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1445995B1 (en) | Method of mounting an electronic component on a circuit board and system for carrying out the method | |
| JP2833326B2 (ja) | 電子部品実装接続体およびその製造方法 | |
| US6724080B1 (en) | Heat sink with elevated heat spreader lid | |
| US6515357B2 (en) | Semiconductor package and semiconductor package fabrication method | |
| JP3914431B2 (ja) | 半導体装置の製造方法 | |
| JP4663184B2 (ja) | 半導体装置の製造方法 | |
| US8138018B2 (en) | Manufacturing method of semiconductor device having underfill resin formed without void between semiconductor chip and wiring board | |
| JP3326382B2 (ja) | 半導体装置の製造方法 | |
| JP2004356529A (ja) | 半導体装置および半導体装置の製造方法 | |
| US6773958B1 (en) | Integrated assembly-underfill flip chip process | |
| JP2001313314A (ja) | バンプを用いた半導体装置、その製造方法、および、バンプの形成方法 | |
| WO2004064142A1 (ja) | 半導体装置及びその製造方法 | |
| US6002171A (en) | Integrated heat spreader/stiffener assembly and method of assembly for semiconductor package | |
| JP3552422B2 (ja) | ボールグリッドアレイ半導体装置及びその実装方法 | |
| JP2002359323A (ja) | 半導体装置及び半導体装置の製造方法 | |
| JPH0727924B2 (ja) | 実装体の製造方法 | |
| JP2000286302A (ja) | 半導体チップ組立方法及び組立装置 | |
| JP2002184936A (ja) | 半導体装置およびその製造方法 | |
| JP2002026071A (ja) | 半導体装置及びその製造方法、回路基板並びに電子機器 | |
| JPH10154726A (ja) | 半導体装置及びその製造方法 | |
| JP3947502B2 (ja) | 異方導電性フィルムからなる封止部材の製造方法 | |
| JP2002026250A (ja) | 積層回路モジュールの製造方法 | |
| JPH11274227A (ja) | 半導体チップの実装方法および装置 | |
| JP3419398B2 (ja) | 半導体装置の製造方法 | |
| JP2001077295A (ja) | 半導体装置の製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041210 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20041210 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060522 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060530 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060727 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20060822 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061010 |
|
| A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20061116 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070116 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070202 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100209 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110209 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120209 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130209 Year of fee payment: 6 |
|
| LAPS | Cancellation because of no payment of annual fees |