JP3898293B2 - 液晶装置の製造方法 - Google Patents
液晶装置の製造方法 Download PDFInfo
- Publication number
- JP3898293B2 JP3898293B2 JP20441397A JP20441397A JP3898293B2 JP 3898293 B2 JP3898293 B2 JP 3898293B2 JP 20441397 A JP20441397 A JP 20441397A JP 20441397 A JP20441397 A JP 20441397A JP 3898293 B2 JP3898293 B2 JP 3898293B2
- Authority
- JP
- Japan
- Prior art keywords
- resist
- liquid crystal
- conductive film
- transparent conductive
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 91
- 238000004519 manufacturing process Methods 0.000 title claims description 63
- 238000000034 method Methods 0.000 claims description 55
- 239000000758 substrate Substances 0.000 claims description 39
- 238000005530 etching Methods 0.000 claims description 31
- 230000001681 protective effect Effects 0.000 claims description 18
- 230000002708 enhancing effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 77
- 230000008569 process Effects 0.000 description 35
- 239000003513 alkali Substances 0.000 description 25
- 239000000243 solution Substances 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 5
- 230000006872 improvement Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 229910003437 indium oxide Inorganic materials 0.000 description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 101000911772 Homo sapiens Hsc70-interacting protein Proteins 0.000 description 1
- 101001139126 Homo sapiens Krueppel-like factor 6 Proteins 0.000 description 1
- 101000710013 Homo sapiens Reversion-inducing cysteine-rich protein with Kazal motifs Proteins 0.000 description 1
- 101000661816 Homo sapiens Suppression of tumorigenicity 18 protein Proteins 0.000 description 1
- 101000661807 Homo sapiens Suppressor of tumorigenicity 14 protein Proteins 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 229910000042 hydrogen bromide Inorganic materials 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
- Optical Filters (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20441397A JP3898293B2 (ja) | 1997-07-30 | 1997-07-30 | 液晶装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20441397A JP3898293B2 (ja) | 1997-07-30 | 1997-07-30 | 液晶装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH1152402A JPH1152402A (ja) | 1999-02-26 |
| JPH1152402A5 JPH1152402A5 (enExample) | 2005-09-29 |
| JP3898293B2 true JP3898293B2 (ja) | 2007-03-28 |
Family
ID=16490137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20441397A Expired - Fee Related JP3898293B2 (ja) | 1997-07-30 | 1997-07-30 | 液晶装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3898293B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000122095A (ja) | 1998-10-20 | 2000-04-28 | Sanyo Electric Co Ltd | 反射型液晶表示装置 |
| TWI224227B (en) * | 1999-07-14 | 2004-11-21 | Sanyo Electric Co | Method for making a reflection type liquid crystal display device |
| US6563559B2 (en) | 2000-02-02 | 2003-05-13 | Sanyo Electric Co., Ltd. | Reflective liquid crystal display having increase luminance for each display pixel |
-
1997
- 1997-07-30 JP JP20441397A patent/JP3898293B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1152402A (ja) | 1999-02-26 |
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