JP3862633B2 - 非放射性誘電体線路の製造方法 - Google Patents

非放射性誘電体線路の製造方法 Download PDF

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Publication number
JP3862633B2
JP3862633B2 JP2002236351A JP2002236351A JP3862633B2 JP 3862633 B2 JP3862633 B2 JP 3862633B2 JP 2002236351 A JP2002236351 A JP 2002236351A JP 2002236351 A JP2002236351 A JP 2002236351A JP 3862633 B2 JP3862633 B2 JP 3862633B2
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JP
Japan
Prior art keywords
dielectric
film
sacrificial layer
forming
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2002236351A
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English (en)
Japanese (ja)
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JP2004080241A (ja
Inventor
光博 湯浅
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Tokyo Electron Ltd
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Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2002236351A priority Critical patent/JP3862633B2/ja
Priority to PCT/JP2003/010316 priority patent/WO2004017455A1/fr
Priority to US10/524,294 priority patent/US20050251994A1/en
Priority to AU2003257834A priority patent/AU2003257834A1/en
Publication of JP2004080241A publication Critical patent/JP2004080241A/ja
Application granted granted Critical
Publication of JP3862633B2 publication Critical patent/JP3862633B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/16—Dielectric waveguides, i.e. without a longitudinal conductor
    • H01P3/165—Non-radiating dielectric waveguides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/001—Manufacturing waveguides or transmission lines of the waveguide type
    • H01P11/006—Manufacturing dielectric waveguides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49016—Antenna or wave energy "plumbing" making

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Waveguides (AREA)
  • Micromachines (AREA)
JP2002236351A 2002-08-14 2002-08-14 非放射性誘電体線路の製造方法 Expired - Lifetime JP3862633B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002236351A JP3862633B2 (ja) 2002-08-14 2002-08-14 非放射性誘電体線路の製造方法
PCT/JP2003/010316 WO2004017455A1 (fr) 2002-08-14 2003-08-13 Procede de fabrication d'un guide d'ondes dielectrique non rayonnant et guide d'ondes dielectrique non rayonnant
US10/524,294 US20050251994A1 (en) 2002-08-14 2003-08-13 Method for manufacturing nonradiative dielectric waveguide and nonradiative dielectric waveguide
AU2003257834A AU2003257834A1 (en) 2002-08-14 2003-08-13 Method for manufacturing nonradiative dielectric waveguide and nonradiative dielectric waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002236351A JP3862633B2 (ja) 2002-08-14 2002-08-14 非放射性誘電体線路の製造方法

Publications (2)

Publication Number Publication Date
JP2004080241A JP2004080241A (ja) 2004-03-11
JP3862633B2 true JP3862633B2 (ja) 2006-12-27

Family

ID=31884409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002236351A Expired - Lifetime JP3862633B2 (ja) 2002-08-14 2002-08-14 非放射性誘電体線路の製造方法

Country Status (4)

Country Link
US (1) US20050251994A1 (fr)
JP (1) JP3862633B2 (fr)
AU (1) AU2003257834A1 (fr)
WO (1) WO2004017455A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9014526B2 (en) 2010-03-31 2015-04-21 Hewlett-Packard Development Company, L.P. Waveguide system and methods
US9012905B2 (en) 2011-04-08 2015-04-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device including transistor comprising oxide semiconductor and method for manufacturing the same
US10141623B2 (en) 2016-10-17 2018-11-27 International Business Machines Corporation Multi-layer printed circuit board having first and second coaxial vias coupled to a core of a dielectric waveguide disposed in the circuit board
CN111149253A (zh) * 2017-09-29 2020-05-12 英特尔公司 多管芯半导体封装中的经由波导的半导体管芯间通信

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3563630A (en) * 1966-12-07 1971-02-16 North American Rockwell Rectangular dielectric optical wave-guide of width about one-half wave-length of the transmitted light
GB1301553A (fr) * 1970-07-14 1972-12-29
US4028643A (en) * 1976-05-12 1977-06-07 University Of Illinois Foundation Waveguide having strip dielectric structure
JPS57166701A (en) * 1981-04-03 1982-10-14 Shigeo Nishida Dielectric line
JPS58215804A (ja) * 1982-06-09 1983-12-15 Seki Shoji Kk 誘電体線路
US4688009A (en) * 1985-05-13 1987-08-18 Varian Associates, Inc. Triple-pane waveguide window
US5017509A (en) * 1988-07-19 1991-05-21 Regents Of The University Of California Stand-off transmission lines and method for making same
JPH08125412A (ja) * 1994-10-19 1996-05-17 Mitsubishi Electric Corp 伝送線路，及びその製造方法
JP3134781B2 (ja) * 1996-07-19 2001-02-13 株式会社村田製作所 多層誘電体線路回路
JPH10224120A (ja) * 1997-02-06 1998-08-21 Murata Mfg Co Ltd 誘電体線路
JPH10303609A (ja) * 1997-04-24 1998-11-13 Kyocera Corp 誘電体線路
JP3377932B2 (ja) * 1997-06-30 2003-02-17 京セラ株式会社 高周波用多層配線基板の製造方法
DE69832333T2 (de) * 1997-07-18 2006-07-20 Northrop Grumman Corp., Los Angeles Mikroelektromechanischer Schalter
US6640403B2 (en) * 1999-03-22 2003-11-04 Vanguard International Semiconductor Corporation Method for forming a dielectric-constant-enchanced capacitor
JP3608990B2 (ja) * 1999-10-19 2005-01-12 新光電気工業株式会社 多層回路基板およびその製造方法
US6441479B1 (en) * 2000-03-02 2002-08-27 Micron Technology, Inc. System-on-a-chip with multi-layered metallized through-hole interconnection
US6611237B2 (en) * 2000-11-30 2003-08-26 The Regents Of The University Of California Fluidic self-assembly of active antenna
US6885795B1 (en) * 2002-05-31 2005-04-26 Kotusa, Inc. Waveguide tap monitor

Also Published As

Publication number Publication date
AU2003257834A1 (en) 2004-03-03
US20050251994A1 (en) 2005-11-17
WO2004017455A1 (fr) 2004-02-26
JP2004080241A (ja) 2004-03-11

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