JP3848673B2 - 光学式形状測定装置 - Google Patents
光学式形状測定装置 Download PDFInfo
- Publication number
- JP3848673B2 JP3848673B2 JP2006014128A JP2006014128A JP3848673B2 JP 3848673 B2 JP3848673 B2 JP 3848673B2 JP 2006014128 A JP2006014128 A JP 2006014128A JP 2006014128 A JP2006014128 A JP 2006014128A JP 3848673 B2 JP3848673 B2 JP 3848673B2
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- Prior art keywords
- wafer
- subject
- optical
- shape measuring
- measuring apparatus
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Description
11,21:発光器 12,22:測定光
13,23:ハーフミラー 14,24:コリメータレンズ
15,25:基準平面基板 16,26受光器
17:演算器 18:モニタ
19,29:平板ガラス
Claims (3)
- エッジ部を介して略鉛直に保持された厚さの薄い平板状の被検体の主面側及び裏面側に対向配置された光学測定手段と、前記2つの光学測定手段の内、少なくとも一方の光学測定手段と被検体との間に、被検体と平行間隙を形成し且つ被検体に近接して配置された剛体平板を備えてなることを特徴とする光学式形状測定装置。
- エッジ部を介して略鉛直に保持された厚さの薄い平板状の被検体の主面側に配置された光学測定手段と、前記被検体の裏面側に、被検体と平行間隙を形成し且つ被検体に近接して配置された剛体平板を備えてなることを特徴とする光学式形状測定装置。
- 請求項1又は2に記載の光学式形状測定装置において、剛体平板が被検体に20mm以下の間隔で配置されてなる光学式形状測定装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2006014128A JP3848673B2 (ja) | 2006-01-23 | 2006-01-23 | 光学式形状測定装置 |
Applications Claiming Priority (1)
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JP2006014128A JP3848673B2 (ja) | 2006-01-23 | 2006-01-23 | 光学式形状測定装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000184489A Division JP3785025B2 (ja) | 2000-06-20 | 2000-06-20 | 光学式形状測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006138871A JP2006138871A (ja) | 2006-06-01 |
JP3848673B2 true JP3848673B2 (ja) | 2006-11-22 |
Family
ID=36619772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006014128A Expired - Lifetime JP3848673B2 (ja) | 2006-01-23 | 2006-01-23 | 光学式形状測定装置 |
Country Status (1)
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JP (1) | JP3848673B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008076269A (ja) * | 2006-09-22 | 2008-04-03 | Tokyo Univ Of Agriculture & Technology | 縦型形状測定装置、および形状測定方法。 |
JP6301815B2 (ja) * | 2014-11-17 | 2018-03-28 | 株式会社神戸製鋼所 | 形状測定装置 |
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2006
- 2006-01-23 JP JP2006014128A patent/JP3848673B2/ja not_active Expired - Lifetime
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JP2006138871A (ja) | 2006-06-01 |
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