JP3821570B2 - ネガ型レジスト組成物 - Google Patents

ネガ型レジスト組成物 Download PDF

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Publication number
JP3821570B2
JP3821570B2 JP06559898A JP6559898A JP3821570B2 JP 3821570 B2 JP3821570 B2 JP 3821570B2 JP 06559898 A JP06559898 A JP 06559898A JP 6559898 A JP6559898 A JP 6559898A JP 3821570 B2 JP3821570 B2 JP 3821570B2
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JP
Japan
Prior art keywords
group
substituent
resin
resist composition
cycloalkylene
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP06559898A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11258801A5 (enExample
JPH11258801A (ja
Inventor
利明 青合
俊一 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP06559898A priority Critical patent/JP3821570B2/ja
Publication of JPH11258801A publication Critical patent/JPH11258801A/ja
Publication of JPH11258801A5 publication Critical patent/JPH11258801A5/ja
Application granted granted Critical
Publication of JP3821570B2 publication Critical patent/JP3821570B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP06559898A 1998-03-16 1998-03-16 ネガ型レジスト組成物 Expired - Lifetime JP3821570B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP06559898A JP3821570B2 (ja) 1998-03-16 1998-03-16 ネガ型レジスト組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06559898A JP3821570B2 (ja) 1998-03-16 1998-03-16 ネガ型レジスト組成物

Publications (3)

Publication Number Publication Date
JPH11258801A JPH11258801A (ja) 1999-09-24
JPH11258801A5 JPH11258801A5 (enExample) 2005-02-24
JP3821570B2 true JP3821570B2 (ja) 2006-09-13

Family

ID=13291626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP06559898A Expired - Lifetime JP3821570B2 (ja) 1998-03-16 1998-03-16 ネガ型レジスト組成物

Country Status (1)

Country Link
JP (1) JP3821570B2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6506534B1 (en) * 1999-09-02 2003-01-14 Fujitsu Limited Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices
JP4648526B2 (ja) * 1999-09-02 2011-03-09 富士通株式会社 ネガ型レジスト組成物、レジストパターンの形成方法及び電子デバイスの製造方法
JP2002006501A (ja) * 1999-11-09 2002-01-09 Sumitomo Chem Co Ltd 化学増幅型レジスト組成物
JP4105371B2 (ja) 2000-07-28 2008-06-25 富士フイルム株式会社 ネガ型感光性平版印刷版
US7374857B2 (en) 2001-11-30 2008-05-20 Wako Pure Chemical Industries Ltd. Bismide compound, acid generator and resist composition each containing the same, and method of forming pattern from the composition
US7338748B2 (en) 2002-09-30 2008-03-04 Fujifilm Corporation Polymerizable composition and planographic printing plate precursor
JP4137577B2 (ja) 2002-09-30 2008-08-20 富士フイルム株式会社 感光性組成物
JP2004126050A (ja) 2002-09-30 2004-04-22 Fuji Photo Film Co Ltd 平版印刷版原版
JP4150261B2 (ja) 2003-01-14 2008-09-17 富士フイルム株式会社 平版印刷版原版の製版方法
JP2004252201A (ja) 2003-02-20 2004-09-09 Fuji Photo Film Co Ltd 平版印刷版原版
JP4299639B2 (ja) 2003-07-29 2009-07-22 富士フイルム株式会社 重合性組成物及びそれを用いた画像記録材料
JP2005099284A (ja) 2003-09-24 2005-04-14 Fuji Photo Film Co Ltd 感光性組成物及び平版印刷版原版
ES2961372T3 (es) * 2015-07-10 2024-03-11 Arkema France Composiciones curables que comprenden acrilatos monofuncionales

Also Published As

Publication number Publication date
JPH11258801A (ja) 1999-09-24

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