JP3816615B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP3816615B2
JP3816615B2 JP1530897A JP1530897A JP3816615B2 JP 3816615 B2 JP3816615 B2 JP 3816615B2 JP 1530897 A JP1530897 A JP 1530897A JP 1530897 A JP1530897 A JP 1530897A JP 3816615 B2 JP3816615 B2 JP 3816615B2
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JP
Japan
Prior art keywords
substrate
focusing
image
signal
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1530897A
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English (en)
Japanese (ja)
Other versions
JPH10213522A (ja
JPH10213522A5 (OSRAM
Inventor
卓 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP1530897A priority Critical patent/JP3816615B2/ja
Publication of JPH10213522A publication Critical patent/JPH10213522A/ja
Publication of JPH10213522A5 publication Critical patent/JPH10213522A5/ja
Application granted granted Critical
Publication of JP3816615B2 publication Critical patent/JP3816615B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Automatic Focus Adjustment (AREA)
  • Liquid Crystal (AREA)
JP1530897A 1997-01-29 1997-01-29 基板検査装置 Expired - Fee Related JP3816615B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1530897A JP3816615B2 (ja) 1997-01-29 1997-01-29 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1530897A JP3816615B2 (ja) 1997-01-29 1997-01-29 基板検査装置

Publications (3)

Publication Number Publication Date
JPH10213522A JPH10213522A (ja) 1998-08-11
JPH10213522A5 JPH10213522A5 (OSRAM) 2004-12-24
JP3816615B2 true JP3816615B2 (ja) 2006-08-30

Family

ID=11885174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1530897A Expired - Fee Related JP3816615B2 (ja) 1997-01-29 1997-01-29 基板検査装置

Country Status (1)

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JP (1) JP3816615B2 (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4586272B2 (ja) * 2001-01-12 2010-11-24 ソニー株式会社 基板検査装置と基板検査方法、及び液晶表示装置の製造方法
JP2007225431A (ja) * 2006-02-23 2007-09-06 Mitsubishi Electric Corp 外観検査装置
JP2008197612A (ja) * 2007-01-17 2008-08-28 Fuji Electric Holdings Co Ltd 画像表示装置および画像表示プログラム
JP5038191B2 (ja) * 2008-03-04 2012-10-03 有限会社共同設計企画 電子部品検査方法およびそれに用いられる装置
JP2010025699A (ja) * 2008-07-17 2010-02-04 Shibaura Mechatronics Corp 基板の位置認識装置及び撮像認識方法
WO2016072381A1 (ja) * 2014-11-04 2016-05-12 三菱電機株式会社 ロープ径計測システム、ロープ径計測装置、ロープ径計測方法およびプログラム

Also Published As

Publication number Publication date
JPH10213522A (ja) 1998-08-11

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