JP3814343B2 - フィルム厚の測定方法及び装置 - Google Patents

フィルム厚の測定方法及び装置 Download PDF

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Publication number
JP3814343B2
JP3814343B2 JP22483596A JP22483596A JP3814343B2 JP 3814343 B2 JP3814343 B2 JP 3814343B2 JP 22483596 A JP22483596 A JP 22483596A JP 22483596 A JP22483596 A JP 22483596A JP 3814343 B2 JP3814343 B2 JP 3814343B2
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JP
Japan
Prior art keywords
light
film
signal
optical
probe
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Expired - Fee Related
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JP22483596A
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English (en)
Japanese (ja)
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JPH09119814A (ja
JPH09119814A5 (enExample
Inventor
ロナルド・ヴィー・アルブス
ウエイン・ヴィー・ソリン
スティーブン・エー・ニュートン
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Agilent Technologies Inc
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Agilent Technologies Inc
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Publication of JPH09119814A publication Critical patent/JPH09119814A/ja
Publication of JPH09119814A5 publication Critical patent/JPH09119814A5/ja
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Publication of JP3814343B2 publication Critical patent/JP3814343B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP22483596A 1995-08-28 1996-08-27 フィルム厚の測定方法及び装置 Expired - Fee Related JP3814343B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US520,199 1995-08-28
US08/520,199 US5642196A (en) 1995-08-28 1995-08-28 Method and apparatus for measuring the thickness of a film using low coherence reflectometry

Publications (3)

Publication Number Publication Date
JPH09119814A JPH09119814A (ja) 1997-05-06
JPH09119814A5 JPH09119814A5 (enExample) 2004-07-29
JP3814343B2 true JP3814343B2 (ja) 2006-08-30

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ID=24071580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22483596A Expired - Fee Related JP3814343B2 (ja) 1995-08-28 1996-08-27 フィルム厚の測定方法及び装置

Country Status (3)

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US (1) US5642196A (enExample)
EP (1) EP0762079A3 (enExample)
JP (1) JP3814343B2 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198540B1 (en) 1997-03-26 2001-03-06 Kowa Company, Ltd. Optical coherence tomography have plural reference beams of differing modulations
JPH10267610A (ja) * 1997-03-26 1998-10-09 Kowa Co 光学測定装置
US6406641B1 (en) 1997-06-17 2002-06-18 Luxtron Corporation Liquid etch endpoint detection and process metrology
EP0947862A3 (en) 1998-03-31 2004-03-17 Ntt Advanced Technology Corporation Method and apparatus for maintaining optical signal having low degree of polarization in specific state of polarization
RU2147728C1 (ru) * 1998-11-10 2000-04-20 Иванов Вадим Валерьевич Интерферометрическое устройство для бесконтактного измерения толщины
US6172756B1 (en) 1998-12-11 2001-01-09 Filmetrics, Inc. Rapid and accurate end point detection in a noisy environment
US6184985B1 (en) 1998-12-11 2001-02-06 Filmetrics, Inc. Spectrometer configured to provide simultaneous multiple intensity spectra from independent light sources
US6204922B1 (en) 1998-12-11 2001-03-20 Filmetrics, Inc. Rapid and accurate thin film measurement of individual layers in a multi-layered or patterned sample
US6822745B2 (en) * 2000-01-25 2004-11-23 Zygo Corporation Optical systems for measuring form and geometric dimensions of precision engineered parts
US6806969B2 (en) * 2001-10-19 2004-10-19 Agilent Technologies, Inc. Optical measurement for measuring a small space through a transparent surface
US7502121B1 (en) * 2004-11-24 2009-03-10 Ahbee 1, L.P. Temperature insensitive low coherence based optical metrology for nondestructive characterization of physical characteristics of materials
JP4429886B2 (ja) * 2004-12-09 2010-03-10 富士フイルム株式会社 光断層映像装置
DE102008049972A1 (de) * 2008-10-01 2010-04-22 Peter Wolters Gmbh Verfahren zum Messen der Dicke von in einer Bearbeitungsmaschine bearbeiteten scheibenförmigen Werkstücken
WO2013019776A2 (en) 2011-08-01 2013-02-07 University Of Florida Research Foundation, Inc. Simultaneous refractive index and thickness measurments with a monochromatic low-coherence interferometer
US8829518B2 (en) 2011-09-13 2014-09-09 International Business Machines Corporation Test structure and calibration method
CN107339943B (zh) * 2017-04-25 2019-09-27 哈尔滨工程大学 偏振复用的共光路自校准薄膜厚度测量装置及测量方法
JP7622857B2 (ja) * 2021-09-13 2025-01-28 日本電信電話株式会社 光ファイバセンシング装置及び方法
CN114234821A (zh) * 2021-12-20 2022-03-25 南京大学 一种膜电极厚度检测装置及检测方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323229A (en) * 1992-08-31 1994-06-21 Science Applications International Corporation Measurement system using optical coherence shifting interferometry

Also Published As

Publication number Publication date
EP0762079A2 (en) 1997-03-12
JPH09119814A (ja) 1997-05-06
US5642196A (en) 1997-06-24
EP0762079A3 (en) 1997-12-29

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