JPH09119814A5 - - Google Patents

Info

Publication number
JPH09119814A5
JPH09119814A5 JP1996224835A JP22483596A JPH09119814A5 JP H09119814 A5 JPH09119814 A5 JP H09119814A5 JP 1996224835 A JP1996224835 A JP 1996224835A JP 22483596 A JP22483596 A JP 22483596A JP H09119814 A5 JPH09119814 A5 JP H09119814A5
Authority
JP
Japan
Prior art keywords
light
signal
probe
collected
exiting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996224835A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09119814A (ja
JP3814343B2 (ja
Filing date
Publication date
Priority claimed from US08/520,199 external-priority patent/US5642196A/en
Application filed filed Critical
Publication of JPH09119814A publication Critical patent/JPH09119814A/ja
Publication of JPH09119814A5 publication Critical patent/JPH09119814A5/ja
Application granted granted Critical
Publication of JP3814343B2 publication Critical patent/JP3814343B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP22483596A 1995-08-28 1996-08-27 フィルム厚の測定方法及び装置 Expired - Fee Related JP3814343B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US520,199 1995-08-28
US08/520,199 US5642196A (en) 1995-08-28 1995-08-28 Method and apparatus for measuring the thickness of a film using low coherence reflectometry

Publications (3)

Publication Number Publication Date
JPH09119814A JPH09119814A (ja) 1997-05-06
JPH09119814A5 true JPH09119814A5 (enExample) 2004-07-29
JP3814343B2 JP3814343B2 (ja) 2006-08-30

Family

ID=24071580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22483596A Expired - Fee Related JP3814343B2 (ja) 1995-08-28 1996-08-27 フィルム厚の測定方法及び装置

Country Status (3)

Country Link
US (1) US5642196A (enExample)
EP (1) EP0762079A3 (enExample)
JP (1) JP3814343B2 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198540B1 (en) 1997-03-26 2001-03-06 Kowa Company, Ltd. Optical coherence tomography have plural reference beams of differing modulations
JPH10267610A (ja) * 1997-03-26 1998-10-09 Kowa Co 光学測定装置
US6406641B1 (en) 1997-06-17 2002-06-18 Luxtron Corporation Liquid etch endpoint detection and process metrology
EP0947862A3 (en) 1998-03-31 2004-03-17 Ntt Advanced Technology Corporation Method and apparatus for maintaining optical signal having low degree of polarization in specific state of polarization
RU2147728C1 (ru) * 1998-11-10 2000-04-20 Иванов Вадим Валерьевич Интерферометрическое устройство для бесконтактного измерения толщины
US6172756B1 (en) 1998-12-11 2001-01-09 Filmetrics, Inc. Rapid and accurate end point detection in a noisy environment
US6184985B1 (en) 1998-12-11 2001-02-06 Filmetrics, Inc. Spectrometer configured to provide simultaneous multiple intensity spectra from independent light sources
US6204922B1 (en) 1998-12-11 2001-03-20 Filmetrics, Inc. Rapid and accurate thin film measurement of individual layers in a multi-layered or patterned sample
US6822745B2 (en) * 2000-01-25 2004-11-23 Zygo Corporation Optical systems for measuring form and geometric dimensions of precision engineered parts
US6806969B2 (en) * 2001-10-19 2004-10-19 Agilent Technologies, Inc. Optical measurement for measuring a small space through a transparent surface
US7502121B1 (en) * 2004-11-24 2009-03-10 Ahbee 1, L.P. Temperature insensitive low coherence based optical metrology for nondestructive characterization of physical characteristics of materials
JP4429886B2 (ja) * 2004-12-09 2010-03-10 富士フイルム株式会社 光断層映像装置
DE102008049972A1 (de) * 2008-10-01 2010-04-22 Peter Wolters Gmbh Verfahren zum Messen der Dicke von in einer Bearbeitungsmaschine bearbeiteten scheibenförmigen Werkstücken
WO2013019776A2 (en) 2011-08-01 2013-02-07 University Of Florida Research Foundation, Inc. Simultaneous refractive index and thickness measurments with a monochromatic low-coherence interferometer
US8829518B2 (en) 2011-09-13 2014-09-09 International Business Machines Corporation Test structure and calibration method
CN107339943B (zh) * 2017-04-25 2019-09-27 哈尔滨工程大学 偏振复用的共光路自校准薄膜厚度测量装置及测量方法
JP7622857B2 (ja) * 2021-09-13 2025-01-28 日本電信電話株式会社 光ファイバセンシング装置及び方法
CN114234821A (zh) * 2021-12-20 2022-03-25 南京大学 一种膜电极厚度检测装置及检测方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323229A (en) * 1992-08-31 1994-06-21 Science Applications International Corporation Measurement system using optical coherence shifting interferometry

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