JP3764400B2 - 静電容量型傾斜センサ - Google Patents

静電容量型傾斜センサ Download PDF

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Publication number
JP3764400B2
JP3764400B2 JP2002081719A JP2002081719A JP3764400B2 JP 3764400 B2 JP3764400 B2 JP 3764400B2 JP 2002081719 A JP2002081719 A JP 2002081719A JP 2002081719 A JP2002081719 A JP 2002081719A JP 3764400 B2 JP3764400 B2 JP 3764400B2
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mass
electrode
electrodes
substrate
detection electrodes
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JP2002081719A
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Japanese (ja)
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JP2003279349A5 (enrdf_load_stackoverflow
JP2003279349A (ja
Inventor
洋 上野
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Tokai Rika Co Ltd
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Tokai Rika Co Ltd
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Publication of JP2003279349A5 publication Critical patent/JP2003279349A5/ja
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JP2002081719A 2002-03-22 2002-03-22 静電容量型傾斜センサ Expired - Fee Related JP3764400B2 (ja)

Priority Applications (1)

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JP2002081719A JP3764400B2 (ja) 2002-03-22 2002-03-22 静電容量型傾斜センサ

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JP2002081719A JP3764400B2 (ja) 2002-03-22 2002-03-22 静電容量型傾斜センサ

Publications (3)

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JP2003279349A JP2003279349A (ja) 2003-10-02
JP2003279349A5 JP2003279349A5 (enrdf_load_stackoverflow) 2005-05-19
JP3764400B2 true JP3764400B2 (ja) 2006-04-05

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110811096A (zh) * 2019-12-06 2020-02-21 宿州青智网络科技有限公司 一种智能警报以及防丢的老人用辅助拐杖

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005088664A1 (ja) * 2004-03-12 2008-05-08 群馬県 スイッチ機能を有するセンサ、その製造方法、およびこれらを組み込んだ電子機器
KR20130071040A (ko) * 2011-12-20 2013-06-28 삼성전기주식회사 관성센서
CN103712601B (zh) * 2012-10-08 2016-06-01 硕英股份有限公司 液体多层电容倾斜微传感器
US11511037B2 (en) 2018-06-08 2022-11-29 Analog Devices, Inc. Systems and methods for measuring needle depth

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110811096A (zh) * 2019-12-06 2020-02-21 宿州青智网络科技有限公司 一种智能警报以及防丢的老人用辅助拐杖

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JP2003279349A (ja) 2003-10-02

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