CN102278981B - 陀螺仪及其制造方法 - Google Patents
陀螺仪及其制造方法 Download PDFInfo
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- CN102278981B CN102278981B CN201010200715.3A CN201010200715A CN102278981B CN 102278981 B CN102278981 B CN 102278981B CN 201010200715 A CN201010200715 A CN 201010200715A CN 102278981 B CN102278981 B CN 102278981B
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 45
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- 238000000034 method Methods 0.000 claims description 43
- 238000009413 insulation Methods 0.000 claims description 42
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- 238000005530 etching Methods 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 12
- 229910052721 tungsten Inorganic materials 0.000 claims description 12
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- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000007769 metal material Substances 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 156
- 239000002184 metal Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 230000008569 process Effects 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
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- 238000012986 modification Methods 0.000 description 3
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- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
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- 239000007789 gas Substances 0.000 description 2
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/02—Rotary gyroscopes
- G01C19/04—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/12—Gyroscopes
- Y10T74/1282—Gyroscopes with rotor drive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/12—Gyroscopes
- Y10T74/1296—Flywheel structure
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims (12)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010200715.3A CN102278981B (zh) | 2010-06-11 | 2010-06-11 | 陀螺仪及其制造方法 |
US13/703,506 US20130118280A1 (en) | 2010-06-11 | 2011-01-26 | Gyroscope and method for manufacturing the same |
PCT/CN2011/070635 WO2011153839A1 (zh) | 2010-06-11 | 2011-01-26 | 陀螺仪及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010200715.3A CN102278981B (zh) | 2010-06-11 | 2010-06-11 | 陀螺仪及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102278981A CN102278981A (zh) | 2011-12-14 |
CN102278981B true CN102278981B (zh) | 2014-01-08 |
Family
ID=45097505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010200715.3A Active CN102278981B (zh) | 2010-06-11 | 2010-06-11 | 陀螺仪及其制造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20130118280A1 (zh) |
CN (1) | CN102278981B (zh) |
WO (1) | WO2011153839A1 (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103373698B (zh) * | 2012-04-26 | 2015-09-16 | 张家港丽恒光微电子科技有限公司 | 制作mems惯性传感器的方法及mems惯性传感器 |
DE102012208030A1 (de) * | 2012-05-14 | 2013-11-14 | Robert Bosch Gmbh | Mikromechanischer Inertialsensor und Verfahren zu dessen Herstellung |
CN103645345B (zh) * | 2013-12-06 | 2016-08-17 | 杭州士兰微电子股份有限公司 | 多轴电容式加速度计 |
CN103645342B (zh) * | 2013-12-06 | 2016-08-17 | 杭州士兰微电子股份有限公司 | 多轴电容式加速度计及加速度检测方法 |
US10775168B2 (en) * | 2014-12-01 | 2020-09-15 | Sony Corporation | Sensor device, gyro sensor, and electronic apparatus |
GB201514114D0 (en) * | 2015-08-11 | 2015-09-23 | Atlantic Inertial Systems Ltd | Angular velocity sensors |
FI127042B (en) * | 2015-09-09 | 2017-10-13 | Murata Manufacturing Co | Electrode of a microelectromechanical device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5450751A (en) * | 1993-05-04 | 1995-09-19 | General Motors Corporation | Microstructure for vibratory gyroscope |
US5747690A (en) * | 1995-12-27 | 1998-05-05 | Samsung Electronics Co., Ltd. | Vibratory microgyroscope |
CN1464286A (zh) * | 2002-06-13 | 2003-12-31 | 祥群科技股份有限公司 | 钟摆式微型惯性传感器及其制造方法 |
CN1776366A (zh) * | 2005-11-24 | 2006-05-24 | 上海交通大学 | 永磁介磁组合悬浮转子微陀螺 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5897223A (en) * | 1997-11-17 | 1999-04-27 | Wescam Inc. | Stabilized platform system for camera |
JP2003509670A (ja) * | 1999-09-17 | 2003-03-11 | キオニックス インク | 電気分離式マイクロ機械ジャイロスコープ |
CN100483073C (zh) * | 2003-08-05 | 2009-04-29 | 财团法人工业技术研究院 | 微型振动式双轴感测陀螺仪 |
US7155976B2 (en) * | 2005-01-05 | 2007-01-02 | Industrial Technology Research Institute | Rotation sensing apparatus and method for manufacturing the same |
US7406867B2 (en) * | 2005-06-27 | 2008-08-05 | Milli Sensor Systems + Actuators | G2-Gyroscope: MEMS gyroscope with output oscillation about the normal to the plane |
US8375791B2 (en) * | 2009-07-13 | 2013-02-19 | Shanghai Lexvu Opto Microelectronics Technology Co., Ltd. | Capacitive MEMS gyroscope and method of making the same |
-
2010
- 2010-06-11 CN CN201010200715.3A patent/CN102278981B/zh active Active
-
2011
- 2011-01-26 WO PCT/CN2011/070635 patent/WO2011153839A1/zh active Application Filing
- 2011-01-26 US US13/703,506 patent/US20130118280A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5450751A (en) * | 1993-05-04 | 1995-09-19 | General Motors Corporation | Microstructure for vibratory gyroscope |
US5747690A (en) * | 1995-12-27 | 1998-05-05 | Samsung Electronics Co., Ltd. | Vibratory microgyroscope |
CN1464286A (zh) * | 2002-06-13 | 2003-12-31 | 祥群科技股份有限公司 | 钟摆式微型惯性传感器及其制造方法 |
CN1776366A (zh) * | 2005-11-24 | 2006-05-24 | 上海交通大学 | 永磁介磁组合悬浮转子微陀螺 |
Also Published As
Publication number | Publication date |
---|---|
WO2011153839A1 (zh) | 2011-12-15 |
CN102278981A (zh) | 2011-12-14 |
US20130118280A1 (en) | 2013-05-16 |
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Owner name: SHANGHAI LEXVU OPTO MIRCOELECTRICS TECHNOLOGY CO., Free format text: FORMER OWNER: JIANGSU LIHENG ELECTRONIC CO., LTD. Effective date: 20130115 |
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Owner name: ZHANGJIAGANG LIHENGGUANG MICRO-ELECTRONICS TECHNOL Free format text: FORMER OWNER: SHANGHAI LEXVU OPTO MIRCOELECTRICS TECHNOLOGY CO., LTD. Effective date: 20130929 |
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Effective date of registration: 20190507 Address after: 201203 501B, Building 5, 3000 Longdong Avenue, Pudong New Area, Shanghai Patentee after: LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) Ltd. Address before: 215613 Shuanglong Village, Fenghuang Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee before: LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) Ltd. |
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Denomination of invention: Optical gyroscope and manufacturing method thereof Effective date of registration: 20191017 Granted publication date: 20140108 Pledgee: Pudong Shanghai technology financing Company limited by guarantee Pledgor: LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) Ltd. Registration number: Y2019310000021 |
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Date of cancellation: 20230615 Granted publication date: 20140108 Pledgee: Pudong Shanghai technology financing Company limited by guarantee Pledgor: LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) Ltd. Registration number: Y2019310000021 |
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Effective date of registration: 20230717 Address after: 323000 room 307, block B, building 1, No.268 Shiniu Road, nanmingshan street, Liandu District, Lishui City, Zhejiang Province Patentee after: Zhejiang Core Microelectronics Co.,Ltd. Address before: 201203 501B, Building 5, 3000 Longdong Avenue, Pudong New Area, Shanghai Patentee before: LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) Ltd. |