JP3731551B2 - 圧電発振器の検査システム及びその検査方法 - Google Patents

圧電発振器の検査システム及びその検査方法 Download PDF

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Publication number
JP3731551B2
JP3731551B2 JP2002059579A JP2002059579A JP3731551B2 JP 3731551 B2 JP3731551 B2 JP 3731551B2 JP 2002059579 A JP2002059579 A JP 2002059579A JP 2002059579 A JP2002059579 A JP 2002059579A JP 3731551 B2 JP3731551 B2 JP 3731551B2
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temperature
frequency
piezoelectric oscillator
predetermined
frequency deviation
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Japanese (ja)
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JP2003004785A (ja
JP2003004785A5 (zh
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浩 木下
聡 芹沢
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2002059579A priority Critical patent/JP3731551B2/ja
Priority to CNB021055653A priority patent/CN1194228C/zh
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Publication of JP2003004785A5 publication Critical patent/JP2003004785A5/ja
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JP2002059579A 2001-04-18 2002-03-05 圧電発振器の検査システム及びその検査方法 Expired - Fee Related JP3731551B2 (ja)

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Application Number Priority Date Filing Date Title
JP2002059579A JP3731551B2 (ja) 2001-04-18 2002-03-05 圧電発振器の検査システム及びその検査方法
CNB021055653A CN1194228C (zh) 2001-04-18 2002-04-17 压电振荡器的检查系统及其检查方法

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JP2001120219 2001-04-18
JP2001-120219 2001-04-18
JP2002059579A JP3731551B2 (ja) 2001-04-18 2002-03-05 圧電発振器の検査システム及びその検査方法

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JP2003004785A JP2003004785A (ja) 2003-01-08
JP2003004785A5 JP2003004785A5 (zh) 2005-02-24
JP3731551B2 true JP3731551B2 (ja) 2006-01-05

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CN (1) CN1194228C (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010190836A (ja) * 2009-02-20 2010-09-02 Epson Toyocom Corp 周波数測定装置及び検査システム
CN101609126B (zh) * 2009-07-16 2013-04-24 广东大普通信技术有限公司 温度补偿晶体振荡器的自动测试系统
JP4998620B2 (ja) 2009-09-14 2012-08-15 株式会社村田製作所 圧電振動装置の製造方法
JP5817236B2 (ja) 2011-06-17 2015-11-18 株式会社Sumco 半導体試料中の金属汚染評価方法および半導体基板の製造方法
JP2016187152A (ja) 2015-03-27 2016-10-27 セイコーエプソン株式会社 発振器の製造方法、発振器、電子機器及び移動体

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JP2003004785A (ja) 2003-01-08
CN1381733A (zh) 2002-11-27
CN1194228C (zh) 2005-03-23

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