JP3702379B2 - 薄板円板状ワークの両面研削装置 - Google Patents
薄板円板状ワークの両面研削装置 Download PDFInfo
- Publication number
- JP3702379B2 JP3702379B2 JP33326496A JP33326496A JP3702379B2 JP 3702379 B2 JP3702379 B2 JP 3702379B2 JP 33326496 A JP33326496 A JP 33326496A JP 33326496 A JP33326496 A JP 33326496A JP 3702379 B2 JP3702379 B2 JP 3702379B2
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- Prior art keywords
- workpiece
- grinding
- roller
- slide member
- double
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 5
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Images
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- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33326496A JP3702379B2 (ja) | 1996-12-13 | 1996-12-13 | 薄板円板状ワークの両面研削装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33326496A JP3702379B2 (ja) | 1996-12-13 | 1996-12-13 | 薄板円板状ワークの両面研削装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10175144A JPH10175144A (ja) | 1998-06-30 |
| JPH10175144A5 JPH10175144A5 (enExample) | 2004-10-21 |
| JP3702379B2 true JP3702379B2 (ja) | 2005-10-05 |
Family
ID=18264171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33326496A Expired - Fee Related JP3702379B2 (ja) | 1996-12-13 | 1996-12-13 | 薄板円板状ワークの両面研削装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3702379B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5663733B2 (ja) * | 2010-02-22 | 2015-02-04 | 秋田県 | 平面両面仕上げ方法及び平面両面仕上げ装置 |
| JP5627114B2 (ja) | 2011-07-08 | 2014-11-19 | 光洋機械工業株式会社 | 薄板状ワークの研削方法及び両頭平面研削盤 |
| CN105127899B (zh) * | 2015-10-12 | 2018-03-27 | 郑州磨料磨具磨削研究所有限公司 | 砂轮固定夹具及使用该砂轮固定夹具的磨床装置 |
| CN110125798A (zh) * | 2019-06-19 | 2019-08-16 | 北京石油化工学院 | 一种偏心行星轨迹多尺寸卡盘的自动磨印石机 |
| CN110539220A (zh) * | 2019-09-24 | 2019-12-06 | 北京航天新风机械设备有限责任公司 | 一种环体端面打磨装置 |
| CN116276327B (zh) * | 2023-02-10 | 2025-05-30 | 安徽金世汽车配件有限公司 | 一种新能源汽车电机转毂的生产工艺及其装置 |
-
1996
- 1996-12-13 JP JP33326496A patent/JP3702379B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10175144A (ja) | 1998-06-30 |
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