JP3685191B2 - 異方導電性コネクターおよびプローブ部材並びにウエハ検査装置およびウエハ検査方法 - Google Patents

異方導電性コネクターおよびプローブ部材並びにウエハ検査装置およびウエハ検査方法 Download PDF

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JP3685191B2
JP3685191B2 JP2003289032A JP2003289032A JP3685191B2 JP 3685191 B2 JP3685191 B2 JP 3685191B2 JP 2003289032 A JP2003289032 A JP 2003289032A JP 2003289032 A JP2003289032 A JP 2003289032A JP 3685191 B2 JP3685191 B2 JP 3685191B2
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anisotropic conductive
conductive
wafer
inspection
connection
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JP2004111930A (ja
JP2004111930A5 (enExample
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良司 瀬高
雅也 直井
克己 佐藤
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JSR Corp
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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
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JP2003289032A 2002-08-09 2003-08-07 異方導電性コネクターおよびプローブ部材並びにウエハ検査装置およびウエハ検査方法 Expired - Fee Related JP3685191B2 (ja)

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JP2003289032A JP3685191B2 (ja) 2002-08-09 2003-08-07 異方導電性コネクターおよびプローブ部材並びにウエハ検査装置およびウエハ検査方法

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JP2002232558 2002-08-09
JP2003289032A JP3685191B2 (ja) 2002-08-09 2003-08-07 異方導電性コネクターおよびプローブ部材並びにウエハ検査装置およびウエハ検査方法

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JP2004111930A JP2004111930A (ja) 2004-04-08
JP2004111930A5 JP2004111930A5 (enExample) 2005-06-30
JP3685191B2 true JP3685191B2 (ja) 2005-08-17

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Families Citing this family (4)

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Publication number Priority date Publication date Assignee Title
CN1943081A (zh) * 2004-04-14 2007-04-04 Jsr株式会社 各向异性导电膜制造用模具及各向异性导电膜的制造方法
JP4714840B2 (ja) * 2004-08-04 2011-06-29 Ｄｏｗａエレクトロニクス株式会社 導電性磁性粉および導電性ペースト
WO2020075810A1 (ja) * 2018-10-11 2020-04-16 積水ポリマテック株式会社 電気接続シート、及び端子付きガラス板構造
CN116046845A (zh) * 2022-12-17 2023-05-02 唐山国芯晶源电子有限公司 一种现场检测石英晶片导电胶粘接质量的方法及装置

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