JP3609588B2 - 半導体製造装置 - Google Patents
半導体製造装置 Download PDFInfo
- Publication number
- JP3609588B2 JP3609588B2 JP19405697A JP19405697A JP3609588B2 JP 3609588 B2 JP3609588 B2 JP 3609588B2 JP 19405697 A JP19405697 A JP 19405697A JP 19405697 A JP19405697 A JP 19405697A JP 3609588 B2 JP3609588 B2 JP 3609588B2
- Authority
- JP
- Japan
- Prior art keywords
- oil
- temperature
- flanges
- temperature oil
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19405697A JP3609588B2 (ja) | 1997-07-18 | 1997-07-18 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19405697A JP3609588B2 (ja) | 1997-07-18 | 1997-07-18 | 半導体製造装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH1140551A JPH1140551A (ja) | 1999-02-12 |
| JP3609588B2 true JP3609588B2 (ja) | 2005-01-12 |
| JPH1140551A5 JPH1140551A5 (enExample) | 2005-02-24 |
Family
ID=16318222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19405697A Expired - Fee Related JP3609588B2 (ja) | 1997-07-18 | 1997-07-18 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3609588B2 (enExample) |
-
1997
- 1997-07-18 JP JP19405697A patent/JP3609588B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1140551A (ja) | 1999-02-12 |
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