JP3600886B2 - Method for manufacturing insulated gate transistor - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an insulated gate transistor (TFT) formed on an insulating surface such as an insulating material such as glass or a material obtained by forming an insulating film such as silicon oxide on a silicon wafer, and a method for manufacturing the same. The present invention is particularly effective for TFTs formed on a glass substrate having a glass transition point (also referred to as strain temperature or strain point) of 750 ° C. or less. The semiconductor device according to the present invention is used for a drive circuit such as an active matrix such as a liquid crystal display, an image sensor, or a three-dimensional integrated circuit.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, it is widely known to form a TFT (thin film transistor) for driving an active matrix type liquid crystal display device, an image sensor, or the like. In particular, recently, due to the need for high-speed operation, a crystalline silicon TFT having higher electric field mobility has been developed instead of an amorphous silicon TFT using amorphous silicon for an active layer. However, when higher characteristics and higher durability are required, a high resistance region (a drain having an offset gate without addition of an impurity or a low impurity concentration drain (LDD)) as used in semiconductor integrated circuit technology is required. )). However, unlike the known semiconductor integrated circuit technology, the TFT has many problems to be solved. In particular, since an element is formed on an insulating surface and reactive ion anisotropic etching cannot be performed sufficiently, there is a great limitation that a fine pattern cannot be formed.
[0003]
FIG. 3 shows a cross-sectional view of a typical process for fabricating an HRD used to date. First, a base film 302 is formed over a substrate 301, and an active layer is formed using crystalline silicon 303. Then, an insulating film 304 is formed on the active layer using a material such as silicon oxide (FIG. 3A).
[0004]
Next, the gate electrode 305 is formed of polycrystalline silicon (doped with impurities such as phosphorus), tantalum, titanium, aluminum, or the like. Further, using the gate electrode as a mask, an impurity element (phosphorus or boron) is introduced by means of ion doping or the like, and high-resistance regions (HRD) 306 and 307 with a small doping amount are formed in the active layer 303 in a self-aligned manner. You. The active layer region below the gate electrode into which the impurity has not been introduced becomes a channel formation region (FIG. 3B).
[0005]
Then, the doped impurities are activated by a heat source such as a laser or a flash lamp. Next, an insulating film 308 made of silicon oxide or the like is formed by means such as plasma CVD or APCVD (FIG. 3C), and this is anisotropically etched to form a side wall 309 adjacent to the side surface of the gate electrode. It is formed (FIG. 3D).
Then, an impurity element is again introduced by ion doping or the like, and a sufficiently high impurity region (low resistance impurity region, source / drain region) 310, 311 is self-aligned using the gate electrode 305 and the side wall 309 as a mask. Is formed on the active layer 303. That is, two independent impurities are implanted into the drain, and an anisotropic etching step exists between the respective implantation steps (FIG. 3E).
[0006]
Then, the doped impurities are activated by a heat source such as a laser or a flash lamp. Finally, an interlayer insulator 312 is formed, a contact hole is formed in the source / drain region through the interlayer insulator, and wirings / electrodes 313 and 314 connected to the source / drain are formed using a metal material such as aluminum. (FIG. 3F).
[0007]
[Problems to be solved by the invention]
The above method directly follows the conventional LDD fabrication process in a semiconductor integrated circuit, and is a process that is difficult to apply as it is to a TFT fabrication process on a glass substrate, or a process that is not preferable in terms of productivity. There is.
[0008]
First, an impurity implantation step and activation of impurities by laser irradiation or the like are required at least twice. Moreover, between these steps, for example, a step such as anisotropic etching is present, and it is necessary to take out the substrate from the vacuum chamber each time. For this reason, the productivity was reduced. In particular, regarding the activation of impurities, in a conventional semiconductor integrated circuit, activation of an impurity element is performed by thermal annealing. Therefore, activation of the impurity is performed after all impurity introduction is completed (that is, FIG. ) Was completed.
[0009]
However, particularly for TFTs on a glass substrate, it is difficult to perform thermal annealing due to temperature restrictions on the substrate, and it is necessary to rely on laser annealing and flash lamp annealing (RTA or RTP). However, in these methods, since the irradiated surface is selectively annealed, for example, a portion below the side wall 309 is not annealed. Therefore, annealing is required for each impurity doping.
[0010]
Second, the difficulty in forming the side walls. The thickness of the insulating film 308 is 0.5 to 2 μm. Normally, the thickness of the base film 302 provided on the substrate is 1000 to 3000 °, so that the base film is often erroneously etched in this etching step, and the substrate is often exposed, and the yield is reduced. . Since a substrate used for manufacturing a TFT contains many elements harmful to a silicon semiconductor, it is necessary to avoid overetching reaching the substrate as much as possible. It is also difficult to finish the width of the side wall uniformly. This is because, during plasma dry etching such as reactive ion etching (RIE), unlike a silicon substrate used in a semiconductor integrated circuit, delicate control of plasma was difficult due to the insulating surface of the substrate. It is.
[0011]
Since the high-resistance drain has a high resistance, it is necessary to make the width as narrow as possible. However, mass production is difficult due to the above-mentioned variation, and in this process, self-alignment (that is, using a lithography method) The problem was how to make the process easier to control.
[0012]
The present invention is directed to a method for forming a high-resistance impurity region by solving the above-mentioned problems and further simplifying the process, and a TFT having a high-resistance region (high-resistance drain, HRD) thus formed. . Here, the high-resistance drain (HRD) means that, in addition to a drain having a low impurity concentration and a high resistance, carbon, oxygen, nitrogen, or the like is added to prevent activation of impurities regardless of the impurity concentration. As a result, a drain having a high resistance is included.
[0013]
[Means for Solving the Problems]
In forming the high resistance region, the present invention is characterized in that an oxide layer formed by means such as anodic oxidation of a gate electrode is positively used. In particular, the anodic oxide has a feature that its thickness can be precisely controlled and its thickness can be widely and uniformly formed from a thin one of 1000 mm or less to a thick one of 5,000 mm or more. It is preferable as a substitute for the side wall formed by anisotropic etching.
[0014]
In particular, a so-called barrier type anodic oxide is not etched unless it is a hydrofluoric acid-based etchant, whereas a porous type anodic oxide is selectively etched by an etchant such as phosphoric acid. For this reason, it is characterized in that other materials constituting the TFT, for example, silicon and silicon oxide can be treated without causing any damage. Further, in both the barrier type and the porous type, anodic oxide is extremely difficult to be etched by dry etching. In particular, the feature is that the selectivity is sufficiently large in etching with silicon oxide.
The present invention is characterized in that a TFT is manufactured by the following manufacturing process. By adopting this process, the HRD can be configured more reliably and the mass productivity can be improved.
[0015]
FIG. 1 shows the basic steps of the present invention. First, a base insulating film 102 is formed on a substrate 101, and an active layer 103 is formed of a crystalline semiconductor (a semiconductor in which even a small amount of crystal such as single crystal, polycrystal, and semi-amorphous is called a crystalline semiconductor in the present invention). ). Then, the insulating film 104 is formed of a material such as silicon oxide so as to cover this, and a film is formed of a material that can be anodized. Aluminum, tantalum, titanium, silicon, and the like, which can be anodized, are preferable as the material of this coating. In the present invention, a gate electrode having a single layer structure using these materials alone may be used, or a gate electrode having a multilayer structure in which two or more layers are stacked. For example, it has a two-layer structure in which titanium silicide is stacked on aluminum or a two-layer structure in which aluminum is stacked on titanium nitride. The thickness of each layer may be determined by the practitioner according to the required device characteristics.
[0016]
Further, a film serving as a mask in anodic oxidation is formed to cover the film, and both are simultaneously patterned and etched to form a gate electrode 105 and a mask film 106 thereon. As a material of the mask film, a photoresist used in a normal photolithography process, a photosensitive polyimide, or a material which can be etched with a normal polyimide may be used (FIG. 1A).
[0017]
Next, a porous anodic oxide 107 is formed on the side surface of the gate electrode 105 by applying a current to the gate electrode 105 in an electrolytic solution. This anodic oxidation step is performed using a 3 to 20% acidic aqueous solution of citric acid or oxalic acid, phosphoric acid, chromic acid, sulfuric acid or the like. In this case, a thick anodic oxide of 0.5 μm or more can be formed at a low voltage of about 5 to 30 V (FIG. 1B).
[0018]
Then, the insulating film 104 is etched by a dry etching method, a wet etching method, or the like. This etching depth is arbitrary, and etching may be performed until the underlying active layer is exposed, or may be stopped during the etching. However, from the viewpoint of mass productivity, yield, and uniformity, it is desirable to perform etching up to the active layer. At this time, the insulating film having the original thickness remains in the insulating film (gate insulating film) below the region covered with the anodic oxide 107 and the gate electrode 105. When the gate electrode contains aluminum, tantalum, and titanium as main components and the insulating film 104 contains silicon oxide as a main component and a dry etching method is used, a fluorine-based material (for example, NF ₃ , SF ₆ If dry etching is performed using the etching gas of (1), the insulating film 104 of silicon oxide is quickly etched, but the etching rate of aluminum oxide, tantalum oxide, and titanium oxide is sufficiently small, so that the insulating film 104 is selectively used. Can be etched.
[0019]
In wet etching, a hydrofluoric acid-based etchant such as 1/100 hydrofluoric acid may be used. In this case as well, the insulating film 104 made of silicon oxide is quickly etched, but the etching rate of aluminum oxide, tantalum oxide, and titanium oxide is sufficiently small, so that the insulating film 104 can be selectively etched (FIG. 1D). .
[0020]
After that, the anodic oxide 107 is removed. As the etchant, a phosphoric acid-based solution, for example, a mixed acid of phosphoric acid, acetic acid, and nitric acid is preferable. However, when the gate electrode is made of aluminum, for example, if a phosphoric acid-based etchant is used, the gate electrode is also etched at the same time. In such a case, a current is applied to the gate electrode in an ethylene glycol solution containing 3 to 10% tartaric acid, boric acid, and nitric acid in the previous step (FIG. 1C). Therefore, it is preferable to provide a barrier-type anodic oxide 108 on the side surface and the upper surface of the gate electrode. In this anodic oxidation step, the thickness of the anodic oxide obtained is determined by the magnitude of the voltage applied between the gate electrode 105 and the opposing electrode.
[0021]
It should be noted that, although barrier type anodic oxidation is a later step, barrier type anodic oxide is not formed outside the porous anodic oxide, but barrier type anodic oxide 108 It is formed between the porous anodic oxide 107 and the gate electrode 105. In the above-mentioned phosphoric acid-based etchant, the etching rate of the porous anodic oxide is 10 times or more the etching rate of the barrier anodic oxide. Therefore, the barrier-type anodic oxide 108 having an appropriate thickness is not substantially etched by the phosphoric acid-based etchant, so that the inner gate electrode can be protected. Of course, if the gate electrode is not etched by the etchant used for etching the porous anodic oxide, it is needless to say that such a barrier-type anodic oxide need not be provided (FIGS. 1C and 1C). E)).
[0022]
Through the above steps, a structure in which a part of the insulating film 104 (hereinafter, referred to as a gate insulating film) selectively remains below the gate electrode can be obtained. Since the gate insulating film 104 ′ originally existed under the porous anodic oxide 107, the gate insulating film 104 ′ was formed not only under the gate electrode 105 and under the barrier anodic oxide 108 but also at the barrier anodic oxide 108. , And a width y is determined in a self-aligned manner (without using a photolithography process). In other words, a region where the gate insulating film 104 'exists and a region where the gate insulating film 104' does not exist are formed in a self-alignment manner outside the channel formation region below the gate electrode in the active layer 103.
[0023]
N-type or P-type impurity ions accelerated by this structure are implanted into the active layer. Of course, the active layer under the gate electrode 105 (and the surrounding anodic oxide 108) is not substantially implanted. In the present invention, at least two acceleration conditions for impurity ions are used. For example, two types of acceleration conditions are set, such as ions having high acceleration energy (fast ions) and ions having low acceleration energy (slow ions). When the low-speed ions are implanted first, they cannot reach the regions 111 and 112 of the active layer covered with the gate insulating film 104 ′, and mainly reach the regions 110 and 113 not covered with the gate insulating film. Is injected into. Next, high-speed ions are implanted. The energy at this time is such that it passes through the gate insulating film 104 '. In this case, ions are implanted into the regions 111 and 112 through the gate insulating film. On the other hand, many ions pass through the regions 110 and 113, and eventually are mainly implanted into the regions 111 and 112 in this case (FIGS. 1E and 1F).
[0024]
If the dose of the low-speed ions is made larger than that of the high-speed ions, the regions 110 and 113 become low-resistance regions, and the regions 111 and 112 become high-resistance regions. The dose may be controlled by the doping time or the amount of generated ions. In the above doping step, it is only necessary to change only the acceleration voltage while keeping the ion source of the impurity element. In this case as well, as in the above example, low-speed ions may be used first, and high-speed ions may be used later, or vice versa.
[0025]
Further, the acceleration voltage may be changed stepwise as shown in FIG. 4A, or may be changed continuously as shown in FIG. However, in any method, according to the present invention, once the substrate is set in the doping apparatus, a high-resistance region is formed by a single doping step in the sense that all doping steps are completed without taking out the substrate once. It is characterized by:
[0026]
As described above, the present invention is characterized in that the width of the high resistance impurity region is controlled in a self-aligned manner by the thickness y of the anodic oxide 107. Further, the end portion 109 of the gate insulating film 104 'and the end portion 117 of the high-resistance region (HRD) 112 can be made substantially coincident with each other. Although it is extremely difficult to control the width of the side wall that plays such a role in the conventional method shown in FIG. 3, in the present invention, the width of the anodic oxide 107 is determined by the anodic oxidation current (charge amount). Therefore, extremely delicate control is possible.
[0027]
Furthermore, as is clear from the above-described steps, even if the impurity doping step is performed substantially once, a low-resistance region and a high-resistance region can be formed. It only needs to be processed twice. Thus, in the present invention, mass productivity can be improved by reducing the steps of doping and activation. Conventionally, HRD has a problem that it is difficult to make an ohmic contact with an electrode because of its large resistance, and that the resistance lowers the drain voltage. However, on the other hand, due to the presence of the HRD, the generation of hot carriers can be suppressed and high reliability can be obtained. The present invention solves this contradictory problem at once, and can obtain a 0.1-1 μm-wide HRD formed in a self-aligned manner and ohmic contact with the source / drain electrodes.
[0028]
Further, in the present invention, by appropriately utilizing the thickness of the anodic oxide 108 in FIG. 1, the positional relationship between the end of the gate electrode and the impurity region can be arbitrarily changed, and a so-called offset structure can be obtained.
Generally, in an offset state, a reverse leakage current is reduced and an on / off ratio is improved. For example, a leakage current such as a TFT (pixel TFT) used for controlling a pixel of an active matrix liquid crystal display is reduced. It is suitable for applications that require a small amount. However, there is also a disadvantage that the hot carriers generated at the end of the HRD are deteriorated by being trapped by the anodic oxide.
[0029]
BEST MODE FOR CARRYING OUT THE INVENTION
[Embodiment 1]
FIG. 1 shows this embodiment. First, a silicon oxide film having a thickness of 1000 to 3000 ° was formed as a base oxide film 102 on a substrate (Corning 7059, 300 mm × 400 mm or 100 mm × 100 mm) 101. As a method of forming the oxide film, a sputtering method in an oxygen atmosphere was used. However, in order to further improve mass productivity, a film in which TEOS is decomposed and deposited by a plasma CVD method may be used.
[0030]
Thereafter, an amorphous silicon film was deposited by plasma CVD or LPCVD at 300 to 5000 °, preferably 500 to 1000 °, and left in a reducing atmosphere at 550 to 600 ° C. for 4 to 24 hours to be crystallized. . This step may be performed by laser irradiation. Then, the silicon film crystallized in this manner was patterned to form the island regions 103. Further, a silicon oxide film 104 having a thickness of 700 to 1500 ° was formed thereon by sputtering.
[0031]
Thereafter, an aluminum (containing 1 wt% Si or 0.1 to 0.3 wt% Sc (scandium)) film having a thickness of 1000 to 3 μm was formed by an electron beam evaporation method or a sputtering method. Then, a photoresist (for example, OFPR800 / 30cp, manufactured by Tokyo Ohka) was formed by spin coating. If an aluminum oxide film having a thickness of 100 to 1000 ° is formed on the surface by anodic oxidation before forming the photoresist, the adhesion to the photoresist is good and the leakage of current from the photoresist is suppressed. This was effective in forming the porous anodic oxide only on the side surfaces in the subsequent anodic oxidation step. Thereafter, the photoresist and the aluminum film were patterned and etched together with the aluminum film to form a gate electrode 105 mask film 106 (FIG. 1A).
[0032]
Further, anodization was performed by passing an electric current through the electrolytic solution to form anodized oxide 107 having a thickness of 3000 to 6000 °, for example, 5000 °. The anodic oxidation may be performed using a 3 to 20% aqueous solution of citric acid or oxalic acid, phosphoric acid, chromic acid, sulfuric acid, or the like, and applying a constant current of 5 to 30 V to the gate electrode. In the present embodiment, the voltage was set to 8 V in an oxalic acid solution (30 ° C.), and anodic oxidation was performed for 20 to 40 minutes. The thickness of the anodic oxide was controlled by the anodic oxidation time. The anodic oxidation voltage was preferably lower than the anodic oxidation voltage before applying the resist (FIG. 1B).
[0033]
Next, the mask was removed, and a current was again applied to the gate electrode in the electrolytic solution. This time, an ethylene glycol solution containing 3 to 10% tartaric acid, boric acid, and nitric acid was used. A better oxide film was obtained when the temperature of the solution was lower than room temperature around 10 ° C. As a result, a barrier-type anodic oxide 108 was formed on the upper and side surfaces of the gate electrode. The thickness of the anodic oxide 108 was proportional to the applied voltage, and an applied voltage of 150 V formed an anodic oxide of 2000 °. The thickness of the anodic oxide 108 was determined according to the required offset width. However, a high voltage of 250 V or more is required to obtain an anodic oxide having a thickness of 3000 ° or more, which adversely affects the characteristics of the TFT. Preferably, the thickness is 3000 ° or less. In this embodiment, the voltage is increased to 80 to 150 V, and the voltage is selected according to the required thickness of the anodic oxide film 108 (FIG. 1C).
[0034]
After that, the silicon oxide film 104 was etched by a dry etching method. In this etching, a plasma mode of isotropic etching or a reactive ion etching mode of anisotropic etching may be used. However, it is important to prevent the active layer from being etched deeply by making the selectivity between silicon and silicon oxide sufficiently large. For example, CF as an etching gas ₄ Is used, the anodic oxide is not etched, and only the silicon oxide film 104 is etched. In addition, the silicon oxide film 104 'under the porous anodic oxide 107 remained without being etched (FIG. 1D).
[0035]
After that, the anodic oxide 107 was etched using a mixed acid of phosphoric acid, acetic acid, and nitric acid. In this etching, only the anodic oxide 107 was etched, and the etching rate was about 600 ° / min. The gate insulating film 104 'thereunder remains as it is. Then, an impurity is implanted into the active layer 103 of the TFT in a self-alignment manner by using the gate electrode portion (that is, the gate electrode and the anodic oxide film around the gate electrode) and the gate insulating film as a mask by an ion doping method. Source / drain regions) 110 and 113 and high resistance impurity regions 111 and 112 were formed. Phosphine (PH ₃ ) Resulted in an N-type impurity region. To form a P-type impurity region, diborane (B ₂ H ₆ ) May be used as the doping gas. First, doping was performed at an acceleration energy of 1 to 30 keV, for example, 5 kV. Dose amount is 5 × 10 ¹⁴ ~ 5 × 10 ^Fifteen cm ^-2 , For example, 1 × 10 ^Fifteen cm ^-2 And As a result, the regions 110 and 113 which are not covered with the gate insulating film 104 'are mainly doped with impurities to form low resistance regions (FIG. 1E).
[0036]
Then, the acceleration energy was increased to 65 to 110 keV, for example, 90 kV, while the substrate was set in the doping apparatus. Dose amount is 5 × 10 ¹² ~ 5 × 10 ^Thirteen cm ^-2 , For example, 1 × 10 ^Thirteen cm ^-2 And As a result, mainly, the regions 111 and 112 covered with the gate insulating film 104 'were doped with impurities to form high-resistance regions (FIG. 1F).
Thereafter, irradiation with a KrF excimer laser (wavelength: 248 nm, pulse width: 20 nsec) was performed to activate the impurity ions introduced into the active layer. Thus, high resistance regions 111 and 112 were obtained.
[0037]
[Embodiment 2]
FIG. 2 shows this embodiment. First, a base oxide film 202 and an island-like silicon semiconductor are formed on a substrate 201 having an insulating surface (for example, NA35 glass manufactured by NH Techno Glass Co., Ltd.) 201 by using the steps of FIGS. A region (for example, a crystalline silicon semiconductor) 203, a silicon oxide film 204, a gate electrode 205 of an aluminum film (thickness of 200 nm to 1 μm), and a porous anodic oxide (thickness of 3000 to 1 μm, for example, 5000) on the side surface of the gate electrode 206 were formed (FIG. 2A).
Then, as in the first embodiment, a barrier-type anodic oxide 207 having a thickness of 1000 to 2500 ° was formed. Further, using the porous anodic oxide 206 as a mask, the silicon oxide film 204 was etched to form a gate insulating film 204 '(FIG. 2B).
[0038]
Thereafter, using the barrier type anodic oxide film 207 as a mask, the porous anodic oxide film 206 was removed by etching. Thereafter, nitrogen ions were implanted by ion doping using the gate electrode portions (205, 207) and the gate insulating film 204 'as a mask. The doping gas is nitrogen gas (N ₂ ) Was used. Dose amount is 1 × 10 ¹⁴ ~ 3 × 10 ¹⁶ cm ^-2 , For example, 2 × 10 ^Fifteen cm ^-2 The acceleration voltage was 65 to 110 kV, for example, 80 kV. In this doping, nitrogen ions are high-speed, so that ions pass through the regions 208 and 211 that are not covered with the gate insulating film 204 ′ and are hardly doped (SIMS (secondary ion mass spectrometry) method). According to 1 × 10 ¹⁹ cm ^-2 It was below. On the other hand, the regions 209 and 210 covered with the gate insulating film ¹⁹ ~ 2 × 10 ²¹ cm ^-3 A concentration of nitrogen (depending on the depth) was introduced (FIG. 2C).
[0039]
Next, the atmosphere of the doping chamber was changed to phosphine (PH). ₃ ) And implanted phosphorus ions. First, the acceleration energy was set to 65 to 110 keV, for example, 90 kV. Dose amount is 5 × 10 ¹² ~ 5 × 10 ^Thirteen cm ^-2 , For example, 1 × 10 ^Thirteen cm ^-2 And As a result, mainly, the regions 208 and 211 covered with the gate insulating film 204 'were doped with impurities to form high resistance regions (FIG. 2D).
Thereafter, the acceleration energy was reduced to doping at 1 to 30 keV, for example, 5 kV, while the substrate was set in the doping apparatus. Dose amount is 5 × 10 ¹⁴ ~ 5 × 10 ^Fifteen cm ^-2 , For example, 1 × 10 ^Fifteen cm ^-2 And As a result, the regions 208 and 211 that are not covered with the gate insulating film 204 'are mainly doped with impurities to form low-resistance regions (FIG. 2E).
[0040]
Thereafter, irradiation with a KrF excimer laser (wavelength: 248 nm, pulse width: 20 nsec) was performed to activate the impurity ions introduced into the active layer. As the laser, a XeCl excimer laser (wavelength 308 nm, pulse width 50 nsec) may be used.
Needless to say, other lasers may be used other than the excimer laser. As for the pulse laser, an infrared laser such as an Nd: YAG laser (preferably Q-switched pulse oscillation) or a visible light laser such as its second harmonic can be used. However, when the laser irradiation is performed from the upper surface of the metal film, It is necessary to select a laser having a wavelength that is not reflected by the metal film. However, there is almost no problem when the metal film is extremely thin. Further, the laser light may be applied from the substrate side. In this case, it is necessary to select a laser beam that passes through the underlying silicon semiconductor film.
[0041]
Further, instead of laser, lamp annealing by irradiation of visible light or near-infrared light may be used. When performing lamp annealing, lamp irradiation is performed for several minutes at 600 ° C. and for several tens seconds at 1000 ° C. so that the surface to be irradiated is about 600 to 1000 ° C. Annealing by near-infrared rays (for example, 1.2 μm infrared rays) is performed by selectively absorbing near-infrared rays into a silicon semiconductor, not heating the glass substrate so much, and shortening the irradiation time for one time. Heating can be suppressed, which is extremely useful.
[0042]
Finally, as shown in FIG. 2F, a silicon oxide film having a thickness of 2000 to 1 μm, for example, 3000 μm is formed on the entire surface as an interlayer insulator 212 by a CVD method, and contact holes are formed in the source / drain of the TFT. Then, aluminum wiring / electrodes 213 and 214 were formed to a thickness of 2000 to 1 μm, for example, 5000 °. If, for example, titanium nitride is formed as a barrier metal between the aluminum electrodes 213 and 214 and the low-resistance regions 208 and 211, the reliability can be further improved.
[0043]
In this embodiment, as a result, the high resistance regions 209 and 210 can be selectively doped with nitrogen. This may be oxygen, carbon, or a mixture thereof. By doing so, the leakage current of the TFT can be suppressed. This is particularly suitable for the use of the TFT of the present embodiment which requires high charge retention characteristics such as an active matrix.
FIG. 4C illustrates a state of the doping process in this embodiment. After the nitrogen doping is first performed as described above, the nitrogen doping may be performed later as illustrated in FIG. In any case, the present embodiment is characterized in that both phosphorus doping and nitrogen doping can be performed continuously while the substrate is set in the doping apparatus.
[0044]
【The invention's effect】
According to the present invention, a high resistance region (HRD) can be formed by substantially one doping, one laser annealing, and an activation process such as RTA. That is, it is no longer necessary to form two types of the same conductivity type regions by independent processes as in the related art. This shortening of the process is effective in increasing mass productivity and reducing the amount of investment in the TFT manufacturing line. Further, in the present invention, since the width of the HRD is formed with extremely high precision, a TFT having excellent yield and uniformity can be obtained.
[0045]
It is needless to say that the TFT of the present invention can be formed in the same manner when a three-dimensional integrated circuit is formed on a substrate on which a semiconductor integrated circuit is formed, or when formed on glass or an organic resin. Are formed on the insulating surface in any case. In particular, the effect of the present invention is remarkable for an electro-optical device such as a monolithic active matrix circuit having peripheral circuits on the same substrate.
[Brief description of the drawings]
FIG. 1 shows a method for manufacturing a TFT according to Embodiment 1.
FIG. 2 illustrates a method for manufacturing a TFT according to Embodiment 2.
FIG. 3 shows a method for manufacturing a TFT according to a conventional method.
FIG. 4 shows a state of a doping step in the present invention.
[Explanation of symbols]
101 insulating substrate
102 Base oxide film (silicon oxide)
103 Active layer (crystalline silicon)
104 insulating film (silicon oxide)
104 'gate insulating film
105 Gate electrode (aluminum)
106 Mask film (photoresist)
107 Anodic oxide (porous aluminum oxide)
108 Anodic oxide (barrier type aluminum oxide)
109 Edge of gate insulating film
110, 113 Low resistance impurity region
111, 112 High resistance impurity region (HRD)

Claims (8)

A semiconductor layer formed on a substrate having an insulating surface ,
A gate insulating film formed so as to cover a channel formation region of the semiconductor layer and a pair of low-concentration impurity regions sandwiching the channel formation region ;
A gate electrode formed so as to cover a region of the gate insulating film corresponding to the channel forming region ,
By introducing a first impurity at a first concentration into the semiconductor layer using the gate electrode and the gate insulating film as a mask in a reaction vessel, a region of the semiconductor layer that is not covered with the gate insulating film is formed. Forming a high-concentration impurity region, and introducing a second impurity of the same conductivity type as the first impurity into the semiconductor layer at a second concentration in the reaction layer using the gate electrode as a mask. Forming a low concentration impurity region in a region of the layer covered with the gate insulating film ;
A method for manufacturing an insulated gate transistor in which laser light, visible light or infrared light is applied to activate the first and second impurities,
The method for manufacturing an insulated gate transistor, wherein the first and second impurities are introduced without taking the semiconductor layer out of the reaction vessel. A semiconductor layer formed on a substrate having an insulating surface ,
A gate insulating film formed so as to cover a channel formation region of the semiconductor layer and a pair of low-concentration impurity regions sandwiching the channel formation region ;
A gate electrode formed so as to cover a region of the gate insulating film corresponding to the channel forming region ,
By introducing a first impurity into said semiconductor layer using the gate electrodes as a mask in a reaction vessel at a first concentration, a low concentration impurity region in the region covered by the gate insulating film of said semiconductor layer formed by introducing the reaction vessel at the gate electrode and the gate insulating film of the first impurity having the same conductivity type second impurity into the semiconductor layer as a mask at a second concentration, said semiconductor Forming a high-concentration impurity region in a region of the layer not covered by the gate insulating film ;
A method for manufacturing an insulated gate transistor in which laser light, visible light or infrared light is applied to activate the first and second impurities,
The method for manufacturing an insulated gate transistor, wherein the first and second impurities are introduced without taking the semiconductor layer out of the reaction vessel. 3. The method for manufacturing an insulated gate transistor according to claim 1 , wherein the first and second impurities are phosphorus. 3. The method according to claim 1 , wherein the first and second impurities are boron. 4. The method according to any one of claims 1 to 4,
The semiconductor layer manufacturing method of an insulated gate transistor, characterized by comprising in silicon. The manufacturing method according to any one of claims 1 to 5,
A method for manufacturing an insulated gate transistor, wherein the first impurity and the second impurity are the same impurity. The method according to any one of claims 1 to 6,
A method for manufacturing an insulated gate transistor, comprising irradiating a laser beam from the substrate side to activate the first and second impurities. The method according to any one of claims 1 to 7 ,
A method for manufacturing an insulated gate transistor, comprising adding nitrogen, oxygen, or carbon to the low-concentration impurity region .

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