JP3582072B2 - Linear motor stator - Google Patents

Description

[0101]
[Industrial applications]
The present invention relates to a cooling structure for a stator of a linear motor, and is particularly suitable for a linear motor that drives a table in a vacuum chamber.
[0092]
[Prior art]
As a first conventional technique, a moving direction of a mover is set in a stator of a linear motor in which a belt-shaped coil is attached to both sides of a stator frame of good heat conduction and non-magnetic material. (See, for example, Japanese Utility Model Application Laid-Open No. 5-9183), in which a belt-shaped coil is cooled through a winding fixing frame.
As a second prior art, a stator of a linear motor is provided with a gap between both side surfaces of a band-shaped coil of a stator in which band-shaped coils are stuck on both sides of a winding fixed frame made of a good heat conducting nonmagnetic material. A thin-walled rectangular can with the upper and lower parts of the fixed frame fitted and fixed, a refrigerant passage between the can and the band-shaped coil, end plates provided at both ends in the elongate direction of the can, and a refrigerant supply port provided on the end plate And a refrigerant discharge port, in which field permanent magnets are opposed to both side surfaces of the can, and the strip-shaped coil is directly cooled by a refrigerant (for example, Japanese Utility Model Laid-Open No. 6-41381).
[0093]
[Problems to be solved by the invention]
However, in the first related art, since the winding is cooled through the winding fixed frame, the cooling efficiency is reduced due to the thermal resistance between the winding fixed frame and the band-shaped coil.
In the second conventional technique, the cooling efficiency is good because the band-shaped coil is directly cooled by the coolant, but the structure is complicated, and the gap is widened by the gap between the can and the band-shaped coil, so that the field magnetic flux easily leaks. There is a problem.
Therefore. An object of the present invention is to provide a linear motor stator having a simple structure that directly cools a strip-shaped coil without widening a gap.
[0093]
[Means for Solving the Problems]
In order to solve the above problems, the present invention provides a smooth band-shaped coil attached to a winding fixing frame made of a good heat conducting / non-magnetic material, and the flat band coil provided on the winding fixing frame and accommodating the smooth band coil. Fixing of a linear motor having a coil groove and a refrigerant passage provided inside the coil groove and having a supply port and a discharge port for a refrigerant, wherein the smooth band-shaped coil is liquid-tightly fixed to the coil groove. In this case, the smooth band-shaped coil is formed of a curved band-shaped coil having a large curvature protruding toward the refrigerant passage, and the curved band-shaped coil is fixed to a frame via a buffer member, and A frame is fixed to the coil groove, a partition groove is provided outside the coil groove, and a partition made of a degassing material is provided in the partition groove.
[0056]
[Action]
By the above means, the inner surface of the strip coil is directly cooled by the refrigerant.
[0086]
【Example】
An embodiment of the present invention will be described below with reference to FIGS.
For example, a smooth belt-shaped coil 2 as disclosed in Japanese Utility Model Publication No. 5-34224 is attached to a side surface of a winding fixing frame 1 made of a good heat conductive and non-magnetic material such as duralumin and stainless steel, and a partition wall is provided outside the coil. 4 are provided.
A groove is formed in the winding fixing frame 1 to be a refrigerant passage 3 having a width smaller than the width of the smooth band-shaped coil 2 and a length shorter than the length of the smooth band-shaped coil 2. A wide coil groove 11 is dug, and a partition groove 12 having substantially the same size as the partition wall 4 made of a non-magnetic degassing material such as stainless steel is dug above the coil groove 11.
At both ends in the longitudinal direction of the bottom of the coolant passage 3, a coolant supply port 31 and a coolant outlet 32 penetrating the back surface of the winding fixing frame 1 are provided.
The smooth belt-shaped coil 2 is fixed in the coil groove 11 by bonding or the like, and the periphery is sealed. After that, the partition 4 is housed in the partition groove 12, and the partition 4 and the winding fixing frame 1 are liquid-tightly welded by laser, TIG, MIG, or the like.
The partition 4 is opposed to the permanent magnet 5 via a gap. A yoke 6 is provided on the back of the permanent magnet 5. A mover is constituted by the permanent magnet 5 and the yoke 6.
Note that the smooth band coil 2 may be a curved band coil 21 described later.
007
FIG. 3 shows a second embodiment.
The coil groove 11 of the embodiment is a coil groove 11a which is deeper than the thickness of the smooth band coil 2. The smooth band coil 2 of the embodiment is a curved band coil 21 having an arc of a large curvature R centered on a point in the horizontal direction that is convex toward the refrigerant passage.
The curved band-shaped coil 21 is fixed to a frame 22 having a thickness slightly smaller than the depth of the coil groove 11a via a buffer member 13 such as a compound having a refrigerant resistance. The buffer member 13 also serves as a seal with the refrigerant passage 3.
The frame 22 to which the curved belt-shaped coil 21 is fixed is inserted into the coil groove 11, the frame 22 is fixed to the coil groove 11 by bonding or the like, and the periphery is sealed.
After that, the partition 4 is housed in the partition groove 12, and the partition 4 and the winding fixing frame 1 are liquid-tightly welded by laser, TIG, MIG, or the like.
With this configuration, the arc and the buffer member 13 absorb the heat generated by the curved band-shaped coil 21 itself due to the exciting current cyclically changing and the deformation of the curved band-shaped coil 21 due to the pressure change of the refrigerant.
In addition, even if the curved belt-shaped coil 21 is replaced with the smooth belt-shaped coil 2 similar to the embodiment, the deformation of the smooth belt-shaped coil 2 can be absorbed by the buffer member 13.
[0098]
【The invention's effect】
With the above configuration, the following effects can be obtained.
(1) Since the surface of the belt-shaped coil is directly washed with the refrigerant, the cooling efficiency is good.
(2) In the second embodiment, the heat generated by the strip coil and the pressure change of the refrigerant are absorbed by the arc of the strip coil and the buffer member, so that the durability is excellent.
[Brief description of the drawings]
FIG. 1 is a front sectional view showing an embodiment of the present invention.
FIG. 2 is a plan view of a partial cross section showing an embodiment of the present invention.
FIG. 3 is a front sectional view showing a second embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Winding fixed frame 11, 11a Coil groove 12 Partition groove 13 Buffer member 2 Smooth band coil 21 Curved band coil 22 Frame 3 Refrigerant passage 31 Supply port 32 Outlet 4 Partition wall 5 Permanent magnet 6 Yoke

Claims (1)

A smooth band-shaped coil attached to a winding fixing frame made of a good heat conducting / non-magnetic material, a coil groove provided on the winding fixing frame and for accommodating the smooth band coil, and provided inside the coil groove. And a refrigerant passage provided with a supply port and a discharge port for the refrigerant, and a linear motor stator comprising the smooth band-shaped coil liquid-tightly fixed to the coil groove ,
The smooth band-shaped coil is configured by a curved band-shaped coil having a large curvature convex toward the refrigerant passage,
The curved belt-shaped coil is fixed to a frame via a buffer member, and the frame is fixed to the coil groove,
A stator for a linear motor, wherein a partition groove is provided outside the coil groove, and a partition made of a degassed material is provided in the partition groove.

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