JP3522809B2 - Inductor - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inductor formed in a coil shape with a conductor on a semiconductor substrate, and more particularly to an inductor having a ferromagnetic layer on both upper and lower surfaces or one surface of a conductor. . [0002] Conventionally, it has been known to provide an inductor comprising a conductor formed in a coil shape and a ferromagnetic layer overlaid on both sides or one side of the conductor on a semiconductor substrate. I have. A metal layer is used as the conductor layer, a sendust alloy or ferrite vapor deposition layer is used as the ferromagnetic layer, or an ink layer in which ferromagnetic powder is dispersed in a binder is used as the ferromagnetic layer. It is provided on the substrate in a pattern. [0003] In order to form a conductor layer and a ferromagnetic layer by photolithography, several steps are required for each layer. For example, a ferromagnetic layer-conductor layer- Manufacture of an inductor having a three-layer structure of ferromagnetic layers requires ten or more steps or more, which is extremely troublesome.
The present invention provides an inductor that has a three-layer structure of a ferromagnetic layer, a conductor layer, and a ferromagnetic layer, or a two-layer structure of a conductor layer and a ferromagnetic layer, and can reduce the number of manufacturing steps. Things. [0004] An inductor according to the present invention is provided.
In the case of data, a coil-shaped pattern is formed on the semiconductor substrate
And the upper and lower surfaces and both sides of this conductor layer,
Or light of a photocurable ferromagnetic organic material covering the top and both sides
An inductor comprising a hardened layer, wherein the semiconductor substrate
Side surfaces of conductor layers adjacent to each other in a cross section perpendicular to
Characterized in that the covering photo-cured layers are separated from each other
Things. In the present invention, since a photocurable organic material is used as a ferromagnetic layer for increasing the inductance of a coil formed of a conductor layer, a photoengraving technique is directly applied to obtain a desired layer. Ru can be simplified process for obtaining the ferromagnetic layer pattern. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention
I will explain about it. Photocurable ferromagnetic organic material on semiconductor substrate
With a thin layer of photo-printing technology to achieve the desired pattern
When light is applied, only the required parts are cured, so uncured parts
Is removed by a solvent to obtain the first pattern of the required pattern.
Is formed. Next, a semiconductor substrate including the above ferromagnetic material layer
Apply a well-known photoresist material to the entire surface of the
A mask is formed by the technique, and the coil-shaped conductor layer is
It is formed on a ferromagnetic material layer. [0008] Photocurable ferromagnetic material is again formed on the entire surface of the semiconductor substrate.
Providing a thin layer of equipment, exposing it in the required pattern,
Removing the unexposed portion to form a second ferromagnetic material layer
And a coil consisting of a conductor sandwiched between ferromagnetic organic layers
Obtainable. The first and second ferromagnetic material layers
Can omit one of them. Accordingly, the first and second patterns having a required pattern
When forming the second ferromagnetic material layer, the second ferromagnetic material layer itself is exposed to light.
To obtain the required pattern.
Photoresis used to get the key pattern
The step of applying a coating layer can be omitted. In the above-described photosensitive process, a photopolymerizable monomer is used.
Between the electron donating group and the electron accepting group of the
By irradiating light, the former emits electrons and cations
Changes into a radical, the latter accepting that electron and anion
Turns into radicals. Irradiation light is selectively applied to such photoelectric
Monochromaticity, directivity, and time due to the need to cause a child transfer reaction
Laser beam light with excellent controllability is desirable. Also on
When applying an electric or magnetic field during the light irradiation described above,
Existence of formed cation radical and anion radical
Can be stabilized. Same as the light irradiation for the photoelectron transfer reaction described above.
Sometimes or later, irradiate with another suitable wavelength of light
Thereby, the monomer is a cation radical as described above and
A photopolymerization reaction occurs while retaining the anion radical
To cure. After performing the photoelectron transfer reaction described above, photopolymerization
Apply the above-mentioned electric or magnetic field until the reaction is completed
To keep the cation radical and anion radio
This is useful for fixing the holding status of files. The organic material polymerized and cured as described above is
Stable state of cation radical and anion radical
It has a high magnetic function, and
Contributes to increasing the conductance. Hereinafter, embodiments will be further described with reference to the drawings.
Then, it will be described more specifically. First, an electron donating group and
Suitable for photopolymerizable diacetylene monomer having an electron accepting group.
Dilute with an appropriate solvent, apply it on the semiconductor substrate 1, and dry it.
After drying, an uncured layer 2 as shown in FIG. This
In the layer 2 of the above, light for photoelectron transfer reaction and light for polymerization reaction
When the required pattern is irradiated with light, only the irradiated part
Changes to a polydiacetylene compound and cures
Then, when the unirradiated portion is washed away with a solvent, it is shown in FIG.
The cured layers 3, 3,... Having such a required pattern are obtained. The uncured layer 2 is irradiated with light to form
Cause such a reaction. Diacetylenization shown in FIG. 3 (a)
The compound monomer molecules 21, 21... Are each a side chain.
Having an electron donating group 22 and an electron accepting group 23
It is composed of a ren group 24. This is the light for photoelectron transfer
Is irradiated, as shown in FIG.
Emits an electron to change to a cation radical 25,
The acceptor group 23 accepts the released electrons and anions
It changes to Zical 26. Next, when this is irradiated with light for photopolymerization,
As shown in FIG. 3C, the diacetylene group 24 is
The radical 25 and the anion radical 26
ゝ A polymerization reaction occurs, converting to polydiacetylene compound 27.
Become This polydiacetylene compound 27 has a cation
Having a radical 25 and an anion radical 26,
These cation radicals 25 and anion radicals are
Because it is at the side chain position of compound 27, it is safe even after light irradiation is stopped.
Can you to exist in the constant, it exhibits a high magnetic function. For the above-described photoelectron transfer reaction and polymerization reaction
The light may be applied simultaneously. In addition, a strong electric field
Or, if a magnetic field is applied, the generated cation radicals and
And the anion radical holding state by Zeeman effect etc.
More stable. An ordinary photoresist is used on the substrate 1.
, A mask of a required pattern is superimposed on the cured layers 3, 3,...
The layers 4, 4,... Are formed as shown in FIG.
1 (d) and 2 through a mask layer by plating and plating.
The conductor layers 5, 5,... Shown in FIG.
4 is removed. FIG. 1 (d) is the same as FIG. 2 (a).
It is sectional drawing in alignment with DD line in FIG. The insulating layer 6 is placed at the intersection of the conductors, and
A mask is made of photoresist, and as shown in FIG.
At the intersection where the conductor layers 5, 5...
The conductor layers 7, 7,... And on it
As shown in FIG. 1F, an uncured layer 2
To form an uncured layer 8 similar to that of
Irradiation of light for kinetics and photopolymerization
After curing together and removing the unpolymerized part, FIG. 1 (g) and
The cured layers 9, 9... Having a pattern as shown in FIG.
Is obtained. Note that FIG. 1 (g) corresponds to G in FIG. 2 (b).
It is sectional drawing which follows the -G line. FIG . 1 (g) and FIG. 2 (b)
Thus, the coil made of the conductor layers 7, 7,...
... sandwiched between ferromagnetic organic layers 3, 3, 9, 9, ...
Therefore, the inductance can be increased. FIG . 4 shows another example of a photocurable ferromagnetic organic material.
Show. In FIG. 4A, the diacetylene compound monomer
-31, 31 ... are diacetylene groups 32 and electric children
Giving group 33, electron accepting group 34 and diacetylene group 32
Linked to an electron donating group 33 and an electron accepting group 34, respectively
Spacers 35 and 36. The spacers 35 and 36 serve as optoelectronic transfer
Only when irradiated with application light, the electron donating group 33 is released.
Transports the electrons to the electron accepting group 34.
Represents a Group 6 element such as oxygen, sulfur, or selenium;
Single bond functional groups such as the following methylene groups include
You. This diacetylenic compound monomer has an electron donating group 33 unless irradiated with light for a photoelectron transfer reaction.
Cannot be transferred to the electron accepting group. However, when this is irradiated with light for a photoelectron transfer reaction having an appropriate wavelength, the electrons emitted from the electron donating group 33 are carried to the electron accepting group 34, and as shown in FIG. This produces radicals 38. Further, for a photopolymerization reaction of a suitable wavelength,
When irradiated with light, as shown in FIG.
Group 32 is a cation radical 37 and an anion radical 3
Polymerized to retain the polydiacetylene compound 39
Changes to This compound is also the same as the compound shown in FIG.
Similarly, stably present cation radicals and anions
Excellent magnetic performance is exhibited by radicals. The conductor forming the current path of the inductor
As a ferromagnetic layer laminated on the layer, for example, a photocurable magnetic layer
It is characterized by the use of conductive materials, but is suitable for this purpose.
As described above, the electron donating group or the electron accepting group
Containing at least one of them as a functional group in the molecule
And a compatible monomer. As the photopolymerizable monomer, for example,
It was polymerized by light, to generate a polydiacetylene bond Gia
Those containing a cetylene group, a vinyl group and the like can be mentioned. Ma
The photopolymerizable monomer may be any that can be photopolymerized.
All photoreactive groups can be used, but polydiacetyl
Those that form a π-conjugate bond such as a ren bond are organic
It is desirable from the viewpoint of the magnetic function in the magnetic material. [0026] Then, a government that emits electrons by light irradiation
Active groups, that is, electron donating groups, emit electrons when irradiated with light.
And the cation radical formed by emitting the electron
Dical can be stably present during photopolymerization reaction
If so, any functional group can be used. As a concrete example
Is a functional group having a triphenyl group,
, Dipropylamine, diisopropylamine, etc.
Aliphatic such as amine, anthracene, benzoan
Thracene, substituted benzanthracene, dibenzoanthrace
Sen, bicene, pyrene, benzopyrene, dibenzopyrene
Carbocyclic aromatic functional groups such as
Locoline, thiophene, substituted thiophene, furan, substituted
Heterocyclic functional groups such as furan, pyrrole and substituted pyrrole;
Carbazole and also tetrathiafulvalene and its derivatives
And other functional groups that form a charge transfer complex.
Of course, it is not limited to these compounds,
Derivatives of these functional groups or two or more of these functional groups
Use of functional groups that combine and combine
Absent. A functional group that accepts electrons when irradiated with light,
In other words, the electron accepting group accepts the electrons released during light irradiation.
And the anion radiated by receiving the electron
Cal can be stably present during the photopolymerization reaction
If so, any functional group can be used. As a concrete example
Acrylic acid, acetamide, ethylene oxide, etc.
Aliphatic functional groups, nitrobenzene and other carbocyclic aromatic agents
Functional group, furthermore, benzoquinone, tetracyano-P-benzo
Functional groups consisting of benzoquinone derivatives such as quinone, tetra
Cyanoethylene and tetracyanoquinodimethane and their
Functionality that forms a charge transfer complex such as a derivative functional group
Groups. Of course, only these functional groups
However, derivatives of these functional groups and
Functional groups that combine two or more functional groups
It can be used. It should be noted that both the electron donating group and the electron accepting group
Irradiation should cause donation and acceptance of electrons
Has at least one of the functional groups donating an electron or
You just need to get it. For this reason, the electron donor or
Or at least one of the electron-accepting functional groups
Good. The above-mentioned photo-curable ferromagnetic organic compound
Uncured material, such as a polymer, is formed on or on a semiconductor substrate
To cover the conductor layer that has been
To cure only that part and remove the uncured part with solvent
Have the required pattern by removing
Related to an inductor having a magnetic material layer formed thereon.
You. As described above, according to the present invention,
Since a photocurable organic material was used as the ferromagnetic layer for increasing the inductance of the coil formed of the conductor layer, a process for obtaining a desired pattern of a ferromagnetic layer by directly applying photolithography technology. Ru can be simplified.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing each manufacturing process of an inductor embodying the present invention. FIG. 2 is a plan view of the inductor during manufacture and of a finished product. FIG. 3 is an explanatory diagram of a change state of a photopolymerizable ferromagnetic organic substance used in an example of the present invention by light irradiation. FIG. 4 is an explanatory view of a change state of a photopolymerizable ferromagnetic organic substance used in another embodiment of the present invention by light irradiation. DESCRIPTION OF THE REFERENCE NUMERALS 1 semiconductor substrate 3 cured layer of photopolymerizable ferromagnetic organic substance 5 conductor layer 7 conductor layer 9 cured layer of photopolymerizable ferromagnetic organic substance 21 diacetylene compound monomer 22 electron donating group 23 electron accepting group 24 diacetylene Group 25 cation radical 26 anion radical 27 diacetylene compound polymer

Claims (1)

(57) [Claim 1] A conductor layer formed in a coil-like pattern on a semiconductor substrate, and upper and lower surfaces and both side surfaces of the conductor layer ,
Or a photocurable layer of a photocurable ferromagnetic organic material covering the upper surface and both side surfaces, wherein the inductors are adjacent to each other in a cross section perpendicular to the semiconductor substrate.
An inductor, wherein a photo-cured layer covering a side surface of a conductor layer is separated from each other .