JP3291748B2 - Dielectric ceramic composition for temperature compensation - Google Patents

Dielectric ceramic composition for temperature compensation

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Publication number
JP3291748B2
JP3291748B2 JP01846792A JP1846792A JP3291748B2 JP 3291748 B2 JP3291748 B2 JP 3291748B2 JP 01846792 A JP01846792 A JP 01846792A JP 1846792 A JP1846792 A JP 1846792A JP 3291748 B2 JP3291748 B2 JP 3291748B2
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Japan
Prior art keywords
dielectric ceramic
weight
parts
ceramic composition
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP01846792A
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Japanese (ja)
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JPH05182524A (en
Inventor
本 義 弘 吉
田 康 信 米
部 行 雄 坂
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は温度補償用誘電体磁器
組成物に関し、特にたとえば積層コンデンサ,積層LC
フィルタの誘電体磁器として用いられる温度補償用誘電
体磁器組成物に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic composition for temperature compensation, and more particularly to, for example, a multilayer capacitor and a multilayer LC.
The present invention relates to a dielectric ceramic composition for temperature compensation used as a dielectric ceramic of a filter.

【0002】[0002]

【従来の技術】従来、この種の温度補償用誘電体磁器組
成物としては、MgTiO3 −CaTiO3 系の磁器組
成物が用いられていた。
2. Description of the Related Art Conventionally, as this kind of dielectric ceramic composition for temperature compensation, a MgTiO 3 —CaTiO 3 series ceramic composition has been used.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、MgT
iO3 −CaTiO3 系の磁器組成物では、その焼結温
度が1300℃以上と高く、さらに、中性または還元性
の低酸素分圧下で焼成した場合に磁器が還元されて半導
体化するという問題点を有していた。
However, MgT
iO 3 In -CaTiO 3 based ceramic composition, as high as the sintering temperature is 1300 ° C. or higher, further, a problem that the semiconductive ceramic is reduced when fired at low oxygen partial pressure neutral or reducing Had a point.

【0004】そのため、内部電極の材料として、誘電体
磁器材料が焼結する温度で溶融せず、かつ、誘電体磁器
材料が半導体化しない高い酸素分圧下で焼成されても酸
化されない金属を用いなければならない。このため、従
来の材料を積層コンデンサの誘電体磁器として用いる際
には、内部電極の材料として高融点かつ高温で酸化しに
くい高価な白金やパラジウムを使用しなければならず、
積層コンデンサの低価格化の大きな妨げとなっていた。
For this reason, a metal that does not melt at a temperature at which the dielectric ceramic material sinters and does not oxidize even when fired under a high oxygen partial pressure at which the dielectric ceramic material does not turn into a semiconductor must be used as a material for the internal electrodes. Must. For this reason, when using a conventional material as the dielectric porcelain of the multilayer capacitor, expensive platinum or palladium which has a high melting point and is hardly oxidized at a high temperature must be used as a material of the internal electrode.
This hindered the cost reduction of multilayer capacitors.

【0005】そこで、上述の問題点を解決するために、
内部電極の材料を高価な貴金属からたとえばニッケルや
銅などの安価な卑金属にすることが望まれていた。しか
し、このような卑金属を内部電極の材料として使用し、
従来の条件下で焼成すると、電極材料が酸化したり溶融
したりしてしまう。そのため、このような卑金属を内部
電極の材料として使用するために、酸素分圧の低い中性
または還元性の雰囲気中において低温で焼成しても半導
体化せず、コンデンサ用の誘電体磁器材料として充分な
比抵抗と優れた誘電特性とを有する誘電体磁器組成物が
必要とされていた。
Therefore, in order to solve the above problems,
It has been desired that the material of the internal electrodes be changed from expensive noble metals to inexpensive base metals such as nickel and copper. However, using such a base metal as the material of the internal electrode,
When firing under conventional conditions, the electrode material is oxidized or melted. Therefore, in order to use such a base metal as a material for the internal electrode, it does not turn into a semiconductor even when fired at a low temperature in a neutral or reducing atmosphere having a low oxygen partial pressure, and as a dielectric ceramic material for a capacitor. There has been a need for a dielectric ceramic composition having sufficient specific resistance and excellent dielectric properties.

【0006】この種の問題点を解決するための誘電体磁
器組成物が、特開平1−102806号公報などに開示
されている。この誘電体磁器組成物は、酸素分圧の低い
中性または還元性の雰囲気中において焼成が可能であ
る。したがって、この誘電体磁器組成物を使用して、ニ
ッケルや銅などの卑金属を内部電極の材料とする温度補
償用積層コンデンサを提供することができる。しかし、
この誘電体磁器組成物は、焼成温度や誘電体の温度係数
に関しては、上述の問題点を解決するものの、Q値は1
MHzで2000以下と小さかった。
A dielectric porcelain composition for solving this kind of problem is disclosed in JP-A-1-102806 and the like. This dielectric ceramic composition can be fired in a neutral or reducing atmosphere having a low oxygen partial pressure. Therefore, a multilayer capacitor for temperature compensation using a base metal such as nickel or copper as a material of an internal electrode can be provided by using this dielectric ceramic composition. But,
This dielectric porcelain composition solves the above-mentioned problems with respect to the firing temperature and the temperature coefficient of the dielectric, but has a Q value of 1
It was as small as 2000 or less at MHz.

【0007】それゆえに、この発明の主たる目的は、酸
素分圧の低い中性または還元性の雰囲気中において、1
050℃以下の低温で還元されることなく焼結し、か
つ、誘電率の温度係数の絶対値が50ppm/℃以下、
Q値が1MHzで2500以上、20℃における比抵抗
値が1×1012Ωcm以上である誘電体磁器を得ること
ができ、銅などの卑金属を内部電極として使用できる温
度補償用誘電体磁器組成物を提供することである。
[0007] Therefore, the main object of the present invention is to provide a neutral or reducing atmosphere having a low oxygen partial pressure.
Sintering without reduction at a low temperature of 050 ° C. or less, and an absolute value of a temperature coefficient of a dielectric constant of 50 ppm / ° C. or less,
A dielectric ceramic composition having a Q value of 2500 or more at 1 MHz and a specific resistance value of 1 × 10 12 Ωcm or more at 20 ° C. can be obtained, and a base metal such as copper can be used as an internal electrode. It is to provide.

【0008】[0008]

【課題を解決するための手段】この発明は、TiO2
2〜43重量部、ZrO2 38〜58重量部、SnO2
9〜26重量部を主成分として含み、主成分100重量
部に対して、副成分として、B2 3 ,SiO2 ,Li
2 Oの中から選ばれる少なくとも1種類を含む金属酸化
物を5〜35重量部添加した、温度補償用誘電体磁器組
成物である。
SUMMARY OF THE INVENTION The present invention provides a TiO 2 2
2 to 43 parts by weight, 38 to 58 parts by weight of ZrO 2 , SnO 2
9 to 26 parts by weight as a main component, and B 2 O 3 , SiO 2 , Li
It is a dielectric ceramic composition for temperature compensation to which 5 to 35 parts by weight of a metal oxide containing at least one selected from 2 O is added.

【0009】[0009]

【発明の効果】この発明によれば、酸素分圧の低い中性
または還元性の雰囲気中において、1050℃以下の低
温で還元されることなく焼結し、静電容量の温度係数の
絶対値が50ppm/℃以下で、Q値が1MHzで25
00以上であり、20℃における比抵抗値が1×1012
Ωcm以上の特性を有する誘電体磁器を得ることができ
る温度補償用誘電体磁器組成物が得られる。
According to the present invention, sintering is performed at a low temperature of 1050 ° C. or less without reduction in a neutral or reducing atmosphere having a low oxygen partial pressure, and the absolute value of the temperature coefficient of capacitance is obtained. Is 50 ppm / ° C or less and the Q value is 25 at 1 MHz.
00 or more, and the specific resistance at 20 ° C. is 1 × 10 12
A temperature-compensating dielectric porcelain composition capable of obtaining a dielectric porcelain having a characteristic of Ωcm or more is obtained.

【0010】したがって、この温度補償用誘電体磁器組
成物を積層コンデンサ用材料として用いれば、銅など卑
金属を内部電極として使用することが可能となる。その
ため、積層コンデンサの大容量化に伴う電極のコストの
増大を解消することができ、低価格の積層コンデンサを
提供することができる。また、この温度補償用誘電体磁
器組成物から得られる誘電体磁器は、Q値が高く、誘電
率の温度係数が小さい。そのため、銀,銅,金などの導
電率の高い電極を用いることによって、マイクロ波領域
で使用される積層LCフィルタ,RFモジュールなどの
材料として使用することができる。
Therefore, when this dielectric ceramic composition for temperature compensation is used as a material for a multilayer capacitor, a base metal such as copper can be used as an internal electrode. Therefore, it is possible to eliminate an increase in the cost of the electrodes due to the increase in the capacity of the multilayer capacitor, and to provide a low-cost multilayer capacitor. The dielectric ceramic obtained from the temperature-compensating dielectric ceramic composition has a high Q value and a small temperature coefficient of the dielectric constant. Therefore, by using an electrode having high conductivity such as silver, copper, or gold, it can be used as a material for a laminated LC filter, an RF module, or the like used in a microwave region.

【0011】この発明の上述の目的,その他の目的,特
徴および利点は、図面を参照して行う以下の実施例の詳
細な説明から一層明らかとなろう。
The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.

【0012】[0012]

【実施例】まず、主成分の出発原料として、純度99.
5%以上のTiO2 ,ZrO2 ,SnO2 をそれぞれ表
1に示す配合比になるように配合した。
EXAMPLES First, as a starting material of a main component, a purity of 99.
5% or more of TiO 2 , ZrO 2 , and SnO 2 were blended so as to have the blend ratios shown in Table 1.

【0013】[0013]

【表1】 [Table 1]

【0014】また、副成分の材料として、B2 3 ,S
iO2 ,Li2 O,BaO,ZnO,CuO,MnO,
CaOを準備した。これらの材料を表2に示す割合にな
るように秤量し、それらをボールミルで湿式混合し、粉
砕した後、蒸発乾燥し、自然雰囲気中において1000
℃で溶融させた。さらに、溶融した材料をボールミルで
BR>1μm以下に湿式粉砕した後、蒸発乾燥させて、A
系列とB系列との2種類の副成分を得た。
Further, B 2 O 3 , S
iO 2 , Li 2 O, BaO, ZnO, CuO, MnO,
CaO was prepared. These materials were weighed to the ratios shown in Table 2, wet-mixed in a ball mill, pulverized, evaporated to dryness, and dried in a natural atmosphere at 1000 wt.
Melted at ℃. In addition, the molten material is
BR> 1 μm or less, then dry by evaporation
Two types of subcomponents, a sequence and a B sequence, were obtained.

【0015】[0015]

【表2】 [Table 2]

【0016】得られた主成分と副成分とを表1に示す割
合となるように配合し、配合原料を得た。
The obtained main component and subcomponent were blended so as to have the ratio shown in Table 1 to obtain a blended raw material.

【0017】この配合原料に結合材として酢酸ビニル系
バインダを5重量部加え、ボールミルで湿式混合して混
合物を得た。さらに、この混合物を蒸発乾燥した後、整
粒して粉末原料を得た。得られた粉末原料を2ton/
cm2 の圧力で直径20mm,厚さ1.0mmの円板状
に成形して成形物を得た。
5 parts by weight of a vinyl acetate-based binder was added as a binder to this compounding raw material, and the mixture was wet-mixed with a ball mill to obtain a mixture. Further, after evaporating and drying the mixture, the mixture was sized to obtain a powder raw material. 2 ton /
It was molded into a disk having a diameter of 20 mm and a thickness of 1.0 mm under a pressure of cm 2 to obtain a molded product.

【0018】次に、この円板状の成形物をジルコニア粉
末を敷粉としたアルミナ質の箱に入れ、自然雰囲気中に
おいて500℃で2時間酢酸ビニル系バインダを燃焼さ
せた。その後、体積比率でN2 :H2 =3:100の還
元ガス雰囲気中において、円板状の成形物を900〜1
050℃で2時間焼成して、素子を得た。さらに、得ら
れた素子の両主面に、In−Ga合金を塗布して電極を
形成し、試料(コンデンサ)を作製した。
Next, the disc-shaped molded product was placed in an alumina box using zirconia powder as a powder, and the vinyl acetate binder was burned at 500 ° C. for 2 hours in a natural atmosphere. Then, in a reducing gas atmosphere with a volume ratio of N 2 : H 2 = 3: 100, the disc-shaped molded product is 900-1.
The element was obtained by firing at 050 ° C. for 2 hours. Further, an In-Ga alloy was applied to both main surfaces of the obtained device to form electrodes, thereby preparing a sample (capacitor).

【0019】そして、得られた試料について、誘電率
ε,Q値,誘電率の温度係数α(ppm/℃),20℃
における比抵抗ρ20(Ωcm)の各特性を測定した。
Then, for the obtained sample, the dielectric constant ε, Q value, temperature coefficient of dielectric constant α (ppm / ° C.), 20 ° C.
Each characteristic of the specific resistance ρ 20 (Ωcm) was measured.

【0020】なお、誘電率εおよびQ値は周波数1MH
z,電圧1Vrms,温度20℃の条件下で測定した。
また、誘電率の温度係数α(ppm/℃)は、20℃に
おける静電容量C20および85℃における静電容量C85
から次式によって求めた。 α(ppm/℃)={(C85−C20)/C20}×{1/(85−20)} ×106
The dielectric constant ε and the Q value are set at a frequency of 1 MHz.
z, voltage 1 Vrms, temperature 20 ° C.
Further, the temperature coefficient α (ppm / ° C.) of the dielectric constant is expressed by a capacitance C 20 at 20 ° C. and a capacitance C 85 at 85 ° C.
From the following equation. α (ppm / ° C.) = {(C 85 −C 20 ) / C 20 } × {1 / (85−20)} × 10 6

【0021】さらに、20℃における比抵抗ρ20(Ωc
m)は、20℃において500Vの直流電圧を印加した
ときに流れる電流値から求めた。そして、これらの結果
を表3に示した。
Further, the specific resistance ρ 20 (Ωc at 20 ° C.)
m) was determined from a current value flowing when a DC voltage of 500 V was applied at 20 ° C. Table 3 shows the results.

【0022】[0022]

【表3】 [Table 3]

【0023】なお、表1および表3中*印を付したもの
はこの発明の範囲外のものであり、それ以外はこの発明
の範囲内のものである。
In Tables 1 and 3, those marked with an asterisk are outside the scope of the present invention, and the others are within the scope of the present invention.

【0024】また、表1に示した各試料の主成分の組成
を図1中に3成分組成図で示した。この図面において○
印を付した数字は各試料番号を示す。
The composition of the main components of each sample shown in Table 1 is shown in FIG. 1 as a three-component composition diagram. ○ in this drawing
The number with the mark indicates each sample number.

【0025】さらに、図1中には、この発明の組成物の
主成分の組成比を示す領域を、組成点A,B,C,D,
EおよびFを頂点とした多角形で示した。
Further, in FIG. 1, regions indicating the composition ratios of the main components of the composition of the present invention are represented by composition points A, B, C, D,
It is shown as a polygon with E and F as vertices.

【0026】そして、この発明にかかる組成物は、主成
分100重量部に対して、副成分として、B2 3 ,S
iO2 ,Li2 Oの中から選ばれる少なくとも1種類を
含む金属酸化物が5〜35重量部添加される。
The composition according to the present invention contains B 2 O 3 , S
iO 2, Li 2 metal oxide containing at least one selected from the O is added 5 to 35 parts by weight.

【0027】次に、この発明にかかる温度補償用誘電体
磁器組成物の成分の数値を上述のように限定した理由に
ついて説明する。
Next, the reason why the numerical values of the components of the dielectric ceramic composition for temperature compensation according to the present invention are limited as described above will be described.

【0028】TiO2 が22重量部未満では、焼結性が
悪く、1050℃の温度で焼成しても、緻密な焼結体が
得られないので好ましくない(試料番号17参照)。ま
た、TiO2 が43重量部を超えると、温度係数が大き
くなり、かつ比抵抗が1012Ωcm未満となるので好ま
しくない(試料番号1参照)。
If the content of TiO 2 is less than 22 parts by weight, the sinterability is poor, and even if it is fired at a temperature of 1050 ° C., a dense sintered body cannot be obtained. On the other hand, if TiO 2 exceeds 43 parts by weight, the temperature coefficient becomes large and the specific resistance becomes less than 10 12 Ωcm, which is not preferable (see Sample No. 1).

【0029】ZrO2 が38重量部未満では、温度係数
が大きくなるので好ましくない。また、ZrO2 が58
重量部を超えると、焼結性が悪く、1050℃の温度で
焼成しても、緻密な焼結体が得られないので好ましくな
い(試料番号11参照)。
If ZrO 2 is less than 38 parts by weight, the temperature coefficient is undesirably large. Further, when ZrO 2 is 58
If the amount is more than 10 parts by weight, the sinterability is poor, and even if firing at a temperature of 1050 ° C., a dense sintered body cannot be obtained, which is not preferable (see Sample No. 11).

【0030】SnO2 が9重量部未満であるか、あるい
は26重量部を超えると、温度係数が大きくなり、かつ
比抵抗が1012Ωcm未満となるので好ましくない(試
料番号14参照)。
If SnO 2 is less than 9 parts by weight or more than 26 parts by weight, the temperature coefficient is increased and the specific resistance is less than 10 12 Ωcm, which is not preferable (see Sample No. 14).

【0031】主成分100重量部に対して、A系列の副
成分の添加量が5重量部未満では、焼結性が悪く、10
50℃の温度で焼成しても、緻密な焼結体が得られない
ので好ましくない(試料番号18参照)。また、A系列
の副成分の添加量が35重量部を超えると、Q値が25
00未満となるので好ましくない(試料番号21参
照)。
If the amount of the auxiliary component of the A series is less than 5 parts by weight with respect to 100 parts by weight of the main component, the sinterability is poor, and
Firing at a temperature of 50 ° C. is not preferable because a dense sintered body cannot be obtained (see Sample No. 18). On the other hand, if the amount of the auxiliary component in the A series exceeds 35 parts by weight, the Q value becomes 25%.
It is not preferable because it is less than 00 (see Sample No. 21).

【0032】主成分100重量部に対して、B系列の副
成分の添加量が5重量部未満では、焼結性が悪く、10
50℃の温度で焼成しても、緻密な焼結体が得られない
ので好ましくない。また、B系列の副成分の添加量が3
5重量部を超えると、Q値が2500未満となり、かつ
比抵抗が1012Ωcm未満となるので好ましくない(試
料番号25参照)。
If the amount of the B-series subcomponent is less than 5 parts by weight with respect to 100 parts by weight of the main component, the sinterability is poor, and
Firing at a temperature of 50 ° C. is not preferable because a dense sintered body cannot be obtained. In addition, the addition amount of the auxiliary component of the B series is 3
If it exceeds 5 parts by weight, the Q value is less than 2500 and the specific resistance is less than 10 12 Ωcm, which is not preferable (see Sample No. 25).

【0033】なお、上述の実施例において副成分として
金属酸化物の粉末を使用したが、それ以外に溶液を添加
してもよい。また、副成分は各素材を溶融・粉砕によっ
てガラス化して用いたが、素材のまま主成分に添加して
もよい。
Although the metal oxide powder is used as an auxiliary component in the above embodiment, a solution may be added. In addition, the subcomponents are used by vitrifying each material by melting and pulverization, but may be added to the main component as it is.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の組成物の主成分の配合比を示す3成
分組成図である。
FIG. 1 is a three-component composition diagram showing the mixing ratio of the main components of the composition of the present invention.

フロントページの続き (56)参考文献 特開 平5−182523(JP,A) 特開 昭58−18808(JP,A) (58)調査した分野(Int.Cl.7,DB名) H01B 3/12 304 H01B 3/12 320 H01B 3/12 338 H01G 4/12 358 C04B 35/46 Continuation of the front page (56) References JP-A-5-182523 (JP, A) JP-A-58-18808 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H01B 3 / 12 304 H01B 3/12 320 H01B 3/12 338 H01G 4/12 358 C04B 35/46

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 TiO2 22〜43重量部、ZrO2
8〜58重量部、SnO2 9〜26重量部を主成分とし
て含み、 前記主成分100重量部に対して、副成分として、B2
3 ,SiO2 ,Li2 Oの中から選ばれる少なくとも
1種類を含む金属酸化物を5〜35重量部添加した、温
度補償用誘電体磁器組成物。
1. ZrO 2 , 22 to 43 parts by weight of TiO 2
8 to 58 parts by weight of SnO 2 and 9 to 26 parts by weight of SnO 2.
A dielectric ceramic composition for temperature compensation, comprising 5 to 35 parts by weight of a metal oxide containing at least one selected from O 3 , SiO 2 and Li 2 O.
JP01846792A 1992-01-06 1992-01-06 Dielectric ceramic composition for temperature compensation Expired - Lifetime JP3291748B2 (en)

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JP01846792A JP3291748B2 (en) 1992-01-06 1992-01-06 Dielectric ceramic composition for temperature compensation

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Application Number Priority Date Filing Date Title
JP01846792A JP3291748B2 (en) 1992-01-06 1992-01-06 Dielectric ceramic composition for temperature compensation

Publications (2)

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JPH05182524A JPH05182524A (en) 1993-07-23
JP3291748B2 true JP3291748B2 (en) 2002-06-10

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Publication number Priority date Publication date Assignee Title
JP3985009B1 (en) 2006-07-07 2007-10-03 Tdk株式会社 Dielectric porcelain

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