JP3200201B2 - Nitride magnetic powder and method for producing the same - Google Patents
Nitride magnetic powder and method for producing the sameInfo
- Publication number
- JP3200201B2 JP3200201B2 JP30852092A JP30852092A JP3200201B2 JP 3200201 B2 JP3200201 B2 JP 3200201B2 JP 30852092 A JP30852092 A JP 30852092A JP 30852092 A JP30852092 A JP 30852092A JP 3200201 B2 JP3200201 B2 JP 3200201B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- alloy
- magnetic material
- atomic
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 150000004767 nitrides Chemical class 0.000 title description 7
- 239000006247 magnetic powder Substances 0.000 title description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 49
- 239000000696 magnetic material Substances 0.000 claims description 42
- 229910045601 alloy Inorganic materials 0.000 claims description 34
- 239000000956 alloy Substances 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 33
- 239000013078 crystal Substances 0.000 claims description 27
- 239000000203 mixture Substances 0.000 claims description 27
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 9
- 239000012298 atmosphere Substances 0.000 claims description 7
- 229910052741 iridium Inorganic materials 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 229910052702 rhenium Inorganic materials 0.000 claims description 6
- 229910052707 ruthenium Inorganic materials 0.000 claims description 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 5
- 229910052762 osmium Inorganic materials 0.000 claims description 5
- 229910052703 rhodium Inorganic materials 0.000 claims description 5
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 36
- 239000000463 material Substances 0.000 description 34
- 229910052757 nitrogen Inorganic materials 0.000 description 31
- 230000003647 oxidation Effects 0.000 description 24
- 238000007254 oxidation reaction Methods 0.000 description 24
- 239000000843 powder Substances 0.000 description 22
- 238000005121 nitriding Methods 0.000 description 17
- 239000007789 gas Substances 0.000 description 16
- 230000005415 magnetization Effects 0.000 description 15
- 238000000137 annealing Methods 0.000 description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- 239000002245 particle Substances 0.000 description 11
- 239000001257 hydrogen Substances 0.000 description 10
- 229910052742 iron Inorganic materials 0.000 description 9
- 238000002844 melting Methods 0.000 description 9
- 230000008018 melting Effects 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 229910052760 oxygen Inorganic materials 0.000 description 9
- 229910017086 Fe-M Inorganic materials 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 238000010298 pulverizing process Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 6
- 150000002910 rare earth metals Chemical class 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 229910052684 Cerium Inorganic materials 0.000 description 3
- 229910052779 Neodymium Inorganic materials 0.000 description 3
- 229910052777 Praseodymium Inorganic materials 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000010791 quenching Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910052727 yttrium Inorganic materials 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 2
- 102000005717 Myeloma Proteins Human genes 0.000 description 2
- 108010045503 Myeloma Proteins Proteins 0.000 description 2
- 229910052772 Samarium Inorganic materials 0.000 description 2
- JZQOJFLIJNRDHK-CMDGGOBGSA-N alpha-irone Chemical compound CC1CC=C(C)C(\C=C\C(C)=O)C1(C)C JZQOJFLIJNRDHK-CMDGGOBGSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000012300 argon atmosphere Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000005347 demagnetization Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 230000005307 ferromagnetism Effects 0.000 description 2
- 238000009689 gas atomisation Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 229910001337 iron nitride Inorganic materials 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 238000005551 mechanical alloying Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910001122 Mischmetal Inorganic materials 0.000 description 1
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910021141 Sm—F Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011802 pulverized particle Substances 0.000 description 1
- -1 rare earth nitride Chemical class 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
- H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
- H01F1/047—Alloys characterised by their composition
- H01F1/053—Alloys characterised by their composition containing rare earth metals
- H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
- H01F1/059—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and Va elements, e.g. Sm2Fe17N2
- H01F1/0596—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and Va elements, e.g. Sm2Fe17N2 of rhombic or rhombohedral Th2Zn17 structure or hexagonal Th2Ni17 structure
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Powder Metallurgy (AREA)
- Hard Magnetic Materials (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、高磁気特性で耐酸化性
に優れた希土類−鉄−窒素系磁性材料で、特に小型モー
ター、アクチュエーターなどの用途に最適な磁性材料に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rare earth-iron-nitrogen based magnetic material having high magnetic properties and excellent oxidation resistance, and particularly to a magnetic material most suitable for use in small motors and actuators.
【0002】[0002]
【従来の技術】磁性材料は家庭電化製品、音響製品、自
動車部品やコンピューターの周辺端末機まで、幅広い分
野で使用されており、エレクトロニクス材料としての重
要性は年々増大しつつある。特に最近、各種電気・電子
機器の小型化、高効率化が要求されてきたため、より高
性能の磁性材料が求められている。2. Description of the Related Art Magnetic materials are used in a wide range of fields from home appliances, audio products, automobile parts and peripheral devices of computers, and their importance as electronic materials is increasing year by year. In particular, recently, there has been a demand for miniaturization and high efficiency of various electric and electronic devices, so that a magnetic material with higher performance is required.
【0003】この時代の要請に応え、Sm−Co系、N
d−Fe−B系などの希土類磁性材料の需要が急激に増
大している。しかし、Sm−Co系は原料供給が不安定
で原料コストが高く、Nd−Fe−B系は耐熱性、耐食
性に劣る問題点がある。一方、新しい希土類系磁性材料
として、希土類−鉄−窒素系磁性材料が発明されてい
る。(例えば特開平2−57663)この材料は、磁
化、異方性磁界、キュリー点が高く、Sm−Co系、N
d−Fe−B系の欠点を補う磁性材料として期待されて
いる。[0003] In response to the demands of this era, Sm-Co based, N
The demand for rare earth magnetic materials such as d-Fe-B is rapidly increasing. However, the Sm-Co system has a problem that the supply of the material is unstable and the cost of the material is high, and the Nd-Fe-B system has a problem in that the heat resistance and the corrosion resistance are inferior. On the other hand, as a new rare earth magnetic material, a rare earth-iron-nitrogen magnetic material has been invented. This material has a high magnetization, an anisotropic magnetic field, and a high Curie point.
It is expected as a magnetic material that compensates for the drawbacks of the d-Fe-B system.
【0004】しかし、希土類−鉄−窒素系材料を細かく
粉砕して使用する場合、表面が酸化されて保磁力が低下
し、この材料が本来有している高磁気特性を充分発揮す
ることができない。この対策として、希土類−鉄−窒素
系材料に金属成分Mを含ませて磁性材料の特性を改善す
る方法が考えられる。この希土類−鉄−M−窒素組成を
有する材料については、特開昭61−9551(M=P
t、Pd、Rh、Re、Ru)に開示されている。However, when a rare earth-iron-nitrogen-based material is used after being finely ground, its surface is oxidized and its coercive force is reduced, so that the material cannot exhibit its intrinsic high magnetic properties. . As a countermeasure, a method of improving the characteristics of the magnetic material by adding a metal component M to a rare earth-iron-nitrogen-based material can be considered. The material having the rare earth-iron-M-nitrogen composition is disclosed in JP-A-61-9551 (M = P
t, Pd, Rh, Re, Ru).
【0005】特開昭61−9551に開示されている材
料は、製造上、窒化鉄、α−鉄、窒化希土類及びM単体
を多く含む材料となり、従って、保磁力を初めとする磁
気特性は著しく劣化して、これらの材料は高性能な磁石
材料とならない。このため、磁気特性が高い菱面体晶又
は六面体晶の結晶構造を有し、しかも耐酸化性に優れた
希土類−鉄−M−窒素系材料は現在知られておらず、そ
の出現が強く望まれている。The material disclosed in Japanese Patent Application Laid-Open No. 61-9551 is a material containing a large amount of iron nitride, α-iron, rare earth nitride and M alone in production, and therefore has remarkable magnetic properties such as coercive force. Deteriorating, these materials do not become high performance magnet materials. For this reason, a rare earth-iron-M-nitrogen-based material having a rhombohedral or hexahedral crystal structure having high magnetic properties and excellent oxidation resistance is not known at present, and its appearance is strongly desired. ing.
【0006】[0006]
【発明が解決しようとする課題】本発明は、菱面体晶ま
たは六方晶の結晶構造を有した希土類−鉄−窒素系材料
に金属元素Mを共存させて、高い磁気特性と優れた耐酸
化性を合わせ持つ希土類−鉄−M−窒素組成の磁性材料
とその製造法を提供するものである。DISCLOSURE OF THE INVENTION The present invention relates to a rare-earth-iron-nitrogen-based material having a rhombohedral or hexagonal crystal structure in which a metal element M coexists to provide high magnetic properties and excellent oxidation resistance. The present invention provides a rare earth-iron-M-nitrogen composition magnetic material having the following characteristics:
【0007】[0007]
【課題を解決するための手段】高い磁気特性と耐酸化性
を有する希土類−鉄−窒素系磁性材料を得るために、母
合金に種々の元素(M)を添加した系について鋭意検討
した結果、磁気特性が高く耐酸化性の優れた組成及び結
晶構造を有する希土類(R)−鉄(Fe)−M−窒素
(N)組成を有する磁性材料を見いだし、本発明を成す
に至った。In order to obtain a rare earth-iron-nitrogen based magnetic material having high magnetic properties and oxidation resistance, the present inventors have conducted intensive studies on a system obtained by adding various elements (M) to a mother alloy. The present inventors have found a magnetic material having a composition of rare earth (R) -iron (Fe) -M-nitrogen (N) having a high magnetic property and excellent oxidation resistance and a crystal structure, and have accomplished the present invention.
【0008】即ち、本発明は(1)一般式Rα(Fe
(1- γ) Mγ)(100- α- β) Nβで表される磁性材料
であり、RはYを含む希土類元素のうち少なくとも一
種、Mは、Re、Ru、Os、Rh、Ir、Pd、P
t、Auの元素のうち少なくとも一種、α、βは原子百
分率で 3≦α≦20 3≦β≦30 γは原子比で 0.001≦γ≦0.5 であって、かつそのR、Fe、M及びNを含んだ相が菱
面体晶または六方晶の結晶構造を含有することを特徴と
する磁性材料、及び、(2)上記記載の磁性材料の成分
であるFeの0.01〜50原子%をCoで置換した組
成を有することを特徴とする磁性材料であり、(3)一
般式Rα/(100-β) (Fe(1- γ) Mγ)(100- α- β
)/(100- β) で表される合金を、窒素ガス、アンモニア
ガスのうち少なくとも一種を含む雰囲気下で、200〜
650℃の範囲で熱処理することを特徴とする上記
(1)又は(2)に記載の磁性材料の製造法である。That is, the present invention relates to (1) a compound represented by the general formula Rα (Fe
(1- γ) Mγ) (100- α - β) is a magnetic material represented by N.beta, at least one kind of rare earth element R, including the Y, M is, Re, Ru, Os, Rh , Ir, Pd , P
At least one of the elements t and Au, α and β are atomic percentages 3 ≦ α ≦ 203 3 ≦ β ≦ 30 γ is an atomic ratio of 0.001 ≦ γ ≦ 0.5 and R, Fe , M and N are characterized in that the phase containing rhombohedral or hexagonal crystal structure is contained therein; and (2) 0.01 to 50% of Fe which is a component of the magnetic material described above. A magnetic material characterized by having a composition in which atomic% is replaced by Co, and (3) a general formula Rα / (100- β ) (Fe (1- γ ) Mγ) (100- α - β)
) / (100- β ) in an atmosphere containing at least one of nitrogen gas and ammonia gas,
The method for producing a magnetic material according to the above (1) or (2), wherein the heat treatment is performed at a temperature of 650 ° C.
【0009】以下本発明について詳細に説明する。希土
類(R)としては、Y、La、Ce、Pr、Nd、P
m、Sm、Eu、Gd、Tb、Dy、Ho、Er、T
m、YbおよびLuのうち少なくとも一種を含めば良
く、従って、ミッシュメタルやジジム等の二種以上の希
土類元素の混合物を用いても良いが、好ましい希土類と
しては、Y、Ce、Pr、Nd、Sm、Gd、Dy、E
rである。さらに好ましくは、Y、Ce、Pr、Nd、
Smである。Hereinafter, the present invention will be described in detail. As the rare earth (R), Y, La, Ce, Pr, Nd, P
m, Sm, Eu, Gd, Tb, Dy, Ho, Er, T
It is sufficient that at least one of m, Yb and Lu is included. Therefore, a mixture of two or more rare earth elements such as misch metal and dymium may be used. Preferred rare earths include Y, Ce, Pr, Nd, Sm, Gd, Dy, E
r. More preferably, Y, Ce, Pr, Nd,
Sm.
【0010】また、このRは工業的生産により入手可能
な純度でよく、製造上不可避の不純物、例えばO、H、
C、Al、Si、F、Na、Mg、Ca、Liなどが存
在していても差し支えない。鉄(Fe)は、強磁性を担
う本磁性材料の基本組成であり、Feのうち0.01〜
50原子%をCoで置換しても良く、この場合キュリー
点、磁化が高く、更に耐酸化性の高い材料となる。以
下、鉄成分と記述した場合、Coで最大50原子%まで
置換した場合も含むものとする。さらに、本発明の効果
を発揮するために必須な成分であるRe、Ru、Os、
Rh、Ir、Pd、Pt、Auの各元素(M)のうち1
種または2種以上をFeとMの合計量に対して0.1〜
50原子%の範囲で共存させる。[0010] The R may have a purity that can be obtained by industrial production, and impurities unavoidable in production, such as O, H,
C, Al, Si, F, Na, Mg, Ca, Li and the like may be present. Iron (Fe) is the basic composition of the present magnetic material that is responsible for ferromagnetism, and
50 atomic% may be replaced by Co. In this case, a material having a high Curie point and high magnetization and high oxidation resistance is obtained. Hereinafter, a description of an iron component includes a case where Co is replaced by up to 50 atomic% with Co. Furthermore, Re, Ru, Os, which are essential components for exhibiting the effects of the present invention,
One of the elements (M) of Rh, Ir, Pd, Pt, and Au
Seed or two or more kinds with respect to the total amount of Fe and M
Coexist in the range of 50 atomic%.
【0011】本発明におけるR−Fe−M−N系磁性材
料の組成は、R成分が3〜20原子%、鉄及びM成分が
併せて50〜94原子%、Nが3〜30原子%の範囲に
あることが必要である。R成分が3原子%未満のとき、
鉄成分を多く含む軟磁性相が分離し、窒化物の保磁力が
低下して実用的な永久磁石とならない。またR成分が2
0原子%を越えると、残留磁束密度が低下して好ましく
ない。又、R成分の組成として好ましくは5〜15原子
%、更に好ましくは7〜12原子%である。The composition of the R-Fe-MN-based magnetic material in the present invention is such that the R component is 3 to 20 atomic%, the iron and M components together are 50 to 94 atomic%, and N is 3 to 30 atomic%. Must be in range. When the R component is less than 3 atomic%,
The soft magnetic phase containing a large amount of iron component is separated, and the coercive force of the nitride is reduced, so that a practical permanent magnet cannot be obtained. The R component is 2
If it exceeds 0 atomic%, the residual magnetic flux density is undesirably reduced. The composition of the R component is preferably 5 to 15 atomic%, and more preferably 7 to 12 atomic%.
【0012】鉄中のM共存量としては、鉄とM成分の合
計に対し原子比で0.001〜0.5の範囲とする必要
がある。0.5を越えると飽和磁化が低下して好ましく
なく、0.001未満の場合は耐酸化性に対するMの添
加効果がほとんどない。さらに、Auについては、その
金属半径がFeと大きく異なるため、安定な菱面体晶系
や六方晶系を得るために、M共存量として0.3以下と
することが望ましい。The coexistence amount of M in iron must be in the range of 0.001 to 0.5 in atomic ratio to the total of iron and M components. If it exceeds 0.5, the saturation magnetization is lowered, which is not preferable. If it is less than 0.001, the effect of adding M on the oxidation resistance is hardly obtained. Further, since the metal radius of Au is significantly different from that of Fe, it is desirable that the M coexistence amount is 0.3 or less in order to obtain a stable rhombohedral or hexagonal system.
【0013】磁化、保磁力など磁気特性のバランスも考
え合わせると、M置換量として、好ましくは0.01〜
0.2である。M成分としてのRe、Ru、Os、R
h、Ir、Pd、Pt、Auに加えて、Mn、Cr、N
i、Li、Na、K、Mg、Ca、Sr、Ba、Ti、
Zr、Hf、V、Nb、Ta、Mo、W、Cu、Ag、
Zn、B、Al、Ga、In、C、Si、Ge、Sn、
Pb、Biの元素のうち1種または2種以上(M’成
分)を添加しても良いが、これらの含有量はRe、R
u、Os、Rh、Ir、Pd、Pt、Auの合計量を越
えないで、しかもRe、Ru、Os、Rh、Ir、P
d、Pt、Auとの合計量がγ値の範囲にある様にしな
ければならない。Considering the balance of magnetic properties such as magnetization and coercive force, the M substitution amount is preferably 0.01 to
0.2. Re, Ru, Os, R as M component
h, Ir, Pd, Pt, Au, Mn, Cr, N
i, Li, Na, K, Mg, Ca, Sr, Ba, Ti,
Zr, Hf, V, Nb, Ta, Mo, W, Cu, Ag,
Zn, B, Al, Ga, In, C, Si, Ge, Sn,
One or more of the elements Pb and Bi (M ′ component) may be added, but their contents are Re, R
u, Os, Rh, Ir, Pd, Pt, and Au without exceeding the total amount, and Re, Ru, Os, Rh, Ir, P
The total amount of d, Pt, and Au must be within the range of the γ value.
【0014】R−Fe−M−N系磁性材料の主相の結晶
構造としては、六方晶並びに菱面体晶のうち少なくとも
一種を体積分率で全体の50%以上含むことが必要であ
る。ここにいう主相とは、少なくともR、Fe及びNを
含み、かつ菱面体晶又は六方晶の結晶構造を有する相の
ことであり、それ以外の組成、結晶構造を有する相を副
相と呼ぶ。The crystal structure of the main phase of the R—Fe—M—N magnetic material must contain at least one of hexagonal and rhombohedral in a volume fraction of 50% or more of the whole. The main phase referred to herein is a phase containing at least R, Fe and N and having a rhombohedral or hexagonal crystal structure, and a phase having a composition and crystal structure other than that is called a subphase. .
【0015】例えば、副相としてRFe12-XM’X Ny
相といった正方晶を取る磁性の高い窒化物相を含んでい
ても良いが、本発明の耐酸化性の効果を充分発揮させる
ためには、その体積分率は本発明の磁性材料の体積分率
を越えてはならない。体積分率が75%を越える場合、
実用上極めて好ましい材料となる。本発明で得られるR
−Fe−M−N系材料の主相は、結晶構造がその原料と
するR−Fe−M合金の主原料相とほぼ同じ対称性を有
し、窒素が格子間に侵入するかもしくはM成分などと置
換して導入され、結晶格子が多くの場合膨張する。For example, RFe 12-X M ′ X N y is used as a subphase.
It may contain a highly magnetic nitride phase that takes a tetragonal phase such as a phase, but in order to sufficiently exhibit the oxidation resistance effect of the present invention, the volume fraction of the magnetic material of the present invention must be Must not be exceeded. If the volume fraction exceeds 75%,
This is a very preferable material for practical use. R obtained by the present invention
-The main phase of the Fe-M-N-based material has a crystal structure that is substantially the same as the main raw material phase of the R-Fe-M alloy as the raw material, and nitrogen penetrates between lattices or the M component. The crystal lattice expands in many cases.
【0016】ここにいう主原料相とは、少なくともR及
びFeを含み、かつ菱面体晶又は六方晶の結晶構造を有
する相のことであり、それ以外の組成、結晶構造を有
し、かつNを含まない相を副原料相と呼ぶ。結晶格子の
膨張に伴い、耐酸化性及び磁気特性の各項目のうち一項
目以上が向上し、実用上好適な磁性材料となる。The term "main material phase" as used herein means a phase containing at least R and Fe and having a rhombohedral or hexagonal crystal structure. Is referred to as an auxiliary material phase. With the expansion of the crystal lattice, at least one of the items of the oxidation resistance and the magnetic properties is improved, and the magnetic material is suitable for practical use.
【0017】ここにいう磁気特性とは、材料の飽和磁化
(4πIs)、残留磁束密度(Br)、磁気異方性磁界
(Ha)、磁気異方性エネルギー(Ea)、磁気異方性
比、キュリー点(Tc)、固有保磁力(iHc)、角形
比(Br/4πIs)、最大エネルギー積[(BH)m
ax]、熱減磁率(α)、保磁力の温度変化率(β)の
うち少なくとも一つを言う。但し、磁気異方性比とは、
外部磁場を15kOe印加した時の困難磁化方向の磁化
(a)と容易磁化方向の磁化(b)の比(a/b)であ
り、磁気異方性比が小さいもの程、磁気異方性エネルギ
ーが高いと評価される。The magnetic characteristics referred to herein include the saturation magnetization (4πIs), residual magnetic flux density (Br), magnetic anisotropic magnetic field (Ha), magnetic anisotropic energy (Ea), magnetic anisotropy ratio, Curie point (Tc), intrinsic coercive force (iHc), squareness ratio (Br / 4πIs), maximum energy product [(BH) m
ax], the thermal demagnetization rate (α), and the temperature change rate (β) of the coercive force. However, the magnetic anisotropy ratio is
The ratio (a / b) of the magnetization (a) in the difficult magnetization direction and the magnetization (b) in the easy magnetization direction when an external magnetic field of 15 kOe is applied. Is evaluated as high.
【0018】例えば、希土類−鉄−M母合金として、菱
面体構造を有するSm10.5(Fe0. 95Sn0.05)89.5を
選んだ場合、窒素を導入することによって、結晶磁気異
方性が面内異方性から硬磁性材料として好適な一軸異方
性に変化し、磁気異方性エネルギーを初めとする磁気特
性と耐酸化性が向上する。導入される窒素(N)量は、
3〜30原子%にしなければならない。30原子%を越
えると磁化が低く、磁石材料用途としては実用性が小さ
い。3原子%未満では原料合金の性能をあまり向上させ
ることができず、好ましくない。窒素量としてさらに好
ましくは、5〜25原子%、特に好ましくは10〜17
原子%である。[0018] For example, rare earth - as an iron -M master alloy, when choosing the Sm 10.5 (Fe 0. 95 Sn 0.05 ) 89.5 having a rhombohedral structure, by introducing nitrogen, crystal magnetic anisotropy in-plane It changes from anisotropic to uniaxial anisotropy suitable as a hard magnetic material, and the magnetic properties such as magnetic anisotropic energy and the oxidation resistance are improved. The amount of nitrogen (N) introduced is
It must be between 3 and 30 atomic%. If it exceeds 30 atomic%, the magnetization is low, and its practicality is small as a magnet material. If it is less than 3 atomic%, the performance of the raw material alloy cannot be improved much, which is not preferable. The nitrogen content is more preferably 5 to 25 atomic%, and particularly preferably 10 to 17 atomic%.
Atomic%.
【0019】また、目的とするR−Fe−M−N系磁性
材料のR−Fe−M組成比や副相の量比さらに結晶構造
などによって、最適な窒素量は異なり、例えば菱面体構
造を有するNd10.5(Fe0.9 Re0.1 )89.5を原料合
金として選ぶと、最適な窒素量は13〜14原子%付近
となる。このときの最適な窒素量とは、目的に応じて異
なるが材料の耐酸化性及び磁気特性のうち少なくとも一
項目が最適となる窒素量であり、磁気特性が最適とは磁
気異方性比、減磁率及び保磁力の温度変化率の絶対値は
極小、その他は極大となることである。勿論、実用上磁
気特性と耐酸化性能を有する永久磁石材料を調整する場
合には窒素量が必ずしも最適である必要はない。Further, the optimum amount of nitrogen varies depending on the R-Fe-M composition ratio, the subphase amount ratio, and the crystal structure of the target R-Fe-MN-based magnetic material. If Nd 10.5 (Fe 0.9 Re 0.1 ) 89.5 is selected as a raw material alloy, the optimum amount of nitrogen is about 13 to 14 atomic%. The optimal amount of nitrogen at this time is different depending on the purpose, but is the amount of nitrogen at which at least one item among the oxidation resistance and the magnetic properties of the material is optimal. The absolute values of the temperature change rates of the demagnetization rate and the coercive force are minimum values, and the other values are maximum values. Of course, when adjusting a permanent magnet material having magnetic properties and oxidation resistance in practical use, the amount of nitrogen does not necessarily need to be optimal.
【0020】本発明により得られたR−Fe−M−N系
磁性材料には、水素(H)が0.01〜10原子%、さ
らに酸素(O)が0.01〜15原子%含まれることが
好ましい。更に好ましい水素量及び酸素量は、0.1〜
10原子%及び0.1〜10原子%である。従って、特
に好ましい本発明のR−Fe−M−N系材料の組成は、
一般式Rα(Fe(1- γ) Mγ)(100- α- β- δ- ε
) NβHδOεで表わしたとき、α、β、δ、εは原子
%で、 2.4≦α≦20 2.4≦β≦30 0.1≦δ≦10 0.1≦ε≦10 γは原子比で、 0.001≦γ≦0.5 の範囲である。The R-Fe-MN-based magnetic material obtained by the present invention contains 0.01 to 10 atomic% of hydrogen (H) and 0.01 to 15 atomic% of oxygen (O). Is preferred. More preferred amounts of hydrogen and oxygen are 0.1 to
10 at% and 0.1 to 10 at%. Therefore, a particularly preferred composition of the R-Fe-MN-based material of the present invention is:
General formula Rα (Fe (1- γ ) Mγ) (100- α - β - δ - ε
) When expressed as NβHδOε, α, β, δ, and ε are atomic%, and 2.4 ≦ α ≦ 20 2.4 ≦ β ≦ 30 0.1 ≦ δ ≦ 10 0.1 ≦ ε ≦ 10 γ is an atom The ratio is in the range of 0.001 ≦ γ ≦ 0.5.
【0021】R−Fe−N系磁性材料に対するM成分の
共存効果としては、主に耐酸化性の向上である。特に、
R−Fe−N系磁性材料の酸化による劣化では、磁化の
低下に比べ、保磁力の低下が問題となる。本発明の組成
物は酸化に対する保磁力の安定性に優れる特徴を有す
る。その効果の源は強磁性を担うR−Fe−N磁性材料
主相にM成分が共存することによるが、主相そのものが
酸化されづらくなって磁化の劣化を妨ぐだけに限らず、
若干の酸化により粒表面近傍に析出する鉄成分主体の軟
磁性成分にM成分が共存することで保磁力低下を防ぐの
にも寄与している。The coexistence effect of the M component on the R—Fe—N magnetic material is mainly an improvement in oxidation resistance. In particular,
In the deterioration of the R-Fe-N-based magnetic material due to oxidation, a decrease in coercive force is more problematic than a decrease in magnetization. The composition of the present invention is characterized by having excellent stability of coercive force against oxidation. The source of the effect is due to the coexistence of the M component in the main phase of the R-Fe-N magnetic material, which is responsible for ferromagnetism.
The coexistence of the M component with the soft magnetic component mainly composed of the iron component precipitated near the grain surface due to slight oxidation also contributes to preventing a decrease in coercive force.
【0022】M’成分の中にも本発明の効果を有する添
加元素はあるが、本発明のM成分が貴金属及びReとい
う酸化に対して極めて安定な元素であるために、これら
を添加することによる酸化防止効果は、顕著であると考
える。また、本発明の目的とは別に、母合金の調整方法
や条件によっては、粒界近傍、或はRFe3 相などのR
リッチの窒化物相並びにα−Fe相またはその窒化物相
の様なR−Fe−N組成の材料では軟磁性を示す副相に
M成分が凝縮されて、非磁性相化されることにより、窒
化物の角形比や保磁力を向上させる効果もある。Although there are additional elements having the effect of the present invention in the M ′ component, since the M component of the present invention is an extremely stable element against oxidation of noble metal and Re, it is necessary to add these elements. Is considered to have a remarkable antioxidant effect. Further, apart from the object of the present invention, depending on the adjustment method and conditions of the master alloy, R near the grain boundary or RFe 3 phase may be used.
In a material having an R-Fe-N composition such as a rich nitride phase and an α-Fe phase or a nitride phase thereof, the M component is condensed into a subphase exhibiting soft magnetism and is converted into a nonmagnetic phase. It also has the effect of improving the squareness ratio and coercive force of the nitride.
【0023】以下、本発明の製造法について例示する。 (1)母合金の調製 本発明の磁性材料において、窒化原料となるR−Fe−
M合金の主原料相は、R−Fe合金結晶中のFeサイト
にM成分が置き替わる構造、または副原料相がMの添加
によりR−Feの2成分系とは異なる組成、構造を取っ
て、本発明の効果を発揮する。従って、Mの添加は母合
金調整の段階で行うことが望ましい。Hereinafter, the production method of the present invention will be exemplified. (1) Preparation of master alloy In the magnetic material of the present invention, R-Fe-
The main material phase of the M alloy has a structure in which the M component replaces the Fe site in the R-Fe alloy crystal, or the auxiliary material phase has a composition and structure different from that of the R-Fe two-component system due to the addition of M. The effect of the present invention is exhibited. Therefore, it is desirable to add M at the stage of master alloy adjustment.
【0024】R−Fe−M合金の製造法としては、R、
Fe、M金属を高周波により溶解し、鋳型などに鋳込む
高周波溶解法、銅などのボートに金属成分を仕込み、ア
ーク放電により溶かし込むアーク溶解法、高周波溶解し
た溶湯を、回転させた銅ロール上に落しリボン状の合金
を得る超急冷法、高周波溶解した溶湯をガスで噴霧して
合金粉体を得るガスアトマイズ法、Fe及びまたはMの
粉体またはFe−M合金粉体、R及びまたはMの酸化物
粉体、及び還元剤を高温下で反応させ、RまたはR及び
Mを還元しながら、RまたはR及びMを、Fe及びまた
はFe−M合金粉末中に拡散させるR/D法、各金属成
分単体及びまたは合金をボールミルなどで微粉砕しなが
ら反応させるメカニカルアロイング法、上記何れかの方
法で得た合金を水素雰囲気下で加熱し、一旦R及びまた
はMの水素化物と、Fe及びまたはMまたはFe−M合
金に分解し、この後高温下で低圧として水素を追い出し
ながら再結合させ合金化するHDDR法のいずれを用い
てもよい。As a method for producing an R—Fe—M alloy, R,
High frequency melting method in which Fe and M metals are melted by high frequency and cast into molds, etc., arc melting method in which metal components are charged into a boat such as copper and melted by arc discharge, on a copper roll which rotates molten metal with high frequency melting A super-quenching method for obtaining a ribbon-shaped alloy, a gas atomizing method for spraying a high-frequency molten metal with a gas to obtain an alloy powder, Fe and / or M powder or Fe-M alloy powder, R and / or M An R / D method in which the oxide powder and the reducing agent are reacted at a high temperature to reduce R or R and M while diffusing R or R and M into Fe and / or Fe-M alloy powder. A mechanical alloying method in which a metal component alone and / or an alloy is reacted while being finely pulverized by a ball mill or the like, an alloy obtained by any of the above methods is heated in a hydrogen atmosphere, and once reacted with R and / or M hydride. Decomposed into Fe and or M or Fe-M alloy, both the may be used in the HDDR method alloying are recombined while removing hydrogen as low at a high temperature after this.
【0025】高周波溶解法、アーク溶解法を用いた場
合、溶融状態から、合金が凝固する際にFe主体の軟磁
性成分が析出しやすく、特に窒化工程を経た後も保磁力
の低下をひきおこす。そこで、この軟磁性成分を消失さ
せたり、結晶性を向上させる目的として、アルゴン、ヘ
リウムなどの不活性ガス中もしくは真空中、800℃〜
1300℃の温度範囲で焼鈍を行うことが有効である。
この方法で作製した合金は、超急冷法などを用いた場合
に比べ、結晶粒径が大きく結晶性が良好であり、高い残
留磁束密度を有している。When the high-frequency melting method or the arc melting method is used, a soft magnetic component mainly composed of Fe is likely to precipitate from the molten state when the alloy is solidified, and causes a decrease in coercive force even after the nitriding step. Therefore, in order to eliminate the soft magnetic component or to improve the crystallinity, the temperature is set to 800 ° C. or less in an inert gas such as argon or helium or in a vacuum.
It is effective to perform annealing in a temperature range of 1300 ° C.
The alloy produced by this method has a large crystal grain size and good crystallinity, and has a high residual magnetic flux density, as compared with the case where a super-quenching method or the like is used.
【0026】また超急冷法を用いた場合は、微細な結晶
粒が得られ、条件によってはサブミクロンの粒子も調製
できる。但し、冷却速度が大きい場合には、合金の非晶
質化が起こり、窒化後においても磁化などの磁気特性が
低下する。この場合も合金調製後の焼鈍は有効である。
ガスアトマイズ法で得た合金は、球状の形態を取ること
が多く、微粉体から粗粉体まで調製することが可能であ
る。この場合も条件によっては焼鈍を行い、結晶性を良
好にすることが必要となる。この方法に加えてR/D
法、メカニカルアロイング法、HDDR法により調製し
た合金は、微細な結晶粒を調整したり、M成分の組成に
分布を持たしたりすることが可能であるため、本発明の
効果をより顕著にすることが可能である。When the ultra-quenching method is used, fine crystal grains are obtained, and submicron particles can be prepared depending on the conditions. However, when the cooling rate is high, the alloy becomes amorphous, and magnetic properties such as magnetization are reduced even after nitriding. Also in this case, annealing after alloy preparation is effective.
The alloy obtained by the gas atomization method often takes a spherical form, and can be prepared from a fine powder to a coarse powder. Also in this case, depending on the conditions, it is necessary to perform annealing to improve the crystallinity. In addition to this method, R / D
The alloy prepared by the method, mechanical alloying method, or HDDR method can adjust fine crystal grains or have a distribution in the composition of the M component. It is possible to
【0027】ところで、焼鈍条件によっては、合金の結
晶相が異なる場合がある。例えば、R成分によっては、
焼鈍した場合と急冷した場合で、菱面体晶系をとる場合
と六方晶系をとる場合がある。従って、焼鈍の条件は充
分注意を要するし、また焼鈍条件を制御することで目的
とする結晶相を選ぶことができる。 (2)粗粉砕及び分級 上記方法で作製した合金インゴットを直接窒化すること
も可能であるが、結晶粒径が500μmより大きいと窒
化処理時間が長くなり、粗粉砕を行ってから窒化する方
が効率的である。Incidentally, the crystal phase of the alloy may be different depending on the annealing conditions. For example, depending on the R component,
A rhombohedral system and a hexagonal system may be used depending on the case of annealing and rapid cooling. Therefore, the conditions for annealing require careful attention, and the desired crystal phase can be selected by controlling the annealing conditions. (2) Coarse pulverization and classification It is possible to directly nitride the alloy ingot produced by the above method. However, if the crystal grain size is larger than 500 μm, the nitriding treatment time becomes longer. It is efficient.
【0028】粗粉砕はジョ−クラッシャー、ハンマー、
スタンプミル、ローターミル、ピンミル、コーヒーミル
などを用いて行う。また、ボールミルやジェットミルな
どのような粉砕機を用いても、条件次第では窒化に適当
な、合金粉末の調製が可能である。また、粗粉砕の後、
ふるい、振動式あるいは音波式分級機、サイクロンなど
を用いて粒度調整を行うことも、より均質な窒化を行う
ために有効である。Coarse pulverization is performed using a jaw crusher, a hammer,
This is performed using a stamp mill, a rotor mill, a pin mill, a coffee mill, or the like. Further, even if a pulverizer such as a ball mill or a jet mill is used, an alloy powder suitable for nitriding can be prepared depending on conditions. Also, after coarse grinding,
Adjusting the particle size using a sieve, a vibratory or sonic classifier, a cyclone, or the like is also effective for performing more uniform nitriding.
【0029】粗粉砕、分級の後、不活性ガスや水素中で
焼鈍を行うと構造の欠陥を除去することができ、場合に
よっては効果がある。以上で、本発明の製造法における
希土類−鉄合金の粉体原料またはインゴット原料の調製
法を例示したが、これらの原料の結晶粒径、粉砕粒径、
微構造、表面状態などにより、以下に示す窒化の最適条
件に違いが見られる。 (3)窒化・焼鈍 窒化はアンモニアガス、窒素ガスなどの窒素源を含むガ
スを、上記(1)または、(1)及び(2)で得たR−
Fe−M合金粉体またはインゴットに接触させて、結晶
構造内に窒素を導入する工程である。After the coarse pulverization and classification, annealing in an inert gas or hydrogen can remove structural defects, which is effective in some cases. Above, the method of preparing a powder material or an ingot material of a rare earth-iron alloy in the production method of the present invention has been exemplified.
There are differences in the following optimum conditions of nitriding depending on the microstructure, surface condition, and the like. (3) Nitriding / annealing Nitriding is a process in which a gas containing a nitrogen source, such as ammonia gas or nitrogen gas, is obtained by the above-mentioned method (1) or R-
This is a step of introducing nitrogen into the crystal structure by contacting with an Fe-M alloy powder or an ingot.
【0030】このとき、窒化雰囲気ガス中に水素を共存
させると、窒化効率が高いうえに、結晶構造が安定なま
ま窒化できる点で好ましい。またアルゴン、ヘリウム、
ネオンなどの不活性ガスなどを共存させる場合もある。
窒化反応は、ガス組成、加熱温度、加熱処理時間、加圧
力で制御し得る。このうち加熱温度は、母合金組成、窒
化雰囲気によって異なるが、200〜650℃の範囲で
選ばれる。200℃以下では窒素の侵入速度が遅く、反
応の時間がかかりすぎ好ましくなく、650℃以上では
主相が分解して磁気特性が劣化する。さらに好ましい温
度範囲は200℃〜600℃である。At this time, it is preferable to coexist hydrogen in the nitriding atmosphere gas since nitriding efficiency is high and nitriding can be performed with a stable crystal structure. Also argon, helium,
In some cases, an inert gas such as neon coexists.
The nitriding reaction can be controlled by gas composition, heating temperature, heat treatment time, and pressure. The heating temperature varies depending on the mother alloy composition and the nitriding atmosphere, but is selected in the range of 200 to 650 ° C. At a temperature of 200 ° C. or less, the rate of nitrogen penetration is low, and the reaction takes too much time. A more preferred temperature range is from 200C to 600C.
【0031】また窒化を行った後、不活性ガス及び又は
水素ガス中で焼鈍することは磁気特性を向上させる点で
好ましい。窒化・焼鈍装置としては、横型、縦型の管状
炉、回転式反応炉、密閉式反応炉などが挙げられる。何
れの装置においても、本発明の磁性材料を調整すること
が可能であるが、特に窒素組成分布の揃った粉体を得る
ためには回転式反応炉を用いるのが好ましい。After nitriding, annealing in an inert gas and / or hydrogen gas is preferable from the viewpoint of improving magnetic properties. Examples of the nitriding / annealing apparatus include horizontal and vertical tubular furnaces, rotary reactors, and closed reactors. In any of the apparatuses, the magnetic material of the present invention can be adjusted. However, in order to obtain a powder having a uniform nitrogen composition distribution, it is preferable to use a rotary reactor.
【0032】反応に用いるガスは、ガス組成を一定に保
ちながら1気圧以上の気流を反応炉の送り込む気流方
式、ガスを容器に加圧力0.01〜70気圧の領域で封
入する封入方式、或いはそれらの組合せなどで供給す
る。本磁性材料の製造法としては、(1)または、
(1)及び(2)で例示した方法でR−Fe−M組成の
母合金を調整してから、(3)に示した方法で窒化する
工程を用いるのが最も好ましく、この方法によれば融点
の高いM成分を母合金の所望の部分に含有させることが
可能になり、耐酸化性向上に特に効果的である。The gas used for the reaction may be a gas flow system in which a gas stream of 1 atm or more is fed into the reaction furnace while keeping the gas composition constant, a gas sealing system in which the gas is sealed in a container at a pressure of 0.01 to 70 atm, or Supplied in combination. As a method for producing the magnetic material, (1) or
It is most preferable to use the step of adjusting the master alloy having the R-Fe-M composition by the method exemplified in (1) and (2) and then nitriding by the method shown in (3). This allows the M component having a high melting point to be contained in a desired portion of the mother alloy, which is particularly effective for improving oxidation resistance.
【0033】以上が本発明のR−Fe−M−N系磁性材
料の製造法に関する説明であるが、特に実用的な硬磁性
材料として本発明の磁性材料を応用する際には、(4)
微粉砕、(5)磁場成形、(6)着磁を行う場合があ
る。以下、その例を簡単に示す。 (4)微粉砕 例えば、単磁区粒子型のR−Fe−M−N系磁性材料の
うち、特に、窒化処理後も大きな結晶粒径を保っていて
かつ大きな保磁力を発現させたい場合、窒化処理後も多
結晶粒体を保っていてかつ異方性の硬磁性材料としたい
場合などに微粉砕を行う。The above is the description of the method for producing the R—Fe—MN based magnetic material of the present invention. In particular, when the magnetic material of the present invention is applied as a practical hard magnetic material, (4)
Fine grinding, (5) magnetic field shaping, and (6) magnetization may be performed. Hereinafter, the example is shown simply. (4) Pulverization For example, among R-Fe-MN-based magnetic materials of a single magnetic domain type, particularly when a large crystal grain size is to be maintained and a large coercive force is desired to be developed after nitriding, Fine grinding is performed, for example, when the polycrystalline grains are kept after the treatment and anisotropic hard magnetic material is desired.
【0034】微粉砕の方法としては、回転ボールミル、
振動ボールミル、遊星ボールミル、ウエットミル、ジェ
ットミル、カッターミル、ピンミル、自動乳鉢及びそれ
らの組合せなどが用いられる。水素や酸素の量の調整及
び目標とする粉砕粒径に応じて、微粉砕方法が選ばれ
る。As a method of fine pulverization, a rotary ball mill,
A vibration ball mill, a planetary ball mill, a wet mill, a jet mill, a cutter mill, a pin mill, an automatic mortar and a combination thereof are used. The pulverization method is selected according to the adjustment of the amount of hydrogen or oxygen and the target pulverized particle size.
【0035】水素や酸素の量を本発明の特に好ましい範
囲に制御する方法としては、例えばジェットミルを用い
る場合、粉砕ガス中のの酸素及び水蒸気濃度を所定の濃
度に保ったり、またアトライターなどの湿式粉砕を用い
る場合は、溶媒中の溶存酸素や水分量を調整するなどの
方法が挙げられる。 (5)磁場成形 例えば、(3)又は(4)で得た磁性粉体を異方性ボン
ド磁石に応用する場合、熱硬化性樹脂や金属バインダー
と混合したのち磁場中で圧縮成形したり、熱可塑性樹脂
と共に混練したのち磁場中で射出成形を行ったりして、
磁場成形する。As a method for controlling the amounts of hydrogen and oxygen within the particularly preferred ranges of the present invention, for example, when a jet mill is used, the oxygen and water vapor concentrations in the pulverized gas are kept at a predetermined concentration, and an attritor or the like is used. When wet pulverization is used, a method of adjusting the amount of dissolved oxygen or water in the solvent may be used. (5) Magnetic field molding For example, when the magnetic powder obtained in (3) or (4) is applied to an anisotropic bonded magnet, compression molding is performed in a magnetic field after mixing with a thermosetting resin or a metal binder, After kneading with thermoplastic resin, injection molding is performed in a magnetic field,
Form a magnetic field.
【0036】磁場成形は、R−Fe−M−N系磁性材料
を充分に磁場配向せしめるため、好ましくは10kOe
以上、さらに好ましくは15kOe以上の磁場中で行
う。 (6)着磁 (5)で得た異方性ボンド磁石材料や、焼結磁石材料に
ついては、磁石性能を高めるために、通常着磁が行われ
る。The magnetic field shaping is preferably performed at 10 kOe in order to sufficiently orient the R-Fe-MN-based magnetic material in a magnetic field.
Above, more preferably in a magnetic field of 15 kOe or more. (6) Magnetization The anisotropic bonded magnet material and sintered magnet material obtained in (5) are usually magnetized to enhance magnet performance.
【0037】着磁は、例えば静磁場を発生する電磁石、
パルス磁場を発生するコンデンサー着磁器などによって
行う。充分着磁を行わしめるための、磁場強度は、好ま
しくは15kOe以上、さらに好ましくは30kOe以
上である。Magnetization is performed, for example, by an electromagnet that generates a static magnetic field,
This is performed by a condenser magnetizer that generates a pulse magnetic field. The magnetic field strength for sufficiently magnetizing is preferably 15 kOe or more, more preferably 30 kOe or more.
【0038】[0038]
【実施例】以下、実施例により本発明を具体的に説明す
る。評価方法は以下のとおりである。 (1)磁気特性 平均粒径約3μmのR−Fe−M−N系磁性材料を、外
部磁場15kOe中、12ton/cm2 で5mm×1
0mm×2mm程度に成形し、室温で60kOeの磁場
でパルス着磁した後、振動試料型磁力計(VSM)を用
いて、固有保磁力(iHc/kOe)を測定した。 (2)窒素量、窒素量及び水素量 Si3 N4 (SiO2 を定量含む)を標準試料として、
不活性ガス融解法により窒素量及び酸素量を定量した。
水素量は、高純度水素ガス(99.999%)を標準ガ
スとして、不活性ガス融解法により定量した。 (3)平均粒径 リー・ナース比表面積計を用いて、評価した。 (4)耐酸化性能 (1)で評価した平均粒径3μmの粉体の成形品を、1
10℃の恒温槽に入れ、200時間後の固有保磁力を
(1)と同様にして測定し、(1)の結果と比較して固
有保磁力の保持率(%)を求めた。保持率の高いものほ
ど、耐酸化性能が高い。特に、本試験では各種バインダ
ーを添加せずに評価しているため、保持率70%を越え
るものは、例えばボンド磁石とした時の実用物性として
充分使用可能な材料と判定できる。 (5)酸化試験 平均粒径15μmに調整した粗粉体試料10mgを熱天
秤に入れ、50ml/minの空気気流中、昇温速度1
0℃/minの条件で50℃から250℃までの重量変
化率(重量%)を測定した。重量変化率の小さいものほ
ど酸化されにくい。The present invention will be described below in detail with reference to examples. The evaluation method is as follows. (1) Magnetic properties An R-Fe-MN-based magnetic material having an average particle size of about 3 μm was prepared by subjecting an external magnetic field of 15 kOe to 12 ton / cm 2 at 5 mm × 1.
After shaping to about 0 mm × 2 mm and pulse magnetizing at room temperature with a magnetic field of 60 kOe, the intrinsic coercive force (iHc / kOe) was measured using a vibrating sample magnetometer (VSM). (2) Nitrogen amount, nitrogen amount and hydrogen amount Si 3 N 4 (including SiO 2 quantified) as a standard sample,
The amounts of nitrogen and oxygen were determined by an inert gas melting method.
The amount of hydrogen was determined by an inert gas melting method using high-purity hydrogen gas (99.999%) as a standard gas. (3) Average particle size It was evaluated using a Lee Nurse specific surface area meter. (4) Oxidation resistance The powder molded product having an average particle size of 3 μm evaluated in (1) was
The sample was placed in a thermostat at 10 ° C., and after 200 hours, the intrinsic coercive force was measured in the same manner as in (1). The higher the retention, the higher the oxidation resistance. In particular, in the present test, evaluation was performed without adding various binders, so that a material having a retention of more than 70% can be determined to be a material that can be sufficiently used as, for example, practical physical properties when used as a bonded magnet. (5) Oxidation test 10 mg of a coarse powder sample adjusted to an average particle size of 15 μm was placed in a thermobalance, and heated in a 50 ml / min air stream at a heating rate of 1
The rate of weight change (% by weight) from 50 ° C. to 250 ° C. was measured at 0 ° C./min. The smaller the rate of weight change, the more difficult it is to oxidize.
【0039】[0039]
【実施例1】純度99.9%のSm、純度99.9%の
Fe及び純度99.9%のPtを用いてアルゴンガス雰
囲気下アーク溶解炉で溶解混合し、さらにアルゴン雰囲
気中で、1050℃、50時間焼鈍することにより、S
m11.0(Fe0.9 Pt0.1 ) 89.0組成の合金を調製し
た。Example 1 Sm having a purity of 99.9% and a purity of 99.9%
Ar gas atmosphere using Fe and Pt having a purity of 99.9%
Melt and mix in an arc melting furnace under an atmosphere, and further in an argon atmosphere.
By annealing in air at 1050 ° C. for 50 hours, S
m11.0(Fe0.9Pt0.1) 89.0Prepare alloy of composition
Was.
【0040】この合金をジョークラッシャーにより粉砕
し、次いで窒素雰囲気中コーヒーミルでさらに粉砕した
後、ふるいで粒度を調整して、平均粒径約50μmの粉
体を得た。このSm−Fe−Pt合金粉体を横型管状炉
に仕込み、450℃において、アンモニア分圧0.35
atm、水素ガス0.75atmの混合気流中で加熱処
理し、続いてアルゴン気流中で焼鈍したのち、平均粒径
約15μmに調整した。次いでジェットミルにより、窒
素を主体とし一部酸素及び水蒸気を混入させたガスを用
いて、該粉体を平均粒径約5μmに粉砕した。This alloy was pulverized by a jaw crusher and then further pulverized by a coffee mill in a nitrogen atmosphere, and the particle size was adjusted by a sieve to obtain a powder having an average particle diameter of about 50 μm. This Sm-Fe-Pt alloy powder was charged into a horizontal tubular furnace, and at 450 ° C, an ammonia partial pressure of 0.35.
Heat treatment was carried out in a mixed gas stream of atm and hydrogen gas of 0.75 atm, and then annealing in an argon gas stream was performed to adjust the average particle diameter to about 15 μm. Next, the powder was pulverized to a mean particle size of about 5 μm by a jet mill using a gas containing nitrogen and a part of oxygen and water vapor.
【0041】得られたSm−Fe−Pt−N系粉体の組
成、耐酸化性能、酸化試験結果を表1に示した。また、
3μmに粉砕したSm−Fe−Pt−N系粉体の成形体
の保磁力は7.1kOe、残留磁束密度は9.0kGで
あった。なお、X線回折法により解析した結果、この材
料の結晶構造は主として菱面体晶であり、Pt単体に対
応する回折線は見られなかった。The composition, oxidation resistance and oxidation test results of the obtained Sm-Fe-Pt-N powder are shown in Table 1. Also,
The compact of the Sm-Fe-Pt-N-based powder compacted to 3 µm had a coercive force of 7.1 kOe and a residual magnetic flux density of 9.0 kG. As a result of analysis by the X-ray diffraction method, the crystal structure of this material was mainly rhombohedral, and no diffraction line corresponding to Pt alone was found.
【0042】[0042]
【実施例2〜8】母合金の組成を、表1に示す組成比に
変更する以外は実施例1と同様な操作によって、R−F
e−M−N系粉体を得た。その結果を表1に示す。な
お、X線回折法により解析した結果、これらの材料の結
晶構造は主として菱面体晶であり、M単体に対応する回
折線は見られなかった。Examples 2 to 8 R-F by the same operation as in Example 1 except that the composition of the mother alloy was changed to the composition ratio shown in Table 1.
An eMN-based powder was obtained. Table 1 shows the results. As a result of analysis by the X-ray diffraction method, the crystal structures of these materials were mainly rhombohedral, and no diffraction line corresponding to M alone was found.
【0043】[0043]
【比較例1】Ptを加えないで、その分量(原子%)だ
けFeを加える以外は実施例1と同様にして、Sm−F
e−N系粉体を得た。その結果を表1に示す。Comparative Example 1 Sm-F was prepared in the same manner as in Example 1 except that Fe was added by the amount (atomic%) without adding Pt.
An eN powder was obtained. Table 1 shows the results.
【0044】[0044]
【比較例2】実施例1で得た粒径約3μmのSm
9.2 (Fe0.9 Pt0.1 )74.6N14.2H0. 5 O1.5 組成
の粉体を、2ton/cm2 、15kOeの条件で磁場
成形したあと、アルゴン雰囲気下、800℃、1時間の
条件で熱処理を行った。これを急冷したときの成形体の
固有保磁力は0.06kOeであった。この成形体を再
び約3μmに粉砕した粉体の固有保磁力は0.08kO
eであった。なお、この材料の結晶構造をX線回折によ
り解析した結果、α−鉄、窒化鉄に対応する回折線が主
に検出された。Comparative Example 2 Sm having a particle size of about 3 μm obtained in Example 1
9.2 (Fe 0.9 Pt 0.1) 74.6 N 14.2 powder H 0. 5 O 1.5 composition, After a magnetic field molding under the conditions of 2 ton / cm 2, 15 kOe, under an argon atmosphere, 800 ° C., a heat treatment under conditions of 1 hour went. The intrinsic coercive force of the compact when quenched was 0.06 kOe. The inherent coercive force of the powder obtained by grinding this compact again to about 3 μm is 0.08 kO.
e. As a result of analyzing the crystal structure of this material by X-ray diffraction, diffraction lines corresponding to α-iron and iron nitride were mainly detected.
【0045】[0045]
【表1】 [Table 1]
【0046】[0046]
【発明の効果】以上説明した様に、本発明によれば、優
れた耐酸化性を有し、磁気特性の高い希土類−鉄−M−
窒素系磁性材料を提供することができる。As described above, according to the present invention, rare earth-iron-M- has excellent oxidation resistance and high magnetic properties.
A nitrogen-based magnetic material can be provided.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI C22C 38/00 303 C22C 38/00 303D (58)調査した分野(Int.Cl.7,DB名) H01F 1/032 - 1/08 C22C 29/16,33/02,38/00 ────────────────────────────────────────────────── ─── Continued on the front page (51) Int.Cl. 7 identification code FI C22C 38/00 303 C22C 38/00 303D (58) Fields investigated (Int.Cl. 7 , DB name) H01F 1/032-1 / 08 C22C 29 / 16,33 / 02,38 / 00
Claims (3)
- β) Nβで表される磁性材料であり、 RはYを含む希土類元素のうち少なくとも一種、 Mは、Re、Ru、Os、Rh、Ir、Pd、Pt、A
uの元素のうち少なくとも一種、α、βは原子百分率で 3≦α≦20 3≦β≦30 γは原子比で 0.001≦γ≦0.5 であって、かつそのR、Fe、M及びNを含んだ相が菱
面体晶または六方晶の結晶構造を含有することを特徴と
する磁性材料。(1) The general formula Rα (Fe (1- γ ) Mγ) (100- α
- beta) is a magnetic material represented by N.beta, at least one kind of rare earth element R, including the Y, M is, Re, Ru, Os, Rh , Ir, Pd, Pt, A
at least one of the elements u, α and β are atomic percentages 3 ≦ α ≦ 203 3 ≦ β ≦ 30 γ is an atomic ratio of 0.001 ≦ γ ≦ 0.5 and R, Fe, M And a phase containing N has a rhombohedral or hexagonal crystal structure.
るFeの0.01〜50原子%をCoで置換した組成を
有することを特徴とする磁性材料。2. A magnetic material having a composition in which 0.01 to 50 atomic% of Fe which is a component of the magnetic material according to claim 1 is substituted with Co.
γ)(100- α- β)/(100- β) で表される合金を、窒素
ガス、アンモニアガスのうち少なくとも一種を含む雰囲
気下で、200〜650℃の範囲で熱処理することを特
徴とする上記請求項1又は2に記載の磁性材料の製造
法。3. The method according to claim 1, wherein the formula Rα / (100- β ) (Fe (1- γ ) M
γ) heat-treating the alloy represented by (100- α - β ) / (100- β ) at a temperature of 200 to 650 ° C. in an atmosphere containing at least one of nitrogen gas and ammonia gas. The method for producing a magnetic material according to claim 1 or 2, wherein
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