JP3139064B2 - Double-sided simultaneous polishing machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION This invention relates <br/> the double-sided simultaneous surface grinding machine using a suitable carrier in case of polishing both surfaces of a rectangular thin glass or similar as workpiece simultaneously in a plane Things.

[0002]

2. Description of the Related Art Conventionally, this kind of double-sided simultaneous plane polishing machine has
As shown in FIGS. 4A and 4B, a sun gear (1) coaxially arranged and an internal gear (2) surrounding the sun gear (1).
Having a rectangular storage hole (4) for storing and holding the object to be polished (3), meshing with the sun gear (1) and the internal gear (2),
A carrier (5) which rotates while revolving around the sun gear (1), and a polishing surface which is vertically opposed to the carrier (5) and has a polished surface provided on its facing surface, and each of which is rotationally driven; A board (6) and a lower stool (7) are provided.

[0003] Further, the conventional carrier (5) has a structure shown in FIG.
As shown in, one side of the vertical close to the outer periphery of the rectangular housing holes (4)
A bisector is formed so as to pass through the center of the carrier (5), and the rectangular storage holes (4) of the carrier (5) are formed from the inner and outer peripheries of the upper and lower platens (6) and (7) during polishing. The formation position of the rectangular storage hole (4) is set so as not to protrude.

[0004]

In the above-described simultaneous double-sided polishing machine, for example, in order to polish a thin glass having a thickness of 0.2 to 0.5 mm and a width of about 100 × 100 mm,
When lap polishing is performed using a carrier (5) having a rectangular storage hole (4) formed in a plate material such as Swedish steel, uneven wear occurs on the upper and lower platens (6) and (7) made of cast iron, and the polished surface of the glass is formed. Becomes less parallel. In order to solve this, it is necessary to frequently correct the parallelism of the polished surfaces of the upper and lower stools (6) and (7) with a correction carrier (not shown) made of cast iron, which has a drawback that the polishing work efficiency is significantly reduced. Was.

The inventor of the present invention has proposed an upper and lower platen (6) (7) in order to reduce the number of correction operations by the correction carrier.
The outer diameter of the platen is reduced, the diameter of the inner hole of the platens (6) and (7) is increased, and a part of the workpiece (3) is largely eroded from the inner and outer circumferences of the upper and lower platens (6) and (7). Attempts were made to wear the upper and lower stools (6) and (7) uniformly from the inner peripheral edge to the outer peripheral edge to prevent uneven wear by taking out and polishing, but there were the following problems.

In other words, if the amount of the object to be polished (3) protruding from the inner and outer peripheries of the upper and lower platens (6) and (7) is too large, a rectangular storage hole close to the outer perimeter of the carrier (5) during polishing. (4)
Of the upper and lower platens (6) and (7) completely protrudes outside the upper and lower platens (6) and (7). when re-advances enter into the inside, a part of the edge on the outer periphery of the upper and lower surface plates (6) (7) is caught, the carrier (5) itself is often crack failure.
This tendency is more remarkable as the object to be polished (3) becomes thinner. In the case of a circular object to be polished, there is no such problem.

The present invention has been developed in view of the above-mentioned drawbacks of the conventional carrier for a simultaneous double-sided surface polishing machine, and has as its object to reduce the work of repairing the upper and lower platens by the repair carrier, and to reduce the work of the carrier. An object of the present invention is to provide a double-sided simultaneous plane polishing machine capable of preventing crack breakage.

[0008]

In order to achieve the above object, the present invention comprises a sun gear coaxially arranged, an internal gear surrounding the sun gear, and a rectangular housing hole for housing and holding a workpiece. A carrier that meshes with the sun gear and the internal gear, revolves around the sun gear while revolving around the sun gear, and faces the upper and lower surfaces of the carrier with the carrier interposed therebetween. An upper surface plate and a lower surface plate each provided with a polishing surface and respectively driven to rotate, and a double-sided simultaneous plane polishing machine for polishing a portion of a rectangular storage hole of the carrier by protruding from the upper and lower surface plates, and polishing the carrier. A vertical bisector of one side close to the outer periphery of the carrier of the formed rectangular storage hole is located at a position not passing through the center of the carrier, and close to the outer periphery of the carrier of the rectangular storage hole partially protruding from the upper and lower platens of the carrier. One side Is to use a carrier part not protrude completely from the lower platen was formed the rectangular receiving hole so that the positional relationship remaining in the upper and lower surface plates.

[0009]

[Action] rectangular receiving hole of the carrier in the present invention is at a position one side of the vertical bisector close to the outer periphery does not pass the carrier center, and run off a portion from the upper and lower platens before Symbol carrier
Side close to the carrier the outer periphery of the rectangular housing hole part of its not protrude completely from the upper and lower surface plates were formed before Symbol rectangular receiving hole so that the positional relationship remaining in the upper and lower surface plates to the carrier issuing Therefore, even if the object to be polished is thin rectangular glass or the like, one side of the rectangular storage hole of the carrier does not completely protrude from the outer periphery of the upper and lower platens, so that the upper and lower platens are not caught and do not break. However, since a part of the rectangular storage hole can be polished by protruding from the upper and lower platens, uneven wear of the upper and lower platens can be prevented, and the repair work of the upper and lower platens by the correction carrier can be reduced.

[0010]

1A, 1B, and 1C are plan views showing three embodiments of a carrier (5) used in the present invention, in which rectangular receiving holes (4) are formed in five equal parts. A vertical bisector (a) of one side (4a) near the outer periphery of each rectangular storage hole (4)
Are shifted from the straight line (b) passing through the center of the carrier (5) by parallel movements (e), (f), and (g), respectively. Along with this, the distances (h), (i), and (j) from the carrier center to one side (4b) near the carrier center of each rectangular storage hole (4) also vary with the shift amounts (e), (f), and (g). )
The larger the is, the closer it is to the center of the carrier (5). In this case, the closest distance between the rectangular storage holes (4) and the closest distance to the outer peripheral edge of the carrier (5) are set to be small as long as the strength required for the carrier (5) is maintained.

Further, as shown in FIG. 2, one side (4a) near the outer periphery of the carrier (5) of the rectangular storage hole (4) which partially protrudes from the upper and lower platens of the carrier (5 ) is formed by the upper and lower platens. (6) partially polishing plates full protrude is not its from (7) (6) (7) rectangle accommodating hole so that the positional relationship remaining in the (4) the carrier (5) Formed.

[0012] In other words, the upper and lower surface plate (6)
The outer diameter of (7) is, as shown in FIG.
One side near the outer periphery of the carrier is the tangent to the upper and lower platens (6) and (7)
And the distance between the tangent and the side
(L) is set as small as possible.

Next, the vertical, horizontal, thickness is 105 × 105 ×
An embodiment applied to lapped polishing of 0.5 mm borosilicate glass will be described.

In this case, the dimensions and polishing conditions of the used polishing machine and carrier are as follows.

The dimensions of the upper and lower platens (6) and (7): outer diameter 1060m
m, the outer diameter of the inner hole diameter 354mm carrier (5): PCD = 402.17mm per unit area load: 120 g / cm @ 2 using abrasives: # 1200 under plate rotation: 60 rpm, however, the carrier (5) is, in FIG. 1 A , B and C were prepared, e = 20.5mm, f = 26.5mm, g = 3
3.5 mm, h = 69 mm, i = 67 mm, and j = 62 mm. Then, the polishing time can hold parallelism below 0.008mm in polishing object described above by using this carrier (5), 4
The result of comparison with the case where the conventional carrier shown in FIG.

Conventional carrier: 24 minutes Carrier of FIG. 1A: 120 minutes Carrier of FIG. 1B: 240 minutes or more Carrier of FIG. 1C: 180 minutes As is clear from the above comparison results, the carrier used in the present invention. According to the carrier (5), the carrier (5) of FIG. 1B is the best, and the carriers (5) of FIGS. 1C and 1A can be continuously polished for a longer time than the conventional case. .

When the numerical values e to j of the above embodiment are applied, the distance (L) shown in FIG. 3 is configured to be within 2 mm.

The carrier (5) used in the present invention has the above-mentioned structure, is formed to be thinner than the object to be polished, and has only one rectangular storage hole (4). Similar effects can be obtained by applying the present invention.

[0019]

I to the present invention lever, reduce the correction operation of the upper and lower surface plates by modifying the carrier can be polished for a long time continuously, with the polishing operation efficiency can be remarkably improved, thin rectangular It is also possible to prevent the carrier from being cracked and broken even for the object to be polished.

[Brief description of the drawings]

[1] A plan view of a second embodiment of the carrier used in the plan view B of the first embodiment of the carrier used in the present invention is a plan view C of the second embodiment of the carrier used in the present invention present invention

FIG. 2 is a plan view showing a relationship between a carrier and a surface plate used in the present invention.

FIG. 3 is a plan view showing the positional relationship between the outer periphery of the base plate and one side close to the outer periphery of the rectangular storage hole of the carrier in the present invention

FIG. 4A is a plan view showing a schematic structure of a conventional double-sided simultaneous surface polishing machine. FIG. 4B is a longitudinal side view. C is a plan view of a conventional carrier.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Sun gear 2 Internal gear 3 Object to be polished 4 Rectangular storage hole 5 Carrier

Continuation of front page (58) Field surveyed (Int. Cl. ⁷ , DB name) B24B 37/04

Claims (1)

(57) [Claims] 1. A sun gear coaxially arranged, an internal gear surrounding the sun gear, and a rectangular storage hole for storing and holding an object to be polished, meshing with the sun gear and the internal gear, and A carrier that revolves around its periphery while revolving around, and an upper surface plate that is provided with a polishing surface that vertically opposes the carrier and polishes the front and back surfaces of the object to be polished, and is respectively driven to rotate. A lower surface plate, wherein a part of the rectangular storage hole of the carrier is protruded from the upper and lower surface plates and polished. One side close to the outer periphery of the carrier of the rectangular storage hole, which is located at a position where the equal line does not pass through the center of the carrier and partially protrudes from the upper and lower stool of the carrier, does not completely protrude from the upper and lower stool. The part is upper and lower surface plate Use a carrier wherein the formation of the rectangular receiving hole so that the positional relationship remaining
Double-sided simultaneous surface grinding machine, characterized in that there.