JP3137488U - Equipment for chemical treatment of vertical shunt type thin plate materials - Google Patents

Equipment for chemical treatment of vertical shunt type thin plate materials Download PDF

Info

Publication number
JP3137488U
JP3137488U JP2007007179U JP2007007179U JP3137488U JP 3137488 U JP3137488 U JP 3137488U JP 2007007179 U JP2007007179 U JP 2007007179U JP 2007007179 U JP2007007179 U JP 2007007179U JP 3137488 U JP3137488 U JP 3137488U
Authority
JP
Japan
Prior art keywords
thin plate
plate material
solution
tank
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2007007179U
Other languages
Japanese (ja)
Inventor
錦▲方▼ 官
Original Assignee
錦▲方▼ 官
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 錦▲方▼ 官 filed Critical 錦▲方▼ 官
Priority to JP2007007179U priority Critical patent/JP3137488U/en
Application granted granted Critical
Publication of JP3137488U publication Critical patent/JP3137488U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

【課題】板材表面を傷つけない垂直分流式の薄板化学処理装置を提供する。
【解決手段】垂直分流式の薄板化学処理装置は上方に開口21を呈する細長い本体であって、底部に一つ以上の流出口22を設ける処理槽20と、ラック31に嵌め込み固定され、上下に垂直に処理槽20へ設置される薄板材30と、化学溶液を導入するため、処理槽20の開口21の前後両側に装設され、溶液が流体束を呈し、薄板材30の前後両側表面へ噴き出し下方へと高速に流動させるようにし、さらに導入した溶液の流量が処理槽20の底部の流出量を上回るようにし、槽内を溶液で満たし、薄板材30を処理槽20内で浮遊させる分流ユニット40と、を有する。
【選択図】図2
A vertical shunt type thin plate chemical processing apparatus which does not damage the surface of a plate material is provided.
A vertical diversion thin plate chemical processing apparatus is an elongated main body having an opening 21 at the top, a processing tank 20 provided with one or more outlets 22 at the bottom, and a rack 31 fitted and fixed, and vertically. In order to introduce the chemical solution into the thin plate material 30 installed vertically in the processing tank 20, it is installed on both the front and rear sides of the opening 21 of the processing tank 20, and the solution exhibits a fluid bundle, to the front and rear side surfaces of the thin plate material 30. The flow is made to flow downward at high speed, and the flow rate of the introduced solution is made to exceed the outflow amount at the bottom of the processing tank 20, the tank is filled with the solution, and the thin plate 30 is floated in the processing tank 20. And a unit 40.
[Selection] Figure 2

Description

本考案は薄板材を化学処理する装置に関し、特に垂直分流式による薄板材処理の設計に関する。   The present invention relates to an apparatus for chemically processing a thin plate material, and more particularly to a design of a thin plate material processing by a vertical diversion method.

情報時代の到来に伴い、プリント基板(PCB)は各電子製品の重要な部品となり、さらに精密電子製品の機能上および如何なる周辺部分において、精密な設計が成される主要なキーポイントとなった。周知のとおり、プリント基板の製作工程には表面処理、圧着、露光、現像(Developing)、水洗、エッチング(Etching)、剥離(Stripping)等の処理が含まれるが、従来のプリント基板は上述の化学処理を行う過程において、その大半に水平型の設備を用いていた。   With the advent of the information era, printed circuit boards (PCBs) have become important components of each electronic product, and have become the main key points for precise design in the functions of precision electronic products and in any peripheral parts. As is well known, the printed circuit board manufacturing process includes surface treatment, pressure bonding, exposure, development (developing), washing with water, etching (etching), and stripping. In the process of processing, most of them used horizontal equipment.

しかしながら、プリント基板の薄型化への発展が進むにつれて、昨今のハイテクノロジー製品の要求にかなうため、プリント基板の厚さは次第に薄くなっていった。通常よく見られる規格は約0.06mm〜1.2mm、銅箔(UTC)の厚さは18〜70μmであるが、薄板材の回路はより精密になり、極めて損傷を受け易くなった。よって、従来用いられてきた化学処理の水平型設備は搬送方式でも、薄板材に化学溶液(現像液等)を吹きかける方式においても、期待された高い処理品質を達成することができず、薄板材に極めて大きな損傷を与え易くなってしまった。   However, as the development of printed circuit boards has become thinner, the thickness of printed circuit boards has gradually decreased in order to meet the recent demand for high-technology products. The standard often seen is about 0.06 mm to 1.2 mm and the thickness of the copper foil (UTC) is 18 to 70 μm. However, the circuit of the thin plate material has become more precise and extremely susceptible to damage. Therefore, the conventional horizontal processing equipment used in chemical processing cannot achieve the expected high processing quality, whether it is a transport method or a method in which a chemical solution (developer, etc.) is sprayed on a thin plate material. It has become easy to do very big damage to.

そこで、薄板材の化学処理および洗浄工程に対し、図1に示す垂直型の設備によって処理を行うように変更を試みられた。即ち、薄板材13をラック(Rack)14に嵌め込み固定し、クレーンで個別に指定された処理槽11まで移動し、洗浄または化学処理を行うというものであったが、処理槽11内の化学溶液12は循環しているものの、その流動性は不足しているように思われた。そこで、槽内の化学溶液12により高い流動性を備えさせるため、送風機を利用して空気を処理槽11の底端に送り込み、溶液が気泡の作用を受容できるような方法、或いは処理槽11内に注水管を設け、溶液の流動性をサポートし、これより薄板材13の表面交換と反応速度の増加を達成させる等、数多くの方法が用いられた。   Therefore, an attempt has been made to change the thin plate material chemical treatment and cleaning step so that the treatment is performed by the vertical equipment shown in FIG. That is, the thin plate material 13 is fitted and fixed in a rack 14 and moved to a treatment tank 11 individually designated by a crane to perform cleaning or chemical treatment. Although 12 was circulating, its fluidity seemed insufficient. Therefore, in order to provide the chemical solution 12 in the tank with higher fluidity, a method is used in which air is sent to the bottom end of the processing tank 11 using a blower and the solution can receive the action of bubbles, or in the processing tank 11. A number of methods were used, such as providing a water injection pipe to support the fluidity of the solution, thereby achieving surface exchange of the thin plate 13 and increasing the reaction rate.

しかしながら、上記に示した先行技術(Prior Art)によって化学溶液の流動をサポートする上で、ある程度の効果はもたらされたが、プリント基板、アルミ板材等の薄板に対する品質要求はより高くなり、処理槽11の体積についてはより小さく、スペースを占有しないものが求められるようになった。よって、現在使用されている化学処理槽は完全なものではなく、さらに改善する余地があった。
本考案の主な目的は、垂直分流式の薄板化学処理装置を提供することである。
本発明の考案者は上記を鑑み、従来の電気めっき等湿式処理工程の経験に基づいて研究改良を重ね、PCBまたはアルミ板等の薄板材の現像、エッチング、剥離等の化学処理と洗浄工程におけるより優れた方法を提供することを目的とした。
However, although the above-mentioned prior art (Prior Art) provided some effects in supporting the flow of chemical solutions, the quality requirements for thin plates such as printed circuit boards and aluminum plates have become higher, and processing The volume of the tank 11 is smaller, and a tank that does not occupy space has been demanded. Therefore, the chemical treatment tank currently used is not perfect and there is room for further improvement.
The main object of the present invention is to provide a vertical chemical flow type thin plate chemical processing apparatus.
In view of the above, the inventor of the present invention has repeatedly studied and improved based on the experience of conventional wet processing processes such as electroplating, in chemical processing and cleaning processes such as development, etching, and peeling of thin plate materials such as PCBs or aluminum plates. The aim was to provide a better method.

本考案の設計原理は、狭い処理槽に溶液が下方へと流動するための開口を設け、溶液の供給が処理槽の底端から流出する溶液を上回った場合、槽内は溶液で満たされ、さらには槽側へと流出するものである。故に、処理を待ち受ける板材が処理槽に置かれている時でも、前・後方分流の影響によって溶液は処理槽中央の方向へと向かい、板材は槽内で浮遊する状態を呈する。こうして、板材表面は槽壁に接触しにくくなり、板材表面を傷つけないようにする効果が増強される。 The design principle of the present invention is to provide an opening for the solution to flow downward in a narrow processing tank, and when the supply of the solution exceeds the solution flowing out from the bottom end of the processing tank, the tank is filled with the solution, Furthermore, it flows out to the tank side. Therefore, even when a plate material waiting for processing is placed in the processing tank, the solution is directed toward the center of the processing tank due to the influence of the front and rear diversion, and the plate material is in a floating state in the tank. Thus, the plate material surface is less likely to contact the tank wall, and the effect of preventing the plate material surface from being damaged is enhanced.

また、溶液は下方へ向かって高速に流動するため、前記分流効果による板材表面の攪拌、および浄化作用を利用することにより良好な溶液交換が得られ、化学反応の速度は増加する。さらに左右への揺動・振動および超音波のサポートを通じ、より大きな化学溶液の板材における表面交換と反応速度とが提供され、さらなる優れた効果を達成することで、処理品質を向上させる。   Further, since the solution flows at high speed downward, good solution exchange can be obtained by using the stirring and purification action of the plate material surface by the diversion effect, and the speed of the chemical reaction is increased. Furthermore, surface exchange and reaction rate in a larger chemical solution plate material are provided through left / right swinging / vibration and ultrasonic support, and the processing quality is improved by achieving further excellent effects.

上記目的を達成するため、本考案に係る垂直分流式の薄板材化学処理装置は、上方に開口を呈する細長い本体であって、底部に一つ以上の流出口を設ける処理槽と、ラックに嵌め込み固定され、上下に垂直に前記処理槽へ設置される薄板材と、化学溶液を導入するため、前記処理槽の開口の前後両側に装設され、前記溶液が流体束を呈し、前記薄板材の前後両側表面へ噴き出し下方へと高速に流動させるようにし、さらに導入した溶液の流量が前記処理槽底部の流出量を上回るようにし、前記槽内を溶液で満たし、前記薄板材を前記処理槽内で浮遊させる分流ユニットと、を有する。   In order to achieve the above object, a vertical flow-dividing type thin plate chemical processing apparatus according to the present invention is an elongated main body having an opening at the top, a processing tank provided with one or more outlets at the bottom, and fitted into a rack. In order to introduce a chemical solution and a thin plate material fixed and vertically installed in the treatment tank, the chemical solution is installed on both front and rear sides of the opening of the treatment tank, the solution presents a fluid bundle, It blows to the front and rear side surfaces and flows downward at high speed, and the flow rate of the introduced solution exceeds the outflow amount of the bottom of the treatment tank, fills the tank with the solution, and fills the thin plate material in the treatment tank And a diversion unit to be floated on.

以下、本考案の実施形態を図面に基づいて説明する。
先ず、図2〜図4を参照する。本考案の一実施の形態が示す化学処理装置は以下を有する。
処理槽20は上方に開口21を呈する細長い本体で、底部に一つ以上の流出口22を備える。処理槽20は上下共幅が広い本体形状を呈するのが好ましいが、これに限られるものではなく、特殊な状況時においては上部が広く、下部が狭い形状として設けることもできる。また、本実施の形態では開口21の前後両側に外側へ向かって拡張する斜板23を設け、二枚の前・後斜板23の左右両側に流出通路24を形成する。これより、薄板材30はラック31に嵌め込み固定され、上下に垂直に処理槽20へ設置することができる。
Embodiments of the present invention will be described below with reference to the drawings.
First, reference will be made to FIGS. A chemical processing apparatus according to an embodiment of the present invention includes the following.
The treatment tank 20 is an elongated main body having an opening 21 on the upper side, and includes one or more outlets 22 at the bottom. The treatment tank 20 preferably has a main body shape having a wide vertical width, but is not limited to this, and in a special situation, the upper part can be wide and the lower part can be narrow. In the present embodiment, swash plates 23 that extend outward are provided on both front and rear sides of the opening 21, and outflow passages 24 are formed on the left and right sides of the two front and rear swash plates 23. Thus, the thin plate material 30 is fitted and fixed to the rack 31 and can be installed vertically in the processing tank 20.

分流ユニット40は処理槽20の開口21の前後両側に設けられている。本実施の形態においては、化学溶液を導入するため、前・後斜板23に装設され、それぞれ開口の前・後両側の斜板23に設置された二つの前・後噴出管41、42を有し、向かい合って対応する内側に多数のノズル411、421を設け、ノズル411、421から前記薄板材30の両側および処理槽20内へと化学溶液を注入する。そして、前記溶液は流体束を呈し、薄板材30の前後両側表面へ噴き出し、下方へと高速に流動する。さらに、前記導入した溶液は処理槽20の底部の流出口22での流出量を上回って前記槽内を溶液で満たし、薄板材30を処理槽20内で浮遊させる。   The diversion unit 40 is provided on both front and rear sides of the opening 21 of the processing tank 20. In the present embodiment, in order to introduce a chemical solution, two front and rear ejection pipes 41 and 42 are provided on the front and rear swash plates 23 and are respectively installed on the front and rear swash plates 23 of the opening. A large number of nozzles 411 and 421 are provided inside corresponding to each other, and a chemical solution is injected from the nozzles 411 and 421 into both sides of the thin plate material 30 and into the treatment tank 20. And the said solution exhibits a fluid bundle | flux, it ejects to the front-and-rear both-sides surface of the thin board | plate material 30, and flows at high speed to the downward direction. Further, the introduced solution exceeds the outflow amount at the outlet 22 at the bottom of the processing tank 20 to fill the tank with the solution, and the thin plate 30 is floated in the processing tank 20.

図4が示すように、処理を待ち受ける薄板材30が処理槽20に置かれている時、分流ユニット40の作用により、前方側の溶液80および後方側の溶液90がそれぞれ前・後両側で流動し、前方分流81と後方分流91との二つの流力を形成することで薄板材30は処理槽20の中央へと向かい、槽内で浮遊することができる。また、前記化学溶液の流体分流は前後全てにおいて行われ、平衡効果を達成することが可能である。流動状態においては、薄板材30を左右に揺動・振動させたり、超音波の使用等による方式のいずれか一つ、或いはそれらの組合せによって構成された補助装置によってさらなる優れた効果を達成するため、より大きな化学溶液の薄板材30における表面交換と反応速度とを提供する。   As shown in FIG. 4, when the thin plate material 30 waiting for processing is placed in the processing tank 20, the front-side solution 80 and the rear-side solution 90 flow on both the front and rear sides by the action of the diversion unit 40. Then, by forming two flow forces of the front branch 81 and the rear branch 91, the thin plate member 30 can move toward the center of the processing tank 20 and float in the tank. In addition, the fluid solution diversion of the chemical solution is performed before and after all, and an equilibrium effect can be achieved. In a flowing state, in order to achieve a further excellent effect by an auxiliary device configured by swinging / vibrating the thin plate material 30 left and right, using one of the methods using ultrasonic waves, or a combination thereof. Provides surface exchange and reaction rate in the sheet 30 of larger chemical solutions.

当然ながら、分流ユニット40が導入した処理槽20の化学溶液、または流出した化学溶液は、処理槽20の下方に設けられた回収装置50によって回収を行うことが可能で、浪費されることはない。回収装置50は連接されたポンプ60とフィルタ70とをさらに有し、回収された化学溶液を前記分流ユニット40の二つの前・後方噴出管41、42へと搬送し、化学溶液に対して継続した濾過を行い、常に清潔を保つことができる。そして、化学溶液は上方から下方へと流れ、この分流工程において、処理を待ち受ける薄板材30の表面に生じた粉塵もしくは顆粒を取り去り、板材表面を清潔で滑らかな状態とすることができる。   Naturally, the chemical solution in the processing tank 20 introduced by the diversion unit 40 or the chemical solution that has flowed out can be recovered by the recovery device 50 provided below the processing tank 20 and is not wasted. . The recovery device 50 further includes a pump 60 and a filter 70 that are connected to each other, and transports the recovered chemical solution to the two front and rear ejection pipes 41 and 42 of the flow dividing unit 40 and continues the chemical solution. Filtration can be performed, and cleanliness can always be maintained. Then, the chemical solution flows from the upper side to the lower side, and in this diversion step, the dust or granules generated on the surface of the thin plate material 30 waiting for processing can be removed, and the surface of the plate material can be made clean and smooth.

前掲した分流式の処理方式およびその装置は、薄板材の化学処理および洗浄の工程において広く応用することができる。例えば、PCBの現像(Developing)、エッチング(Etching)、剥離(Stripping)、洗浄等の工程である。このほか、アルミ板材等、その他同等効果の材質に関連する処理もまた、適用することができる。
本考案は最も優れた処理品質を達成するため、分流原理によって設計し作り上げた化学処理装置を用い、流体力学における液体の流動特性を十分に運用するものであると同時に、材料力学における薄板材の特性を運用し、流動平衡状態で板材の化学反応が十分な交換と完成を行えるようにするものである。その上、槽壁に接触しにくく、板材の損傷を防止することが可能である。
The above-described shunt type processing method and apparatus can be widely applied in the thin plate material chemical processing and cleaning steps. For example, PCB development (developing), etching (etching), stripping, cleaning, and the like. In addition, treatments related to other equivalent materials such as an aluminum plate can also be applied.
In order to achieve the best processing quality, the present invention uses a chemical processing device designed and built based on the principle of diversion, and fully utilizes the fluid flow characteristics in fluid dynamics, while at the same time, The properties are used so that the chemical reaction of the plate material can be sufficiently exchanged and completed in the flow equilibrium state. In addition, it is difficult to contact the tank wall, and damage to the plate material can be prevented.

従来の化学処理装置の概略図である。It is the schematic of the conventional chemical processing apparatus. 本考案の一実施の形態による化学処理装置を示す側面断面図である。It is side surface sectional drawing which shows the chemical processing apparatus by one embodiment of this invention. 本考案の一実施の形態による化学処理装置を示す正面断面図である。It is front sectional drawing which shows the chemical processing apparatus by one embodiment of this invention. 本考案の一実施の形態による化学処理装置における分流構造図およびブロック図である。It is a flow-dividing structure figure and block diagram in the chemical processing apparatus by one embodiment of this invention.

符号の説明Explanation of symbols

20:処理槽、21:開口、22:流出口、23:斜板、24:流出通路、30:薄板材、31:ラック、40:分流ユニット、41:前方噴出管、42:後方噴出管、411、421:ノズル、50:回収装置、60:ポンプ、70:フィルタ、80:前方側の溶液、81:前方分流、90:後方側の溶液、91:後方分流   20: treatment tank, 21: opening, 22: outlet, 23: swash plate, 24: outflow passage, 30: thin plate material, 31: rack, 40: diversion unit, 41: front ejection pipe, 42: rear ejection pipe, 411, 421: Nozzle, 50: Recovery device, 60: Pump, 70: Filter, 80: Front side solution, 81: Front side diversion, 90: Back side solution, 91: Back side diversion

Claims (6)

垂直分流式の薄板材化学処理装置において、
上方に開口を呈する細長い本体であって、底部に複数の流出口を設ける処理槽と、
ラックに嵌め込み固定され、上下に垂直に前記処理槽へ設置される薄板材と、
化学溶液を導入するため、前記処理槽の開口の前後両側に装設され、前記溶液が流体束を呈し、前記薄板材の前後両側表面へ噴き出し下方へと高速に流動させるようにし、さらに導入した溶液の流量が前記処理槽底部の流出量を上回るようにし、前記槽内を溶液で満たし、前記薄板材を前記処理槽内で浮遊させる分流ユニットと、
を有することを特徴とする垂直分流式の薄板材を化学処理する装置。
In vertical shunt type thin plate chemical processing equipment,
An elongate body having an opening upward, a treatment tank having a plurality of outlets at the bottom;
A thin plate material that is fitted and fixed in a rack and installed vertically in the processing tank;
In order to introduce the chemical solution, it was installed on both the front and rear sides of the opening of the treatment tank, the solution exhibited a fluid bundle, sprayed to the front and rear side surfaces of the thin plate material, and flowed downward at high speed, and further introduced. A flow dividing unit that causes the flow rate of the solution to exceed the outflow amount at the bottom of the processing tank, fills the tank with the solution, and floats the thin plate material in the processing tank;
An apparatus for chemically treating a vertical shunt type thin plate material characterized by comprising:
前記処理槽は左右への揺動、振動および超音波のうち、いずれか一つ或いはそれらの組合せによって構成された補助装置をさらに設けることを特徴とする請求項1に記載の垂直分流式の薄板材を化学処理する装置。   The vertical shunt type thin film according to claim 1, wherein the treatment tank further includes an auxiliary device configured by any one or a combination of swinging to the left and right, vibration and ultrasonic waves. Equipment for chemical processing of plate materials. 前記処理槽は前記薄板材の化学処理および洗浄工程のために提供されることを特徴とする請求項1に記載の垂直分流式の薄板材を化学処理する装置。   The apparatus for chemically treating a vertical shunt type thin plate material according to claim 1, wherein the processing tank is provided for a chemical treatment and cleaning process of the thin plate material. 前記薄板材は、プリント基板、またはアルミ板材からなることを特徴とする請求項1記載の垂直分流式の薄板材を化学処理する装置。   2. The apparatus for chemically treating a vertical shunt type thin plate material according to claim 1, wherein the thin plate material is made of a printed board or an aluminum plate material. 前記分流ユニットはそれぞれ前記開口の前後両側の斜板に設置された二つの前後噴出管を有し、向かい合って対応する内側に多数のノズルを設け、該ノズルから前記薄板材の両側および処理槽内へと化学溶液を注入することを特徴とする請求項1に記載の垂直分流式の薄板材を化学処理する装置。   Each of the diversion units has two front and rear jet pipes installed on swash plates on both sides before and after the opening, and is provided with a number of nozzles facing each other on both sides of the thin plate material and inside the processing tank. The apparatus for chemically treating a vertical shunt type thin plate material according to claim 1, wherein a chemical solution is injected into the substrate. 前記分流ユニットが導入した前記処理槽内の化学溶液、または流出した化学溶液は、処理槽下方に設けられた回収装置によって回収を行うことが可能であり、さらに該回収装置は連接されたポンプとフィルタとを有し、回収された化学溶液を前記分流ユニットの二つの前後方噴出管へと搬送し、継続して化学溶液を循環濾過させることを特徴とする請求項5に記載の垂直分流式の薄板材を化学処理する装置。   The chemical solution in the processing tank introduced by the diversion unit or the chemical solution that has flowed out can be recovered by a recovery device provided below the processing tank, and the recovery device is connected to a pump connected to the processing tank. 6. The vertical shunt system according to claim 5, further comprising a filter, wherein the recovered chemical solution is conveyed to two front and rear jet pipes of the shunt unit, and the chemical solution is continuously circulated and filtered. For chemical processing of thin plate materials.
JP2007007179U 2007-09-14 2007-09-14 Equipment for chemical treatment of vertical shunt type thin plate materials Expired - Lifetime JP3137488U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007007179U JP3137488U (en) 2007-09-14 2007-09-14 Equipment for chemical treatment of vertical shunt type thin plate materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007007179U JP3137488U (en) 2007-09-14 2007-09-14 Equipment for chemical treatment of vertical shunt type thin plate materials

Publications (1)

Publication Number Publication Date
JP3137488U true JP3137488U (en) 2007-11-22

Family

ID=43287846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007007179U Expired - Lifetime JP3137488U (en) 2007-09-14 2007-09-14 Equipment for chemical treatment of vertical shunt type thin plate materials

Country Status (1)

Country Link
JP (1) JP3137488U (en)

Similar Documents

Publication Publication Date Title
CN101555101A (en) Down-type substrate sliming device and slimming system using the same
JP6189279B2 (en) Etching equipment
CN113766747A (en) PCB (printed Circuit Board) micro-etching process for fine circuit and circuit board
JP4099489B2 (en) Resist collection device
US4155775A (en) Cleaning of high aspect ratio through holes in multilayer printed circuit boards
WO2011105072A1 (en) Substrate treating method and substrate treating apparatus
KR200482351Y1 (en) Apparatus for thin filming resist layer
JP3137488U (en) Equipment for chemical treatment of vertical shunt type thin plate materials
JP2011176085A (en) Substrate treating method, and substrate treating apparatus
TWM334597U (en) Chemical processing device of thin plate material having vertical flow-guide type
JP3115047U (en) Jet floating plating tank
JP2000256891A (en) Electroplating method and anode structural body
JP3207408U (en) Resist layer thinning device
JP3301341B2 (en) Surface roughening equipment
TW200408328A (en) Substrate processing equipment
CN219851105U (en) Bernoulli rinse residue liquid removal apparatus
KR101124552B1 (en) Device for electroplating
JPS60198889A (en) Method and device for treating circuit board
JP2004339590A (en) Surface treatment device
JP5146352B2 (en) Surface roughening device for build-up substrate insulation layer
JP5724499B2 (en) Surface roughening device for build-up substrate insulation layer
CN220043786U (en) Novel etching device
KR102263628B1 (en) Desolving tank
JP2644848B2 (en) Hole processing jig
CN212800536U (en) Plating solution jet flow box assembly for IC carrier plate

Legal Events

Date Code Title Description
R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101031

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111031

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121031

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131031

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term