JP3049871B2 - Reference wafer single wafer management system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is capable of instructing the operation and processing of a reference wafer single-wafer management apparatus, in particular, a reference wafer which is a semiconductor wafer included as a sample for grasping a state in a manufacturing process in a manufacturing lot. The present invention relates to a reference wafer single wafer management apparatus.

[0002]

2. Description of the Related Art The manufacture of semiconductor devices is performed by flowing a large number of semiconductor wafers in one production system (production line) in units of production lots and performing tens to hundreds of operations. The number, order, and working conditions of each work differ depending on the type of semiconductor device to be manufactured. A series of operations different depending on the type is called a process, and each process is given an identification number such as a process 001 or a process 002.

[0003] In general, the manufacture of semiconductor devices is performed using a production management system in which devices (computer terminals) for giving work instructions to workers are provided and each device is controlled by a computer.

[0004] By the way, it is not necessary in the manufacture of ordinary semiconductor devices, that is, in the manufacture of semiconductor devices as products, but in the manufacture of semiconductor devices for trial manufacture and R & D, what is required in the manufacturing lot is One of the semiconductor wafers is a reference wafer. While a series of operations are performed on a normal semiconductor wafer, only a part of the operation is performed on a reference wafer. Including a reference wafer in a production lot to determine pass / fail is indispensable for trial production, research, and development.

Accordingly, the reference wafer is removed from the manufacturing lot to which the reference wafer belongs during the series of operations, and is used for characteristic measurement, etc., or some operations in the series of operations are omitted, or Or join a production lot. It is rare that a plurality of reference wafers present in one manufacturing lot have the same work history, and they often have different work histories.

Heretofore, management of individual reference wafers by a production management system has not been performed. This is because the conventional production management system manages semiconductor wafers on a production lot basis. Therefore, conventionally, for a reference wafer, a designer issues an instruction to an operator in a clean room, and the operator processes according to the instruction.

[0007]

However, since the production management system cannot perform single-wafer management for reference wafers, instructions have been given to workers in a clean room by instructions. Prevent paperless work to improve quality. In addition, the production management system cannot maintain the principle of instructing the worker through a display of a terminal installed for each operation (generally, for each type of manufacturing apparatus). Care must also be taken with written instructions, which can easily lead to mistakes. In addition, when a defect occurs in the reference wafer, the system does not manage the single wafer of the reference wafer, so that it is not possible to leave data as to which reference wafer has become defective in what operation.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and an object of the present invention is to provide a reference wafer single wafer management apparatus capable of giving an instruction on a treatment for a reference wafer.

[0009]

The reference wafer single wafer management apparatus according to the present invention is capable of registering, in the work information registering means, not only the working conditions for each manufacturing lot but also the treatment for each reference wafer in the manufacturing lot. The work instruction means is instructed based on the data from the work information registration means in addition to the work condition instruction for the production lot, and is also instructed about the treatment for each reference wafer in the production lot. Update input means for changing the contents of the treatment.

[0010]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram of a reference wafer single wafer management apparatus according to the present invention. FIG. 1 is an overall view of one embodiment of a reference wafer single wafer management apparatus of the present invention, and FIG. 2 is a functional block diagram. In the drawing, 1 is a host computer, 2 is a database managed by the host computer 1, 3 is a designer terminal, which registers system parameters and performs various settings, and performs a series of operations for each production lot. The input for setting the work order, the work conditions of each work, and whether to perform each work on each reference wafer and whether to discard the work is also performed at the designer terminal 3.

4 ₁ and 4 ₂ are each work 5 in the clean room.
_1, 5 ₂ worker terminal provided corresponding to the (However, in the drawings, the operator terminal 4 _1, 4 _2, work 5 _1, 5 ₂
But only a large number (4 ₁ , 4 ₂ ,... And 5
_1, 5 _2, ...) there. The worker terminals 4 ₁ , 4 ₂ , ...
Task 5 _1, 5 _2, which performs a work instruction to the worker ... working conditions for displaying by a display, whether or not to the working of each reference wafer, an indication of whether to discard Also displays work information to be performed. The terminals 4 ₁ , 4 ₂ ,... Can also input data on whether the reference wafer or the like has become defective or various measurement data.

Next, the present embodiment will be described functionally with reference to FIG. 2. Reference numeral 6 denotes work information registration means, which stores a series of works to be performed for each production lot and work conditions for each lot for storing the work conditions. A unit 7 and a reference wafer-specific operation information storage unit 8 that stores a series of operations to be performed on the reference wafer and operation conditions thereof.

Reference numeral 9 denotes a work information reading section for reading the work information from the work information registration means 6. When a production lot identification number is notified from the production lot discriminating section 10, the operation conditions of the production lot and the production conditions in the production lot are displayed. The work information about the treatment of the reference wafer included is read from the work information registration means 6 and the work instruction means 1 comprising a display is read.
1 is displayed.

Reference numeral 12 denotes an operation result discriminating section for judging whether or not the reference wafer which has completed or is about to perform the operation is defective. If a result indicating that the reference wafer is defective is obtained, the future of the reference wafer is determined. Since the treatment needs to be changed, the update signal is sent from the work result determination unit 12 to the update input means (reference data input unit).
13 and the work information on the reference wafer in the work information storage unit 9 for each reference wafer of the work information registration means is updated.

Next, the operation will be described. First, an identification number is assigned to a production lot, and an identification number (sign) is also assigned to each reference wafer of the production lot. Reference wafer identification numbers are given, for example, as R01, R02, R03,. In addition, it is necessary to provide an identification number so that an operator can visually recognize it with the naked eye or a microscope or read it with a reader.

Further, the operation sequence of each production lot and the operation conditions of each operation are set by operating the designer terminal 3, and the action to be performed in each operation is set for each reference wafer. This action does not first work on each of a series of operations of the production lot to which it belongs,
There are four types: second, work but not work (no processing), third, work and not discarded, and fourth, work and discard.

Next, the operation when one work 5 is performed in accordance with an instruction from one work terminal 4 will be described. The identification number of the production lot to be engaged in this work is read by the production lot discriminating unit 10 (for example, a barcode reader) by the operation of the operator. Then, the identification number is sent to the work information reading unit 9, which reads the work conditions of the production lot, the identification numbers (for example, R 01, R 02, etc.) of the reference wafers in the production lot and the reference numbers. The information about the treatment for the wafer is read out, and the information is sent to the worker terminal 4 by the work instructing means 1
1 (display).

Then, the operator performs the operation under the specific operation conditions of the production lot in accordance with the instruction of the operation instructing means 11. In this case, the reference wafer having the identification number indicated to be required for the reference wafer is to be operated. Is supplied to the work (supplied to a manufacturing apparatus that performs the work), and the work is not performed for reference wafers other than the reference wafer, even if a work lot is in progress for the work. Then, when the operation is completed, the operator causes the operation result determination unit 12 to determine whether or not a defect has occurred in the reference wafer for which the operation has been completed. This may cause defects such as cracks in the reference wafer during operation,
In such a case, even if a subsequent operation is set, the operation should not be performed on the reference wafer, and therefore the operation is performed so that the operation is not performed.

Therefore, when the work result discrimination section 12 produces a failure result, an update signal is input to the update input means 13 and the subsequent work information is stored in the work information storage section 8 for each reference wafer in the work information registration means 6 by means of flags. Is not done. That is, the work information of the reference wafer is updated.

When the work is completed, the work is input to the worker terminal 4 to that effect. This is the production lot discriminator 1
This is performed by reading the identification number of the production lot completed by 0. Then, data relating to the production lot required at the time of termination is retrieved from the work information registration means 6. Then, for the operation, data that needs to be input at the end of the operation, such as the presence or absence of reproduction, measurement data, and defective data, are input. Then, the data is taken into the database as history data.

Then, when the work instructing means 11 needs to discard the reference wafer upon completion of the work, that is, when it is necessary to separate the reference wafer from the production lot, an indication to that effect is displayed. More specifically, an instruction to discard the reference wafer is given by the display of “Please discard the reference wafer of the following number here” and the display of the reference wafer number. After that, an instruction of the next operation for the production lot after the operation is performed by the operation instruction means 11.

According to the reference wafer single wafer management apparatus, it is possible to give an instruction not only for the production lot but also for the treatment of the reference wafer in the production lot. It is possible to change. Therefore, it is possible to give a paperless instruction on which reference wafer should be treated and how to treat the reference wafer, and it is possible to prevent a treatment error of the reference wafer. Further, even when a defect occurs in the reference wafer, it is left as data along with the reference wafer number (sign), and can be utilized for production management.

[0023]

The reference wafer single wafer management apparatus according to the present invention provides a series of operations and conditions for each manufacturing lot, and a reference wafer for each reference wafer used as a sample for grasping a state in a semiconductor wafer manufacturing process. Work information registering means capable of registering work information with identification codes or numbers for specifying work conditions; work instruction means for designating work conditions of a production lot and work contents for each reference wafer from the work information registering means; Update input means for changing the work condition of each reference wafer of the information registering means. Therefore, according to the reference wafer single wafer management apparatus of the present invention, it is possible to instruct not only the treatment of the production lot but also the treatment of the reference wafer in the production lot, and the content of the operation information of the reference wafer is appropriately adjusted according to the operation result. It is possible to Therefore, it is possible to give a paperless instruction on which reference wafer should be treated and how to treat the reference wafer, and it is possible to prevent a treatment error of the reference wafer. Further, even when a defect occurs in the reference wafer, it is left as data along with the reference wafer number (sign), and can be utilized for production management.

[Brief description of the drawings]

FIG. 1 is an overall view showing one embodiment of a reference wafer single wafer management apparatus of the present invention.

FIG. 2 is a functional block diagram of the embodiment.

[Explanation of symbols]

 6 work information registration means 11 work instruction means 13 update input means

Continuation of the front page (56) References JP-A-3-29309 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/02

Claims (1)

(57) [Claims] 1. A series of operations and conditions for each manufacturing lot, and an identification code or number for specifying a reference wafer for each reference wafer as a sample for grasping a state in a semiconductor wafer manufacturing process. Work information registration means capable of registering work information; work instruction means for instructing work conditions of a production lot and work contents for each reference wafer from the work information registration means; and Update input means capable of changing operation conditions; and Reference wafer single wafer management apparatus, characterized by comprising: