JPH05304064A - Work instruction and control device of semiconductor wafer process - Google Patents

Abstract

PURPOSE:To obtain a semiconductor wafer process work instruction and control device which is capable of automatically giving work instructions that a specific semiconductor wafer such as a reference wafer is taken in or out in a semiconductor wafer process where semiconductor wafers are running by the lot. CONSTITUTION:A lot master file 1 where a manufacturing lot and the processing state of a semiconductor wafer are stored, a work condition file 2 where work conditions and the work sequence of a manufacturing lot are stored and the processing state of a specific semiconductor wafer in each work and that a specific semiconductor wafer is in work or not are provided as flags, and a take-in/out occurrence detection means 3 which judges that a semiconductor wafer is taken in/out or not basing on the change of the flags with the proceeding of works in the work condition file 2 are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work instruction management apparatus for a semiconductor wafer process, and more particularly to a semiconductor wafer process capable of giving a work instruction to take in or take out a particular semiconductor wafer such as a reference wafer from a semiconductor wafer process flowing in lot units. The present invention relates to a work instruction management device for a process.

[0002]

2. Description of the Related Art A semiconductor wafer process for performing a series of processes such as diffusion, exposure, development, and etching on a semiconductor wafer has been conventionally performed according to a work instruction by an automatic management system using a computer. ..

However, in the semiconductor wafer process, what has been conventionally managed by the automatic management system is only the work performed by the manufacturing apparatus such as diffusion, exposure, development, etching, and the like, such as a reference wafer. The instructions to the operator regarding the semiconductor wafers that are specially taken in or taken out by the operator during the process in the manufacturing lot are merely written (or verbal).

That is, in the manufacture of ordinary semiconductor devices, that is, in the manufacture of semiconductor devices as commercial products, it is not necessary,
What is required in manufacturing a semiconductor device for prototyping and research and development is to use some semiconductor wafers in a manufacturing lot as reference wafers. In contrast to ordinary semiconductor wafers, a series of operations are performed, whereas reference wafers are used to perform only some operations. Including a reference wafer in a manufacturing lot to judge pass / fail is essential for trial manufacture, research, and development.

Therefore, the reference wafer is removed from the manufacturing lot belonging to the middle of the series of operations and used for characteristic measurement, some of the series of operations are omitted, or the reference wafers are removed from the middle of the series of operations. Participate in manufacturing lots. A plurality of reference wafers existing in one manufacturing lot rarely have similar work histories, and often have different work histories.

Conventionally, the reference wafer, which is put in and taken out of such a manufacturing lot during the process, has not been managed by the production management system. This is because the conventional production management system manages semiconductor wafers in units of manufacturing lots. Therefore, conventionally, with respect to the reference wafer, the designer issues an instruction to the operator in the clean room, and the operator processes it according to the instruction.

[0007]

By the way, unlike the prior art, since the production control system cannot perform single-wafer management for the reference wafer, it is necessary to instruct the worker in the clean room by the instruction sheet. Prevents paperlessness to improve internal cleanliness. In addition, the production management system cannot maintain the principle of instructing the operator through the display of the terminal installed for each work (for each manufacturing apparatus). You must also pay attention to the instructions given by, and it is easy to make mistakes. Moreover, when a reference wafer has a defect, the system does not manage the single wafer of the reference wafer. Therefore, there is a problem that it is not possible to record in the system what defect and which reference wafer has become defective. there were.

The present invention has been made to solve such a problem, and automatically takes in or takes out a specific semiconductor wafer such as a reference wafer in a semiconductor wafer process which flows in lot units. An object of the present invention is to provide a work instruction management device for a semiconductor wafer process that can give instructions.

[0009]

A semiconductor wafer process work instruction management apparatus according to the present invention stores a lot master file for holding a production lot and a work-in-progress state of a semiconductor wafer, work conditions for each production lot, and a work order. In addition, a work condition file having as a flag the work in progress to a lot and the presence / absence of work for at least a specific semiconductor wafer in each work, and the loading or unloading of a semiconductor wafer from the change in the flag of the work condition file as the work progresses. It is characterized in that it comprises an intake / extraction occurrence detecting means for judging presence / absence.

[0010]

According to the work instruction management apparatus for the semiconductor wafer process of the present invention, the loading or unloading of a semiconductor wafer into or from the manufacturing lot is carried out for each work on the specific semiconductor wafer in the work condition file, and the presence or absence of the work is indicated. Since the take-in / take-out occurrence detecting means automatically detects from the change of the flag as the work progresses, it is possible to automatically instruct the taking-in or taking-out of the semiconductor wafer into the manufacturing lot based on the detection result.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A work instruction management apparatus for a semiconductor wafer process according to the present invention will be described below in detail with reference to the illustrated embodiments. The drawing shows one embodiment of a work instruction management apparatus for a semiconductor wafer process according to the present invention, and FIG. 1 is a functional block diagram of the work instruction management apparatus for a semiconductor wafer process. 1 is a lot master file, which stores the in-process status of each manufacturing lot that flows through the process, using the lot number as a key.
The stored contents are updated each time the work of the manufacturing lot is started or finished. Then, as a part of the data, the presence or absence of work in progress for each semiconductor wafer in the manufacturing lot, the presence or absence of work, and an instruction regarding taking in or taking out are held in the form of a flag.

A work condition file 2 stores the order of each work to be performed on each manufacturing lot and each work condition as a work name as a key. The data has a next work name as a next pointer. .. Further, it has flags in the form of flags indicating the presence or absence of work in progress for each operation of each semiconductor wafer in the manufacturing lot, the presence or absence of work (there may be no work even if work is in progress), and processing.

Reference numeral 3 compares the flag for each semiconductor wafer in the lot master file 1 with the flag for that semiconductor wafer in the work condition file 2 to determine from the comparison result whether to take in or take out. Y
When the determination result of "es" is obtained, the updating means 4 is caused to update the lot master file 1 so that the taking in or taking out is instructed. Further, when the determination result of No is obtained, the lot master file 1 of the data on the next work of the work condition file 2 is read by the reading means 5.
To read. That is, the contents of the lot master file 1 are updated to those relating to the next work.

The work instruction management apparatus of this semiconductor wafer process causes the lot master file 1 to read the loading or unloading operation and the device name (r) from the file (A) 7 when the loading or unloading is to be performed.
This is because in the work instruction management device of this semiconductor wafer process, each work is always associated with each device, but the introduction or removal is performed by the worker himself, and the related device is specifically not exist. Therefore, in order to maintain the homogeneity of the data format, a fictitious device name, for example, r is set and the device is taken in or taken out.

Reference numeral 6 denotes a terminal device which gives a work instruction based on the data from the lot master file 1. Such a terminal is not only provided for each device that actually performs each work, but also installed so that the operator can instruct the operator to take in or take out at a place where the taking in or taking out occurs.

FIG. 2 shows a concrete example of how the flags are stored in the work condition file 2. In FIG. 2, work 1, work 2, work 3, ... Work N and the order of work are shown from top to bottom along the vertical direction, and
Each work 1, work 2, ... Is additionally provided with devices A, B, C ,. The work in progress for each operation is stored in the form of a flag for each semiconductor wafer (indicated by a number).

The meaning of the flag will be described below.
A blank indicates that the semiconductor wafer has not been processed into a manufacturing lot for that operation. Flag 1 indicates that the semiconductor wafer is in the manufacturing lot for the operation but is not processed, flag 2 indicates that the semiconductor wafer is in the manufacturing lot for the operation and is processed, and flag 3 is the processing. , Indicates the case of discarding.
Incidentally, the discarded semiconductor wafer disappears thereafter, and there is no room to be incorporated into the manufacturing lot.

Next, based on the example shown in FIG. 2, how the flag of the lot master file 1 for storing the current in-process state of each semiconductor wafer changes will be described according to a concrete example. FIG. 3 shows an example of the flags of the lot master file 1 in the normal case, that is, the case where neither intake nor extraction is performed. This example shows a case of shifting from the work 2 to the work 3.

1 in the work condition file 2 (FIG. 2)
The second semiconductor wafer is that the work 2 is the flag 2, that is, the work is in progress, and the work 3 is the flag 1,
That is, it is in process but not processed. Therefore, 1
Since the second semiconductor wafer is in the process of both work 2 and work 3, it is not necessary to take in or take it out in the process of shifting from work 2 to work 3. The second and third semiconductor wafers have the same point that both work 2 and work 3 are in process, and neither take-in nor take-out occurs. In such a case, the flag of the lot master file 1 is simply updated to the flag of the next work (work 3 in this case) by the progress from work 2 to work 3.

On the other hand, FIG. 4 shows the change of the flag of the lot master file 1 in the case where the introduction or the take-out occurs. Specifically, the case of shifting from the work 1 to the work 2 in FIG. 2 is taken as an example. .. With respect to the first semiconductor wafer, in both work 1 and work 2, the flag 2 is set, that is, the work is in progress, and there is no difference before and after the update.

Next, the flag is blank in the operation 1 for the second semiconductor wafer, whereas the flag is 1 in the operation 2. That is, work 1 is not in progress, but work 2 is in progress. This means that the second wafer is put into the manufacturing lot after the end of work 1 and before the start of work 2. The third semiconductor wafer has the flag 1 for the operation 1 and the flag 2 for the operation 2, and there is no change in that both are in process, and it is not necessary to take in or take out the wafer.

For the fourth semiconductor wafer, the flag is 2, ie, in process for the work 1, but the flag is blank, that is, not in process for the work 2. This means that the fourth semiconductor wafer is taken out from the manufacturing lot, and the taking-out work is necessary.

In order to arrange the case of shifting from Work 1 to Work 2, the first and third semiconductor wafers are not taken in or taken out, or the second semiconductor wafer is taken in and the fourth semiconductor wafer is taken. It means that it needs to be taken out. Therefore, the contents of the lot master file 1 should not be updated to the contents of the work 2 immediately after the completion of the work 1, but should be updated to the contents that can be instructed to take in or take out. Specifically, a flag 4 is set for the second semiconductor wafer, and a flag 5 is set for the fourth semiconductor wafer. Then, a fictitious device r to be taken in or taken out is designated as the device name. This is done by reading the data from file (A) into the lot master file 1. That is, in the present embodiment, the flag indicating intake is 4 and the flag indicating extraction is 5.

For semiconductor wafers that are not taken in or taken out (first, third semiconductor wafers, etc.), the flag of the original next work, that is, work 2, is set. Then, in this case, the contents of the lot master file 1 are updated as shown in FIG. Then, at this time, a display as shown in FIG. 5 is made on the terminal 6 for instructing the taking in or taking out between the work 1 and the work 2. Specifically, semiconductor wafers to be taken in and semiconductor wafers to be taken out are indicated by numbers. The worker takes in and takes out the semiconductor wafer according to this instruction.

By the way, when the taking in or taking out is finished, the fact that the work is finished is inputted to the terminal. Then, the contents of the lot master file 1 are accordingly updated as shown in FIG. 6, that is, according to the flag of the work 3 of the work condition file (see FIG. 2) 2. In this way, it is the intake / extraction occurrence detecting means 3 of FIG. 1 that determines whether or not the flag changes with the progress of work to perform the intake or extraction, and the flags are blank and 1 to 3. If there is a change between the two, it is decided that intake or extraction should be performed.

When the blank is changed to 1 to 3, the flag of the semiconductor wafer in the lot master file 1 is updated to 4 which means incorporation, and conversely 1 to 3
When it changes from to blank, the flag is updated to 5 meaning fetch. It is the updating means 4 in FIG. 1 that performs the updating process for such incorporation or removal.

FIG. 7 compares the work order recorded in the work condition file with the actual flow of the production lot. As shown in FIG. 7A, the work order recorded in the work condition file 2 is compared. Then, it seems that there is no work between work 1 and work 2, but as shown in FIG. 7 (B) due to the change in the work progress flag of the wafer recorded in the work condition file. Incorporation of semiconductor wafers (second
The work of taking in the second semiconductor wafer) and taking out the semiconductor wafer (taking out the fourth semiconductor wafer) is performed by the operator. Then, the work is in the form of being performed by an imaginary device r on the data.

FIG. 8 shows an example of the timing of loading / unloading in the flow of the manufacturing lot. For example, in the normal work, for example, work 1 reads the ID (identity) of the manufacturing lot with a bar code and starts the work.
(Work,) Work is completed in this order, and thereafter, the intake / extraction occurrence detection means 3 shown in FIG. Then, if there is no determination result, the process proceeds to the next work (work 2). However, if the result of the determination is yes, the operator reads the bar code (input or take-out of the semiconductor wafer to the terminal) and then takes in or takes it out by himself. Input to the terminal. Then, the next work (work 2) is started.

Next, the updating operation as the work progresses will be described with reference to the flowchart of FIG. When the worker finishes one work, the ID of the manufacturing lot is read by a bar code or the like, and a certain process is requested when one work is finished. After that, the data is read from the lot master file 1, and the data relating to the next work of the work condition file is read from the work condition file 2 with the next work name as a key.

The flags of the data read from the lot master file 1 and the data read from the work condition file 2 are compared. Specifically, it is determined whether one of the flags to be compared is blank and the other is not blank (1 to 3), and if No, this means that it is not necessary to take in or take out. Therefore, the flag of the next work of the work condition file 2 is set to the flag of the lot master file 1. That is, the flag of the lot master file 1 is updated to the content of the flag of the next work of the work condition file 2.

Further, the next work name, the work device name, etc. are also set in the lot master file 1, and the old data is discarded and the update of the lot master file 1 is completed. Then, the data of the lot master file 1 is transferred to the work terminal, and guidance display for the next work is displayed on the display 6 of the terminal. By the way, when the flags of the data read from the lot master file 1 and the data read from the work condition file 2 have a relationship that one is blank and the other is other than blank (1 to 3), that is, the result of the above determination is Yes.
If it is s, it means that intake or extraction should be performed.

In this case, first, after reading the data of the file (A), it is determined whether the flag of the lot master file 1 is blank. If the judgment result is No, it means that it should be taken out. Therefore, the flag of the lot master file 1 is set to 5. On the contrary, if the judgment result is Yes, it should be taken in. Since there is nothing but that, the flag of the lot master file 1 is set to 4, the above data read from the file (A) and its flag are both set and updated in the lot master file 1, and the work of taking in or taking out is done. It is instructed by the terminal 6. The screen is as shown in FIG. 5, for example.

Next, referring to FIG. 10, a data display operation at the start of work will be described. After requesting the start of work from the terminal, the data in the lot master file 1 is read out, then the data in file (A) 7 is read out, and the device of the terminal where the worker is located corresponds to r, that is, take-in or take-out. It is determined whether or not it is a fictitious imaginary device r.

If the determination result is No, it means that normal work is performed. Therefore, the next work is read from the work condition file 2, the lot master file 1 is set, and the normal work is displayed on the display of the terminal 6. Display the working conditions of. On the contrary, if the determination result is Yes, the flag 4 of the lot master file 1 is taken in and the flag 5 is set.
Is taken out and the display of the terminal 6 is instructed to take in or take out accordingly.

According to the work instruction management apparatus of the present semiconductor wafer process, loading or unloading of a semiconductor wafer into or from a manufacturing lot is carried out in the manufacturing lot in each work for a specific semiconductor wafer in the working condition file 2, Since the take-in / take-out occurrence detection means 3 automatically detects from the change of the flag indicating the presence or absence of the work, the contents of the lot master file 1 are updated based on the detection result, and the semiconductor wafer is taken in or taken out from the manufacturing lot. Can be automatically instructed.

[0036]

According to the semiconductor wafer process work instruction management apparatus of the present invention, there are a lot master file for holding a current work-in-progress state for each production lot or semiconductor wafer and a work condition to be processed for each production lot or semiconductor wafer. A work condition file having a flag indicating the work in progress and the presence / absence of each work of at least a specific semiconductor wafer of the manufacturing lot registered in the work order, and the change of the above flag in the file as the work progresses An intake / extraction occurrence detecting means for detecting that the production lot or the semiconductor wafer should be taken in or taken out from the working device, and when the intake / extraction occurrence detecting means does not detect that the introduction or extraction should be taken in, Work order to move to the next work as it is,
The present invention is characterized in that when the intake / extraction occurrence detecting means detects that the semiconductor wafer should be taken in or taken out, the semiconductor wafer is automatically instructed to be taken in or taken out. Therefore, according to the work instruction management apparatus for the semiconductor wafer process of the present invention, the incorporation or removal of the semiconductor wafer from the manufacturing lot is a work in progress work for each work on the specific semiconductor wafer, and a flag indicating the presence or absence of the work. Since the take-in / take-out occurrence detecting means automatically detects the change due to the progress of the work, the taking-in or taking-out of the semiconductor wafer from the manufacturing lot can be automatically instructed based on the detection result.

[Brief description of drawings]

FIG. 1 is a functional block diagram showing one embodiment of a work instruction management device for a semiconductor wafer process according to the present invention.

FIG. 2 is a diagram showing an example of flags of a work condition file of the above embodiment.

FIG. 3 is a diagram showing an example of flags of a lot master file in a normal case of the above embodiment.

FIG. 4 is a diagram showing an example of a flag of a lot master file (transition from work 1 to work 2) in the case where import / extract occurs in the above embodiment.

FIG. 5 is a diagram showing an example of a take-in / take-out instruction screen of the above embodiment.

FIG. 6 is a diagram showing an example of flags in a lot master file after the end of the loading / unloading operation of the above embodiment.

7 (A) and 7 (B) compare the work order recorded in the work condition file of the above embodiment with the actual flow of the manufacturing lot, and FIG. 7 (A) shows the work order in the work condition file. , (B) show the flow of manufacturing lots.

FIG. 8 is a diagram showing timings of taking in and taking out in the flow of the manufacturing lot of the embodiment.

FIG. 9 is a flowchart showing an updating operation according to the progress of work in the above-described embodiment.

FIG. 10 is a flow chart showing an operation of displaying data at the start of work in the above embodiment.

[Explanation of Codes] 1 lot master file 2 work condition file 3 import / extraction occurrence detection means 4 update means 6 work instruction means

Claims (1)

[Claims] 1. A lot master file that holds a current in-process state for each manufacturing lot or semiconductor wafer, and work conditions to be processed for each manufacturing lot or semiconductor wafer are registered in the order of work, and at least a specific semiconductor of the manufacturing lot. A work condition file having a work-in-process related to each work on the wafer and a flag for instructing the presence or absence of each work, and a change in progress of the work of the flag held in the work condition file to the manufacturing apparatus for the manufacturing lot or the semiconductor wafer The intake / extraction occurrence detecting means for detecting that the intake / extraction should be taken in or out, and when the intake / extraction occurrence detecting means does not detect that the intake / extraction is to be taken in, it is necessary to directly proceed to the next work. Give a work instruction, and the above-mentioned intake / extraction occurrence detection means Work instruction management apparatus for semiconductor wafer process being characterized in that to automatically instruct the intake or removal of the semiconductor wafer when it detects that Shiosu should