JPH06318166A - Work information managing device - Google Patents

Abstract

PURPOSE:To shorten the stopping time of a manufacturing lot by copying by copying only work information relating to change on a data base for reference corresponding to a copy request when the copy request is made by designating a work group for which the change registration of the work information is performed on a data base for registration. CONSTITUTION:A compatibility detecting means 9 detects the compatibility of the work information relating to the copy request abstracted by a change information abstracting means 8. A copy means 10 copies the change work information on a reference use data base 2b when a detection result to the effect the existence of compatibility is generated from the compatibility detecting means 9. Thence, a copy result display processing means 11 displays the response result of a work information managing device for the copy request from a terminal 3 for registrant on the display 4 of the terminal 3. An information for reference output means 12 outputs work information for manufacturing lot management addressed to a computer for real time management from the reference use data base 2b to an interface 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work information management device, and more particularly to executing each work from a registration database capable of registering work information relating to work conditions of a series of works for each manufacturing lot. The work information registered in the registration database is copied to the reference database that stores the work information as the reference source of the work information of each manufacturing lot by the work information stored in the reference database. The present invention relates to a work information management device configured to instruct the work conditions.

[0002]

2. Description of the Related Art Semiconductor device manufacturing management is performed by a host computer issuing work instructions to each worker through a terminal device arranged for each manufacturing device in a clean room. . FIG. 5 is a block diagram showing a conventional example of a production management system using such a computer. c is a batch processing host computer, a is a reference database, b is an update database, d is an interface, and e is an instruction from the host computer 1 via the interface d, and the manufacturing lot actually flowing through the line. A computer for real-time management that manages the computer terminal f
Lot management is performed by giving work instructions to ₁ , f ₂ . The terminals f ₁ , f ₂ , ... Are provided corresponding to the respective manufacturing apparatuses g ₁ , g ₂ ,. h is a terminal used by a registrant who registers work data.

The management of the manufacturing lot is performed by the computer c, such as the sequence of a series of operations related to each manufacturing lot, the working conditions of each working, etc. (manufacturing basic information).
Is stored in the database in advance, and the host computer c takes out work data required for real-time management by the real-time management computer e from the database each time and gives it to the computer e via the interface d. . The real time management computer 4 is a host computer c
When the work data is received from the device, the work data is appropriately sent to the terminal for the manufacturing apparatus g to give a work instruction.

The conventional lot management apparatus has a reference database a and an update database b as databases for storing basic information for lot management. The work data taken out by the host computer c as needed for the lot management and sent to the real-time management computer e was the data in the reference database a. On the other hand, the update database b
Plays a role of storing the changed data when there is a change, in order to enable the change (update) of the basic information of lot management. The data recorded in the update database b is sent to the reference database a and copied therein when the update arrives at a certain time (for example, twice at 11:30 am and 1:30 pm every day). This essentially changed the data in the database.

Therefore, if the engineer makes an input to change the basic information to the host computer c at any time when there is a reason to change the basic information, the data in the update database b is changed according to the input. The data change is now accepted. Then, at the time of updating, the contents of the updating database b are rewritten according to the contents of the reference database a to realize data change.

[0006]

By the way, the conventional work information management apparatus has the following problems. First, it takes a considerable amount of time to load and copy the data in the update database b into the reference database a, and during that time, the function of the host computer 1 is considerably divided. .

That is, it is usually only a small part of the basic information that the basic information is changed. However, what is rewritten at the time of updating is all the basic information stored in the reference database a.
It contains all the information necessary for lot management of various ICs such as CMOS ICs and solid-state image sensors, and the amount of data is enormous. Therefore, it takes, for example, 30 minutes to 1 hour to copy the data, the host computer is completely devoted to the copy during that time, and the line is stopped during that time. In this case, a reduction in production amount due to the stop of the line causes a huge loss, and further, a consumption amount per unit time and a use efficiency of the host computer 1 having a high operating cost are reduced, which in turn increases the manufacturing cost of the semiconductor device. Contribute to.

Second, since the data in the registration database is copied to the reference database on a regular basis,
Even if the work information is registered because it is necessary to immediately change the work conditions of the manufacturing lot currently flowing to the site, the contents of the reference database a cannot be changed until the next copy. Therefore, there is a problem that the working conditions of the manufacturing lot are not changed. For example, the contents of the reference database are not switched until it is time to make a copy even if the change registration of the work information is made in order to change the work condition of the next work for the manufacturing lot that is currently under work. Therefore, if the manufacturing lot has completed the next work related to the change registration by the copy time, the work will be performed according to the old work information.

When the copy time arrives during the change registration of the work information, the contents of the change work at the stage when the change is not completely made are copied to the reference database a,
This will be reflected in the manufacturing lot, which may cause a great inconvenience. This is also a problem that occurs because copying from the registration database to the reference database is regular.

Next, if there is a change registration of the work information, the work information after the change and its manufacturing lot are forcibly copied regardless of the validity of the change contents from the registration database to the reference database. It may not be consistent with the current situation. For example, if a lot of work is in progress and you think that it may not be in progress, you make a change to delete the work, and as a result the production lot cannot be moved, or the work equipment information is changed during the work (for example, the diffusion device). In the case where an instruction to perform the diffusion by the diffusion device B is given even though the diffusion by A is being performed), there arises such a disadvantage that the work cannot be completed.

In such a case, it becomes impossible to instruct the worker in the clean room by the work information management device, and the work of the manufacturing lot is delayed. In order to recover this, it is necessary to investigate the cause and correct the data, and this work must be done by a system developer for a considerable amount of time. This causes a huge loss. In other words, the loss due to a large delay in the progress of the work of the lot and the ability and energy of the system developers who should be engaged in system development that should be done one after another are the recognition by the work information registrant side. Every time an inconvenience occurs due to a lack of consistency with the current situation in the line, a loss is generated because it is divided for investigating the cause, which is a large loss.

Further, the work information registrant may register wrong work information in some cases, but even in this case, conventionally, the contents of the registration database b are unchanged as they are in the reference database a.
It has been copied to, causing various inconveniences. For example, if the diffusion temperature is 1000 ° C
Since the temperature was set to 00 ° C., the temperature of the diffusion device became abnormally high, and all lots became defective.

The present invention has been made to solve such a problem, and shortens the time required for copying from the registration database to the reference database, thereby making it possible to stop the operation of the manufacturing lot by copying. And the copy time from the registration database to the reference database can be selected at any time so that the time for which the registered information of the work information is reflected in the manufacturing lot can be selected arbitrarily. Due to the inconsistency between the changed contents and the current situation in the production lot line, the progress of the production lot operation is stopped and the system administrator needs a lot of energy to investigate the cause. However, by preventing it from being copied to the reference database, it is possible to prevent a large loss from occurring. And an object thereof.

[0014]

According to a first aspect of the present invention, there is provided a work information management apparatus, wherein when the work information is changed and registered in the registration database and a work group consisting of a plurality of works is designated and a copy request is made. Only the work information related to the change is copied to the reference database in response to the copy request. A work information management apparatus according to claim 2, wherein when the work information is registered in the registration database, change information storage processing means for storing only the work information related to the change by the registration, and when a copy request is made. Change information extracting means for extracting only the work related to the change from the work group requested to be copied from the registration database, and the work information related to the change is read from the change information extracting means when a copy request is made, and the change is made. Consistency detecting means for detecting the validity of the work information according to the above, and only the work information related to the change in response to the copy request when the detection result indicating that there is consistency is generated by the above-mentioned consistency detecting means. Is characterized in that it is adapted to be copied.

According to another aspect of the work information management apparatus of the present invention, the change work information includes the change date and time area and the copy date and time area, and the date and time when the change is registered is stored in the change date and time area. When the change work information is copied to the reference database, the date and time is stored in the copy date and time area, and the stored content of the change date and time area is switched to the copy date and time. When the copy request is made, the work date and time stored in the change date area and the copy date and time area are compared for each piece of work information of the work group for which the copy request is made, and a comparison result of non-coincidence occurs. It is characterized in that only the work information is copied from the registration database to the reference database.

In the work information management apparatus of the fourth aspect, the consistency detection target by the consistency detection means has the validity of the parameters of the work information itself and the validity of the influence on the production lot due to the change of the work information. The detection result indicating that there is consistency when these two validity values are output from the consistency detection means. Claim 5
The work information management device is characterized in that, when the consistency detection means produces a detection result indicating that there is no consistency, the cause thereof is displayed.

[0017]

According to the work information management apparatus of the present invention, even if the work information related to the change is recorded in the change information storage means, the copy is not made unless there is the copy request. Therefore, the copy request is made at any time. Thus, it is possible to arbitrarily select a time point at which the work information related to the change is reflected in the manufacturing lot. Therefore, all the inconveniences caused by the periodical copying from the registration database to the reference database are eliminated. Next, instead of copying all the contents of the registration database to the reference database all at once, only the work information related to the change is copied, so the time required for the copy is significantly reduced, and the change related to the change is performed during the copy. Only the production lot line needs to be stopped, and the loss caused by the work stoppage due to copying can be extremely reduced.

According to the work information management apparatus of claim 2, when the copy request is made, the consistency detection means detects whether or not there is consistency in the work information requested to be copied.
There is no fear that the inconsistent work information will be taken into the reference database to cause inconvenience on the line, or the system development engineer will be devoted to investigating the cause. According to the work information management device of claim 3, when the change work information is registered, a change date and time area and a copy date and time area are secured together with the change work information, and the change date and time is stored in the change date and time area. The copy date and time is stored in the area, and the date and time stored in the change date and time area is switched to the copy date and time. Therefore, when a copy request is made, whether the change work information has been copied or not has been copied to the change date and time area. It is possible to easily make a determination by comparing the date and time in the date and time area, and it is possible to copy only the unmodified change work information based on the determination result.

According to the work information management device of claim 4, the validity of the parameter itself of the changed work information and the validity of the influence of the change of the work information on the production lot of the line are checked by the consistency detection means. Since the inconsistent work information is incorporated into the reference database, various inconveniences can be prevented in advance because the copying is performed by. According to the work information management apparatus of claim 5, when there is inconsistent work information registration, the reason is displayed, so it is quick and easy to re-register after correcting the work information to be consistent. Can be easily prompted.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The work information management apparatus of the present invention will be described in detail below with reference to the illustrated embodiments. 1A and 1B show one embodiment of the work information management apparatus of the present invention.
Is a block diagram of a main part, and FIG. 7B is a flowchart showing an outline of the operation. First, a main part of the work information management apparatus will be described with reference to FIG. In the drawing, 1 is a host computer and 2 is a database, which comprises a registration database 2a and a reference database 2b. The two databases 2a and 2b may be formed by separate memories, or may occupy different areas of one memory. The registration database 2a stores work information when manufacturing lot management work information is input and when work information for changing the input work information is input.

The reference database 2b is for copying the contents of the registration database 2a and storing it as data to be used for management of manufacturing lots. When a copy request is made, the process that made the copy request [herein In the above, the process means the whole work information of a series of works (work group) required for completion of one manufacturing lot. ], Only the information in which the work information of the work relating to the change is rewritten is copied to the reference database 2b. 3 is a terminal for the registrant, in which the registrant inputs work information,
The change work information is input, the copy request is input, and the display 4 displays the response of the work information management device to the copy request.

An interface 5 contributes to the exchange of information between the host computer 1 and a real-time management computer (not shown). A terminal device provided corresponding to each manufacturing device is connected to the real-time management computer. This interface 5, real-time management computer, each terminal device,
There is no difference in each manufacturing apparatus from the conventional case shown in FIG. Next, the main function of the host computer 1 will be described. Reference numerals 6 to 12 represent the main functions performed by the host computer 1 by executing the program in the form of blocks.

Reference numeral 6 denotes work information registration processing means, which stores the work information in the registration database 2a when the engineer edits work information necessary for manufacturing each manufacturing lot and inputs it by operating the terminal 3. To process. Reference numeral 7 is a change information registration processing means, which has already registered database 2a.
When an input is made to make a change to the work information of the process registered in the step 2, the changed work information is registered in the registration database 2b. This function will be described in detail later.

Reference numeral 8 is a change information extracting means, which operates to extract work information related to the change when a copy request is made by operating the terminal 3. This function will also be described in detail later. Reference numeral 9 denotes a consistency detecting unit that detects the consistency of the work information related to the copy request extracted by the change information extracting unit 8. Consistency to detect whether there is an incorrect setting in the parameter setting of work information (validity)
And there is consistency (validity) as to whether the parameter change of the work information matches the current state of the line, and if the consistency of both is not met, the detection output indicating that there is consistency does not occur.

Reference numeral 10 denotes a copy means, which functions to copy the change work information to the reference database 2b when the consistency detection means 9 detects that there is consistency. Reference numeral 11 denotes a copy result display processing means, which has a function of displaying the response result of the work information management apparatus to the copy request from the registrant terminal 3 on the display 4 of the terminal 3. Reference numeral 12 is a reference information output means for outputting production lot management work information addressed to a real-time management computer (not shown in FIG. 1) from the reference database 2b to the interface 5.

Next, the operation when a change information registration input and copy request are made will be described with reference to FIG.
When an input is made from the terminal 3, it is determined whether or not the input is an input for registering work information or change work information. If the determination result is Yes, the input work information or change work information Is registered in the registration database 2a.

Note that FIGS. 2A to 2E show an example of changes in the work information of a process (process name A) in which registration and change registration have been performed. When a series of work information is registered for a certain process for the first time, the inputted series of work information is registered in the registration database 2a as it is. At that time, the change date area and the copy date area are added to the work information. Along with this, registration is made in the registration database 2a, and at the same time, the date and time of the registration is written in the change date and time area. FIG. 2A shows the state immediately after the writing.

As shown in FIG. 2A, when work information is registered for one process (process A in this case) (this first registered work information copying means is information 1).
Hereafter, each time the change work information is registered for this process A, information 2 and information 3 are numbered in the order of registration. ), The change date and time area 6a and the copy date and time area 6b are secured corresponding to this work information, that is, the information 1, and the date and time of the registration is stored in the change date and time area 6a. This date and time is the year according to the year (eg 19
93), month (eg 09), day (eg 01, 04),
It is expressed by sequentially arranging numbers indicating hours (for example, 09, 12), minutes (for example, 00, 30), and seconds (for example, 00, 30) in 24-hour display. Therefore, if the date and time when the work information was first registered for process A is 19
If it is 02:00 on September 1, 1993 (noon), 19930901120000 is stored in the work information, that is, the change date / time area 6a of the information 1.

The copy date and time 6b of the information 1 initially stores 0000000000000000. And
As will be described later, if there is a copy request for process A, and there is consistency and a copy is made for that information 1 in response to that request, that copy is made in the copy date / time area corresponding to that information 1. The date and time of the modification are stored, and the date and time of the modification date and time area in which the modification date and time is already stored are rewritten to the date and time when the copy was made. Therefore, the date and time when the copy was made is, for example, 19
If it is 2:00 pm on September 1, 1993, then Figure 2
As shown in (B), 199309011400000 includes the change date / time area 6a and the copy date / time area 6b of the information 1.
Will be stored in both.

Next, for the same process A, already information 1
When the input for registering the information 2 to be changed is made from the registrant terminal 3 after the is registered, the change work information is registered by the operation of the change information registration processing means 7 in FIG. The change information registration processing means 7 registers a process (for example, process A) for which work information has already been registered when input is made to register work information for changing the process information. However, as shown in the flow chart of FIG. 3, if change work information is input, it is confirmed whether the work information already exists in the registration database 2a, and if it already exists, the existence of the change work information exists. Change the date and time in the change date and time area for the work information you are using to the current date and time. Further, if the changed work information is information that does not originally exist in the registration database 2a, an area for storing the information is secured and then stored in that area, and the change date and time corresponding to the stored work information. The date and time of the change registration is stored in the area.

Next, the case where a copy request is made will be described. The copy request is made by specifying the process. When a copy request is made, the change information extraction means 8
Then, the work information changed for the process for which the copy request is made is searched for, and the work information is extracted and provided to the consistency detection means as the target of the consistency judgment. by the way,
The change information is extracted by the respective work information [for example, information 1, information 2, information 3, ...
2 (A) to (E)], change date and time area 6
This is performed by comparing a and the stored dates and times in the copy date and time area 6b, and determining work information in which the dates and times do not match as uncopied work information.

Here, the case where a copy request is made when the work information is in the state shown in FIG. 2C will be described as an example. Regarding the information 1, the work information area 6a
And the copy date and time 6b have the same date and time. That is, both 1
It is 99309011400000, and it can be seen that it was copied at 2:00 pm on September 1, 1993. It should be noted that when the work information is registered is unknown because the date and time of the change date and time area is switched to the copy date and time at the time of copying, but there is no particular problem because it is unknown. Regarding the information 2, the date and time of the work information area 6a is 1993.
However, since the date and time of the copy date and time area 6b is 0000000000, the date and time of both areas 6a and 6b do not match. This is because information 2 is registered on September 3, 1993 at 8:00:00. Indicates that it has been copied but has not yet been copied.

The work information in which the dates and times of the change date and time area 6a and the copy date and time area 6b do not match in this manner is not copied information and is therefore extracted as work information to be copied. Incidentally, if a copy request is made when the work information is in the state shown in FIG. 2D, the information 3 is extracted as the work information to be copied.

In this way, when there is a copy request and the work information to be copied is extracted by the change information extracting means 8,
The work information is not immediately copied to the reference database 2b, but the consistency detection unit 9 detects the presence or absence of the consistency and permits the copying of the work information only when it is determined that there is the consistency. In case of consistency, copy is not performed. FIG. 4 is a flowchart showing the operation of the consistency detecting means 9. As shown in FIG. 4, the consistency detecting means 9 first determines whether or not there is an error in the parameter of the work information registered or changed and registered. To do. There are many targets for this judgment, but examples include checking the existence of a work device (a work device that does not exist by mistake may be specified, but that check), and checking the existence of measurement information when performing measurement work. (When performing measurement work, it is not possible to perform measurement unless the information necessary to perform the measurement exists as a premise, but there are cases in which measurement is mistakenly attempted to occur even if the measurement information does not exist. Check it).

When the parameter check is completed and no error occurs, lot master check is performed. This confirms that there is no inconsistency between the change work information and the current status of the production lot in the line.
There are many types of objects that are subject to this parameter check, but examples include the presence check of work in process of a lot, the change check of work in process equipment, and the like. It is possible to prevent the change by omitting the work by the device from the process. If such a check is not carried out, the production lot in process of the device may become inoperable.

When the presence / absence of the consistency is detected and the detection result indicating the consistency is output from the consistency detecting means 9, the copy means 10 functions to refer to the change work information in the registration database 2a. A copy is made to the business database 2b. Then, the copy result display processing means 11 performs a process for causing the display 4 of the terminal 3 to display that the copying has been normally performed. Then, the fact is displayed on the display.

As described above, when the data is copied by the copy means 10 with consistency, the copy date and time is stored in the copy date and time area of the change work information, and the date and time of the change date and time area is changed from the change date and time to the copy date and time. Switch to. For example, when the change work information is the information 2 and the consistency detection result based on the copy request of the process A is OK, the state of FIG. 2C is changed to the state of FIG. Further, when the change work information is information 3, FIG. 2 (E)
The state of FIG. 2 changes to the state of FIG.

If there is no consistency, the copy is not performed, and a display indicating that the copy request cannot be responded is made for that reason. Therefore, the registrant can know the cause of the inconsistency from the display and recognize that the consistent change should be made.

[0039]

The work information management apparatus according to the first aspect of the invention responds to the copy request when a change request of the work information is registered in the registration database and a work group consisting of a plurality of works is designated and a copy request is made. Only the work information related to the change is copied to the reference database. Therefore, according to the work information management apparatus of the first aspect, by making a copy request at any time, it is possible to arbitrarily select the point of time at which the reflection of the work information related to the change is started in the manufacturing lot. Therefore, all the inconveniences caused by the periodical copying from the registration database to the reference database are eliminated. next,
Since the contents of the registration database are not copied all at once to the reference database but only the work information related to the change is copied, the time required for copying is significantly shortened, and the manufacturing lot related to the change is copied during copying. Only the line needs to be stopped, and the loss caused by the work stoppage due to copying can be extremely reduced.

According to another aspect of the present invention, there is provided a work information management device, which stores change information storage processing means for storing only work information related to a change made by the registration when the work information is registered in the registration database, and a copy request. Change information extraction means for extracting only the work related to the change from the work group requested to be copied from the registration database when read, and the work information related to the change read out from the change information extraction means when there is a copy request And at least a consistency detection unit that detects the validity of the work information related to the change, and when the detection result that there is consistency is generated by the consistency detection unit, the change is performed according to the copy request. The feature is that only the work information is copied.
Therefore, according to the work information management apparatus of the present invention, when the copy request is made, the consistency detection means detects the consistency of the work information requested to be copied. There is no risk of being taken in and causing inconvenience on the line, or devoting energy to the system development engineer to investigate the cause.

In the work information management device according to claim 3, the change work information is accompanied by a change date and time area and a copy date and time area, and the date and time when the change is registered is stored in the change date and time area. When the change work information is copied to the reference database, the date and time is stored in the copy date and time area, and the stored content of the change date and time area is switched to the copy date and time. When the copy request is made, the work date and time stored in the change date area and the copy date and time area are compared for each piece of work information of the work group for which the copy request is made, and a comparison result of non-coincidence occurs. Only the work information is targeted for consistency detection by the consistency detection means and copying from the registration database to the reference database. Those characterized by comprising.
Therefore, according to the work information management apparatus of claim 3, when the change work information is registered, the change date / time area and the copy date / time area are secured along with the change work information, and the change date / time is stored in the change date / time area. The copy date / time is stored in the copy date / time area, and the date / time stored in the change date / time area is switched to the copy date / time. Therefore, it is determined whether the change work information has been copied or not copied. It is possible to make a judgment easily by comparison, and it is possible to copy only the unmodified copy work information based on the judgment result.

In the work information management apparatus according to the fourth aspect, the consistency detection target by the consistency detection means has the validity of the parameters of the work information and the validity of the influence on the production lot due to the change of the work information. The detection result indicating that there is consistency when these two validity levels are output from the consistency detection means. Therefore, according to the work information management device of claim 4, after the validity of the parameter itself of the changed work information and the validity of the influence of the change of the work information on the production lot of the line are checked by the consistency detection means. Since copying is performed, it is possible to prevent the inconsistent work information from being incorporated into the reference database and causing various inconveniences.

The work information management apparatus according to claim 5 is characterized in that, when a detection result indicating inconsistency is generated from the consistency detection means, the cause thereof is displayed. Therefore, according to the work information management device of claim 5, when there is inconsistent work information registration, the reason thereof is displayed, so that it is possible to correct the work information and then register again. Prompted quickly and easily.

[Brief description of drawings]

1A and 1B show one embodiment of a work information management apparatus of the present invention, FIG. 1A is a block diagram, and FIG.
Is a flowchart.

FIG. 2A to FIG. 2F are conceptual diagrams showing one change example of work information in a change order.

FIG. 3 is a flowchart showing an operation of a change information registration processing means.

FIG. 4 is a flowchart showing the operation of the consistency detection means.

FIG. 5 is a block diagram of a conventional example.

[Explanation of symbols]

 1 Computer 2a Registration Database 2b Reference Database 3 Terminal 6 Work Information Registration Processing Means 7 Change Information Registration Processing Means 8 Change Information Extracting Means 9 Consistency Detecting Means 10 Copying Means 11 Copy Result Display Processing Means

Claims (5)

[Claims] 1. A reference for storing work information as a reference source for executing each work from a registration database capable of registering work information relating to work conditions of a series of works for each manufacturing lot. Work information that is copied to the database by the work information copying means, and the work information stored in the reference database indicates work conditions for each work of each manufacturing lot. In the management device, when the change registration of the work information is performed in the registration database and a copy request is made by designating a work group consisting of a plurality of works, only the work information related to the change according to the copy request is referred to above. A work information management device characterized by being copied to a database 2. A parameter of work information as a reference source for executing each work is stored from a registration database capable of registering work information related to work conditions of each series of works for each manufacturing lot. The work information registered in the registration database is copied to the reference database by the work information copying means, and the work information stored in the reference database is used to instruct the work condition for each work of each manufacturing lot. In the work information management device, when the work information is registered in the registration database, a change information storage processing unit that stores only work information related to a change by the registration, and a registration database when a copy request is made. Change information extractor that extracts only the work related to the change from the work group requested to be copied from And a consistency detection unit that reads the work information related to the change from the change information extraction unit when a copy request is made and detects the validity of the work information related to the change. The work information management apparatus is configured to copy only the work information related to the change in response to the copy request only when the detection result that the means has the consistency is generated. 3. A parameter of work information as a reference source for executing each work from a registration database capable of registering parameters of work information related to work conditions of each series of works for each manufacturing lot. The work information registered in the registration database is copied to the reference database to be stored by the work information copy means, and the work information stored in the reference database is used to indicate the work condition for each work of each manufacturing lot. When there is a copy request, at least a change information storage processing means for storing only the work information related to the change by the registration when the change registration of the work information is made in the registration database, In a work information management device configured to copy work information in response to a copy request, The change work information is registered in the registration database with the change date and time area and the copy date and time area, and the date and time when the change is registered is stored in the change date and time area. When the change work information is copied to the reference database, its date and time is stored, and the contents stored in the change date and time area are switched to the copy date and time. When there is a request, the date and time stored in the change date and time area and the copy date and time area are compared for each piece of work information of the work group for which a copy request has been made, and only work information for which a comparison result of inconsistency has occurred is registered. A work information management device characterized in that it is adapted to be copied from a database to a reference database. 4. The consistency detection target by the consistency detection means includes the validity of the parameter of the work information itself and the validity of the influence on the production lot due to the change of the work information. The work information management apparatus according to claim 2, wherein the detection result indicating that there is consistency is output from the consistency detection means. 5. The work information management apparatus according to claim 2 or 4, wherein when a detection result indicating that there is no consistency is generated from the consistency detection means, the cause is displayed.