JP2885532B2 - In-process quantity display device for jig / tool name of semiconductor equipment lot - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an in-process display device for a lot of semiconductor devices, and more particularly to a display device for determining the use order of jigs and tools.

[0002]

2. Description of the Related Art Heretofore, a device for displaying the number of in-process pieces for each jig and tool name of this kind of semiconductor device lot displays only the number of in-process pieces for each jig and tool.

[0003]

In a semiconductor manufacturing plant,
A wide variety of semiconductor devices are manufactured, and these semiconductor devices are manufactured through as many as 50 to 500 processes. Since many different jigs and tools are used depending on the type and process of the semiconductor device, a very large number of jigs and tools are used.

Further, in order to achieve a delivery date and to level the work-in-progress, each semiconductor device lot is assigned a priority, and a work-wearing procedure is determined.

Further, in order to minimize the damage when a defect caused by the jig and the tool occurs, the jig and the tool are regularly inspected and cleaned.

[0006] For this reason, if only the in-process quantity for each jig tool name is displayed as in the prior art, the jig and tool having a large in-process quantity are used preferentially, so that a small number of types are manufactured in a short period of time. It was difficult. In addition, since it is not known when to check or periodically clean the jigs and tools, the jigs and tools cannot be prepared in advance, and the operation rate of the semiconductor manufacturing apparatus is reduced.

It is an object of the present invention to solve the above-mentioned drawbacks by displaying necessary information on one screen, and to facilitate the selection and management of jigs and tools for a jig / tool of a semiconductor device lot. It is to provide a display device.

[0008]

In order to achieve the above-mentioned object, a semiconductor device lot in-process display device for jig name of a semiconductor device lot according to the present invention has a processing unit and a display unit. An in-process quantity display device by tool name, wherein the processing unit uses the in-process quantity of each semiconductor device lot being manufactured by a jig / tool priority in a specific semiconductor device manufacturing process and a specific jig / tool. Then, data is collected on the quantity that can be processed before the inspection of this jig and the quantity that can be processed before the periodic cleaning of this jig using a specific jig. The data of the quantity collected by the department is displayed collectively on the screen.

[0009]

According to the present invention, the in-process quantity display device for each jig tool name of the semiconductor device lot according to the present invention uses the in-process quantity for each jig tool name according to the priority order and a specific jig tool to check the jig tool. Using a processable quantity and a specific tool, the quantity that can be processed by the regular cleaning of the tool is displayed on one side.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing an embodiment of the present invention.

In FIG. 1, a production line constituted by a semiconductor manufacturing apparatus 1, a jig / tool cleaning apparatus 2, and a host computer 3 as a processing section for managing the semiconductor manufacturing apparatus 1, a work quantity display section 4 of the present invention as a terminal. is set up.

The semiconductor manufacturing apparatus 1 is provided with an apparatus for inspecting jigs and tools. When a jig is replaced, the jigs and tools are automatically inspected.

Semiconductor manufacturing apparatus 1 and jig cleaning apparatus 2
Are connected to the host computer 3 online. Each semiconductor manufacturing apparatus 1 notifies the host computer 3 of information on when and which semiconductor device lot was processed and when and which jig was attached to the manufacturing apparatus. Further, the jig / tool cleaning device 2 notifies the host computer 3 of information on when and which jig / tool was cleaned.

Therefore, information indicating the state of all the semiconductor device lots and the state of all the jigs and tools is input to the host computer 3.

In the host computer 3, a program for realizing the present invention is executed. The program is output to the display unit 4 for the jig / tool name of the semiconductor device lot of this embodiment by operating the terminal. .

FIG. 2 shows a screen displayed on the display unit 4 as a terminal. The jig in this case is a photomask used when performing alignment exposure in the diffusion process of the semiconductor device. Photomasks have different names depending on the type and process used, and a plurality of photomasks exist with the same name.

In FIG. 1, there are photomasks A, B, and C, and the total number 11 of the photomasks that can be processed by the periodic cleaning and the number of in-process pieces 12, 13, and
14, 15 and a total of 16 which can be processed before the inspection are displayed.

For example, the in-process quantity 12,
The total of 13, 14, and 15 is the largest for the photomask B, but the in-process quantity 12 with the highest priority of priority 1 is the largest for the photomask A, so the photomask A is given priority. It turns out that it needs to be used.

Since the total number 11 of the photomasks A that can be processed before the periodic cleaning is larger than the total number of the in-process quantities 12, 13, 14, and 15 by priority, the photomasks need to be cleaned immediately. There is no, but the total quantity 16 that can be processed before the inspection is the in-process quantity 1 by priority.
Since it is smaller than the sum of 2, 13, 14, and 15, it can be seen that not all semiconductor device lots can be processed only with the photomask currently in use.

FIG. 3 shows the photomask A of FIG.
It is a detailed screen which showed the quantity which can be processed before a regular cleaning, and the quantity which can be processed before an inspection about one photomask.

Since the quantity that can be processed before the inspection is determined when the photomask is attached to the semiconductor manufacturing apparatus, the photomask whose quantity is 0 indicates that it is not currently used.

Looking at this, it can be seen that the photomasks A-1 and A-
2 is currently in use, and A-2 has the same quantity 17 that can be processed before the periodic cleaning and the quantity 18 that can be processed before the inspection, so it can be seen that cleaning is required at the same time as the inspection. Also, it can be seen that A-3 or A-4 should be used instead of A-2.

As described above, by looking at these screens, it is possible to determine, for each photomask, how many semiconductor device lots of priorities are being processed, and when and which photomask should be cleaned and inspected. Since it can be clearly understood and can be very easily managed in managing the photomask, it is possible to improve the productivity of the semiconductor manufacturing process and the operation rate of the semiconductor manufacturing apparatus.

As a jig in another embodiment of the present invention, a test board or a contact board used for connecting a semiconductor device to a semiconductor inspection device in a semiconductor device inspection process may be used. In the case of this embodiment, these jigs and tools have different names depending on the kind and package used. Further, in the inspection process of the semiconductor device, a burn-in process having a very long processing time and a strict permissible time are provided between the next processes. If the permissible time is exceeded, the burn-in process must be performed again. This significantly reduces the productivity of the semiconductor inspection process.

Therefore, by giving a high priority to a semiconductor device lot with a short remaining allowable time, the same effect can be obtained on the same screen as in the above embodiment.

[0026]

As described above, according to the present invention, it is possible to see at once the quantity of in-process pieces of semiconductor device lots by priority order and the quantity that can be processed before the inspection and periodic cleaning of jigs and tools for each jig name. Therefore, it is possible to know at a glance which jig should be used with priority or which jig should be cleaned when.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention.

FIG. 2 is a diagram showing a screen displayed in the present invention.

FIG. 3 is a diagram showing another embodiment of the display screen in the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Semiconductor manufacturing apparatus 2 Jig and tool cleaning apparatus 3 Host computer 4 Terminal 11 Total quantity that can be processed before periodic cleaning 12 In-process quantity of priority 1 13 In-process quantity of priority 14 In-process quantity of priority 3 15 Priority 4 in-process quantity 16 Total quantity that can be processed by inspection 17 Quantity that can be processed with this photomask by periodic cleaning 18 Quantity that can be processed with this photomask by inspection

Claims (1)

(57) [Claims] 1. A device for displaying the number of in-process pieces by jig name of a semiconductor device lot having a processing unit and a display unit, wherein the processing unit is a semiconductor device lot being manufactured in a specific manufacturing process of the semiconductor device. In-process quantity according to priority of each jig and tool, quantity that can be processed before inspection of this jig using a specific jig, and regular cleaning of this jig using a specific jig performs data collection and processing possible quantity, the display unit, jigs name of the semiconductor device lots, characterized in that the data quantity of the processing unit is collected is for displaying collectively on the screen In-process quantity display device.