JP3027851B2 - How to connect electrical circuit components - Google Patents

How to connect electrical circuit components

Info

Publication number
JP3027851B2
JP3027851B2 JP2093328A JP9332890A JP3027851B2 JP 3027851 B2 JP3027851 B2 JP 3027851B2 JP 2093328 A JP2093328 A JP 2093328A JP 9332890 A JP9332890 A JP 9332890A JP 3027851 B2 JP3027851 B2 JP 3027851B2
Authority
JP
Japan
Prior art keywords
conductor
electric circuit
circuit components
organic resin
conductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2093328A
Other languages
Japanese (ja)
Other versions
JPH03291870A (en
Inventor
和夫 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP2093328A priority Critical patent/JP3027851B2/en
Publication of JPH03291870A publication Critical patent/JPH03291870A/en
Application granted granted Critical
Publication of JP3027851B2 publication Critical patent/JP3027851B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、例えば、半導体製品の実装技術において、
対応する電気回路部品間の電極同士を接続すべく実施さ
れる電気回路部品の接続方法に関し、特に、高密度な接
続を可能とする電気回路部品の接続方法に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to, for example, a semiconductor product mounting technology,
The present invention relates to a method of connecting electric circuit components to connect electrodes between corresponding electric circuit components, and more particularly to a method of connecting electric circuit components that enables high-density connection.

〔従来の技術〕[Conventional technology]

半導体製品の高集積化に伴って、半導体製品またはそ
の周辺機器における電気回路部品同士の高密度接続が要
求されている。また、表示装置にあっても、高画質の画
像表示を可能とするために、ドライバICとディスプレイ
またはプリンタヘッドとの間における高密度接続の実現
が必要である。このような事情により、対応する電気回
路部品間の電極同士を高密度に接続するための接続部材
としての異方性導電膜について、種々の提案がなされて
いる。
2. Description of the Related Art As semiconductor products become more highly integrated, there is a demand for high-density connections between electric circuit components in the semiconductor products or peripheral devices thereof. Further, even in a display device, it is necessary to realize a high-density connection between a driver IC and a display or a printer head in order to enable high-quality image display. Under such circumstances, various proposals have been made for anisotropic conductive films as connection members for connecting electrodes between corresponding electric circuit components with high density.

第4図は、例えば特開昭63−237537号公報に開示され
た電気的接続部材の構成を示す断面図である。例えば金
からなる複数の導電体42を、夫々の導電体42同士が電気
的絶縁状態になるようにポリイミド樹脂からなる保持体
43中に散在せしめて、この電気的接続部材41は構成され
ている。各導電体42の両端部は、保持体43から突出して
おり、その径は保持体43内に埋設される部分の径よりも
大きくなっている。
FIG. 4 is a cross-sectional view showing the configuration of an electrical connection member disclosed in, for example, Japanese Patent Application Laid-Open No. 63-237537. For example, a plurality of conductors 42 made of gold, and a holder made of a polyimide resin such that each conductor 42 is in an electrically insulated state.
The electrical connection members 41 are scattered throughout the structure 43. Both ends of each conductor 42 protrude from the holder 43, and the diameter thereof is larger than the diameter of a portion embedded in the holder 43.

そして、このような構成の電気的接続部材41を接続対
象の電極に重ねて、例えば熱圧着にて1個の電極に1つ
の導電体42の一方の端部を接合する。次に、対応する他
方の1個の電極にこの導電体42の他方の端部を接合し
て、両電極間の電気的接続を達成する。
Then, the electrical connection member 41 having such a configuration is overlapped on the electrode to be connected, and one end of one conductor 42 is joined to one electrode by, for example, thermocompression bonding. Next, the other end of the conductor 42 is joined to the other corresponding one of the electrodes to achieve an electrical connection between the two electrodes.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

上述したような電気的接続部材を用いた電気回路部品
の接続方法においては、以下に示すような問題点があっ
た。電極に接合される導電体の両端部は、保持体中にお
ける部分よりも断面積が大きいので、この突出する両端
部が熱圧着によって断面積が著しく拡大し、隣合う導電
体同士が接合されて短絡する可能性が高く、接続ピッチ
には限界があった。また、導電体を保持する保持体はポ
リイミド樹脂等の有機樹脂からなるので、電極への導電
体の接合工程において、電気的接続部材はたわみ等の変
形が生じ易く、高密度の接続を行い難かった。また有機
樹脂からなる保持体では、耐湿試験中にリーク電流を生
じることもあり、信頼性に問題があった。更に、1個の
電極に1個の導電体を接合させるので、両者の位置合わ
せが必要であり、この位置合わせ作業が煩わしかった。
The method for connecting electric circuit components using the above-described electric connection member has the following problems. Since both ends of the conductor joined to the electrode have a larger cross-sectional area than the part in the holder, the protruding both ends have a significantly increased cross-sectional area by thermocompression bonding, and the adjacent conductors are joined together. The possibility of short-circuit was high, and the connection pitch was limited. In addition, since the holding body that holds the conductor is made of an organic resin such as a polyimide resin, in the step of joining the conductor to the electrode, the electrical connection member is likely to be deformed, such as bending, and it is difficult to perform high-density connection. Was. In addition, in the case of a holder made of an organic resin, a leak current may be generated during a humidity resistance test, and there is a problem in reliability. Furthermore, since one conductor is bonded to one electrode, the two need to be aligned, and this alignment work is troublesome.

本発明はかかる事情に鑑みてなされたものであり、隣
合う導電体同士が短絡する可能がなく、たわみ等の変形
が発生せず、接合時の位置合わせが不要であり、高密度
の接続を容易に達成することができる電気回路部品の接
続方法を提供することを目的とする。
The present invention has been made in view of such circumstances, there is no possibility that adjacent conductors are short-circuited, no deformation such as bending occurs, alignment at the time of joining is unnecessary, and high-density connection is achieved. An object of the present invention is to provide a method for connecting electric circuit components that can be easily achieved.

〔課題を解決するための手段〕[Means for solving the problem]

本発明に係る電気回路部品の接続方法は、対応する電
気回路部品の電極同士を接続すべく実施される電気回路
部品の接続方法において、基体上に形成された有機樹脂
中に、夫々の一端を前記基体に当接させ、他端を前記有
機樹脂から突出させずに複数の導電体を散在させてある
電気的接続部材を用い、該電気的接続部材から前記有機
樹脂を除去して前記基体上に前記複数の導電体を露出さ
せ、これらの露出側を接続対象となる一方の電気回路部
品に重ね、該電気回路部品の電極の夫々に当接する導電
体を転写し、前記電極に転写された導電体を残して前記
基体を除去し、残された導電体に他方の電気回路部品の
対応する電極を位置合わせして重ね、接合させることを
特徴とする。
The method for connecting electric circuit components according to the present invention is the method for connecting electric circuit components implemented to connect electrodes of corresponding electric circuit components, wherein one end of each is placed in an organic resin formed on a base. Using an electrical connection member in which a plurality of conductors are scattered without being in contact with the base and the other end protruding from the organic resin, removing the organic resin from the electrical connection member and removing the organic resin on the base The plurality of conductors are exposed, the exposed sides thereof are superimposed on one electric circuit component to be connected, and the conductors in contact with each of the electrodes of the electric circuit component are transferred, and are transferred to the electrodes. The method is characterized in that the base is removed while leaving the conductor, and the corresponding electrode of the other electric circuit component is aligned, overlapped, and joined to the remaining conductor.

〔作用〕[Action]

本発明においては、有機樹脂からの導電体の突出部を
有しない電気的接続部材を用いる。従って、有機樹脂外
に突出している場合に比べて接合時に接合面積の増加は
少なくなり、隣合う導電体間のピッチが小さい場合にお
いても短絡する虞はない。基体を付けたままで、電極に
導電体を転写,形成するので、剛性が増してたわみ等の
変形が生じない。また、1個の電極に対して複数の導電
体を転写,形成するので、電極と導電体との位置合わせ
は不要である。更に、有機樹脂を伴わないので耐湿の信
頼性も優れている。
In the present invention, an electrical connection member having no protrusion of the conductor from the organic resin is used. Therefore, an increase in the bonding area at the time of bonding is smaller than that in the case of protruding outside the organic resin, and there is no risk of short-circuiting even when the pitch between adjacent conductors is small. Since the conductor is transferred and formed on the electrode while the base is still attached, the rigidity is increased and deformation such as bending does not occur. In addition, since a plurality of conductors are transferred and formed for one electrode, there is no need to position the electrodes and the conductor. Further, since no organic resin is involved, the reliability of moisture resistance is also excellent.

〔実施例〕〔Example〕

以下、本発明をその実施例を示す図面に基づいて具体
的に説明する。
Hereinafter, the present invention will be described in detail with reference to the drawings showing the embodiments.

第1図は、本発明に係る電気回路部品の接続方法(以
下本発明方法という)の実施に用いる電気的接続部材1
の構成を示す断面図、第2図はこの電気的接続部材1の
平面図である。図において、2は例えばガラス,ITO等か
らなる基体を示す。基体2上には、例えば感光性の樹脂
からなる有機樹脂3が形成されている。有機樹脂3中に
は、例えば金からなる複数の導電体4が、互いに接する
ことなく分散して設けられている。各導電体4の一端4a
は基体2に接しており、各導電体4の他端4bは有機樹脂
3の上面から突出していない。なお、各導電体4の直径
は5μm,導電体4の形成ピッチは7μmである。
FIG. 1 shows an electric connection member 1 used for carrying out a method for connecting electric circuit components according to the present invention (hereinafter referred to as the method of the present invention).
FIG. 2 is a plan view of the electrical connection member 1. FIG. In the figure, reference numeral 2 denotes a substrate made of, for example, glass, ITO, or the like. An organic resin 3 made of, for example, a photosensitive resin is formed on the base 2. In the organic resin 3, a plurality of conductors 4 made of, for example, gold are provided in a dispersed manner without being in contact with each other. One end 4a of each conductor 4
Is in contact with the base 2, and the other end 4 b of each conductor 4 does not protrude from the upper surface of the organic resin 3. The diameter of each conductor 4 is 5 μm, and the formation pitch of the conductors 4 is 7 μm.

次に、このような構成の電気的接続部材の製造方法に
ついて説明する。
Next, a method of manufacturing the electrical connection member having such a configuration will be described.

まず、基体に感光性の有機樹脂を塗布し、フォトリソ
グラフィにより有機樹脂に所定パターンの複数の穴を形
成する。次に、基体が導電性である場合には基体を共通
電極として、基体が導電性でない場合には基体表面に導
電性被膜を形成してこれを共通電極として、金メッキに
より、形成した穴に金を充填して複数の導電体を形成す
る。この際、導電体(金)が有機樹脂から突出しないよ
うに、メッキ電流密度及び/またはメッキ時間を設定す
る必要がある。
First, a photosensitive organic resin is applied to a base, and a plurality of holes having a predetermined pattern are formed in the organic resin by photolithography. Next, when the base is conductive, the base is used as a common electrode. When the base is not conductive, a conductive film is formed on the surface of the base and used as a common electrode. To form a plurality of conductors. At this time, it is necessary to set the plating current density and / or the plating time so that the conductor (gold) does not protrude from the organic resin.

なお、本実施例では、導電体を金の単一層としたが、
水溶液からの電析が可能である金属であれば金以外の金
属でも良く、また単一層であっても複数層であっても良
い。また、有機樹脂は感光性であるとしたが、例えばレ
ーザビームの照射等により複数の穴を形成する場合に
は、感光性樹脂でなくても良い。
In the present embodiment, the conductor is a single layer of gold.
A metal other than gold may be used as long as it can be electrodeposited from an aqueous solution, and may be a single layer or a plurality of layers. In addition, the organic resin is photosensitive. However, in the case where a plurality of holes are formed by, for example, irradiation with a laser beam, the organic resin may not be photosensitive resin.

次に、このような構成の電気的接続部材を用いて行な
われる本発明方法の実施手順について説明する。第3図
は、この実施手順を示す模式的断面図である。
Next, the procedure of implementing the method of the present invention, which is performed using the electrical connection member having such a configuration, will be described. FIG. 3 is a schematic sectional view showing this procedure.

第3図(a)は、接続対象の一方の電極へ電気的接続
部材1の導電体4を転写,形成する熱圧着工程を示す。
接続対象の複数の電極12を有する基板11をステージ13上
に載置した後、有機樹脂3を除去した電気的接続部材1
を、導電体の他端4bが電極12に接するように、基板11に
重ね、熱転写用の治具14を用いて、各電極12に複数の導
電体4を転写,形成する。ここで、電極12の幅に対して
導電体4の形成ピッチが十分に小さいので、従来のよう
な電極と導電体との位置合わせを行わなくても、各電極
12に必ず複数個の導電体4を転写,形成できる。次に、
第3図(b)に示すように、転写された各複数の導電体
4を夫々の電極12上に残し、基体2のみを剥がす。
FIG. 3A shows a thermocompression bonding step of transferring and forming the conductor 4 of the electrical connection member 1 to one electrode to be connected.
After the substrate 11 having the plurality of electrodes 12 to be connected is mounted on the stage 13, the electrical connection member 1 from which the organic resin 3 is removed
Is stacked on the substrate 11 so that the other end 4b of the conductor is in contact with the electrode 12, and a plurality of conductors 4 are transferred and formed on each electrode 12 using a jig 14 for thermal transfer. Here, since the formation pitch of the conductor 4 is sufficiently small with respect to the width of the electrode 12, each electrode can be formed without performing the conventional alignment between the electrode and the conductor.
A plurality of conductors 4 can be transferred and formed on the substrate 12 without fail. next,
As shown in FIG. 3 (b), the transferred conductors 4 are left on the respective electrodes 12, and only the base 2 is peeled off.

次いで、第3図(c)に示すように、接続対象の他方
の電極15を有する基板16を、これらの電極15が前記基板
11の対応する電極12に残された導電体4の一端4aに接す
るように位置合わせして導電体4に重ね、熱圧着または
圧着用の治具17を用いて熱圧着または圧着により、各電
極15に複数の導電体4を接合させる。この際の接合方法
は、熱圧着または圧着の何れでも良いが、接合後の残留
応力を緩和するためには圧着工程の方が好ましい。ま
た、電極15と導電体4との間に光または熱硬化性の樹脂
を装填し、樹脂の硬化時の応力により接合させても良
い。第3図(d)は、対応する電極12,15同士の接続が
完了した状態を示している。
Next, as shown in FIG. 3 (c), a substrate 16 having the other electrode 15 to be connected is connected to the substrate
Each of the electrodes 11 is aligned by touching one end 4a of the conductor 4 left on the corresponding electrode 12 and placed on the conductor 4 by thermocompression or crimping using a thermocompression or crimping jig 17. A plurality of conductors 4 are bonded to 15. The bonding method at this time may be either thermocompression bonding or compression bonding, but the compression bonding step is more preferable in order to reduce residual stress after bonding. Alternatively, a light or thermosetting resin may be loaded between the electrode 15 and the conductor 4 and joined by a stress at the time of curing the resin. FIG. 3D shows a state in which the connection between the corresponding electrodes 12, 15 has been completed.

以上の如き本発明方法によって、高密度の配線ライン
(電極)を有する基板の接続を行った結果を第1表に示
す。配線密度が200dpi(dot/inch)から1000dpiである
基板を使用し、各基板における配線ラインのピッチ及び
幅と配線ラインのスペース幅とは第1表の通りである。
なお、配線ラインの幅は高密度化に伴って程細線化する
が、700dpi以上では一定値(15μm)とした。また、電
気的接続部材として、第1,2図に示すようなサイズを有
するもの(つまり、導電体の直径が5μm,導電体の形成
ピッチが7μm,隣合う導電体間のスペースが2μm)を
使用した。
Table 1 shows the results of connecting substrates having high-density wiring lines (electrodes) by the method of the present invention as described above. A substrate having a wiring density of 200 dpi (dot / inch) to 1000 dpi is used, and the pitch and width of the wiring lines and the space width of the wiring lines on each substrate are as shown in Table 1.
Note that the width of the wiring line becomes thinner as the density increases, but is set to a constant value (15 μm) at 700 dpi or more. As the electrical connection member, a member having a size as shown in FIGS. 1 and 2 (that is, a conductor diameter is 5 μm, a conductor formation pitch is 7 μm, and a space between adjacent conductors is 2 μm) is used. used.

例えば、配線密度が1000dpiである基板では配線ライ
ンのスペース幅は10.4μmであるが、5μm径の導電体
では配線ライン同士のブリッジが生じていない。なお、
この場合に5本の不良ピンが発生したのは、上下の基板
の位置合わせの精度不良に起因すると考えられる。ま
た、配線ラインの幅は15μm以上であるので、1個の配
線ライン(電極)に1個以上の導電体が接続されること
になる。何れの場合の基板に対しても、本発明の電気的
接続部材では、導通状態は良好であり、接合強度も良好
であった。
For example, in a substrate having a wiring density of 1000 dpi, the space width of a wiring line is 10.4 μm, but in a conductor having a diameter of 5 μm, there is no bridge between the wiring lines. In addition,
It is considered that the occurrence of five defective pins in this case is due to poor positioning accuracy of the upper and lower substrates. Further, since the width of the wiring line is 15 μm or more, one or more conductors are connected to one wiring line (electrode). In any case, the electrical connection member of the present invention had a good conduction state and good bonding strength with respect to the substrate.

〔発明の効果〕〔The invention's effect〕

以上詳述したように、本発明では高密度に電極が配置
された電気回路部品同士の電気的接続を容易に実現する
ことができ、しかもこの際の導通状態及び接合状態は共
に良好である。この結果、半導体製品またはその周辺の
機器における狭ピッチ・多ピンの高密度接続を容易に行
える。また、接合時に電気的接続部材にたわみ等の変形
が生じない、電極と導電体との位置合わせが不要である
等、本発明は優れた効果を奏する。
As described above in detail, according to the present invention, electrical connection between electric circuit components having electrodes arranged at high density can be easily realized, and the conduction state and the joint state at this time are both good. As a result, a high-density connection with a narrow pitch and a large number of pins in a semiconductor product or peripheral devices thereof can be easily performed. In addition, the present invention has excellent effects such that deformation such as bending of the electrical connection member does not occur at the time of joining and alignment of the electrode and the conductor is unnecessary.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明方法の実施に用いる電気的接続部材の断
面図、第2図は本発明方法の実施に用いる電気的接続部
材の平面図、第3図は本発明方法の実施手順を示す模式
的断面図、第4図は従来の電気的接続部材の断面図であ
る。 1……電気的接続部材、2……基体、3……有機樹脂、
4……導電体、12,15……電極
FIG. 1 is a cross-sectional view of an electrical connecting member used for carrying out the method of the present invention, FIG. 2 is a plan view of an electrical connecting member used for carrying out the method of the present invention, and FIG. FIG. 4 is a schematic cross-sectional view of a conventional electrical connection member. 1 ... electric connection member, 2 ... substrate, 3 ... organic resin,
4 ... Conductor, 12,15 ... Electrode

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】対応する電気回路部品の電極同士を接続す
べく実施される電気回路部品の接続方法において、 基体上に形成された有機樹脂中に、夫々の一端を前記基
体に当接させ、他端を前記有機樹脂から突出させずに複
数の導電体を散在させてある電気的接続部材を用い、 該電気的接続部材から前記有機樹脂を除去して前記基体
上に前記複数の導電体を露出させ、これらの露出側を接
続対象となる一方の電気回路部品に重ね、該電気回路部
品の電極の夫々に当接する導電体を転写し、前記電極に
転写された導電体を残して前記基体を除去し、残された
導電体に他方の電気回路部品の対応する電極を位置合わ
せして重ね、接合させることを特徴とする電気回路部品
の接続方法。
1. A method of connecting electric circuit components to connect electrodes of the corresponding electric circuit components, wherein one end of each of the electric circuit components is brought into contact with the base in an organic resin formed on the base. Using an electrical connection member in which a plurality of conductors are scattered without projecting the other end from the organic resin, the organic resin is removed from the electrical connection member to remove the plurality of conductors on the base. And exposing these exposed sides to one of the electric circuit components to be connected, transferring the conductors in contact with each of the electrodes of the electric circuit components, and leaving the conductor transferred to the electrodes, A method of connecting an electric circuit component, wherein a corresponding electrode of the other electric circuit component is aligned, overlapped, and joined to the remaining conductor.
JP2093328A 1990-04-09 1990-04-09 How to connect electrical circuit components Expired - Fee Related JP3027851B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2093328A JP3027851B2 (en) 1990-04-09 1990-04-09 How to connect electrical circuit components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2093328A JP3027851B2 (en) 1990-04-09 1990-04-09 How to connect electrical circuit components

Publications (2)

Publication Number Publication Date
JPH03291870A JPH03291870A (en) 1991-12-24
JP3027851B2 true JP3027851B2 (en) 2000-04-04

Family

ID=14079208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2093328A Expired - Fee Related JP3027851B2 (en) 1990-04-09 1990-04-09 How to connect electrical circuit components

Country Status (1)

Country Link
JP (1) JP3027851B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3350479B2 (en) * 1999-05-10 2002-11-25 ヒロセ電機株式会社 Intermediate electrical connector

Also Published As

Publication number Publication date
JPH03291870A (en) 1991-12-24

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