JP3007849B2 - Shape detection method and shape detection device for object surface - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001] The present invention relates to a method for measuring a tetrahedral shape and a height displacement of a surface of an object by a light cutting method, for detecting scratches on the surface of a cylindrical object such as a can or a roll or a curved object such as a sphere. The present invention relates to a method and a device for detecting a shape of an object surface.

[0002]

2. Description of the Related Art FIG. 26 shows a conventional example (JP-A-6-16745).
No. 5 gazette). That is, a light beam is emitted from a light source 50 through a lens 51 to one point of the object 1 to be detected / rotated / translated and having a columnar appearance, and the scattered light is transmitted through a lens 52 from a direction different from the projection axis M of the light beam. Detector 53
The detection output of the detector 53 is input to an A / D converter 55 via an amplifier 54 to perform A / D conversion. At this time, sampling is performed by the timer 56 for a predetermined time. The A / D converted detection output is stored in the store 57
To a microprocessor 58, which detects a defect by comparing a normal surface with a defective surface, displays the result on a display 59, and discards the detected object 1. A control signal is sent to the control unit 60.

[0003]

In the above-mentioned prior art, the object to be detected 1 is projected while projecting a spot-like light beam.
Are rotated, so that there is a problem that imaging cannot be performed at one time, and there is a problem that a strange object (undetectable region) is generated between the spot beams. Further, a two-stage operation for rotating / translating the object to be detected is required, and there is a problem that the mechanism is complicated mechanically.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has as its object the shape of the surface of an object in which a predetermined detection area (or the entire circumference) can be imaged simultaneously without rotating the object to be detected. It is to provide a detection method and a shape detection device.

[0005]

In order to achieve the above object, according to the first aspect of the present invention, a slit light composed of a slit-shaped light beam is projected, and the reflected light is imaged from a direction different from the projection axis. In the object surface shape detection method for detecting scratches and shapes on the object surface using triangulation, a light source that projects a plurality of slit lights as light cutting lines and a specularly reflected light totally reflected on the surface of the detected object are used. A screen that projects as a reflection pattern, an imaging device that captures an image of the reflection pattern projected on the screen, and an arithmetic device that converts imaging data obtained from the captured reflection pattern into height data, are projected from a light source. A plurality of slit lights are inclined by a predetermined angle from the axis direction of the detected object, and are projected from a direction in which the axis and the slit light are substantially orthogonal to each other. The specularly reflected light totally reflected by the surface is projected as a reflection pattern on a screen arranged on the optical path, and the reflection pattern projected on the screen is imaged by an imaging device arranged over the screen. The feature is to detect the surface shape of the detection object collectively, making it possible to make the incident angle of each slit light almost the same, and to change the reflection pattern showing the deformed shape such as dent of the surface of the detection object Is substantially the same for all slit lights, it is possible to make the height resolution of each slit light substantially constant.

According to the second aspect of the present invention, slit light composed of a slit-like light beam is projected, the reflected light is imaged from a direction different from the projection axis, and the surface of the object is scratched or shaped using triangulation. In the method of detecting the shape of the surface of the object to be detected, a light source that projects a plurality of slit lights as light cutting lines, a screen that projects a regular reflection light totally reflected on the surface of the detection object as a reflection pattern, and a screen projected on the screen An imaging device for imaging the reflection pattern, and an arithmetic device for converting imaging data obtained from the imaged reflection pattern into height data, a plurality of slit lights projected from the light source, the axial direction of the detected object and The specularly reflected light, which is projected from a direction in which the axis and the slit light are substantially parallel and substantially parallel to each other and is totally reflected on the surface of the detected object, is arranged on the optical path. Lean is projected as a reflection pattern, imaging the reflection pattern projected on the screen by an imaging device arranged over the screen, and collectively detecting the surface shape of the detected object from the change of the reflection pattern, The reflection pattern projected on the screen is substantially linear, and the degree of change of the reflection pattern, which indicates a deformed shape such as a dent on the surface of the detected object, is projected as a deviation from the straight line, so the imaging arranged over the screen Image processing for judging pass / fail from data captured by the device is simplified.

According to a third aspect of the present invention, in the first or second aspect, the screen is formed to have a substantially flat shape, and the distance between the detection target and the screen can be reduced. , The structure can be simplified,
As a result, the reflection pattern of each slit light projected on the screen becomes clear, and the detection accuracy can be improved. According to a fourth aspect of the present invention, in the first or second aspect of the present invention, the screen has at least a curved shape, the distance between the detection target and the screen is equal, and the screen is projected on the screen. The reflection pattern projects a wider area than when the shape of the screen is flat. As a result, a larger area can be imaged by the imaging device, and the detection accuracy can be improved.

According to a fifth aspect of the present invention, in the first or second aspect, the screen is arranged so as to be substantially parallel to the axial direction of the object to be detected, and a plurality of screens are provided from the lateral direction of the object to be detected. When the slit light is projected, the height resolution in the longitudinal direction of one line of the reflection pattern projected on the screen can be made equal, and the detection accuracy can be improved.

According to a sixth aspect of the present invention, in the first or second aspect, the screen is arranged at a predetermined angle with respect to the axial direction of the detected object.
When a plurality of slit lights are projected from the lateral direction of the detected object, the optical path length of the slit light can be kept constant, and a clear reflection pattern is projected on the screen,
The detection accuracy can be improved.

According to a seventh aspect of the present invention, in the first or second aspect, the screen is arranged so as to be substantially perpendicular to the axial direction of the object to be detected. When the slit light is projected on the entire surface of the object to be detected, the reflection pattern of the entire surface is projected on the screen, so that the entire surface can be detected with a minimum number of imaging devices, and the number of imaging devices can be reduced. .

According to an eighth aspect of the present invention, in the first or second aspect of the invention, a plurality of obliquely polished plate-like light deflecting members are overlapped, and a slit-like light beam incident on these light deflecting members is provided. The light is deflected by each light deflecting member to obtain a plurality of slit lights, whereby a plurality of slit lights can be easily obtained from one light source, and the number of light sources can be reduced.

According to a ninth aspect of the present invention, in accordance with the first or second aspect of the present invention, a plurality of plate-shaped light deflecting members having wavelength selectivity are polished obliquely and superimposed, and are incident on these light deflecting members. A plurality of slit lights are obtained by separating light beams having a plurality of wavelengths for each wavelength by each light deflecting member, and a plurality of slit lights can be easily obtained from one light source; Reduction can be achieved.

According to a tenth aspect of the present invention, in the method of projecting a light beam, imaging the reflected light from a direction different from the projection axis, and detecting a flaw or shape on the surface of the object using triangulation, An imaging device for imaging reflected light from an object,
A light source for projecting a plurality of slit lights as light cutting lines, a screen for projecting a regular reflection light totally reflected on the surface of the detected object as a reflection pattern, and an arithmetic unit for converting imaging data into height data are provided. The slit-shaped light beam projected from the light source is tilted at a predetermined angle with respect to the axis of the detected object, and is projected from the direction tilted at a predetermined angle with respect to the bottom surface of the detected object, and the detected light beam is detected. The specularly reflected light totally reflected on the surface of the object is projected as a reflection pattern on a screen arranged on the optical path, and the reflection pattern is imaged by an imaging device arranged over the screen. The feature is that the surface shape is detected collectively, and the reflection pattern of the horizontal streak-shaped dent on the surface of the detected object is higher than the projection from the linear reflection pattern. Can be projected as Le, it is effective in poor discovery of streaky recess in the transverse direction.

According to an eleventh aspect of the present invention, in the tenth aspect of the present invention, the light emitting direction of the photoelectric sensor for detecting the object to be detected by passing the moving object to be detected between the light projecting portion and the light receiving portion is equal to the direction of the object to be detected. It is set so as to be parallel to the projection direction of the light source in a form projected on the bottom surface, and the detection signal of the photoelectric sensor is used as a trigger to identify the position of the moving detection target object and perform imaging. It is possible to eliminate the influence of the displacement in the direction perpendicular to the moving direction of the detection object.

According to a twelfth aspect of the present invention, in the tenth aspect of the present invention, a single light source is provided for the image pickup device, and only a light source corresponding to the pitch interval of the slit light within the time from the start to the end of the image pickup. Imaging is performed by intermittently irradiating the light source at the time interval at which the detected object moves, so that the number of slit lights of the light source can be reduced, and the cost of the optical system can be reduced.

According to a thirteenth aspect of the present invention, in the tenth aspect of the present invention, by shifting the trigger signal of the photoelectric sensor, the imaging start timing of the imaging device is shifted, and the regular reflection light totally reflected on the surface of the detected object is reflected by the reflection pattern. The feature is that a screen to be projected is shared, and the number of screens can be reduced. In the invention of claim 14, slit light composed of a slit-shaped light beam is projected, and the reflected light is imaged from a direction different from the projection axis,
In an object surface shape detection device that detects scratches and shapes on the object surface using triangulation, a plurality of slit lights, which are light cutting lines, are inclined by a predetermined angle from the axis direction of the detected object, and the axis and the slit light are Are arranged on the optical path of the specular reflection light of each slit light by the first light source projecting from a direction substantially orthogonal to the first light source and the first light source totally reflected on the surface of the detected object, and reflect each specular reflection light. A first screen for projecting as a pattern, a first imaging device arranged over the first screen to image the reflection pattern projected on the first screen, and a plurality of slit lights serving as light cutting lines are detected. A second light source that projects from a direction that is substantially orthogonal to the axis direction of the object and is substantially parallel to the axis and the slit light, and a slit formed by the second light source that is totally reflected on the surface of the detected object A second screen arranged on the optical path of the specular reflected light to project each specular reflected light as a reflection pattern, and a second screen arranged over the second screen and imaging the reflection pattern projected on the second screen. 2 and the imaging data obtained from the imaged first and second reflection patterns are converted into height data, and the surface shape of the object to be detected is collectively detected based on the obtained height data. A first and second light source, first and second screens, and first and second image pickup devices are arranged so as to surround an outer periphery of the detected object; It is characterized in that the entire circumference is detected collectively, and a predetermined detection area (or the entire circumference) can be simultaneously imaged without rotating the detected object, and the entire circumference of the detected object can be easily detected. be able to

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to embodiments.
I do. (Embodiment 1) This embodiment relates to Claim 1 (and Claim 4,
It corresponds to the invention of 5) and has a cylindrical shape like a beer can.
Inspection of the object 1 to be detected (whether there is any deformation such as dents or scratches)
Inspection of the object surface used for inspection)
I have. In the present embodiment, as shown in FIGS.
Slit light P₁~ P_FiveLight source that projects light as a light cutting line
10 and the specularly reflected light totally reflected on the surface of the detected object 1
Shooting pattern R₁~ R_FiveScreen 11 projected as
And the reflection pattern R projected on the screen 11 ₁~ R
_FiveAn imaging device 12 such as a CCD camera for imaging the
Reflection pattern R ₁~ R_FiveImaging data obtained from
And a calculation device 13 for converting the
Slit light P projected from the₁~ P_FiveIs detected
Incline by a predetermined angle θ from the direction of the axis 2 of the object 1
With axis 2 and slit light P₁~ P_FiveIs approximately orthogonal to
Projected from such a direction and totally reflected on the surface of the detection target object 1.
Specularly reflected light on the screen 11 placed on the optical path
Reflection pattern R₁~ R_FiveScreen 1
1 on the screen 11 by the imaging device 12
Projected reflection pattern R₁~ R_FiveWhen you image
In addition, the reflection pattern R imaged₁~ R_FiveImage processing
Image data to be converted into height data by the arithmetic unit 13
Based on the height data,
And deformation such as scratches).

Thus, the slit light beams P _{1 to} P ₅ composed of the laser light emitted from the light source 10 are inclined at an angle θ to the surface of the object 1 to be detected, and the slit light beams P _{1 to} P ₅ are aligned with the longitudinal direction of the slit light beams P _{1 to} P _5. The light is projected from a direction such that the axis 2 of the detection object 1 is substantially perpendicular to the object, and the specularly reflected light totally reflected is reflected by the reflection patterns R _{1 to} R _1.
5 is projected on the screen 11, and the reflection patterns R _{1 to} R ₅ are imaged by the imaging device 12. At this time, when the dent defect 3 is present on the surface of the columnar object 1 as shown in FIG. , the reflection angle of the specular reflection light of the dent is projected into the defective portion 3, for example slit light P ₃ (θ + δ)
, The reflection pattern R ₁ ... Changes between the non-defective defective portion 3 and the non-defective defective portion 3. That is, the reflection patterns R ₁ ... Of the observed non-defective parts are arcuate, and these reflection patterns R ₁ are captured by the imaging device 12 and the image data processed by the arithmetic device 13 is converted into height data. By performing the conversion and the image processing, the surface shape of the detected object, in this case, the dent defect 3
Detects the depth of all at once.

The principle of obtaining the depth of the dent defect 3 by triangulation will now be described with reference to the principle diagram of FIG. First, assuming that the distance between the surface of the detected object 1 and the lens 200 of the imaging device 12 is L ₁ and the distance between the lens 200 and an imaging element (not shown) is L ₂ , the height displacement is Δh. In this case, the height displacement Δh is Δx and the angle θ, Δh / Δx
= Tanθ, and when the amount of displacement on the image sensor is Δx ′, the height displacement Δh on the image sensor is calculated as follows using the relationship of Δx ′ / Δx = L ₂ / L ₁ Is expressed.

Δx ′ / Δx = (L ₂ / L ₁ ) · (1 / t)
anθ) · Δh Here, Δx ′ indicates image data, and Δh indicates height data (depth data). Therefore, in the arithmetic unit 13, the image data (Δ
x ′) is stored in the memory in the arithmetic unit 13 to obtain the height data image Δh. Further, the arithmetic unit 13 compares the height amount Δh ′ obtained from the processed data image with the standard, and when the standard value is exceeded, determines that it is defective and outputs a result of the quality determination. LD indicates a light source.

Here, the slit light P ₁ .
By the predetermined from the axis 2 direction of the angle θ by the axis 2 and the slit beam P ₁ ... substantially right angle to each other directions with tilting to project the slit light P ₁ ..., each slit light P
₁ can be made substantially the same, and the amount of change of each reflection pattern R ₁ , that is, the resolution of the height Δh ′ can be made substantially the same.

At this time, each slit light P ₁ ... Is projected onto the detection target 1 at an incident angle θ, and the detection target object within a detection area having a width determined by the field of view of the imaging device 12 disposed over the screen 11. Since the reflection patterns R _1, ... Of the reflected light from ₁ are collectively imaged,
It is not necessary to rotate the detected object 1 so that the entire area can be detected from the start to the end of imaging.

In this embodiment, the shape of the screen 11 on which the regular reflection light of the slit light P ₁ ... Totally reflected on the surface of the detection object 1 is projected as a reflection pattern R ₁ is changed to a curved surface (a cylindrical detection object). 1), it is possible to project a reflection pattern R ₁ ... Of a wider area as compared with the case where the shape of the screen 11 is flat. Since the imaging device 12 can also image a wider area, the number of imaging devices 12 can be reduced. Further, since the screen 11 is made parallel to the axis 2 of the detected object 1, the distance between the surface of the detected object 1 and the screen 11 can be equalized, so that the reflection pattern projected on the screen 11 can be obtained. R ₁ ... Become clear, and the detection accuracy can be improved.

In this embodiment, the number of slit light beams P ₁ in one detection area is five. However, if the number of slit light beams P ₁ is further increased and the pitch is narrowed, finer dent defective portion 3 can be detected. Needless to mention. (Embodiment 2) This embodiment relates to claim 2 (and claim 3,
5A and 5B show a device for detecting the shape of the surface of an object used for visual inspection of a columnar object 1 to be detected, as in the first embodiment, and the basic device configuration is the same as that of the first embodiment. Therefore, common portions are denoted by the same reference numerals and description thereof is omitted.

In this embodiment, as shown in FIGS. 5 and 6, a plurality of slit light beams P ₁ ′ to P _1
6 ′ is substantially perpendicular to the direction of the axis 2 of the detected object 1, is inclined by an angle α from the tangential direction of the detected object 1, and the axis 2 and the slit lights P ₁ ′ to P ₆ ′ are substantially parallel. The screen 1 in which the regular reflection light projected from such a direction and totally reflected on the surface of the detection target object 1 is disposed on the optical path thereof
1 'is projected as, a screen 11' to R ₆ 'reflection pattern R ₁ to''reflected projected pattern R _1' by the imaging device 12 disposed in the over the screen 11 to R ₆ '
And reflection patterns R ₁ ′ to R _1
The imaging data obtained by performing image processing on
Is converted into height data, and the shape of the object surface is detected based on the height data.

According to the present embodiment, the screen 11 '
Projected reflection pattern R₁’-R ₆’Is the detected object 1
The non-defective part has a substantially linear shape.
Reflection patterns for defects such as dents on the surface
Since the turn deviates from the straight line, the reflection pattern R₁'…of
The degree of change is the deviation from the straight line when there is no defect
Imaging device 1 projected and arranged over screen 11 '
Judgment of the quality from the data captured by step 2
Can be. Moreover, it is only necessary to determine the deviation from the straight line.
Since image quality can be determined, image processing for quality determination is simplified.
It has the advantage of being simple.

In this embodiment, since the screen 11 'has a flat shape, the distance between the object 1 to be detected and the screen 11' can be shortened. Reflection pattern R ₁ ′
... becomes clear, and the detection accuracy can be improved. Further, since the screen 11 'is made parallel to the axis 2 of the detected object 1, each reflection pattern R ₁ '
Are all the same in the direction of the axis 2.

Note that, as shown in FIG.
May be a curved surface (concentric with the columnar detection object 1) as in the first embodiment. In this case, as described in the first embodiment, it is possible to project a reflection pattern R ₁ ′... Of a wider area than in the case of a flat shape. Since the device 12 can also image a wider area, the number of the imaging devices 12 can be reduced.

(Embodiment 3) The present embodiment corresponds to the sixth aspect of the present invention, and the basic configuration of the apparatus is the same as that of the first embodiment. Is omitted. In the present embodiment, the same screen 11 as in the first embodiment having a curved surface as shown in FIG. 8 is arranged at a predetermined angle γ with respect to the direction of the axis 2 of the detected object 1.

The screen 11 is arranged as described above, and a plurality of slit light beams P ₁ "to P ₄ " projected from the light source 10 are inclined to the surface of the detection object 1 by the angle θ, as in the first embodiment. In addition, regular reflection light that is projected from a direction in which the longitudinal direction of the slit light beams P ₁ ″ to P ₄ ″ and the axis 2 of the detection target object 1 are substantially orthogonal to each other and totally reflected on the surface of the detection target object 1 is reflected by the reflection pattern R. ₁ "to R _4" is projected on the screen 11 as, if picked up by the image pickup device 12 and the reflection pattern R _{1 "~R 4",} maintaining the optical path length of each slit light P ₁ "~P _4" in the same it can, variations in the sharpness of the reflection patterns R ₁ "~R _4" is reduced, thereby enabling high accuracy of detection.

(Embodiment 4) This embodiment corresponds to the seventh aspect of the present invention, and the basic configuration of the apparatus is the same as that of the first embodiment. Is omitted. In the present embodiment, as shown in FIG. 9, the screen 1 faces the upper surface or the bottom surface of the detected object 1 so as to be substantially orthogonal to the direction of the axis 2 of the detected object 1.
1 ", and slit light P ₁ to slit light P ₁ to light emitted from a pair of light sources 10 ₁ and 10 ₂ arranged to face the side of the detected object 1.
The P ₅ is each angle θ inclined to the surface of the object to be detected 1,
Further, the light is projected from a direction in which the longitudinal direction of the slit light beams P _{1 to} P ₅ and the axis 2 of the detection target object 1 are substantially orthogonal to each other, and the specularly reflected light totally reflected is reflected on the screen 11 ″ as reflection patterns R _{1 to} R _5. On the screen 11 ″, reflection patterns R _{1 to} R ₅ covering almost the entire circumference of the detection target object 1 are projected. Therefore, these reflection patterns R ₁ ... Are imaged by the imaging device 12, the image data processed by the arithmetic device 13 are converted into height data, and the image processing is performed to obtain the surface shape ( Whether there is a defect)
Can be detected collectively, and the reflection patterns R ₁ ... Over the entire circumference can be imaged by the _two light sources 10 ₁ and 10 ₂ and the one imaging device 12.
2 can be reduced.

(Embodiment 5) This embodiment is directed to a fifth aspect of the present invention.
Light source 14 as shown in FIG.
The emitted laser light is reflected by the cylindrical lens 15.
Into a slit-shaped light beam B and polished the end face diagonally
Sheet glass 16 serving as a plurality of plate-shaped light deflecting members₁...
The light is incident on the superposed sheet glass group. That is,
These sheet glass 16₁Slit light incident on ...
Beam B is the first sheet glass 16 ₁Front (FIG. 11)
Is partially reflected at point a) shown in FIG.₁Tona
The first sheet glass 16₁The transmitted light that has passed through the
Lass 16_TwoIs incident on. And the second sheet glass 1
6_TwoIs partially reflected at the front surface (point b shown in the figure).
Slit light P_TwoBecomes the second sheet glass 16_TwoTo
The transmitted light is transmitted to the third plate glass 16._ThreeReflection in front of
It is slit light P_ThreeBecomes That is, a plurality of plate
Lass 16₁The light beam above is
Are branched in a chain, and the plate glass 16₁… Is n sheets
N slit light P if aligned₁Optical branch to Pn
Will be done.

As described above, according to the present embodiment, a plurality of slit lights P ₁ can be easily obtained from _one light source 14, and the number of light sources 14 can be reduced. (Embodiment 6) This embodiment corresponds to the ninth aspect of the present invention. As shown in FIG. 12, a multi-wavelength laser beam (wavelengths λ _{1 to} λn) emitted from a light source 17 is slit by a cylindrical lens 15. of converting the light beam B ', and is incident on the glass sheet group having wavelength selectivity of the end face superimposed polished obliquely of the glass sheet 18 ₁ ~18n. That is, these slit-shaped light beam B is incident on the glass sheet 18 ₁ ... ', first only the component of the wavelength lambda ₁ in the first glass sheet 18 ₁ of the front (a point shown in FIG. 13) is reflected slit light P ₁ ', and the other wavelength lambda ₂ ... of the light beam B' is next glass sheet 1 passes through the first glass sheet 18 ₁
Is incident on 8 _2. Then, the second sheet of glass sheet 18 ₂ of the front further wavelength lambda ₂ of the light beam B at (point b shown in the drawing) 'is reflected slit light P _2', and the second sheet of glass sheet 18 ₂ transparent The light beam B 'of the other wavelengths λ ₃ ... Is reflected by the front surface of the _third glass plate 183 to become slit light P ₃ ′. That is, since a plurality of plate glasses 18 ₁ ... Having wavelength selectivity are overlapped, light branching due to the difference in the wavelength λ ₁ ... Of the light beam B ′ is performed in a chain, and the plate glasses 18 ₁ . If the sheets are superimposed, the light is split into n slit lights P ₁ ′ to Pn ′.

As described above, according to the present embodiment, a plurality of slit lights P ₁ ′ can be easily obtained from _one light source 17, and the number of light sources 17 can be reduced. (Embodiment 7) This embodiment corresponds to the invention of claim 14, and is applied to the appearance inspection of the object to be detected 1 which is placed and moved on a transport device 30 such as a belt conveyor as shown in FIGS. This is a configuration to which the shape detection device of the invention is applied, and is configured by combining the configurations in the first and second embodiments.

In this embodiment, a bead having a cylindrical appearance is used.
The side of the detected object 1 such as a can₁~ X
₈, Y₁~ Y_FourDivided into 4 stages from the first stage to the fourth stage
Each of the above areas X for each stage₁…, Y₁Of defects in ...
The presence or absence is checked. Here, the area X
₁~ X₈, Y₁~ Y_FourIs set as shown in FIG.
is there. That is, the direction orthogonal to the moving direction of the detected object 1
The angle as viewed from the center of the detected object 1 with respect to the direction is 60
° and distribute the circumferential surface at equal intervals in the circumferential direction
And divides the detected object 1 into two along the direction of axis 2.
Area X ₁~ X₈And the peripheral surface facing the moving direction
The angle from the center in the direction along the moving direction is 3
A range distributed at equal intervals so as to be 0 ° is a region Y₁~
Y_Four(See FIG. 16).

On the other hand, the semiconductor laser and the fifth embodiment are arranged around the transfer device 30 along the moving direction of the object 1 to be detected.
Alternatively the cylindrical lens and the glass sheet group described 6 comprises a (not shown) such as a light beam by the optical branching the light source 20 ₁ to 20 ₁₂ for emitting a plurality of slit light, from the light sources 20 ₁ to 20 ₁₂ A screen 21 ₁ for projecting, as a reflection pattern, regular reflection light in which the slit light is totally reflected on the peripheral surface (areas X _{1 to} X ₈ , Y _{1 to} Y ₄ ) of the detected object _1.
And to 21 _12, distributed to each stage from the imaging device 22 ₁ to 22 ₁₂ to image the reflected pattern projected comprises a CCD camera to the screen 21 ₁ to 21 ₁₂ over the first stage to the fourth stage It is arranged.

Here, since the detected object 1 flows intermittently on the transport device 30, the pitch between the inspected objects 1 is often not sent at equal intervals. For this reason, in the present embodiment, a light-blocking photoelectric sensor 32 for detecting the detected object 1 on the transport device 30 is installed at the entrance of the first stage, and the detected object 1 crosses the photoelectric sensor 32. after detecting the moment, so that starts imaging by the imaging device 22 ₁ ... a detection signal of the photoelectric sensor 32 as a trigger after a lapse of a predetermined time. Thereby, the detected object 1
Imaging can be performed when the detected object 1 is always present at a fixed imaging position in each stage even if the transport pitch of the
An image of the detected object 1 can be captured.

In the first first stage, description will be given in the first embodiment.
Region X of the detected object 1₁, X_TwoAgainst
Inspection (Detection of defects in the area to determine pass / fail
When. The same shall apply hereinafter), and described in the second embodiment.
Area Y depending on configuration₁, Y_TwoInspection for sand
That is, the light source 20₁The slit light emitted from the object
Area X on the peripheral surface of body 1₁At an angle θ, and
The longitudinal direction of the cutting light is substantially orthogonal to the axis 2 of the detected object 1.
Projected from a direction such that a plurality of slit light regions X₁
Each reflected light at the surface is a curved pattern with a curved surface as a reflection pattern
Screen 21 ₁Projected onto the screen 21₁Projected on
Imaging device 22₁Imaging at
Then, the imaging data subjected to the image processing by the arithmetic
Detected by converting to data and performing image processing
Detects the surface shape of the object 1, that is, defects such as dents and scratches
You. Similarly, area X₁Area X adjacent to_TwoLight source 20_TwoOr
Screen 21 by projecting a plurality of slit lights_TwoProjected on
The reflection pattern thus obtained_TwoBy imaging with
The arithmetic unit 23 detects a defect. The arithmetic unit
23 is an imaging device 22₁… Images (image data
Data for storing data and image data is converted to height data
Control unit (not shown)
) Is detected based on the obtained height data.
The quality of the appearance of the object 1 is determined. On the other hand, area Y₁, Y_Two
The defect detection is performed by the configuration described in the second embodiment.
Go out. In other words, the front or rear
Of the peripheral surface (area Y) facing object 1 to be detected₁~ Y_Four)
The detection of a defect is performed by the configuration described in the first embodiment.
The light source 2 on the moving path of the transport device 30.
0_Three... and the imaging device 22_ThreeMust be placed
These imaging devices 22_ThreeContact the object to be detected 1
Negotiate). Therefore, in order to prevent such problems
In the present embodiment, the light source 20_Three, 20_FourProjected from
The plurality of slit light beams directed toward the axis 2 of the object 1 to be detected.
Direction, and the tangent direction and angle of the detected object 1
And the axis 2 and the slit light are substantially parallel
Project from such a direction that the object 1
The reflected specular light is applied to a flat screen placed on the optical path.
Moon 21_Three, 21_FourProjected as a reflection pattern
Clean 21_Three, 21_FourImaging device 2 placed over
2_Three, 22_FourBy screen 21_Three, 21_FourProjected on
Image the reflected pattern, and
Image data obtained by performing image processing on the turn,
Converted to height data in 3 and based on the height data
The shape of the object surface is detected.

Next, the object 1 to be detected is placed on the transport device 30.
Is moved to the second stage, the second stage
The area X of the detection target object 1 by the configuration described in the state 1_Five,
X₆Inspection, and explained in Embodiment 2.
Area Y_Three, Y _FourInspection for What
A detailed description is omitted. Then the third stage
In the first embodiment, the region X
_Three, X₇Inspection at the end, and finally the fourth stage
With the configuration described in the first embodiment, the area X_Four, X₈Against
After the inspection, the appearance inspection for one detected object 1 is completed.
Complete.

As described above, according to the object surface shape detecting device in the present embodiment, the object to be detected 1
The surface shape can be detected (inspected) collectively over the entire circumference without rotating above. (Embodiment 8) This embodiment corresponds to the tenth aspect of the present invention, and the configuration of the device is basically the same as the configuration of the device of the first embodiment. However, as shown in FIGS. The arrangement of the light source 10 is different. That is, the plurality of slit lights P ₁ ... Projected from the light source 10 are inclined by an angle θ with respect to the axis 2 of the columnar detection object 1 such as a beer can,
And is tilted by an angle β with respect to the bottom surface of the detected object 1,
Further, the specularly reflected light projected from a direction having an angle α with respect to the tangent to the surface of the detection target object 1 and totally reflected on the surface of the detection target object 1 is reflected on a screen 11 disposed on the optical path as a reflection pattern R ₁ . The reflection pattern is imaged by the imaging device 12 that is projected over the screen 11, and the surface shape of the detected object 1 is collectively detected by the arithmetic device 13 based on the same principle as in the first embodiment.

This embodiment is effective for detecting a streak-like dent scratch extending in the same direction as the bottom surface of the detection target object 1, that is, in the lateral direction. Further, as compared with the case of the first embodiment, the brightness level of the reflection patterns R ₁ projected on the screen 11 becomes higher, and the inspection can be performed with higher precision. (Embodiment 9) This embodiment corresponds to the invention of claim 11, and as shown in FIG. 19, a columnar inspected object 1 mounted on and transported by a transport device 30 driven by a drive device 31. The light projecting part 32 of the light-shielding type photoelectric sensor 32
a, the object to be detected 1 is detected by the photoelectric sensor 32 while passing between the light receiving portions 32b. The arithmetic unit 13 identifies the position of the object to be inspected 1 by the detection signal of the photoelectric sensor 32, and An image capturing command is output to the image capturing device 12 as a trigger signal for image capturing, and the image capturing device 12 receiving the command causes the plurality of slit lights P ₁ projected on the surface of the detection target object 1 to emit the slit light P ₁ . Captures a regular reflection pattern R ₁ . Here, since the detected object 1 conveyed by the conveyance device 30 is shifted in the direction B perpendicular to the conveyance direction A as shown in FIG. 20, a stable regular reflection pattern image cannot be obtained. Therefore, as shown in FIG. 20, the light emitting unit 32a and the light receiving unit 32b of the photoelectric sensor 32
The light path between the light source 10 and the projection angle of the light source 10 is tilted by an angle θ with respect to the transport direction, and is parallel to the bottom surface of the detection target object 1 so as to be parallel to any one of the points a, b, and c. Even if it crosses the optical path of the photoelectric sensor 32 at that position, the position projected on the surface of the detected object 1 is the point a ′,
b ′ and c ′, which all correspond to the same position. The optical path of the photoelectric sensor 32 is parallel to the bottom surface of the detected object 1.

The above embodiment is effective for the displacement of the detected object 1. (Embodiment 10) This embodiment corresponds to the twelfth aspect of the present invention, in which a single light source 1 for projecting slit light is provided as shown in FIG. When the detected object 1 conveyed by the driving device (not shown) passes between the light projecting part 32a and the light receiving part b of the photoelectric sensor 32 whose optical path is inclined by an angle θ with respect to the conveying direction, the photoelectric sensor 32 generates a detection signal.
The detection signal is a pulse signal having a constant width as shown in FIG. 22A. The arithmetic unit 13 uses this detection signal as a trigger signal to be detected, and issues an image capture command as shown in FIG. The image is output to the imaging device 12.

Then, a detection signal is input to the light source 10.
After a certain time (t) as shown in FIG.₀)
When the light source 10 is turned on, the slit light P
Is projected on the screen 11 and the regular reflection pattern P₁’
Project. This regular reflection pattern P₁′ To the imaging device 12
Images. Next, the light source 10 is turned off once, and again at time t. ₁
Turns on the light source 10. In this manner, the light source 10 is
Period, a fixed interval (t) corresponding to the pitch interval of the slit light.
₀, T₁,...), As shown in FIG.
Each time the light source 10 is turned on.
Projected on the screen 11 by the slit light P
Regular reflection pattern R₀’, R₁'By the imaging device 12
And take in each one. Then, the data is taken by the imaging device 12 for a predetermined period.
After performing the embedding, the arithmetic unit 13 transmits the image to the imaging device 12.
Turn off the capture command.

Note that t₀, T₁.. Represents the ON period of the light source 10.
Indicates the position of the midpoint. Of course t₀, T₁Indicates that each light source 10 is turned on.
It is good to take with the rising and falling timing of the period
No. In the above embodiment, the slit is formed by the single light source 10.
Since only the light P needs to be projected, the slit of the light source 10 (
Light) is reduced. (Embodiment 11) Embodiment 10 is an embodiment in which
Is to intermittently project the light P
In the present embodiment, as shown in FIG.₁, 1
0_TwoAnd each light source 10₁, 10_TwoPhotoelectric sensor 3 corresponding to
2₁, 32_{twenty one}And the light source 10 ₁Projection direction, photoelectric switch
Itch 32₁Floodlight 32a₁, Light receiving section 32b₁Light between
The relationship between the road and the detected object 1 is the photoelectric
The optical path between the light projecting portion 32a and the light receiving portion 32b of the switch 32,
The same as the relationship between the three detection objects 1 and the photoelectric switch
32_TwoFloodlight 32a_Two, Light receiving section 32b_TwoLight path between light
Source 10₁Projection direction and photoelectric switch 32₁Floodlight 3
2a₁, Light receiving section 32b₁Symmetrically set in the optical path between
And the photoelectric switch 32₁, 32_TwoShooting by the detection signal
The imaging timing of the imaging device 12 is shifted to
₁, 10_TwoScreen 11 to be used for
That's what I did.

In this embodiment, the detected object 1 conveyed by the conveyance device 30 is at an angle θ with respect to the conveyance direction.
If only passes through the optical path of the photoelectric sensor 32 ₁ which has been inclined,
Detection signals from the photoelectric sensor 32 ₁ is input to the arithmetic unit 13 is generated as shown in FIG. 24 (a). The arithmetic unit 13 outputs the image capture command to the image capture device 12 using the detection signal as a trigger signal for image capture, and
₁ a certain distance between the same manner as in the case a predetermined period embodiments _{10 (t 10, t 11 ...} ) ON and OFF, slit light projected to the object to be inspected 1 surface each time on the light source 10 ₁ Pa
The regular reflection patterns R ₁₀ ′, R ₁₁ ′,... Projected on the screen 11 are captured by the imaging device 12. After the capturing by the imaging device 12 for a predetermined period, the arithmetic unit 13 turns off the image capturing command to the imaging device 12.

Subsequently, the object to be detected 1 is
When passing through the _second optical path, from the photoelectric sensor 32 ₂ 24
A detection signal is generated as shown in FIG.
_{As in} the case of ₁ , it is input to the arithmetic unit 13. Arithmetic unit 13 outputs the image capturing instruction detection signal again the imaging device 12 as a trigger signal for image capture, the light source 10 ₂ at regular intervals between the same manner as described above a predetermined time period (t _20, t ₂₁ ...) on, off, and the slit light Pb to be projected on the inspected object 1 surface each time on the light source 10 ₂
The specular reflection pattern R ₂₀ is projected on the screen 11 ', R _21' ... taking respectively by the imaging device 12. After the capturing by the imaging device 12 for a predetermined period, the arithmetic unit 13 turns off the image capturing command to the imaging device 12.

It should be noted the _{t 10, t 11 ..., t} 20, t 21 ..., it indicates the position of the middle point of the period for turning on the light source 10 _1, 10 _2.
Of course, t ₁₀ , t _11, ..., T ₂₀ , t _21, ... May be set at the rising and falling timings of each ON period of the light source 10. In the above embodiment, a single screen 11 may be used for the plurality of light sources 10 ₁ and 10 ₂ , and the number of screens 11 can be reduced.

[0048]

According to the first aspect of the present invention, a slit light composed of a slit-shaped light beam is projected, the reflected light is imaged from a direction different from the projection axis, and the surface of the object is inspected by triangulation. In a shape detection method of an object surface for detecting a shape, a light source that projects a plurality of slit lights as light cutting lines, a screen that projects specularly reflected light totally reflected on the surface of the detected object as a reflection pattern, and a projection on the screen An imaging device for imaging the reflected pattern, and a computing device for converting imaging data obtained from the imaged reflection pattern into height data, the plurality of slit lights projected from the light source, the axis of the detected object The specularly reflected light that is projected from a direction in which the axis and the slit light are substantially perpendicular to each other while being tilted by a predetermined angle from the The projected screen is projected as a reflection pattern on the arranged screen, the reflection pattern projected on the screen is imaged by an imaging device arranged over the screen, and the surface shape of the object to be detected is collectively detected from the change in the reflection pattern. The incident angle of the slit light can be made substantially the same, and the degree of change of the reflection pattern showing a deformed shape such as a dent on the surface of the detected object becomes substantially the same in all the slit lights, so that each slit light There is an effect that the height resolution can be made substantially constant.

According to a second aspect of the present invention, a slit light composed of a slit-shaped light beam is projected, the reflected light is imaged from a direction different from the projection axis, and a scratch or shape on the surface of the object is detected by triangulation. In the method of detecting the shape of the object surface to be detected,
A light source for projecting a plurality of slit lights as light cutting lines, a screen for projecting a regular reflection light totally reflected on the surface of the detected object as a reflection pattern, an imaging device for imaging the reflection pattern projected on the screen, and imaging An arithmetic unit that converts imaging data obtained from the reflected pattern into height data, and makes the plurality of slit lights projected from the light source substantially orthogonal to the axis direction of the detected object, and the axis and the slit light are The light is projected from a direction that is almost parallel, and the specularly reflected light totally reflected on the surface of the detected object is projected as a reflection pattern on a screen arranged on the optical path, and is projected on the screen by an imaging device arranged over the screen. The reflected reflection pattern is imaged, and the surface shape of the object to be detected is detected from the change in the reflection pattern. The shadowed reflection pattern becomes substantially linear, and the degree of change of the reflection pattern indicating a deformed shape such as a dent of the surface of the detected object is projected as a deviation from the straight line, so that the imaging device arranged over the screen may be used. There is an effect that image processing for determining pass / fail from the captured data is simplified.

According to the third aspect of the present invention, since the screen has a substantially flat shape, the distance between the object to be detected and the screen can be shortened, and the structure can be simplified. There is an effect that the reflection pattern of each slit light projected on the screen becomes clear and the detection accuracy can be improved. According to the invention of claim 4, since the shape of the screen is at least a shape having a curved surface, the distance between the detection target and the screen is equal, and the reflection pattern projected on the screen is a case where the shape of the screen is flat. Will be projecting a larger area,
As a result, there is an effect that a wider area can be imaged by the imaging device, and the detection accuracy can be improved.

According to the fifth aspect of the present invention, since the screen is arranged so as to be substantially parallel to the axis direction of the object to be detected, when a plurality of slit lights are projected from the lateral direction of the object to be detected, the light is projected onto the screen. There is an effect that the height resolution in the longitudinal direction of the reflection pattern of one line can be made equal, and the detection accuracy can be improved. According to the sixth aspect of the present invention, since the screen is arranged at a predetermined angle with respect to the axial direction of the detected object, the optical path of the slit light when a plurality of slit lights are projected from the lateral direction of the detected object. The length can be kept constant, and a clear reflection pattern is projected on the screen, which has the effect of increasing the accuracy of detection.

According to the seventh aspect of the present invention, the screen is arranged so as to be substantially perpendicular to the axial direction of the detected object.
When projecting a plurality of slit lights from the longitudinal direction of the detected object to the entire surface of the detected object, the entire pattern can be detected with a minimum number of imaging devices by projecting a reflection pattern of the entire surface on the screen, There is an effect that the number of imaging devices can be reduced.

According to an eighth aspect of the present invention, a plurality of obliquely polished plate-like light deflecting members are overlapped, and a slit-like light beam incident on these light deflecting members is split by each light deflecting member. Therefore, a plurality of slit lights can be easily obtained from one light source, and the number of light sources can be reduced. The invention of claim 9 is
A plurality of plate-shaped light deflecting members having wavelength selectivity are obliquely polished and superimposed, and light beams having a plurality of wavelengths incident on these light deflecting members are separated for each wavelength by each light deflecting member. Therefore, a plurality of slit lights can be easily obtained from one light source, and the number of light sources can be reduced.

According to a tenth aspect of the present invention, there is provided a method for projecting a light beam, capturing an image of the reflected light from a direction different from the projection axis, and detecting a flaw or a shape on an object surface using triangulation. An imaging device for imaging reflected light from an object,
A light source for projecting a plurality of slit lights as light cutting lines, a screen for projecting a regular reflection light totally reflected on the surface of the detected object as a reflection pattern, and an arithmetic unit for converting imaging data into height data are provided. The slit-shaped light beam projected from the light source is tilted at a predetermined angle with respect to the axis of the detected object, and is projected from the direction tilted at a predetermined angle with respect to the bottom surface of the detected object, and the detected light beam is detected. The specularly reflected light totally reflected on the surface of the object is projected as a reflection pattern on a screen arranged on the optical path, and the reflection pattern is imaged by an imaging device arranged over the screen. Since the surface shape is detected all at once, the reflection pattern of the horizontal stripe-shaped dent on the surface of the detected object is regarded as the deviation of the projection higher than the linear reflection pattern. Can be a shadow, there is an effect that is effective in poor discovery of streaky recess in the transverse direction.

According to an eleventh aspect of the present invention, the light projecting direction of the photoelectric sensor for detecting the object to be detected by passing the moving object to be detected between the projecting and light receiving sections is projected on the bottom surface of the object to be detected. It is set so as to be parallel to the projection direction of the light source, and the detection signal of the photoelectric sensor is used as a trigger to identify the position of the moving target object and perform imaging. There is an effect that it can be unaffected.

According to a twelfth aspect of the present invention, a single light source is provided for the image pickup apparatus, and within the time from the start to the end of the image pickup,
Since the light source is intermittently illuminated and imaged at a time interval in which the detected object moves by an amount corresponding to the pitch interval of the slit light, the number of slit light beams of the light source can be reduced,
There is an effect that the cost of the optical system can be reduced.

According to a thirteenth aspect of the present invention, the trigger signal of the photoelectric sensor is shifted so as to shift the image pickup start timing of the image pickup device and share a screen for projecting the regular reflection light totally reflected on the surface of the detected object as a reflection pattern. Therefore, there is an effect that the number of screens can be reduced. The invention according to claim 14 is an object that projects slit light composed of a slit-shaped light beam, images the reflected light from a direction different from the projection axis, and detects a flaw or shape on the surface of the object using triangulation. In the surface shape detection device, a first light source that inclines a plurality of slit lights, which are light cutting lines, by a predetermined angle from an axis direction of an object to be detected and projects the slit light in a direction in which the axis and the slit light are substantially orthogonal to each other; A first screen disposed on an optical path of specular reflection light of each slit light by the first light source totally reflected by the surface of the detected object, and projecting each specular reflection light as a reflection pattern; A plurality of slit light beams, which are light cutting lines, are arranged substantially perpendicular to the axis direction of the object to be detected, and are aligned with the axis line. A second light source projecting from a direction such that the cut light is substantially parallel to the second light source, and a second light source totally reflected by the surface of the detected object, which is disposed on an optical path of specular reflection light of each slit light, and A second screen that projects specularly reflected light as a reflection pattern, a second imaging device that is arranged over the second screen and captures the reflection pattern projected on the second screen, and a first captured image.
And an arithmetic unit that converts the imaging data obtained from the second reflection pattern into height data and collectively detects the surface shape of the detected object based on the obtained height data, Since the first and second light sources, the first and second screens, and the first and second imaging devices are arranged so as to surround the outer periphery, and the entire periphery of the surface of the detected object is detected collectively, A predetermined detection area (or the entire circumference) can be simultaneously imaged without rotating the detected object, and there is an effect that the entire circumference of the detected object can be easily detected.

[Brief description of the drawings]

FIG. 1 is a perspective view of an apparatus according to a first embodiment.

FIG. 2 is a perspective view of the same as seen from another angle.

FIG. 3 is an operation explanatory diagram of the above.

FIG. 4 is an operation explanatory view of the above.

FIG. 5 is a perspective view of an apparatus according to a second embodiment.

FIG. 6 is an operation explanatory view of the above.

FIG. 7 is a perspective view showing another configuration of the above device.

FIG. 8 is a perspective view of an apparatus according to a third embodiment.

FIG. 9 is a perspective view of an apparatus according to a fourth embodiment.

FIG. 10 is a perspective view illustrating a main part of an apparatus according to a fifth embodiment.

FIG. 11 is an explanatory diagram illustrating the above.

FIG. 12 is a perspective view illustrating a main part of an apparatus according to a sixth embodiment.

FIG. 13 is an explanatory diagram illustrating the above.

FIG. 14 is a perspective view of the device of the seventh embodiment.

FIG. 15 is an explanatory diagram for explaining the operation of the above.

FIG. 16 is an explanatory diagram illustrating the above.

FIG. 17 is a perspective view of the device of the eighth embodiment.

FIG. 18 is a side view showing a main part of the above device.

FIG. 19 is a schematic plan view of the device of the ninth embodiment.

FIG. 20 is an explanatory diagram illustrating the above.

FIG. 21 is a schematic plan view of the device of the tenth embodiment.

FIG. 22 is a time chart for explaining the above operation.

FIG. 23 is a schematic plan view of the device of the eleventh embodiment.

FIG. 24 is a time chart for explaining the above operation.

FIG. 25 is a diagram illustrating the principle of triangulation used in the present invention.

FIG. 26 is a diagram showing the configuration of a conventional apparatus.

[Explanation of symbols]

1 the object to be detected 10 light source 11 screen 12 imaging device 13 computing unit P ₁ to P ₅ slit beam R ₁ to R ₅ reflection pattern

Continuation of the front page (56) References JP-A-62-274249 (JP, A) JP-A-60-200141 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01B 11 / 00-11/30

Claims (14)

(57) [Claims] 1. An object surface for projecting a slit light composed of a slit-shaped light beam, imaging the reflected light from a direction different from a projection axis, and detecting a flaw or shape of the object surface using triangulation. In the shape detection method, a light source that projects a plurality of slit lights as light cutting lines, a screen that projects specularly reflected light totally reflected on the surface of the detected object as a reflection pattern, and captures an image of the reflection pattern projected on the screen An imaging device, comprising an arithmetic device that converts imaging data obtained from a captured reflection pattern into height data, inclines a plurality of slit lights projected from the light source by a predetermined angle from the axis direction of the detected object. And project from a direction where the axis and the slit light are substantially orthogonal,
The regular reflection light totally reflected on the surface of the detected object is projected as a reflection pattern on a screen arranged on the optical path,
A method for detecting the shape of the surface of an object, wherein a reflection pattern projected onto the screen is imaged by an imaging device arranged over the screen, and the surface shape of the object to be detected is detected collectively from a change in the reflection pattern. 2. An object surface for projecting a slit light composed of a slit-shaped light beam, imaging the reflected light from a direction different from the projection axis, and detecting a flaw or a shape on the object surface using triangulation. In the shape detection method, a light source that projects a plurality of slit lights as light cutting lines, a screen that projects specularly reflected light totally reflected on the surface of the detected object as a reflection pattern, and captures an image of the reflection pattern projected on the screen An imaging device, comprising an arithmetic device that converts imaging data obtained from a captured reflection pattern into height data, and makes a plurality of slit lights projected from a light source substantially orthogonal to an axis direction of the detected object and an axis line. And the slit light are projected from a direction such that they are substantially parallel to each other, and the specularly reflected light totally reflected on the surface of the detected object is reflected on a screen placed on the optical path. The reflection pattern projected on the screen by an imaging device arranged over the screen, and detecting the surface shape of the object to be detected from the change in the reflection pattern collectively. Shape detection method. 3. The method according to claim 1, wherein the screen has a substantially flat shape. 4. The method according to claim 1, wherein the screen has a shape having at least a curved surface. 5. The method for detecting the shape of an object surface according to claim 1, wherein the screen is arranged so as to be substantially parallel to the axial direction of the object to be detected. 6. The method for detecting the shape of an object surface according to claim 1, wherein the screen is arranged so as to be inclined at a predetermined angle with respect to the axial direction of the object to be detected. 7. The method for detecting the shape of an object surface according to claim 1, wherein the screen is arranged so as to be substantially perpendicular to the axial direction of the object to be detected. 8. A plurality of obliquely polished plate-like light deflecting members are overlapped, and a slit-like light beam incident on these light deflecting members is split by each of the light deflecting members to form a plurality of slit light beams. 3. The method for detecting the shape of an object surface according to claim 1, wherein 9. A plurality of plate-shaped light deflecting members having wavelength selectivity are obliquely polished and superimposed, and a light beam having a plurality of wavelengths incident on these light deflecting members is formed by each light deflecting member. 3. The method for detecting the shape of an object surface according to claim 1, wherein a plurality of slit light beams are obtained by separating the light beams for each wavelength. 10. A method for projecting a light beam, imaging the reflected light from a direction different from the projection axis, and detecting a flaw or shape on the surface of the object using triangulation. Imaging device, a light source for projecting a plurality of slit lights as light cutting lines, a screen for projecting regular reflection light totally reflected on the surface of the detected object as a reflection pattern, and converting the imaging data to height data And a slit-shaped light beam projected from the light source is inclined at a predetermined angle with respect to the axis of the detected object, and is tilted at a predetermined angle with respect to the bottom surface of the detected object. Projected from the direction, the specularly reflected light totally reflected on the surface of the object to be detected is projected as a reflection pattern on a screen disposed on the optical path, and the reflection pattern is projected by an imaging device disposed over the screen. Image, and the shape detection method of the object surface and detecting collectively the surface shape of the object to be detected from a change in the reflection pattern. 11. A light emitting direction of a photoelectric sensor for detecting an object to be detected by passing a moving object to be detected between a light projecting portion and a light receiving portion is equal to a projecting direction of a light source in a form projected on a bottom surface of the object to be detected. 11. The method for detecting the shape of the surface of an object according to claim 10, wherein the object is set so as to be parallel, and the position of the object to be detected is identified and the imaging is performed using the detection signal of the photoelectric sensor as a trigger. 12. A single light source for an imaging device,
11. The object according to claim 10, wherein a light source is intermittently illuminated at a time interval in which the detected object moves by an amount corresponding to a pitch interval of the slit light within a time period from the start to the end of the imaging, and the imaging is performed. Surface shape detection method. 13. A screen for projecting a regular reflection light totally reflected on a surface of an object to be detected as a reflection pattern by shifting an imaging start timing of an imaging device by shifting a trigger signal of a photoelectric sensor. The method for detecting a shape of an object surface according to claim 10. 14. An object surface for projecting a slit light composed of a slit-shaped light beam, imaging the reflected light from a direction different from the projection axis, and detecting a flaw or shape of the object surface using triangulation. In the shape detection device, a first light source that inclines a plurality of slit lights, which are light cutting lines, by a predetermined angle from the axis direction of the detected object and projects the slit light in a direction in which the axis and the slit light are substantially orthogonal to each other; A first screen that is arranged on the optical path of specular reflection light of each slit light by the first light source totally reflected on the surface of the detection object and projects each specular reflection light as a reflection pattern; and arranged over the first screen. A first imaging device for imaging the reflection pattern projected on the first screen, and a plurality of slit light beams, which are light cutting lines, being substantially orthogonal to the axis direction of the detected object and having the axis and the slit. A second light source for projecting from a direction in which light is substantially parallel, and a second light source totally reflected on the surface of the detected object, which is disposed on an optical path of specular reflection light of each slit light, and each specular reflection. A second screen that projects light as a reflection pattern, a second imaging device that is arranged over the second screen and captures an image of the reflection pattern projected on the second screen, and first and second captured images. An arithmetic unit that converts imaging data obtained from the reflection pattern into height data and collectively detects the surface shape of the detected object based on the obtained height data, so as to surround the outer periphery of the detected object. , The first and second light sources, the first and second screens, and the first and second imaging devices are arranged,
An object surface shape detecting device for detecting the entire periphery of a surface of an object to be detected collectively.