JP3005391B2 - Photosensitive liquid removal device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for removing a photosensitive solution, and more particularly, to removing unnecessary photosensitive solution from a photosensitive solution applied to the surface of a thin plate member in a process of manufacturing a shadow mask or a lead frame. Liquid removing device for use.

[0002]

2. Description of the Related Art Metal parts such as shadow masks and lead frames for color cathode-ray tubes are manufactured from long metal sheets.
It is manufactured continuously using a photoetching method. This manufacturing step includes a step of forming a photosensitive film on the surface of a thin metal plate. When forming a photosensitive film, a thin metal plate is first immersed in a photosensitive solution tank, and a photosensitive solution is applied to the surface of the thin metal plate.
Then, the metal sheet coated with the photosensitive liquid is conveyed to a drying unit. In the drying section, the application amount of the photosensitive liquid is adjusted by a doctor roller, and thereafter, the photosensitive liquid is dried in a drying furnace to form a photosensitive film. In addition, rollers for transport are provided in the photosensitive solution tank and the drying furnace, respectively.
These rollers continuously transport the photosensitive solution and the inside of the drying unit.

In the process of forming such a photosensitive film, the distance from the entrance in the drying furnace to the first roller in the drying furnace is usually a short distance. For this reason, it is difficult to dry the photosensitive liquid on the metal sheet until the metal sheet reaches the first roller, and the photosensitive liquid adheres to the first roller. The photosensitive liquid adhering to this roller eventually dries, peels off from the roller, and causes foreign matters on the photosensitive film.

Therefore, the roller in the drying furnace is formed so as to be in contact with only both ends (unnecessary parts as a product) of the metal sheet, and a plastic film or a thin metal piece is pressed against a part of the sheet metal which contacts the roller. Or by pressing gauze or the like, the photosensitive liquid in that portion is removed. In addition, on both end portions of the metal sheet from which the photosensitive liquid has been removed, a coating film which is not affected by the etching liquid is formed so as not to be etched in a later etching step. By such a method, it is possible to prevent the photosensitive liquid from adhering to the rollers in the drying furnace.

However, in such a method, a thick portion of the photosensitive solution is formed at the boundary between the portion where the photosensitive solution is scraped or wiped and the portion where the photosensitive solution remains. This thick portion tends to be insufficiently dried, and may contaminate the downstream conveying roller. Also, when winding a thin metal plate into a coil shape, as the number of times of winding increases, the coil surface of the thick portion rises, damaging the photosensitive film at the time of winding, and debris of the photosensitive film from the scratched portion. It causes the occurrence of.

On the other hand, for example, Japanese Patent Application Laid-Open No. 54-69378 and Japanese Utility Model Application Laid-Open No. 4-20050 indicate that the photosensitive liquid at the end of a thin metal plate is removed by suction before drying. Here, suction nozzles are arranged at both ends of the sheet metal. The suction nozzle has a V-shaped suction port that sandwiches both sides of the thin metal plate. In this case, since the unnecessary photosensitive liquid is removed by suction, the thick portion as described above is hardly generated.

[0007]

In the prior art disclosed in the above-mentioned publication, when the metal sheet sways during transportation, or when both ends 3a of the metal sheet 3 are deformed in a wavy shape as shown in FIG. The width of the photosensitive liquid to be sucked changes, and the amount of the sucked photosensitive liquid changes on both sides of the thin metal plate. In this case, on the side where a large amount of the photosensitive liquid remains, the drying of the photosensitive liquid becomes insufficient, and the photosensitive liquid that cannot be completely dried adheres to the roller, thereby causing the above-described problem.

It is not necessary to completely remove the photosensitive liquid at both ends of the thin metal plate by suction. For example, when the first roller is disposed on one surface side, it is possible to reduce the suction amount of the photosensitive liquid on the other surface side as compared with the one surface side. If the photosensitive solution is left, there is no need to form an etching resistant coating on this surface.

However, in the conventional apparatus, it is difficult to strictly control the suction amount of the photosensitive liquid on both sides of the thin metal plate. An object of the present invention is to enable uniform suction of a photosensitive solution without forming a thick portion of the photosensitive solution when removing the photosensitive solution at the end of a thin metal plate. Another object of the present invention is to make it possible to control the suction amount of a photosensitive solution in addition to the above objects.

[0010]

A photosensitive liquid removing apparatus according to a first aspect of the present invention is a thin plate member to which a photosensitive liquid is applied and conveyed.
To remove unnecessary photosensitive liquid from both ends in the width direction
A liquid removing device, wherein a width of a surface of a thin plate member to be conveyed is provided.
Direction at both ends, each of which is
Contact one end in the width direction of the surface of the thin plate member
Extending along the formed contact surface and the conveying direction of the thin plate member
Grooves formed on the contact surface so that
The transport direction is set at the end of the direction in which the thin plate member is transported.
A pair of suction ports having a suction port opened in a direction perpendicular to
The contact surfaces of the head and the pair of suction heads
Move the sheet-like member toward the surface at both ends in the width direction.
And pressing means for pressing each of them.

[0011] photosensitive solution removing apparatus according to the second invention, wherein
Item 1. A pair of suction heads according to Item 1, wherein the pair of suction heads
So that both ends of the thin plate member are sandwiched between
It is characterized by being arranged in two pairs facing each other.

[0012]

In the photosensitive liquid removing apparatus according to the first invention, a thin plate
A pair of suctions respectively provided at both ends in the width direction of the member
The contact surface of the head is pressed against the width of the
Is pressed toward the surface of both ends in the direction
The material is brought into contact with the surface at both ends in the width direction . One pair of suction
Each of the heads has a surface
A contact surface formed to contact one end in the width direction and a thin
Form on the contact surface so as to extend along the transport direction of the plate-like member
The formed plural grooves and the thin plate member of the contact surface are transported
The suction port is formed at the end of the sheet member and opens in the direction perpendicular to the transport direction.
Unnecessary ones of the photosensitive liquid applied to the part, the suction
A thin plate-like part is formed by a plurality of grooves provided on the contact surface of the head.
It is efficiently guided to the suction port without staying on the material, and is removed by suction.

Here, the unnecessary photosensitive liquid is efficiently guided to the suction port by the groove and is removed by suction from the suction port, so that the portion of the thin plate member from which the photosensitive liquid has been removed and the photosensitive liquid are removed.
It is difficult to form a thick part at the boundary with the remaining part , and
The width at which the photosensitive liquid is removed at both ends of the thin plate member becomes constant. Also, the width of the groove formed on the contact surface of the suction head ,
By changing the depth, it is possible to control the amount of sucked the photosensitive solution.

In the apparatus for removing a photosensitive liquid according to the second invention,
A pair of suction heads is provided at each end of the plate member in the width direction.
2 are provided so as to face each other so as to sandwich both ends of the thin plate member.
They are arranged in pairs. Placed at both ends of the thin plate
Each of the four suction head contact surfaces has a suction port
Is provided, and the width of the thin plate member is
Unnecessary photosensitive liquid stays on the thin plate from both sides
It is removed without suction. Here, the first invention and <br/> Similarly hardly thick portion is formed, moreover its thin plate member
A pair of suction heads on each side at both ends in the width direction
Since sandwiched by, it is possible to further reduce the influence of deformation such as waving the both widthwise end portions of the thin plate member.

[0015]

FIG. 1 is a schematic structural view of a photosensitive film forming apparatus employing a photosensitive liquid removing apparatus according to one embodiment of the present invention. This device is installed in a clean room. The photosensitive film forming apparatus mainly has a photosensitive solution tank 1 and a drying furnace 2 arranged downstream of the photosensitive solution tank 1 (post-process side). A photosensitive liquid removing device 4 for removing unnecessary photosensitive liquid on the surface of the thin metal plate 3 is disposed between the photosensitive liquid tank 1 and the drying furnace 2. The metal sheet 3 is in the form of a strip and is continuously supplied to the apparatus. Further, on the upstream side (pre-process side) of the photosensitive solution tank 1, there is provided a leveling device for cleaning the surface of the thin metal plate 3, and on the downstream side of the drying furnace 2, a printing device is provided. .

The photosensitive solution tank 1 is filled with a photosensitive solution, and the metal sheet 3 is transported by a transport roller 5 arranged on the upstream side of the photosensitive solution tank 1. Inside the photosensitive liquid tank 1, a roller 6 in the tank is provided, and further downstream, a pair of doctor rollers 7 is provided. The drying furnace 2 includes a supply unit 10 into which the metal sheet 3 from the photosensitive solution tank 1 enters, and a discharge unit 11 for discharging the metal sheet 3 from which the photosensitive solution on the surface is dried.
And In the drying furnace 2, a plurality of transport rollers 12 for transporting the metal sheet 3 in the drying furnace 2;
A ceramic heater 13 for drying the photosensitive liquid on the surface of the thin metal plate 3 is provided. Each of the transport rollers 12 is shaped so as to contact only the both ends of the thin metal plate 3. That is, as shown in FIG. 2A, both end portions 12a that come into contact with the thin metal plate 3 are larger in diameter than other portions. As shown in FIG. 2B, the conveying roller 12 'may be formed so that the diameter gradually increases from the center to both ends, so that the conveying roller 12' comes into contact with only both ends of the thin metal plate 3. The ceramic heater 13 is a thin metal plate 3.
Are arranged to face each other with the transfer path therebetween. Thereby, it is possible to dry the photosensitive liquid applied to both surfaces of the thin metal plate 3.

A suction device 15 is connected to the photosensitive solution removing device 4.
And a reservoir tank 16 is disposed between them. A drain pipe 17 is connected to the reservoir tank 16, and the photosensitive liquid accumulated in the tank 16 is supplied to the drain cock 1.
8, it can be returned to the photosensitive solution tank 1 as needed.

As shown in the enlarged view of FIG. 3, the photosensitive liquid removing device 4 is arranged at a position where the end of the thin metal plate 3 passes so that the end is sandwiched from both sides. In addition,
The pair of devices shown in FIG. 3 is arranged for each of both ends of the sheet metal 3. Each of the photosensitive liquid removing devices 4 includes a suction head 2 that contacts the end surface of the metal sheet 3.
0 and a pressing mechanism 21 for pressing the suction head 20 against the thin metal plate 3.

The suction head 20 has an inverted L shape in side view,
It has a head body 22 and a cover 23 fixed to a downstream side wall of the head body 22. As shown in FIG. 4, the head main body 22 has a contact surface 22a that comes into contact with the surface of the end of the thin metal plate 3, and the contact surface 22a has an upstream corner and both corners in a direction orthogonal to the transport direction. The portions are chamfered 22b, 22c, 22d. Thereby, the metal sheet 3 is conveyed while smoothly contacting the contact surface of the suction head 20. Also, on the contact surface 22a,
A plurality of grooves 24 are formed along the transport direction of the thin metal plate 3. The upstream end of the groove 24 extends to the vicinity of the upstream end of the head body 22, and the downstream end opens to the mounting surface of the cover 23. The groove 24 has a triangular cross section as shown in FIG. 6, the angle θ of the groove 24 is 60 to 120 degrees, the pitch P is 1.5 to 2 mm, and the interval W between the grooves is 0.3 to 1.0 m.
m.

As shown in FIG. 5, the front end 23a of the cover 23 on the side of the head body 22 has a blade shape. Then, the contact surface 22 of the head body 22 is
A suction port 25 for sucking and removing the photosensitive liquid collected by the groove 24a is formed. A recess 26 is formed further inside the suction port 25, and the recess 26 communicates with a suction tube 28 through a suction hole 27. Cover 2
3 is fixed to the head body 22 by bolts 30,
As shown in FIG. 7, the hole 31 through which the bolt 30 passes is a long hole extending in a direction orthogonal to the surface of the thin metal plate 3.

With such a configuration, the distance of the cover 23 to the thin metal plate 3 can be adjusted to control the amount of the photosensitive liquid to be sucked. For example, by making the tip 23a of the cover 23 flush with the contact surface 22a, almost all of the photosensitive liquid on the contact surface 22a can be recovered, and by removing the cover 23 from the surface of the thin metal plate 3, the recovery of the photosensitive liquid can be performed. The amount can be reduced.

Next, the pressing mechanism 21 will be described.
The pressing mechanism 21 is arranged between two rods 35 fixed to the back surface of the head body 22, a support block 36 that supports one end of the two rods 35, and between the head body 22 and the support block 36. And a spring 37. The rod 35 passes through the support block 36,
A nut 38 is fixed to the tip. The support block 36 is fixed to a fixed frame (not shown).

With such a configuration, the suction head 20 is constantly urged toward the thin metal plate 3 by the spring 37 and the tightening position of the nut 38 is adjusted.
The pressing pressure of the suction head 20 against the metal sheet 3 can be adjusted. The pressing pressure is appropriately adjusted according to, for example, the degree of the wavy deformation of the thin metal plate 3. When setting the photosensitive solution removing device 4 of the present embodiment, FIGS.
As shown in (2), a pair of photosensitive liquid removing devices 4 are arranged to face each other, and both ends of the thin metal plate 3 are sandwiched. At this time, in the photosensitive liquid removing device 4 on the right side surface in FIG.
Is set so that the tip 23a of the head body 22 is flush with the contact surface 22a of the head body 22. Further, in the photosensitive liquid removing device 4 on the left side, the cover 23 is set so that the front end 23a is separated from the surface of the thin metal plate 3.

In such a set state, the photosensitive liquid on the right surface of the thin metal plate 3 in FIG. 3 can be almost completely recovered at a portion where the transport roller 12 in the drying furnace 2 comes into contact. Therefore, even if the distance L (see FIG. 1) until the first contact with the transport roller 12 is short, the photosensitive liquid in the portion that comes into contact with the transport roller 12 is dried while being transported. Adhesion can be prevented.

On the other hand, the left side surface in FIG. 3 has a considerable distance before coming into contact with the transport roller 12. Therefore, even if a certain amount of the photosensitive liquid is left, the remaining photosensitive liquid is dried before coming into contact with the transport roller 12. Therefore, the remaining photosensitive liquid can be prevented from adhering to the transport roller 12. In this case, since a photosensitive film is formed, it is not necessary to form an etching resistant film later.

Next, the operation will be described. The metal sheet 3 having undergone the leveling process is transported by the transport roller 5 to the photosensitive solution tank 1.
It is transported inside. In the photosensitive solution tank 1, rollers 6 in the tank are provided.
And by the doctor roller pair 7. During this conveyance, the photosensitive liquid is applied to both surfaces of the metal thin plate 3. The metal sheet 3 coated with the photosensitive liquid is conveyed to the drying furnace 2.

At this time, the metal sheet 3 pulled up from the photosensitive solution tank 1 is supplied with the photosensitive solution at both ends thereof by the photosensitive solution removing device 4.
Removed by In the photosensitive solution removing device 4, the contact surfaces 22 a of the suction head 20 are attached to both ends of the metal sheet 3 from both sides.
Is imposed. Therefore, the photosensitive liquid adhering to the portion of the thin metal plate 3 enters the groove 24 of the contact surface 22a. Here, the groove 24 communicates with the suction port 25, and the suction port 25 is connected to the suction device 1 via a suction pipe 28 or the like.
5, the photosensitive liquid that has entered the groove 24 is guided to the suction port 25. Then, the photosensitive liquid guided to the suction port 25 is scraped off by the distal end portion 23 a of the cover 23 and collected in the concave portion 26. And further, the suction hole 2
7, and collected in the reservoir tank 16 via the suction pipe 28.

In the photosensitive liquid removing device 4 on the left side in FIG. 3, the tip 23a of the cover 23 is separated from the surface of the thin metal plate 3 as described above, so that the photosensitive liquid slightly remains on the surface and is dried. A photosensitive film is formed by passing through the furnace 2. In the drying furnace 2, as shown in FIG.
Conveying roller 12 having only both ends in contact with both ends of sheet metal 3
Transports the thin metal plate 3. Here, since the photosensitive liquid at both ends of the thin metal plate 3 has been removed by the photosensitive liquid removing device 4, it is possible to prevent the photosensitive liquid from adhering to the transport roller 12.

In such an embodiment, unnecessary photosensitive liquid is removed by suction, so that a thick portion can be prevented from being formed at the boundary between the portion where the photosensitive liquid has been removed and the portion where it has not been removed. Further, since the suction head 20 is pressed from both sides of the thin metal plate 3, even if the thin metal plate 3 oscillates or undulates, the influence thereof can be suppressed and the photosensitive liquid can be uniformly removed. Further, the contact surface 2 of the suction head 20 with the thin metal plate 3
Since the grooves 24 are formed in the groove 2, unnecessary photosensitive liquid can be efficiently collected, and the amount of the collected liquid can be adjusted by controlling the shape, the number, and the like of the grooves 24.

[Other Embodiments] (a) In the above embodiment, a pair of photosensitive solution removing devices 4 are arranged to face each other and sandwich the thin metal plate 3, but only one surface is contacted. The photosensitive liquid removing device 4 may be arranged at the bottom. (B) In the above embodiment, the mounting position of the cover 23 was adjusted to adjust the removal amount of the photosensitive liquid.
The removal amount of the photosensitive liquid may be adjusted by changing the shape, number, etc.

(C) The shape of the groove 24 formed on the contact surface 22 is not limited to a triangular cross section. For example, the shape may be a semicircle. (D) The pressing means is not limited to a spring, and may use an elastic member such as compressed air or rubber.

[0032]

[Effect] As described above according to the first invention in the photosensitive liquid removal device suction f having a suction port and groove and is formed in contact surfaces
Since the photosensitive liquid on the surface of the thin plate member is suctioned and removed using the pad, it is difficult to form a thick portion of the photosensitive liquid, and the photosensitive liquid can be efficiently removed. Further, by changing the shape of the groove and the like, it becomes easy to adjust the removal amount of the photosensitive solution.

In the photosensitive liquid removing apparatus according to the second aspect of the present invention, the suction head having the suction port is disposed so as to face each other so as to sandwich both sides of the thin plate member. It is difficult to form a portion, and moreover, the effect of deformation of the thin plate-like member such as runout and waving can be reduced, and uniform removal of the photosensitive liquid can be performed.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a photosensitive film forming apparatus employing one embodiment of the present invention.

FIG. 2 is a perspective view of a transport roller disposed in a drying furnace of the apparatus.

FIG. 3 is a front view of a photosensitive liquid removing device arranged in the device.

FIG. 4 is a perspective view of the photosensitive liquid removing device.

FIG. 5 is a sectional view of a cover of the photosensitive liquid removing device.

FIG. 6 is an enlarged sectional partial view of a groove formed in a head main body of the photosensitive liquid removing device.

FIG. 7 is a partial plan view of a mounting portion of the cover.

FIG. 8 is a perspective view showing a deformed state of a metal thin plate.

[Explanation of symbols]

 Reference Signs List 3 metal thin plate 4 photosensitive liquid removing device 20 suction head 21 pressing mechanism 22 head body 22a contact surface 24 groove 25 suction port

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01J 9/14 C23F 1/08

Claims (2)

(57) [Claims] 1. A thin plate portion to which a photosensitive liquid is applied and conveyed
A photosensitive liquid removing device for removing unnecessary photosensitive liquid from both ends in the width direction of the material, the surface of the thin plate member being conveyed.
Are arranged at both ends in the width direction of the
It comes into contact with one end in the width direction of the surface of the sheet
Between the contact surface formed in
Grooves formed on the contact surface to extend
The sheet-like member on the surface is placed at the end in the direction
And a suction port that opens in a direction perpendicular to the
Contact between the suction head and the pair of suction heads
Face to the surface of both ends in the width direction of the thin plate member to be conveyed
And a pressing means for pressing each of the photosensitive liquids. 2. A pair of opposite ends of each of the thin plate members is provided.
Hold the suction head at both ends of the thin plate
2. The device according to claim 1, wherein two pairs are arranged opposite to each other.
The photosensitive solution removing device according to the above.