JP2001002452A - Production of glass substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the occurrence of defects caused by dirt on both of the upper and the rear surfaces of a glass substrate by blowing air onto the both surfaces of the glass substrate in an flow rate higher than a specified flow rate from a nozzle. SOLUTION: The flow rate of compressed air to be blown onto a glass substrate 1 is not less than 5 liter/min (25 deg.C, 1 atm). Dust on both of the upper and rear surfaces of the glass substrate is removed by inserting the glass substrate 1 into a box 3 having exhausting lines 6 using robot hands 5 or the like, when the glass substrate is transported between processes, and then blowing compressed air onto the upper and rear surfaces of the glass substrate from nozzles 2a, 2b each being equipped with a static eliminator system, which compressed air is supplied from a compressed air line 4 and deionized by electrodes for eliminating static electricity. Re-deposition and scattering to the outside of the dust are prevented by providing exhausting lines 6 at the side faces and the inmost side face of the box 3 to exhaust the scattered dust. The exhausting capacity is preferably not less than 5 liter/min (25 deg.C, 1 atm). The glass substrate thus obtained is suitable for a transporting device for color filter substrates.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate cleaning method for removing dust adhering to a glass substrate.

[0002]

2. Description of the Related Art Processing of a color filter is performed in an industrial clean room, but it may be contaminated by adhesion of dust during transportation of the processing step. When the processing process is performed in a state where dust adheres to the color filter, the color filter becomes defective. However, since it is difficult to completely prevent dust in the processing steps, it is necessary to remove dust attached to the color filters before each processing step.

[0003] Therefore, as a method of removing dust, a wet cleaning method of removing foreign substances with pure water or a dry cleaning method of removing foreign substances with compressed air is used. The wet cleaning method has a large equipment configuration and complicated processing steps, whereas the dry cleaning method has a small equipment configuration and simple processing steps, and can be easily installed. But it is often used. However, with the dry cleaning method of the existing technology, dust on the front side of the color filter or on one side can be removed, but dust on both sides cannot be removed at the same time, so when removing dust on the front side of the color filter, There is a disadvantage that product defects due to back surface contamination cannot be prevented. The back surface contamination of the color filter causes a reduction in quality and a reduction in yield.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems of the conventional dry cleaning method, and it has been found that a defect caused by dirt on both front and back surfaces of a glass substrate used for a color filter or the like is generated. It is an object of the present invention to provide a method and an apparatus for manufacturing a glass substrate for preventing the occurrence of the problem.

[0005]

The present invention employs the following configuration to achieve the above object. That is, (1) 5 liter / min (25 ° C., 1
A method for producing a glass substrate, characterized by blowing air (in terms of atm) or more from the front and rear surfaces of a nozzle with a nozzle to clean the glass substrate.

(2) The method for manufacturing a glass substrate according to (1), wherein the blown air is ionized by a static elimination mechanism.

(3) The method of manufacturing a glass substrate according to (1) or (2), wherein the cleaning is performed using a box into which the glass substrate can be inserted.

(4) 5 liters / minute (25
(3) The method for producing a glass substrate according to the above (3), wherein more exhaust is performed.

(5) An apparatus for manufacturing a glass substrate, characterized in that a nozzle for blowing air at a rate of 5 liters / minute (at 25 ° C., converted to 1 atm) or more onto both sides of the glass substrate for cleaning is provided. .

(6) The apparatus for manufacturing a glass substrate according to (5), wherein a nozzle is provided at an entrance of the box having an exhaust line.

(7) The apparatus for manufacturing a glass substrate according to the above (6), further comprising means for inserting the glass substrate into the inside of the box from the entrance of the box.

(8) The apparatus for manufacturing a glass substrate according to any one of the above (5) to (7), which is used for a color filter.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on an embodiment shown in the drawings.

FIG. 1 is a schematic perspective view showing an example of a dry cleaning method according to the present invention.

In FIG. 1, when the glass substrate 1 is transferred between processes, the glass substrate 1 is inserted into a box 3 having an exhaust line 6 by a robot hand 5 or the like. With the two nozzles 2a and 2b,
Compressed air is blown toward the front and back surfaces of the glass substrate 1. The glass substrate 1 is inserted by a robot hand 5 or the like into the box 3 from the entrance of the glass substrate having a size slightly larger than the glass substrate 1 provided between the two nozzles 2a and 2b.

At this time, air supplied from the compressed air line 4, preferably air ionized by the static elimination electrode, is blown into the box 3 from above and below from the nozzles 2 a and 2 b, so that the front and back of the glass substrate 1 are exposed. Dust adhered to both sides is removed. The box 3 is provided with exhaust lines 6 on the side surface and the back side, and exhausting the scattered dust prevents re-attachment of the dust and scattering to the outside.

The flow rate of the compressed air blown onto the glass substrate 1 is set to 5 liter / min (at 25 ° C., converted into 1 atm) or more. If the amount is less than this, it becomes difficult to remove the attached dust.

The materials of the nozzles 2a and 2b, the box 3, and the piping are preferably those which are hardly charged. If the material is metal, a material which generates little dust due to corrosion (for example, preferably stainless steel) is used. It is preferable that polishing is performed so that dust can be easily removed even if it adheres little. Further, it is preferable to adopt a structure that enables disassembly and facilitates cleaning.

It is preferable to use compressed air blown from the nozzles 2a and 2b after removing dust with a filter. Further, it is preferable that a static elimination mechanism for removing static electricity is provided in the nozzles 2a and 2b, neutralization of static electricity of dust and static elimination processing are performed to improve the removal efficiency. Further, it is preferable that the compressed air is blown out in the width direction of the glass substrate 1 so that the compressed air is applied to the entire front and back surfaces of the glass substrate 1 by intermittent rows of holes or continuous slits. Is preferred.

Further, it is preferable that the nozzles 2a and 2b have a structure in which the blow angle can be set, and the blown air is set so as to be directed to the exhaust line 6 of the box 3. The exhaust line 6 is preferably disposed behind the nozzles 2a and 2b attached to the box 3, and it is preferable to adjust the exhaust amount so that the blown air does not leak out of the box 3. That is, the exhaust volume is set to be larger than the spray volume, that is, 5 liters / minute (25
C. (converted to 1 atm).

The glass substrate 1 is inserted into the box 3 by the robot hand 5 or the like. At this time, the glass substrate 1 passes between nozzles 2a and 2b provided above and below the entrance of the box 3, and It is important that the rear end 1a of the glass substrate 1 inserted from the compressed air outlet 2b is inserted into the inside of the box 3. Further, it is preferable that the exhaust in the box 3 is always operated.

A valve is attached to the compressed air line 4 and the like so that the blowing and stopping of the compressed air blown from the nozzles 2a and 2b can be controlled. When the compressed air is constantly blown out from the nozzles 2a and 2b, when the glass substrate 1 is inserted into the box 3, dust adhering to the glass substrate 1 scatters outside the box 3, and the surroundings are removed. Because it can be contaminated,
It is preferable to blow out compressed air only at the time of extraction after insertion.

When the glass substrate 1 is inserted into or removed from the box 3, the opening area of the entrance is preferably made as small as possible in order to increase the wind speed at the entrance of the box 3. It is important to avoid contact with

The speed at which the glass substrate 1 is extracted from the box 3 is such that dust is removed by blowing more compressed air onto the glass substrate 1 and the dust scattered in the box 3 is taken out of the box together with the glass substrate 1. In order to make the process difficult, it is preferable to make the process as late as possible within the allowable tact time of each process.

[0025]

EXAMPLES The present invention will be described below in detail with reference to examples, but the present invention is not limited to these examples.

As shown in FIG. 1, width 400 mm × length 500 m
mx 450mm width for 0.7mm thick glass substrate
SUS304 with a length of 630 mm and a height of 50 mm (# 40
(Both sides polished).

The compressed air supplied to the nozzle has an original pressure of 0.5
A 5 μm filter was installed in the compressed air line at Mpa.

The nozzle is provided with a static elimination mechanism for ionizing compressed air to be blown out, and generates ions in the atmosphere to adsorb ions of opposite characteristics to the dust, which is a charged substance, to neutralize static electricity of the dust and eliminate static electricity. Was done.

The nozzle has a hole of 0.5 mm in diameter of 20 mm.
Compressed air at 70 liters / minute (converted to 25 ° C. and 1 atm) was flowed. The angle of the nozzle was inclined 45 degrees with respect to the substrate surface, and the valve was provided upstream of the compressed air line so that the ionized compressed air could be blown out and stopped.

The speed of extracting the glass substrate from the inside of the box was 0.5 m / sec.

The dry cleaning method of the present invention is preferably provided in a glass substrate transfer device, preferably a transfer device for a color filter glass substrate.

[0032]

According to the present invention, dust adhering to the glass substrate can be removed on both front and back surfaces. As a result, defective products due to dust can be eliminated.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing an example of a dry cleaning method according to the present invention.

[Description of Signs] 1: Glass substrate 2a, 2b: Nozzle with static elimination mechanism 3: Box 4: Compressed air line 5: Robot hand 6: Exhaust line

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H048 BA11 BB14 3B116 AA02 AB42 BB22 BB24 BB32 BB89 CD11 4G059 AA08 AC30

Claims (8)

[Claims] 1. The method according to claim 1, wherein the glass substrate is 5 liters / minute (25
A method for producing a glass substrate, characterized by blowing air (at a temperature of 1 ° C. or more at a temperature of at least 1 ° C.) from a front surface and a back surface with a nozzle for cleaning. 2. The method according to claim 1, wherein the blowing air is ionized by a charge eliminating mechanism. 3. The method according to claim 1, wherein the cleaning is performed using a box into which the glass substrate can be inserted. 4. From the inside of the box, 5 l / min (25 ° C., 1a
The method according to claim 3, wherein more air is exhausted (converted to tm). 5. An apparatus for manufacturing a glass substrate, comprising a nozzle for blowing air at a rate of 5 liters / minute (at 25 ° C., converted into 1 atm) or more onto both sides of the glass substrate for cleaning. 6. The apparatus for manufacturing a glass substrate according to claim 5, wherein a nozzle is provided at an entrance of the box having an exhaust line. 7. A device according to claim 6, further comprising means for inserting a glass substrate from the entrance of said box into said box.
2. The apparatus for manufacturing a glass substrate according to claim 1. 8. The glass substrate manufacturing apparatus according to claim 5, wherein the apparatus is for a color filter.