JP3001485B2 - Manufacturing method of multilayer printed wiring board - Google Patents

Manufacturing method of multilayer printed wiring board

Info

Publication number
JP3001485B2
JP3001485B2 JP9319964A JP31996497A JP3001485B2 JP 3001485 B2 JP3001485 B2 JP 3001485B2 JP 9319964 A JP9319964 A JP 9319964A JP 31996497 A JP31996497 A JP 31996497A JP 3001485 B2 JP3001485 B2 JP 3001485B2
Authority
JP
Japan
Prior art keywords
printed wiring
wiring board
multilayer printed
substrate
copper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP9319964A
Other languages
Japanese (ja)
Other versions
JPH11154788A (en
Inventor
良晃 堀井
Original Assignee
富山日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富山日本電気株式会社 filed Critical 富山日本電気株式会社
Priority to JP9319964A priority Critical patent/JP3001485B2/en
Publication of JPH11154788A publication Critical patent/JPH11154788A/en
Application granted granted Critical
Publication of JP3001485B2 publication Critical patent/JP3001485B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/18Acidic compositions for etching copper or alloys thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、多層プリント配線
板の製造方法に関し、特に金属箔の厚さや種類の異なる
導体層を有する金属箔張り内層材を使用した多層プリン
ト配線板の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer printed wiring board, and more particularly to a method for manufacturing a multilayer printed wiring board using a metal foil-clad inner layer material having conductor layers of different thicknesses and types. It is.

【0002】[0002]

【従来の技術】電子装置の高機能化に伴い、これらの電
子装置に使用されるプリント配線板においても、高密度
化、複雑化パターン対応が要求され、両面や内層の銅箔
の厚さが異なるプリント配線板が製造されるようになっ
ている。
2. Description of the Related Art As electronic devices have become more sophisticated, printed wiring boards used in these electronic devices have also been required to have higher densities and more complicated patterns. Different printed wiring boards are being manufactured.

【0003】従来、両面の銅箔の厚さが異なる両面銅張
り基板を使用したプリント配線板の製造技術が、特開昭
60−218486号公報に開示されている。この技術
によれば、図4の如く、厚さの異なる銅箔3,4を有す
る銅張りの基板1の両面にエッチングレジスト8のパタ
ーンを形成した2枚の基板1を同じ厚さの銅箔4を外側
にして重ね合わせる。この重ね合わせた基板をエッチン
グし、銅箔4のエッチングレジスト非被覆部をエッチン
グ後、2枚の基板を分離する。次いで、2枚の基板1を
銅箔4を内側にして重ね、同様にエッチング後、もとの
2枚にもどして変則両面板が得られる。上記の技術にお
ける基板の重ね合わせる方法としては、位置合わせ用ガ
イド穴等を使用してピン止めするか、テープ止めが使用
される。また、エッチング液の浸入が無視できないよう
な極薄銅箔のような場合には、重ねた基板の周辺をすべ
てテープ等でシールしエッチング液の浸入を防ぐように
される。
Conventionally, a technique for manufacturing a printed wiring board using a double-sided copper-clad board having different thicknesses of copper foils on both sides is disclosed in Japanese Patent Application Laid-Open No. 60-218486. According to this technique, as shown in FIG. 4, two substrates 1 each having a pattern of an etching resist 8 formed on both surfaces of a copper-clad substrate 1 having copper foils 3 and 4 having different thicknesses are connected to copper foils having the same thickness. Lay 4 on the outside. The superposed substrates are etched to etch the non-coated portions of the copper foil 4 with the etching resist, and then the two substrates are separated. Next, the two substrates 1 are stacked with the copper foil 4 inside, and after etching similarly, the two original substrates are returned to obtain the irregular double-sided board. As a method of superposing the substrates in the above technique, pinning using a guide hole or the like for positioning or tape fixing is used. Further, in the case of an ultra-thin copper foil in which the penetration of the etching solution cannot be ignored, the periphery of the stacked substrates is all sealed with a tape or the like so as to prevent the penetration of the etching solution.

【0004】上記技術では、2枚の基板を重ね合わせる
方法として、ガイド穴を使用してピン止めする方法や重
ねた基板の周辺をテープ止めする方法が使用されている
が、特開昭62−247596号公報に開示された両面
テープで2枚の基板の周端部を張り合わせる方法も使用
される。
In the above technique, as a method of superposing two substrates, a method of pinning using a guide hole or a method of tapering the periphery of the superposed substrate is used. No. 247,596 discloses a method of bonding the peripheral ends of two substrates with a double-sided tape.

【0005】この技術について図5を参照して説明す
る。図5(a)は2枚の基板の周端部を両面テープで張
り合わせる場合の基板の構成斜視図であり、図5(b)
は、2枚の基板を張り合わせた後の基板の断面拡大図で
ある。まず、2枚の銅張り基板1の同じ厚さの銅箔4面
側を対向させ(図5(a))、次いで両面テープ12で
張り合わせ、図5(b)の如く2枚の基板は両面テープ
12で接着一体化する。次いで、銅箔3面を整面、ラミ
ネート、露光、現像、エッチング等の処理を行った後、
有機溶剤等で両面テープ12を溶解させ、2枚の基板を
分離する。一般にこの両面テープを使用した方法では、
銅箔4面は回路形成や酸化処理(積層前処理)等を行わ
ない面である。
[0005] This technique will be described with reference to FIG. FIG. 5A is a configuration perspective view of a substrate in a case where the peripheral ends of two substrates are bonded to each other with a double-sided tape, and FIG.
FIG. 2 is an enlarged cross-sectional view of a substrate after two substrates are bonded together. First, two copper-clad substrates 1 are made to face each other with copper foils 4 of the same thickness facing each other (FIG. 5 (a)), and then bonded together with a double-sided tape 12, and as shown in FIG. Adhesive and integrated with tape 12. Then, after performing processing such as surface preparation, lamination, exposure, development, and etching on the three surfaces of the copper foil,
The double-sided tape 12 is dissolved with an organic solvent or the like, and the two substrates are separated. Generally, in the method using this double-sided tape,
The surface of the copper foil 4 is a surface on which circuit formation, oxidation treatment (laminating pretreatment), and the like are not performed.

【0006】[0006]

【発明が解決しようとする課題】上記の従来技術におい
ては、基板の板端をテープ等でシールするため、もとの
2枚にするための剥離作業がおこなわれるので、作業工
教が増加して非効率的である。しかもプリント配線板の
薄板化が進むほど基板の板端のテ ー プの剥離が困難
で、その剥離の際に、基板の割れ等の不具合は発生しや
すい問題点があった。
In the above-mentioned prior art, since the plate edge of the substrate is sealed with a tape or the like, a peeling operation is performed to make the two original substrates, so that the work technique is increased. And inefficient. Moreover, as the thickness of the printed wiring board becomes thinner, it is more difficult to peel off the tape at the board edge of the board, and at the time of peeling, problems such as cracking of the board tend to occur.

【0007】上記の両面テープで2枚の基板を貼り合わ
せる方法では、処理液が両面テープと基板界面に浸入
し、基板表面を酸化させる不具合が発生し、また処理後
の両面テープ剥離には有機溶剤が必要であり、作業環境
面や製造コスト面で問題があった。
In the method of bonding two substrates with the above-mentioned double-sided tape, the processing liquid infiltrates the interface between the double-sided tape and the substrate, causing a problem that the surface of the substrate is oxidized. Since a solvent is required, there are problems in terms of working environment and manufacturing cost.

【0008】本発明は上記の従来の問題点を解決した多
層プリント配線板の製造方法を提供することを目的とす
る。
An object of the present invention is to provide a method for manufacturing a multilayer printed wiring board which solves the above-mentioned conventional problems.

【0009】[0009]

【課題を解決するための手段】本発明の多層プリント配
線板の製造方法は、厚さが異なる銅箔を両面に有する2
枚の両面銅張り基板の片面の同じ厚さの銅箔面に粘着性
有機被膜を化学析出し、前記2枚の銅張りの基板を前記
粘着性有機被膜を介して圧着する工程と、前記圧着した
基板の表面と側面にアルカリ現像型の感光性レジストで
エッチングレジストを形成してエッチングし前記圧着し
た基板の両面に回路を形成する工程と、前記圧着した基
板をアルカリ性の剥離液に浸漬して前記エッチングレジ
ストを除去すると工程と、前記圧着した基板を酸性水溶
液に浸漬して分離する工程と、前記分離した2枚の基板
を前記回路面を内側にプリプレグを介し積層する工程を
含むことを特徴とする。
According to the present invention, there is provided a method for manufacturing a multilayer printed wiring board, comprising:
A step of chemically depositing an adhesive organic film on one side of a copper foil having the same thickness on one side of a double-sided copper-clad substrate, and pressing the two copper-clad substrates through the adhesive organic film; A step of forming an etching resist with an alkali developing type photosensitive resist on the surface and side surfaces of the substrate and etching to form circuits on both surfaces of the pressed substrate, and immersing the pressed substrate in an alkaline stripping solution. A step of removing the etching resist, a step of immersing the press-bonded substrate in an aqueous acid solution and separating, and a step of laminating the two separated substrates on the circuit surface inside through a prepreg. And

【0010】本発明における前記粘着性有機被膜層は2
枚の基板の圧着固定し、以降の工程をあたかも1枚の基
板を処理する如くできるばかりでなく、圧着した基板の
間に異物が混入するのを防止し、また、粘着性有機被膜
は感光性レジストの現像中にアルカリ現像液が圧着した
基板間に万一浸入しても銅箔の表面を保護する作用があ
る。
In the present invention, the adhesive organic coating layer is preferably composed of 2
Not only can one substrate be pressed and fixed, and the subsequent steps can be performed as if one substrate were processed, but foreign substances can be prevented from entering between the pressed substrates. Even if the alkali developing solution enters between the press-bonded substrates during the development of the resist, it has an effect of protecting the surface of the copper foil.

【0011】[0011]

【発明の実施の形態】本発明の実施の形態について図面
を参照して説明する。図1は本発明の第1の実施の形態
の多層プリント配線板の製造方法の工程順を説明するた
めの基板要部の断面図である。
Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view of a main part of a substrate for explaining a process sequence of a method for manufacturing a multilayer printed wiring board according to a first embodiment of the present invention.

【0012】まず厚さが異なる銅箔3と銅箔4を両面に
有する両面銅張りの基板1と基板2の銅箔4面に粘着性
有機被膜20を化学析出する(図1(a))。なお、基
板1,2の銅箔3としては、厚さ35μmや70μmの
銅箔を使用することができ、また銅箔4としては、厚さ
18μmの銅箔が使用できる。
First, an adhesive organic film 20 is chemically deposited on the copper foil 4 of the double-sided copper-clad substrate 1 and the substrate 2 having copper foils 3 and 4 having different thicknesses on both surfaces (FIG. 1 (a)). . The copper foil 3 of the substrates 1 and 2 may be a 35 μm or 70 μm thick copper foil, and the copper foil 4 may be an 18 μm thick copper foil.

【0013】次いで、基板1、2の銅箔4面同士を粘着
性有機被膜20層を介して圧着し、図1(b)の如く、
マスキングテープ5を基板1,2端から3〜10mmと
基板1,2の側面を覆うように貼り付ける。上記の粘着
性有機被膜20は、銅箔面をイミダゾール系化合物含有
水溶液に接触させることによって化学析出し、その好ま
しい膜厚は1〜5μmである。この粘着性有機被膜層2
0の剥離は有機溶剤を使用する必要はなく、酸水溶液等
で容易に剥離でき、また機械的にも基板1,2上のお互
いの粘着性有機被膜20の界面から容易に分離すること
ができる。
Next, the copper foils 4 of the substrates 1 and 2 are pressure-bonded to each other via a 20-layer adhesive organic film, and as shown in FIG.
The masking tape 5 is attached so as to cover the side surfaces of the substrates 1 and 2 from 3 to 10 mm from the ends of the substrates 1 and 2. The above-mentioned adhesive organic film 20 is chemically deposited by bringing the copper foil surface into contact with an aqueous solution containing an imidazole compound, and the preferred film thickness is 1 to 5 μm. This sticky organic coating layer 2
It is not necessary to use an organic solvent for peeling 0, and it can be easily peeled off with an acid aqueous solution or the like, and can be easily separated mechanically from the interface between the adhesive organic coatings 20 on the substrates 1 and 2. .

【0014】マスキングテープ5としては、アクリル系
樹脂、アルデヒド系樹脂、フェノール系樹脂、カルボン
酸系樹脂等の厚さ20〜50μmの強アルカリ溶解型の
感光性樹脂テープが使用できる。このマスキングテープ
5は2重量%程度の濃度の炭酸ソーダ、メタケイ酸ソー
ダ等の水溶液の現像液には耐性を有し、2〜5重量%の
水酸化ナトリウム等の強アルカリ性の剥離液で剥離でき
る。なお、マスキングテープ5は100〜130℃のヒ
ートロールにより基板に熱圧着する。次に、10〜20
重量%の硫酸と0.2〜1重量%の過酸化水素含有のソ
フトエッチング液により基板1,2の銅箔3の表面を表
面処理を施した後、マスキングテープ5に重ならないよ
うに感光性のドライフィルム6をラミネートする(図1
(c))。
As the masking tape 5, a strong alkali-soluble photosensitive resin tape having a thickness of 20 to 50 μm, such as an acrylic resin, an aldehyde resin, a phenol resin, or a carboxylic acid resin, can be used. This masking tape 5 is resistant to a developing solution of an aqueous solution such as sodium carbonate or sodium metasilicate having a concentration of about 2% by weight, and can be peeled off with a strong alkaline stripping solution such as sodium hydroxide of 2 to 5% by weight. . The masking tape 5 is thermocompression-bonded to the substrate by a heat roll at 100 to 130 ° C. Next, 10-20
After the surfaces of the copper foils 3 of the substrates 1 and 2 have been subjected to a surface treatment with a soft etching solution containing 2% by weight of sulfuric acid and 0.2 to 1% by weight of hydrogen peroxide, the photosensitive layer 5 is photosensitive so as not to overlap the masking tape 5. Laminated dry film 6 (FIG. 1)
(C)).

【0015】更に、図1(d)の如くマスキングテープ
5も露光できる内層パターンのマスクフィルム7を基板
1,2の両面に合わせ、紫外線をドライフィルム6に照
射して露光後、0.8〜1.2重量%の炭酸ナトリウム
水溶液等の現像液で未露光部のドライフィルム6を除去
してエッチングレジスト8を得る(図1(e))。
Further, as shown in FIG. 1 (d), a mask film 7 having an inner layer pattern capable of exposing the masking tape 5 is aligned on both sides of the substrates 1 and 2, and after irradiating the dry film 6 with ultraviolet rays, the exposure is reduced to 0.8 to An unexposed portion of the dry film 6 is removed with a developing solution such as a 1.2% by weight aqueous sodium carbonate solution to obtain an etching resist 8 (FIG. 1E).

【0016】次いで、図1(f)の如く露出した銅箔3
を温度40〜60℃の5〜15重量%の塩酸、2〜10
重量%の過酸化水素を含む塩化第二銅水溶液または、塩
化第二鉄水溶液のエッチング液でエッチングして除去
後、2〜5重量%の水酸化ナトリウム水溶液等のアルカ
リ性剥離液でエッチングレジスト8とマスキングテープ
5を同時に除去し、次いで銅箔4面同士を分離し、片面
に回路9,回路10がそれぞれ形成された基板1a,基
板2aを得る(図1(g)。この分離は銅箔4上の粘着
性有機被膜層20を5〜10重量%濃度の塩酸や硫酸溶
液で溶解させる方法や基板1,2の銅箔上のお互いの粘
着性有機被膜層20の界面を機械的に分離させる方法に
よって行うことができる。
Then, the exposed copper foil 3 as shown in FIG.
5 to 15% by weight hydrochloric acid at a temperature of 40 to 60 ° C, 2 to 10%
After removal by etching with an etching solution of an aqueous cupric chloride solution or an aqueous solution of ferric chloride containing 2 wt% of hydrogen peroxide, the etching resist 8 is removed with an alkaline stripping solution such as a 2 to 5 wt% aqueous sodium hydroxide solution. The masking tape 5 is removed at the same time, and then the four surfaces of the copper foil 4 are separated from each other to obtain a substrate 1a and a substrate 2a each having a circuit 9 and a circuit 10 formed on one surface, respectively (FIG. 1 (g). A method of dissolving the above-mentioned adhesive organic coating layer 20 with a hydrochloric acid or sulfuric acid solution having a concentration of 5 to 10% by weight, or mechanically separating the interface between the adhesive organic coating layers 20 on the copper foils of the substrates 1 and 2. Can be done by any method.

【0017】これらの基板1a,基板2aを回路9,1
0を内側にしてプリプレグを介して積層し、通常技術を
使用して穴あけ、めっき、印刷、エッチングして多層プ
リント配線板を製造する。
These substrates 1a and 2a are connected to circuits 9, 1
Laminating through a prepreg with 0 inside, drilling, plating, printing and etching using conventional techniques to produce a multilayer printed wiring board.

【0018】次に、本発明の第2の実施の形態について
説明する。図2は、本発明の第2の実施の形態の多層プ
リント配線板の製造方法の工程順を説明するための基板
要部の断面図である。本実施の形態では、上記第1の実
施の形態におけるマスキングテープの代わりにドライフ
ィルムを使用し、ドライフィルムで基板表面と側面をマ
スキングする。
Next, a second embodiment of the present invention will be described. FIG. 2 is a cross-sectional view of a main part of a substrate for explaining a process sequence of a method for manufacturing a multilayer printed wiring board according to a second embodiment of the present invention. In the present embodiment, a dry film is used instead of the masking tape in the first embodiment, and the surface and side surfaces of the substrate are masked with the dry film.

【0019】まず、上記第1の実施の形態と同様に、厚
さが異なる銅箔3と銅箔4を両面に有する両面銅張りの
基板1と基板2の銅箔4面に粘着性を有する粘着性有機
被膜層20を化学析出する(図2(a))。次いで、基
板1、2の銅箔4面同士を銅箔4上の粘着性有機被膜2
0層を介して圧着し、図2(b)の如く基板1、2の銅
箔3面に、基板端から2mmから10mm程度はみ出す
ようにドライフィルム6をラミネートする。尚、非ラミ
ネート側は、マイラー等の耐熱樹脂でドライフィルムを
保護する。次に、図2(c)の如く基板1、2の板端か
ら出ているドライフィルム同士を合わせ温度100〜1
30℃で熱圧着する。
First, as in the first embodiment, the copper foil 4 of the double-sided copper-clad substrate 1 and the substrate 2 having the copper foils 3 and 4 having different thicknesses on both surfaces has adhesiveness. The adhesive organic coating layer 20 is chemically deposited (FIG. 2A). Next, the copper foil 4 surfaces of the substrates 1 and 2 are adhered to each other by the adhesive organic coating 2 on the copper foil 4.
Then, the dry film 6 is laminated on the copper foil 3 of the substrates 1 and 2 so as to protrude from the edge of the substrate by about 2 mm to 10 mm as shown in FIG. 2B. The dry film is protected on the non-laminated side with a heat-resistant resin such as Mylar. Next, as shown in FIG. 2C, the dry films protruding from the plate ends of the substrates 1 and 2 are combined with each other at a temperature of 100-1.
Thermocompression bonding at 30 ° C.

【0020】以降の工程は上記第1の実施の形態と同様
な工程により露光(図2(d))、現像(図2
(e))、エッチング(図2(f)、エッチングレジス
ト剥離と基板分離(基板1a、基板2a形成)(図2
(g))を行う。次いで分離した基板1a,基板2aを
プリプレグを介して積層し、通常の穴あけ、めっき、印
刷、エッチング技術を使用して多層プリント配線板を製
造する。
In the subsequent steps, exposure (FIG. 2D) and development (FIG. 2D) are performed in the same manner as in the first embodiment.
(E)), etching (FIG. 2F), etching resist peeling and substrate separation (formation of substrate 1a and substrate 2a) (FIG. 2)
(G)). Next, the separated substrate 1a and substrate 2a are laminated via a prepreg, and a multilayer printed wiring board is manufactured using ordinary drilling, plating, printing and etching techniques.

【0021】第2の実施の形態の多層プリント配線板の
製造方法では、圧着した基板1,2の側面もドライフィ
ルム6で被覆するために、上記第1の実施の形態の多層
プリント配線板の製造方法と比較して、製造工程の簡略
化ができる。
In the method for manufacturing a multilayer printed wiring board according to the second embodiment, the side surfaces of the press-bonded substrates 1 and 2 are also covered with the dry film 6. The manufacturing process can be simplified as compared with the manufacturing method.

【0022】次に、本発明の第3の実施の形態について
説明する。図3は、本発明の第2の実施の形態の多層プ
リント配線板の製造方法の工程順を説明するための基板
要部の断面図である。本実施の形態では、上記第2の実
施の形態におけるドライフィルムの代わりに感光性の液
状レジストで基板表面と側面をマスキングする。
Next, a third embodiment of the present invention will be described. FIG. 3 is a cross-sectional view of a main part of a substrate for explaining a process sequence of a method for manufacturing a multilayer printed wiring board according to a second embodiment of the present invention. In the present embodiment, the substrate surface and side surfaces are masked with a photosensitive liquid resist instead of the dry film in the second embodiment.

【0023】まず、上記第1、第2の実施の形態と同様
に、厚さが異なる銅箔3と銅箔4を両面に有する2枚の
両面銅張りの基板1と基板2の銅箔4面に粘着性を有す
る粘着性有機被膜層20を形成する(図3(a))。次
いで、基板1、2の銅箔4面同士を銅箔4上の粘着性有
機被膜20層を介して圧着し、図3(b)の如く基板
1,2の銅箔3面に、感光性の液状レジスト11を塗布
する。塗布方法としては、浸漬法が適している。 ま
た、液状レジストの成分としては、アクリル系樹脂、ア
ルデヒド系樹脂、フェノール系樹脂、カルボン酸系樹脂
等を使用でき、その塗布厚は10〜20μmが適当であ
る。液状レジスト11を塗布後、温度80〜100℃で
約30分熱風乾燥する。以降、上記第1、第2の実施の
形態と同様な工程によって多層プリント配線板を製造す
る。
First, as in the first and second embodiments, two double-sided copper-clad substrates 1 and 2 each having copper foils 3 and 4 each having a different thickness are provided. An adhesive organic coating layer 20 having an adhesive surface is formed (FIG. 3A). Next, the copper foils 4 of the substrates 1 and 2 are pressure-bonded to each other via the adhesive organic coating 20 layer on the copper foil 4, and the photosensitive foil 3 is applied to the copper foils 3 of the substrates 1 and 2 as shown in FIG. Of the liquid resist 11 is applied. A dipping method is suitable as a coating method. In addition, as a component of the liquid resist, an acrylic resin, an aldehyde resin, a phenol resin, a carboxylic acid resin, or the like can be used, and its coating thickness is suitably from 10 to 20 μm. After applying the liquid resist 11, it is dried with hot air at a temperature of 80 to 100 ° C. for about 30 minutes. Thereafter, a multilayer printed wiring board is manufactured by the same steps as those in the first and second embodiments.

【0024】[0024]

【発明の効果】本発明は、厚さの異なる銅箔を両面に有
する2枚の両面銅張りの基板の同じ厚さの銅箔面を化学
的に析出した粘着性有機被膜を介して張り合わせた後、
基板の表面と側面に感光性のドライフィルム等を形成し
てパターン形成処理をすることによって次のような効果
が得られる。 (1)従来例のように基板周辺部につけたテープの剥離
作業を必要としないためにパターン形成の作業能率を1
0〜30%向上することができる。 (2)従来のようなテープ剥離のための有機溶剤の使用
は必要としないために製造コストの削減ができる。 (3)張り合わせた基板の分離が容易であり、基板のカ
ケ割れの発生を防止できるために多層プリント配線板の
品質を向上できる。 (4)張り合わせた銅箔面がパターン形成中、粘着性有
機被膜で保護され、該銅箔面の酸化、変色の発生を防止
できるために多層板プリント配線板の外層回路パターン
の品質を向上できる。
According to the present invention, two double-sided copper-clad substrates having copper foils having different thicknesses on both sides are bonded together via a chemically deposited adhesive organic film on the copper foil surfaces of the same thickness. rear,
The following effects can be obtained by forming a photosensitive dry film or the like on the surface and side surfaces of the substrate and performing pattern formation processing. (1) Since there is no need to remove the tape attached to the peripheral portion of the substrate as in the conventional example, the working efficiency of pattern formation is reduced to 1
It can be improved by 0 to 30%. (2) Since it is not necessary to use an organic solvent for peeling off the tape as in the related art, the manufacturing cost can be reduced. (3) The quality of the multilayer printed wiring board can be improved because the bonded substrates can be easily separated and the occurrence of cracks in the substrate can be prevented. (4) The quality of the outer layer circuit pattern of the multilayer printed wiring board can be improved because the surface of the laminated copper foil is protected by the adhesive organic film during the pattern formation, and the oxidation and discoloration of the copper foil surface can be prevented. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施の形態の多層プリント配線
板の製造方法の工程順を説明するための基板要部の断面
図である。
FIG. 1 is a cross-sectional view of a main part of a substrate for explaining a process sequence of a method for manufacturing a multilayer printed wiring board according to a first embodiment of the present invention.

【図2】本発明の第2の実施の形態の多層プリント配線
板の製造方法の工程順を説明するための基板要部の断面
図である。
FIG. 2 is a cross-sectional view of a main part of a substrate for describing a process order of a method for manufacturing a multilayer printed wiring board according to a second embodiment of the present invention.

【図3】本発明の第3の実施の形態の多層プリント配線
板の製造方法の工程順を説明するための基板要部の断面
図である。
FIG. 3 is a cross-sectional view of a main part of a substrate for describing a process order of a method for manufacturing a multilayer printed wiring board according to a third embodiment of the present invention.

【図4】従来のプリント配線板の製造例を示す基板要部
の断面図である。
FIG. 4 is a cross-sectional view of a main part of a substrate showing an example of manufacturing a conventional printed wiring board.

【図5】従来のプリント配線板の製造例を示す基板要部
の断面図である。
FIG. 5 is a cross-sectional view of a main part of a substrate showing an example of manufacturing a conventional printed wiring board.

【符号の説明】[Explanation of symbols]

1,2,1a,2a 基板 3,4 銅箔 5 マスキングテープ 6 ドライフィルム 7 マスクフィルム 8 エッチングレジスト 9,10 回路 11 液状レジスト 12 両面テープ 20 粘着性有機被膜層 1,2,1a, 2a Substrate 3,4 Copper foil 5 Masking tape 6 Dry film 7 Mask film 8 Etching resist 9,10 Circuit 11 Liquid resist 12 Double-sided tape 20 Adhesive organic coating layer

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 厚さが異なる銅箔を両面に有する2枚の
両面銅張り基板の片面の同じ厚さの銅箔面に粘着性有機
被膜を化学析出し、前記2枚の銅張りの基板を前記粘着
性有機被膜を介して圧着する工程と、前記圧着した基板
の表面と側面にアルカリ現像型の感光性レジストでエッ
チングレジストを形成してエッチングし前記圧着した基
板の両面に回路を形成する工程と、前記圧着した基板を
アルカリ性の剥離液に浸漬して前記エッチングレジスト
を除去すると工程と、前記圧着した基板を酸性水溶液に
浸漬して分離する工程と、前記分離した2枚の基板を前
記回路面を内側にプリプレグを介し積層する工程を含む
ことを特徴とする多層プリント配線板の製造方法。
1. An adhesive organic film is chemically deposited on one side of a copper foil of the same thickness on one side of two double-sided copper-clad boards having copper foils having different thicknesses on both sides, and the two copper-clad boards are provided. Pressure-bonding via the adhesive organic film, and forming an etching resist on the surface and side surfaces of the pressure-bonded substrate with an alkali-developable photosensitive resist to form circuits on both surfaces of the pressure-bonded substrate Removing the etching resist by immersing the press-bonded substrate in an alkaline stripper, and immersing the press-bonded substrate in an acidic aqueous solution to separate the two substrates. A method for manufacturing a multilayer printed wiring board, comprising a step of laminating a circuit surface inside through a prepreg.
【請求項2】 前記粘着性有機被膜を前記銅張り基板を
イミダゾール系化合物含有水溶液に接触させることによ
って厚さ1乃至5μmを化学析出させた請求項1記載の
多層プリント配線板の製造方法。
2. The method for producing a multilayer printed wiring board according to claim 1, wherein the adhesive organic film is chemically deposited to a thickness of 1 to 5 μm by bringing the copper-clad substrate into contact with an aqueous solution containing an imidazole compound.
【請求項3】 前記感光性レジストとしてアルカリ現像
型のドライフィルムを使用した請求項1または2記載の
多層プリント配線板の製造方法。
3. The method for producing a multilayer printed wiring board according to claim 1, wherein an alkali-developing dry film is used as said photosensitive resist.
【請求項4】 前記感光性レジストとしてアルカリ現像
型のマスキングテープとアルカリ現像型のドライフィル
ムを使用し、該マスキングテープを前記圧着した基板の
側面と周辺部に形成し、該アルカリ現像型のドライフィ
ルムを前記圧着した基板の表面に形成した請求項1また
は2記載の多層プリント配線板の製造方法。
4. An alkali-developing masking tape and an alkali-developing dry film are used as the photosensitive resist, and the masking tape is formed on the side and peripheral portions of the press-bonded substrate. 3. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein a film is formed on the surface of the press-bonded substrate.
【請求項5】 前記感光性レジストとしてアルカリ現像
型の液状レジストをを使用した請求項1または2記載の
多層プリント配線板の製造方法。
5. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein a liquid resist of an alkali development type is used as said photosensitive resist.
JP9319964A 1997-11-20 1997-11-20 Manufacturing method of multilayer printed wiring board Expired - Fee Related JP3001485B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9319964A JP3001485B2 (en) 1997-11-20 1997-11-20 Manufacturing method of multilayer printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9319964A JP3001485B2 (en) 1997-11-20 1997-11-20 Manufacturing method of multilayer printed wiring board

Publications (2)

Publication Number Publication Date
JPH11154788A JPH11154788A (en) 1999-06-08
JP3001485B2 true JP3001485B2 (en) 2000-01-24

Family

ID=18116223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9319964A Expired - Fee Related JP3001485B2 (en) 1997-11-20 1997-11-20 Manufacturing method of multilayer printed wiring board

Country Status (1)

Country Link
JP (1) JP3001485B2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1063873A3 (en) * 1999-06-22 2003-04-23 Dr.-Ing. Jürgen Schulz-Harder Process for manufacturing substrates with patterned metallizations and holding and fixing element used in the process
JP4811756B2 (en) * 2001-09-28 2011-11-09 Dowaメタルテック株式会社 Method for manufacturing metal-ceramic bonding circuit board
JP2007335700A (en) 2006-06-16 2007-12-27 Fujitsu Ltd Manufacturing method of wiring board
JP2007335698A (en) 2006-06-16 2007-12-27 Fujitsu Ltd Manufacturing method of wiring board
US7807215B2 (en) 2006-09-21 2010-10-05 Samsung Electro-Mechanics Co., Ltd. Method of manufacturing copper-clad laminate for VOP application
JP2008078487A (en) * 2006-09-22 2008-04-03 Samsung Electro Mech Co Ltd Method of manufacturing copper clad laminate for vop
JP2009021435A (en) * 2007-07-12 2009-01-29 Sony Chemical & Information Device Corp Manufacturing method of wiring board
KR101180355B1 (en) 2012-02-21 2012-09-07 주식회사 비에이치 Manufacturing method of dual side multi layer typed flexible printed circuit board and dual side multi layer typed flexible printed circuit board manufactured by the method thereof
CN115868254A (en) * 2020-09-03 2023-03-28 积水化学工业株式会社 Metal-clad laminate protected at end portion, method for manufacturing printed wiring board, and method for manufacturing intermediate for printed wiring board
JP2023077955A (en) * 2021-11-25 2023-06-06 信越化学工業株式会社 Material for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, and patterning process

Also Published As

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