JP2933105B2 - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JP2933105B2
JP2933105B2 JP3269645A JP26964591A JP2933105B2 JP 2933105 B2 JP2933105 B2 JP 2933105B2 JP 3269645 A JP3269645 A JP 3269645A JP 26964591 A JP26964591 A JP 26964591A JP 2933105 B2 JP2933105 B2 JP 2933105B2
Authority
JP
Japan
Prior art keywords
resin
semiconductor device
lead
external
upper resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3269645A
Other languages
Japanese (ja)
Other versions
JPH05109930A (en
Inventor
純一 河西
和人 辻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3269645A priority Critical patent/JP2933105B2/en
Priority to EP95113975A priority patent/EP0689241A2/en
Priority to EP19920309366 priority patent/EP0538010A3/en
Priority to US07/961,161 priority patent/US5475259A/en
Priority to KR92019118A priority patent/KR960016562B1/en
Publication of JPH05109930A publication Critical patent/JPH05109930A/en
Priority to US08/441,462 priority patent/US5666064A/en
Priority to US08/455,909 priority patent/US5637923A/en
Priority to US08/789,661 priority patent/US5736428A/en
Priority to US08/789,625 priority patent/US5750421A/en
Application granted granted Critical
Publication of JP2933105B2 publication Critical patent/JP2933105B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01078Platinum [Pt]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、樹脂封止型の多ピンの
半導体装置に関する。
The present invention relates to a resin-sealed multi-pin semiconductor device.

【0002】近年、半導体装置の高集積化より多ピン化
が進むと共に、小型化が常に要求される。これに伴い微
小ピッチで配列される外部リードの幅、厚みが小さくな
り、強度が極めて低くなってきている。そのため、製造
から実装まで、外部リードにストレスを加えないことが
重要となる。
In recent years, as the number of pins has increased due to higher integration of semiconductor devices, miniaturization has always been required. As a result, the width and thickness of the external leads arranged at a fine pitch have become smaller, and the strength has become extremely low. Therefore, it is important not to apply stress to the external leads from manufacturing to mounting.

【0003】[0003]

【従来の技術】図6(A),(B)に従来の半導体装置
の断面図を示す。図6(A)は平面断面図、図6(B)
は図6(A)のA−A断面図である。図6(A),
(B)において、半導体装置30は、いわゆるQFP
(Quad FlatPackage)型のもので、リードフレーム31
の中央部分のステージ32上に半導体チップ33が搭載
される。そして、半導体チップ33とリードフレーム3
1の内部リード34とがワイヤ35によりボンディング
され、封止樹脂36によりモールドされる。また、リー
ドフレーム31の外部リード37がL型形状に加工され
る。
2. Description of the Related Art FIGS. 6A and 6B are sectional views of a conventional semiconductor device. FIG. 6A is a plan cross-sectional view, and FIG.
FIG. 7 is a sectional view taken along the line AA of FIG. FIG. 6 (A),
In (B), the semiconductor device 30 is a so-called QFP
(Quad FlatPackage) type lead frame 31
The semiconductor chip 33 is mounted on the stage 32 at the center of the semiconductor chip 33. Then, the semiconductor chip 33 and the lead frame 3
The first internal lead 34 is bonded with a wire 35 and molded with a sealing resin 36. Further, the external leads 37 of the lead frame 31 are processed into an L-shape.

【0004】例えば、外部リード37がピッチ0.5m
mで300ピンを越えるものや、ピッチ0.4mm,
0.3mmで100ピンを越えるパッケージが開発され
ている。この場合の外部リード37の厚さも約200μ
mから約100μmに移行してきている。
For example, when the external leads 37 have a pitch of 0.5 m
over 300 pins in pitch m, pitch 0.4mm,
Packages exceeding 100 pins at 0.3 mm have been developed. In this case, the thickness of the external lead 37 is also about 200 μm.
from about m to about 100 μm.

【0005】このような半導体装置30について、メー
カーの出荷、ユーザーの受け入れ等の特性試験を行う場
合、試験装置におけるプローブ又はソケットにより、当
該半導体装置30の外部リード37の先端部をコンタク
トさせて行っている。
When such a semiconductor device 30 is subjected to a characteristic test such as shipment from a manufacturer, acceptance of a user, or the like, the tip of the external lead 37 of the semiconductor device 30 is brought into contact with a probe or a socket in the test device. ing.

【0006】[0006]

【発明が解決しようとする課題】しかし、上述のように
外部リード37の幅、厚みが小さくなって強度が極めて
低くなってきていることから、試験時におけるプローブ
又はソケットとのコンタクトの際に、外部リード37が
変形する危険性が高いという問題がある。
However, as described above, the width and thickness of the external lead 37 have become smaller and the strength has become extremely low. There is a problem that the risk of deformation of the external lead 37 is high.

【0007】また、当該半導体装置30の特性試験を行
う際、プローブ又はソケットのコンタクト、外部リード
長を含めたパスが長くなり、インピーダンスの影響で高
速素子の特性に変動を生じ易くなるという問題がある。
Further, when a characteristic test of the semiconductor device 30 is performed, a path including a probe or socket contact and an external lead length becomes long, and the characteristic of the high-speed element tends to fluctuate due to the influence of impedance. is there.

【0008】そこで、本発明は上記課題に鑑みなされた
もので、外部リードの変形を防止して確実な特性試験が
可能な半導体装置を提供することを目的とする。
The present invention has been made in view of the above problems, and has as its object to provide a semiconductor device capable of preventing deformation of external leads and performing a reliable characteristic test.

【0009】上記課題は、リードフレームのステージ上
にチップが搭載され、該リードフレームの内部リードと
の接続後、外部リードを延出させて樹脂モールドにより
パッケージングされる半導体装置において、前記パッケ
ージングにより形成されるパッケージの、実装面に対す
る前記外部リードより上方の上部樹脂を、該外部リード
の下面の表出部を表出させて下部樹脂より大に形成する
と共に、前記上部樹脂の端部より外側で前記外部リード
が前記実装面側に折り曲げられた構成とすることにより
解決することができる
[0009] The above object is to provide a semiconductor device in which a chip is mounted on a stage of a lead frame, and after connecting with an internal lead of the lead frame, external leads are extended and packaged by resin molding. The upper resin above the external lead with respect to the mounting surface of the package formed by exposing the exposed portion of the lower surface of the external lead to be larger than the lower resin and from the end of the upper resin This can be solved by adopting a configuration in which the external lead is bent toward the mounting surface on the outside .

【0010】また、リードフレームのステージ上にチッ
プが搭載され、該リードフレームの内部リードとの接続
後、外部リードを延出させて樹脂モールドによりパッケ
ージングされる半導体装置において、前記パッケージン
グにより形成されるパッケージの、実装面に対する前記
外部リードより上方の上部樹脂と下部樹脂の大きさを異
ならせ、該外部リードの一面の表出部表出させて形成
し、該上部樹脂と該下部樹脂との大きさの差部分で表出
する該表出部間に、突出部を一体で形成することによっ
ても解決される。
In a semiconductor device in which a chip is mounted on a stage of a lead frame and connected to internal leads of the lead frame, external leads are extended and packaged by resin molding. The size of the upper resin and the lower resin above the external lead with respect to the mounting surface of the package to be formed is made different, and the exposed portion of one surface of the external lead is exposed to form the upper resin and the lower resin. The problem can also be solved by integrally forming the protruding portion between the exposed portions exposed at the difference in size.

【0011】[0011]

【作用】上述のように、上部樹脂と下方の下部樹脂の大
きさを異ならせて形成し、 その大きさの差部分で外部
リードの上面又は下面の表出部を表出させている。
As described above, the size of the upper resin and the size of the lower resin below are large.
Formed with different sizes, and the difference in size
The exposed portion on the upper or lower surface of the lead is exposed.

【0012】これにより、半導体装置の特性試験を行う
際、上記外部リードの表出した下面の表出部に試験を行
うためのプローブ又はソケットを接触導通させて行うこ
とが可能となる。すなわち、外部リードの先端で試験を
行なわないことから、該外部リードの幅が狭く、厚みが
小さくても、試験時に外部リードを変形させることを防
止することが可能となる。
This makes it possible to conduct a characteristic test of the semiconductor device by bringing a probe or a socket for conducting the test into contact with the exposed portion of the exposed lower surface of the external lead. That is, since the test is not performed at the tip of the external lead, it is possible to prevent the external lead from being deformed during the test even if the external lead is narrow and thin.

【0013】また、試験の際には上述の外部リードの下
面の表出部をプローブ又はソケットに搭載接触させると
共に、該表出部の接触位置がチップに近い位置であるこ
とから、試験時の信号パスが短縮されることになり、高
速素子の特性変動を防止することが可能となる。
In the test, the exposed portion on the lower surface of the external lead is brought into contact with the probe or the socket, and the contact position of the exposed portion is close to the chip. Since the signal path is shortened, it is possible to prevent the characteristic fluctuation of the high-speed element.

【0014】また、上部樹脂と下部樹脂の何れかを他方
より大に形成し、その差部分で表出している外部リード
の一面の表出部間に突出部を形成させる。
Further, one of the upper resin and the lower resin is formed larger than the other resin, and a protruding portion is formed between the exposed portions of one surface of the external lead exposed at the difference.

【0015】これにより、上述の外部リードの変形や高
速素子の特性変動が前述と同様に防止されると共に、表
出させた外部リードの表出部と、特性試験時のプローブ
又はソケットの接触位置のずれを該突出部より規制させ
ることが可能となり、確実な試験を行うことが可能とな
る。
As a result, the deformation of the external lead and the variation in the characteristics of the high-speed element are prevented in the same manner as described above, and the exposed portion of the external lead and the contact position of the probe or the socket at the time of the characteristic test are prevented. Can be regulated by the projecting portion, and a reliable test can be performed.

【0016】[0016]

【実施例】図1に、本発明の第1の実施例の構成図を示
す。図1(A)は側部断面図であり、図1(B)は底面
図である。
FIG. 1 shows a configuration diagram of a first embodiment of the present invention. FIG. 1A is a side sectional view, and FIG. 1B is a bottom view.

【0017】図1(A),(B)の半導体装置1Aにお
いて、リードフレーム2のステージ3上にチップ4が搭
載され、リードフレーム2の内部リード5との間でワイ
ヤ6によりボンディングされる。そして、モールド樹脂
によりパッケージ7が形成され、その後リードフレーム
2の外部リード8が回路基板の表面に実装が可能となる
ような形状に足曲げ加工される。
In the semiconductor device 1A shown in FIGS. 1A and 1B, a chip 4 is mounted on a stage 3 of a lead frame 2 and is bonded to an internal lead 5 of the lead frame 2 by a wire 6. Then, a package 7 is formed by a mold resin, and thereafter, the external leads 8 of the lead frame 2 are bent in a shape such that the external leads 8 can be mounted on the surface of the circuit board.

【0018】この場合、パッケージ7の外部リード8よ
り上方の上部樹脂7aは下部樹脂7bより大に形成さ
れ、上部樹脂7aと下部樹脂7bとの大きさの差部分、
すなわち上部樹脂7aの下面縁端部分で外部リード8の
下面が表出する表出部8aが形成される。そして、表出
部8a周辺の面は上部樹脂7aの下面縁端部分に埋設さ
れる。なお、該上部樹脂7aの下面縁端部分における外
部リード8は少なくとも下面の表出部8aが表出してい
ればよい。
In this case, the upper resin 7a above the external leads 8 of the package 7 is formed to be larger than the lower resin 7b, and a difference in size between the upper resin 7a and the lower resin 7b,
That is, an exposed portion 8a is formed at the edge of the lower surface of the upper resin 7a so that the lower surface of the external lead 8 is exposed. The surface around the exposed portion 8a is buried in the lower edge of the upper resin 7a. The external lead 8 at the lower edge of the upper resin 7a only needs to be exposed at least at the exposed portion 8a on the lower surface.

【0019】例えば、外部リード8の幅が0.1mm〜
0.2mm、厚さが100μmでピッチを0.3mm〜
0.4mmとして100本以上配列される。
For example, when the width of the external lead 8 is 0.1 mm to
0.2mm, 100μm thickness, 0.3mm pitch
100 or more are arranged as 0.4 mm.

【0020】この場合、表出部8aは、リード長さで4
00μm表出される。すなわち、この400μmは、後
述する特性試験におけるプローブとの接触のために必要
なリード長である。
In this case, the exposed portion 8a has a lead length of 4
It is expressed as 00 μm. That is, this 400 μm is a lead length necessary for contact with the probe in a characteristic test described later.

【0021】ここで、図2に、図1の製造工程を説明す
るための図を示す。図2において、まず、リードフレー
ム2のステージ3上にチップ4を搭載して、内部リード
5とワイヤ6によりボンディング後、上金型9a及び下
金型9bにより形成されるキャビティ10内にチップ4
周辺のモールド部分が位置される。
Here, FIG. 2 is a view for explaining the manufacturing process of FIG. In FIG. 2, first, the chip 4 is mounted on the stage 3 of the lead frame 2, and after bonding with the internal lead 5 and the wire 6, the chip 4 is placed in the cavity 10 formed by the upper mold 9a and the lower mold 9b.
A peripheral mold portion is located.

【0022】この場合、上金型9aの空間は下金型9b
の空間より大に形成されており、リードフレーム2の内
部リード5と外部リード8の一部を上金型9aにより覆
っている。そして、リードフレーム2の位置決めのため
に、下金型9bに突起11が形成され、リードフレーム
2を貫通して上金型9aに嵌合する。
In this case, the space of the upper mold 9a is
The inner lead 5 and a part of the outer lead 8 of the lead frame 2 are covered by an upper mold 9a. Then, a projection 11 is formed on the lower mold 9b for positioning the lead frame 2, and penetrates through the lead frame 2 to fit into the upper mold 9a.

【0023】そして、上金型9aに形成されているゲー
ト12よりモールド樹脂を注入してパッケージングする
ものである。
Then, a molding resin is injected from the gate 12 formed on the upper mold 9a to perform packaging.

【0024】そこで、図3に、本発明による特性試験を
説明するための図を示す。図3において、試験装置13
におけるソケット14より、半導体装置1Aの外部リー
ド8の数に応じたプローブ15が設けられている。そし
て、このプローブ15上に、半導体装置1A における外
部リード8の表出部8aが接触導通するように載置され
ることにより特性試験が行われるものである。
FIG. 3 is a diagram for explaining a characteristic test according to the present invention. In FIG. 3, the test device 13
Are provided with probes 15 corresponding to the number of external leads 8 of the semiconductor device 1A . Then, a characteristic test is performed by placing the exposed portion 8a of the external lead 8 in the semiconductor device 1A on the probe 15 so as to be in contact with and conduction.

【0025】すなわち、半導体装置1A の特性試験を行
うにあたり、ソケット14上に載置すれば足り、また、
プローブ15との接触を外部リード8の先端ではなく、
上部樹脂7aに3面が埋設された外部リード8の表出部
8aで行っている。これにより、外部リード8の強度が
低くても変形を防止して容易に特性試験を行うことがで
きる。
That is, in conducting a characteristic test of the semiconductor device 1 A , it is sufficient to mount the semiconductor device 1 A on the socket 14.
The contact with the probe 15 is not the tip of the external lead 8,
This is performed at the exposed portion 8a of the external lead 8 in which three surfaces are embedded in the upper resin 7a. Thereby, even if the strength of the external lead 8 is low, deformation can be prevented and the characteristic test can be easily performed.

【0026】また、試験を行うに際し、信号経路となる
プローブ15を長く設ける必要がなく、また該プローブ
15とチップ4に近い位置で接触させることができるこ
とから、信号パスが短くなってインピーダンスの増加を
回避することができる。これにより、チップ4が高速素
子の場合に、インピーダンスの影響を受けず、特性変動
が防止されて正確な特性試験を行うことができるもので
ある。
In conducting a test, it is not necessary to provide a long probe 15 as a signal path, and the probe 15 can be brought into contact with the probe 4 at a position close to the chip 4, so that the signal path is shortened and the impedance is increased. Can be avoided. Thereby, when the chip 4 is a high-speed element, the characteristic fluctuation is prevented without being affected by impedance, and an accurate characteristic test can be performed.

【0027】次に、図4に、図1のリード形状の変形例
の構成断面図を示す。図1では、外部リード8の表面実
装用にL型形状に形成した場合を示したが、図4(A)
は、外部リード8A を下方に約直角に足曲げ加工したも
のである。また、図4(B)は外部リード8B を足曲げ
加工せずに直線形状としたものである。図4(A),
(B)両方共に外部リード8A ,8B には、上述と同様
に、表出部8aが形成されるもので、効果は図1と同様
である。
Next, FIG. 4 is a sectional view showing the configuration of a modification of the lead shape shown in FIG. FIG. 1 shows a case where the external lead 8 is formed in an L-shape for surface mounting, but FIG.
Is obtained by legs bent approximately at right angles to the outer leads 8 A downward. Further, FIG. 4 (B) is obtained by a linear shape without bending legs outer leads 8 B. FIG. 4 (A),
The outer leads 8 A, 8 B in (B) both, in the same manner as described above, those exposed portions 8a are formed, the effect is the same as that shown in FIG.

【0028】次に、図5に、本発明の第2の実施例の構
成図を示す。図5は、底面から観た斜視図を示したもの
である。図5における半導体装置1B は、外部リード
の下面に表出部8aを形成させて、上部樹脂7aを下部
樹脂7bより大に形成するのは図1と同様である。この
場合、外部リード8の表出部8aの間に突出部16を上
部樹脂7aと一体に形成したものである。
Next, FIG. 5 shows a configuration diagram of a second embodiment of the present invention. FIG. 5 is a perspective view as viewed from the bottom. The semiconductor device 1 B is shown in FIG. 5, the outer leads 8
The upper portion 7a is formed larger than the lower portion resin 7b by forming the exposed portion 8a on the lower surface of the substrate as in FIG. In this case, the protrusion 16 is formed integrally with the upper resin 7a between the exposed portions 8a of the external leads 8.

【0029】この半導体装置1B は、基本的に図1に示
す半導体装置1A の効果と同様であり、これに加えて特
性試験時に突出部16が表出部8aに接触するプローブ
(図3参照)の位置規制の役割を果たす。すなわち、プ
ローブの位置ずれを防止して確実な試験を行うことがで
きるものである。
[0029] The semiconductor device 1 B is similar to the effect of essentially the semiconductor device 1 A shown in FIG. 1, a probe was added protrusion 16 at the time characteristics testing is this contact with the exposed portion 8a (FIG. 3 Plays a role in position regulation (see Ref.). That is, it is possible to perform a reliable test while preventing the displacement of the probe.

【0030】なお、図5では、パッケージ7を上部樹脂
7aを下部樹脂7bより大に形成する場合を示したが、
搭載されるチップが試験時にインピーダンスの影響を受
けない場合には、下部樹脂7bを上部樹脂7aより大に
形成してもよい。この場合、表出部8aは外部リード8
の上面に形成され、表出部8a間には突出部16が形成
されるものである。そして、特性試験時には上方にプロ
ーブが位置し、突出部16により位置規制されて確実に
表出部16と接触導通させることができる。
FIG. 5 shows a case where the package 7 is formed so that the upper resin 7a is larger than the lower resin 7b.
If the mounted chip is not affected by the impedance during the test, the lower resin 7b may be formed larger than the upper resin 7a. In this case, the exposed portion 8a is the external lead 8
Are formed on the upper surface, and a protruding portion 16 is formed between the exposed portions 8a. During the characteristic test, the probe is located above, and the position is regulated by the protruding portion 16 so that the probe can be reliably brought into contact with the exposed portion 16.

【0031】なお、第2の実施例における外部リード8
の形状は、図1及び図4と同様に形成される。
Note that the external leads 8 in the second embodiment
Is formed in the same manner as in FIGS.

【0032】[0032]

【発明の効果】以上のように本発明によれば、パッケー
ジの上部樹脂を下部樹脂より大に形成し、その大きさの
差部分で外部リードの下面を表出させることにより、ま
た、表出部間に突出部を形成することにより、特性試験
時における外部リードの変形を防止して、確実に試験を
行うことができる。
According to the present invention as described above, according to the present invention, to form an upper resin package larger than the lower resin, by to expose the lower surface of the outer leads by the size difference between the portion of its, also, Table By forming the protruding portions between the protruding portions, deformation of the external leads during the characteristic test can be prevented, and the test can be reliably performed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施例の構成図である。FIG. 1 is a configuration diagram of a first embodiment of the present invention.

【図2】図1の製造を説明するための図である。FIG. 2 is a view for explaining the manufacture of FIG. 1;

【図3】本発明による特性試験を説明するための図であ
る。
FIG. 3 is a diagram for explaining a characteristic test according to the present invention.

【図4】図1のリード形状の変形例の構成断面図であ
る。
FIG. 4 is a sectional view of a configuration of a modification of the lead shape of FIG. 1;

【図5】本発明の第2の実施例の構成図である。FIG. 5 is a configuration diagram of a second embodiment of the present invention.

【図6】従来の半導体装置の断面図である。FIG. 6 is a cross-sectional view of a conventional semiconductor device.

【符号の説明】[Explanation of symbols]

A ,1B 半導体装置 2 リードフレーム 3 ステージ 4 チップ 5 内部リード 6 ワイヤ 7 パッケージ 7a 上部樹脂 7b 下部樹脂 8 外部リード 8a 表出部 16 突出部 DESCRIPTION OF SYMBOLS 1 A , 1B semiconductor device 2 Lead frame 3 Stage 4 Chip 5 Internal lead 6 Wire 7 Package 7a Upper resin 7b Lower resin 8 External lead 8a Exposure 16 Projection

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 リードフレームのステージ上にチップが
搭載され、前記リードフレームの内部リードとの接続
後、外部リードを延出させて樹脂モールドによりパッケ
ージングされる半導体装置において、 前記パッケージングにより形成されるパッケージの、実
装面に対する前記外部リードより上方の上部樹脂を、前
記外部リードの下面の表出部を表出させて下部樹脂より
大に形成すると共に、前記上部樹脂の端部より外側で前
記外部リードが前記実装面側に折り曲げられていること
を特徴とする半導体装置。
1. A semiconductor device in which a chip is mounted on a stage of a lead frame, connected to an internal lead of the lead frame, and then external leads are extended and packaged by resin molding. The upper resin above the external lead with respect to the mounting surface of the package to be formed is formed larger than the lower resin by exposing the exposed portion of the lower surface of the external lead, and is formed outside the end of the upper resin. The semiconductor device according to claim 1, wherein the external lead is bent toward the mounting surface.
【請求項2】 リードフレームのステージ上にチップが
搭載され、前記リードフレームの内部リードとの接続
後、外部リードを延出させて樹脂モールドによりパッケ
ージングされる半導体装置において、 前記パッケージングにより形成されるパッケージの、実
装面に対する前記外部リードより上方の上部樹脂と下方
の下部樹脂の大きさを異ならせ、前記外部リードの一面
の表出部を表出させて形成し、 前記上部樹脂と前記下部樹脂との大きさの差部分で表出
する前記表出部間に、突出部を一体で形成することを特
徴とする半導体装置。
2. A chip is provided on a stage of a lead frame.
Mounted and connected with the internal lead of the lead frame
Then, extend the external leads and package with resin mold.
In a semiconductor device to be packaged, the actual size of the package formed by the packaging is reduced.
Upper resin above and below the external leads relative to the mounting surface
The size of the lower resin of the
Is formed by exposing the exposed portion of the upper resin and is exposed at a difference in size between the upper resin and the lower resin.
The projection is integrally formed between the exposed portions.
Semiconductor device.
【請求項3】 前記上部樹脂と前記下部樹脂との大きさ
の差部分による前記外部リードの前記下面の表出部周辺
の面を、前記上部樹脂に埋設させることを特徴とする請
求項1記載の半導体装置。
3. The size of the upper resin and the lower resin
Around the exposed portion of the lower surface of the external lead due to the difference between
Characterized in that the surface is embedded in the upper resin.
The semiconductor device according to claim 1.
【請求項4】 前記上部樹脂と前記下部樹脂との大きさ
の差部分による前記外部リードの前記一面の表出部周辺
の面を、大きく形成された該上部樹脂又は該下部樹脂に
埋設させることを特徴とする請求項2記載の半導体装
置。
4. The size of the upper resin and the lower resin
Around the exposed portion of the one surface of the external lead due to the difference portion
The surface of the upper resin or the lower resin formed large
3. The semiconductor device according to claim 2, wherein the semiconductor device is buried.
Place.
JP3269645A 1991-10-17 1991-10-17 Semiconductor device Expired - Fee Related JP2933105B2 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP3269645A JP2933105B2 (en) 1991-10-17 1991-10-17 Semiconductor device
EP95113975A EP0689241A2 (en) 1991-10-17 1992-10-14 Carrier for carrying semiconductor device
EP19920309366 EP0538010A3 (en) 1991-10-17 1992-10-14 Semiconductor package, a holder, a method of production and testing for the same
US07/961,161 US5475259A (en) 1991-10-17 1992-10-16 Semiconductor device and carrier for carrying semiconductor device
KR92019118A KR960016562B1 (en) 1991-10-17 1992-10-17 Semiconductor package, a holder, a method for producing and testing for the same
US08/441,462 US5666064A (en) 1991-10-17 1995-05-15 Semiconductor device, carrier for carrying semiconductor device, and method of testing and producing semiconductor device
US08/455,909 US5637923A (en) 1991-10-17 1995-05-31 Semiconductor device, carrier for carrying semiconductor device
US08/789,661 US5736428A (en) 1991-10-17 1997-01-27 Process for manufacturing a semiconductor device having a stepped encapsulated package
US08/789,625 US5750421A (en) 1991-10-17 1997-01-27 Semiconductor device, carrier for carrying semiconductor device, and method of testing and producing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3269645A JP2933105B2 (en) 1991-10-17 1991-10-17 Semiconductor device

Publications (2)

Publication Number Publication Date
JPH05109930A JPH05109930A (en) 1993-04-30
JP2933105B2 true JP2933105B2 (en) 1999-08-09

Family

ID=17475237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3269645A Expired - Fee Related JP2933105B2 (en) 1991-10-17 1991-10-17 Semiconductor device

Country Status (1)

Country Link
JP (1) JP2933105B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0823042A (en) * 1994-07-07 1996-01-23 Fujitsu Ltd Semiconductor device, its manufacture and mold used for it
WO1999052149A1 (en) * 1998-04-06 1999-10-14 Infineon Technologies Ag Use of the constructional characteristics of an electronic component as a reference for positioning the component
JP5590981B2 (en) * 2010-06-14 2014-09-17 三菱電機株式会社 Semiconductor device
JP2013170930A (en) * 2012-02-21 2013-09-02 Toyota Motor Corp Electronic component inspection method, electric characteristic inspection device therefor, and terminal of electronic component
JP2016032048A (en) * 2014-07-29 2016-03-07 トヨタ自動車株式会社 Electromagnetic shield body and box

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01286343A (en) * 1988-05-12 1989-11-17 Mitsubishi Electric Corp Resin sealed type semiconductor device

Also Published As

Publication number Publication date
JPH05109930A (en) 1993-04-30

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