JP2912076B2 - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JP2912076B2
JP2912076B2 JP4083259A JP8325992A JP2912076B2 JP 2912076 B2 JP2912076 B2 JP 2912076B2 JP 4083259 A JP4083259 A JP 4083259A JP 8325992 A JP8325992 A JP 8325992A JP 2912076 B2 JP2912076 B2 JP 2912076B2
Authority
JP
Japan
Prior art keywords
island
semiconductor device
resin
internal
semiconductor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4083259A
Other languages
Japanese (ja)
Other versions
JPH05251609A (en
Inventor
元秋 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP4083259A priority Critical patent/JP2912076B2/en
Publication of JPH05251609A publication Critical patent/JPH05251609A/en
Application granted granted Critical
Publication of JP2912076B2 publication Critical patent/JP2912076B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements

Landscapes

  • Lead Frames For Integrated Circuits (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は半導体素子をリードフレ
ームで支持し樹脂封止してなる半導体装置、さらに詳し
くいえば、半導体素子から発する熱を放熱させる構造を
考慮した半導体装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device in which a semiconductor element is supported by a lead frame and sealed with a resin, and more particularly, to a semiconductor device in consideration of a structure for radiating heat generated from the semiconductor element.

【0002】[0002]

【従来の技術】半導体装置は、その大容量化に伴い半導
体素子から発生する熱量が多くなり、その熱を逃がすた
め半導体を収容するパッケージ構造の改善の努力がなさ
れている。図4は従来の半導体装置の構造の例を示す図
で、(a)は1つの例の平面図,(b)はその断面図で
ある。(c)は他の従来例を示す断面図である。半導体
素子5はリードフレームのアイランド1に固着されてお
り、素子の電極パッドとリードフレーム3の内部リード
4の先端は細線7で結線された構造になっている。これ
ら半導体素子5と内部リード4の部分は点線で示すよう
に樹脂部6で封止されている。
2. Description of the Related Art As the capacity of a semiconductor device increases, the amount of heat generated from a semiconductor element increases, and efforts have been made to improve the package structure for accommodating the semiconductor in order to release the heat. 4A and 4B show an example of the structure of a conventional semiconductor device. FIG. 4A is a plan view of one example, and FIG. 4B is a sectional view thereof. (C) is a sectional view showing another conventional example. The semiconductor element 5 is fixed to the island 1 of the lead frame, and the electrode pads of the element and the tips of the internal leads 4 of the lead frame 3 are connected by thin wires 7. The semiconductor element 5 and the internal lead 4 are sealed with a resin portion 6 as shown by a dotted line.

【0003】この半導体装置の発熱は主に素子表面で起
こり、その熱は樹脂を介し内部リード4を通り外部に放
散される。さらにこの熱の流れを促進するために図4
(c)に示すように非導電シート9を挟んで導電性の良
好な金属片11を接着する構造のものも存在する。
The heat generated by the semiconductor device mainly occurs on the element surface, and the heat is radiated to the outside through the internal leads 4 via the resin. To further promote this heat flow, FIG.
As shown in (c), there is a structure in which a metal piece 11 having good conductivity is bonded with a non-conductive sheet 9 interposed therebetween.

【0004】[0004]

【発明が解決しようとする課題】上述した従来の半導体
装置はリードフレームの材質を銅系のものを使用して放
熱性を向上させるようにしている。しかしながら、1ワ
ット程度の発熱量までしか放散できないのが現状であ
る。この原因は主に樹脂の熱伝導性の悪さにあり、半導
体素子と内部リードの間にある樹脂が適切な熱の流れを
阻害していると考えられる。そこで、図4(c)のよう
な構造にして対策を講じた結果、放熱性はいくらか改善
されたものの、熱放散のシミュレイトでも推測されるよ
うに、素子表面の熱のほとんどは素子表面の各片から各
内部リード先端に逃げる割合が多いため高熱伝導性の金
属片11の効果はあまり大きくなかった。本発明の目的
は上述の熱放熱性を大幅に改善した半導体装置を提供す
ることにある。
In the above-mentioned conventional semiconductor device, the heat dissipation is improved by using a copper-based lead frame. However, at present, heat can be dissipated up to only about 1 watt. This is mainly due to the poor thermal conductivity of the resin, and it is considered that the resin between the semiconductor element and the internal leads is obstructing the proper flow of heat. Therefore, as a result of taking measures against the structure shown in FIG. 4 (c), although the heat dissipation is somewhat improved, as can be estimated from the simulated heat dissipation, most of the heat on the element surface is removed from each element surface. The effect of the high thermal conductivity metal piece 11 was not so large because a large percentage of the piece escaped to the tip of each internal lead. SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor device in which the above-mentioned heat dissipation is greatly improved.

【0005】[0005]

【課題を解決するための手段】前記目的を達成するため
に本発明による半導体装置は、半導体素子を搭載したア
イランドを吊りリードで支持し、前記アイランドの側端
と一定の間隔をとって多数の内部リードを対面配置さ
せ、前記アイランドおよび内部リード部分を樹脂封止し
てなる樹脂封止形半導体装置において、前記アイランド
の側端と前記内部リードの先端との間の一定の間隔部分
に前記封止樹脂より熱伝導率の高い物質を配置して構成
されている。
In order to achieve the above-mentioned object, a semiconductor device according to the present invention comprises an antenna having a semiconductor element mounted thereon.
The island is supported by suspension leads and the side edges of the island
And a number of internal leads facing each other
And the islands and internal lead portions are resin-sealed.
In a resin-encapsulated semiconductor device, a material having a higher thermal conductivity than the encapsulating resin is arranged at a fixed interval between a side end of the island and a tip of the internal lead.

【0006】また、本発明は半導体素子を搭載したアイ
ランドを吊りリードで支持し、前記アイランドの側端と
一定の間隔をとって多数の内部リードを対面配置させ、
前記アイランドおよび内部リード部分を樹脂封止してな
る樹脂封止型半導体装置において、前記内部リードまた
前記アイランドの裏面に非導電シートを接着させ、前
記アイランドの側端または前記半導体素子の側面と前記
内部リードの先端のとの間の一定の間隔部分であって前
記非導電シートの上に、前封止樹脂より熱伝導率の高
い物質を接着させて構成されている。
Further, the present invention provides an eye mounted with a semiconductor element.
The land is supported by suspension leads, and the side end of the island is
Many internal leads are arranged facing each other at regular intervals,
The islands and internal leads are not sealed with resin.
In that resin-sealed semiconductor device, the internal lead or a non-conductive sheet is adhered to the rear surface of said island a constant spacing between the side edge or side of the semiconductor element of the island of the tip of the inner lead on a portion of the non-conductive sheet is constituted by adhering a high pre SL thermal conductivity than the sealing resin material.

【0007】[0007]

【実施例】以下、図面を参照して本発明をさらに詳しく
説明する。図1は本発明による半導体装置の第1の実施
例を示す図で、(a)は平面図,(b)はその断面図で
ある。図中、従来例で用いた符号と同じ符号を付してあ
る部分は同じ構成部分である。アイランド1の側端と、
一定の間隔をおいて対面させられている内部リード4と
の間に高熱伝導性物質8が配置されている。この高熱伝
導性物質8はアルミナが安価で適している。この他にチ
ッ化ホウ素,ダイヤモンド等、樹脂6より熱伝導率が高
ければ用いることができる。この高熱伝導性物質8は図
1(b)から明らかなようにリードフレーム3の厚さと
同じ厚さにして面を揃えているが、高熱伝導性物質8は
細線7に触れない限り厚めにすることができアイランド
の上面から飛び出していても構わない。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail with reference to the drawings. 1A and 1B show a first embodiment of a semiconductor device according to the present invention, wherein FIG. 1A is a plan view and FIG. 1B is a sectional view thereof. In the figure, portions denoted by the same reference numerals as those used in the conventional example are the same components. With the side edges of Island 1;
A high thermal conductive material 8 is arranged between the internal leads 4 facing each other at a fixed interval. Alumina is suitable for the high thermal conductive material 8 at a low cost. In addition, boron nitride, diamond, or the like can be used if the thermal conductivity is higher than that of the resin 6. As is apparent from FIG. 1B, the high thermal conductive material 8 has the same thickness as the lead frame 3 and has the same surface, but the high thermal conductive material 8 is made thicker unless it touches the fine wire 7. You can also jump out of the top of the island.

【0008】図2は本発明による半導体装置の第2の実
施例を示す図で、(a)は平面図,(b)はその断面図
である。用いている符号は図1の場合と同じである。こ
の実施例はリードフレーム3のアイランド1の裏面と内
部リード4の裏面に接着されている非導電性シート9の
上に高熱伝導性物質8が固着されている。高熱伝導性物
質8の配置されている位置は図1の実施例と同じ位置で
アイランド1の側端と、一定の間隔をおいて対面させら
れている内部リード4との間に配置されている。このよ
うな構造にすることにより半導体装置の組み立てはさら
に容易になる。
FIGS. 2A and 2B show a second embodiment of the semiconductor device according to the present invention, wherein FIG. 2A is a plan view and FIG. 2B is a sectional view thereof. The reference numerals used are the same as those in FIG. In this embodiment, a high thermal conductive material 8 is fixed on a non-conductive sheet 9 adhered to the back surface of the island 1 of the lead frame 3 and the back surface of the internal lead 4. The position of the high thermal conductive material 8 is the same as that of the embodiment shown in FIG. 1, and is disposed between the side end of the island 1 and the internal lead 4 facing each other at a fixed interval. . With such a structure, the assembly of the semiconductor device is further facilitated.

【0009】図3は本発明による半導体装置の第3の実
施例を示す図で、(a)は平面図,(b)はその断面図
である。用いている符号は図1の場合と同じである。こ
の実施例はリードフレーム3の内部リード4の裏面に接
着されている非導電性シート19の上に高熱伝導性物質
8が固着されている。高熱伝導性物質8は半導体素子5
の側端と、一定の間隔をおいて対面させられている内部
リード4との間に配置されている。さらに半導体素子5
を搭載したアイランド1がデプレス部10から下部にデ
プレスされている。この実施例では発熱する半導体素子
面と高熱伝導性物質と内部リードが同一面上に配置され
た構造となるため放熱効果は実施例の中で最も大きくな
る。
FIGS. 3A and 3B are views showing a third embodiment of the semiconductor device according to the present invention, wherein FIG. 3A is a plan view and FIG. The reference numerals used are the same as those in FIG. In this embodiment, a high thermal conductive material 8 is fixed on a non-conductive sheet 19 adhered to the back surface of the internal lead 4 of the lead frame 3. The high thermal conductive material 8 is a semiconductor element 5
And the internal lead 4 facing at a fixed interval. Further semiconductor device 5
Is depressed downward from the depressing unit 10. In this embodiment, the heat dissipation effect is the largest in the embodiment because the semiconductor element surface, the high heat conductive material, and the internal lead that generate heat are arranged on the same surface.

【0010】[0010]

【発明の効果】以上、説明したように本発明はアイラン
ドと内部リードとの間の一定の間隔に封止樹脂より熱伝
導率の高い物質を配置した構造にしてあるので、半導体
素子から内部リードに伝達する熱の流れを促進すること
ができ、半導体素子の熱放散性を著しく向上させる効果
がある。
As described above, the present invention has a structure in which a substance having a higher thermal conductivity than the sealing resin is arranged at a fixed interval between the island and the internal lead. The flow of heat transmitted to the semiconductor device can be promoted, and the heat dissipation of the semiconductor element can be significantly improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による半導体装置の第1の実施例を示す
図で、(a)は平面図,(b)は断面図である。
FIGS. 1A and 1B are views showing a first embodiment of a semiconductor device according to the present invention, wherein FIG. 1A is a plan view and FIG.

【図2】本発明による半導体装置の第2の実施例を示す
図で、(a)は平面図,(b)は断面図である。
FIGS. 2A and 2B are views showing a second embodiment of the semiconductor device according to the present invention, wherein FIG. 2A is a plan view and FIG.

【図3】本発明による半導体装置の第3の実施例を示す
図で、(a)は平面図,(b)は断面図である。
3A and 3B are views showing a third embodiment of the semiconductor device according to the present invention, wherein FIG. 3A is a plan view and FIG. 3B is a cross-sectional view.

【図4】従来の半導体装置の例を示す図で、(a)は平
面図,(b)は断面図である。(c)は他の従来例の断
面図である。
4A and 4B are diagrams showing an example of a conventional semiconductor device, wherein FIG. 4A is a plan view and FIG. 4B is a cross-sectional view. (C) is a sectional view of another conventional example.

【符号の説明】[Explanation of symbols]

1…アイランド 2…吊りリード 3…リードフレーム 4…内部リード 5…半導体素子 6…樹脂封止部 7…ワイヤ 8…高熱伝導性物質 9,19…非導電シート 10…吊りリードデプレス部 11…高熱伝導金属片 DESCRIPTION OF SYMBOLS 1 ... Island 2 ... Suspended lead 3 ... Lead frame 4 ... Internal lead 5 ... Semiconductor element 6 ... Resin sealing part 7 ... Wire 8 ... High thermal conductive substance 9, 19 ... Non-conductive sheet 10 ... Suspended lead depress part 11 ... High thermal conductive metal piece

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】半導体素子を搭載したアイランドを吊りリ
ードで支持し、前記アイランドの側端と一定の間隔をと
って多数の内部リードを対面配置させ、前記アイランド
および内部リード部分を樹脂封止してなる樹脂封止形半
導体装置において、 前記アイランドの側端と前記内部リードの先端との間の
一定の間隔部分に前記封止樹脂より熱伝導率の高い物質
を配置したことを特徴とする半導体装置。
1. An island on which a semiconductor element is mounted
With a certain distance from the side edge of the island.
A large number of internal leads facing each other,
And resin-encapsulated half with internal leads
The semiconductor device according to claim 1, wherein a substance having a higher thermal conductivity than the sealing resin is disposed at a predetermined interval between the side end of the island and the tip of the internal lead.
【請求項2】半導体素子を搭載したアイランドを吊りリ
ードで支持し、前記アイランドの側端と一定の間隔をと
って多数の内部リードを対面配置させ、前記アイランド
および内部リード部分を樹脂封止してなる樹脂封止型半
導体装置において、 前記内部リードまたは前記アイランドの裏面に非導電シ
ートを接着させ、前記アイランドの側端または前記半導
体素子の側面と前記内部リードの先端のとの間の一定の
間隔部分であって前記非導電シートの上に、前封止樹
脂より熱伝導率の高い物質を接着させたことを特徴とす
る半導体装置。
2. An island on which a semiconductor element is mounted is suspended from the island.
With a certain distance from the side edge of the island.
A large number of internal leads facing each other,
And a resin-sealed mold with resin-sealed internal lead portions
In conductor arrangement, wherein the inner lead or a non-conductive sheet is adhered to the rear surface of said island, said a fixed interval portion between the side edge or side of the semiconductor element of the island of the tip of the inner lead on the non-conductive sheet, the semiconductor device is characterized in that to adhere the pre-Symbol higher thermal conductivity than the sealing resin material.
JP4083259A 1992-03-05 1992-03-05 Semiconductor device Expired - Lifetime JP2912076B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4083259A JP2912076B2 (en) 1992-03-05 1992-03-05 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4083259A JP2912076B2 (en) 1992-03-05 1992-03-05 Semiconductor device

Publications (2)

Publication Number Publication Date
JPH05251609A JPH05251609A (en) 1993-09-28
JP2912076B2 true JP2912076B2 (en) 1999-06-28

Family

ID=13797351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4083259A Expired - Lifetime JP2912076B2 (en) 1992-03-05 1992-03-05 Semiconductor device

Country Status (1)

Country Link
JP (1) JP2912076B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6466446B1 (en) * 1994-07-01 2002-10-15 Saint Gobain/Norton Industrial Ceramics Corporation Integrated circuit package with diamond heat sink

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3736253A (en) * 1972-04-10 1973-05-29 Sobin Chlor Alkali Inc Process and apparatus for removing mercury from waste water
JPH03190264A (en) * 1989-12-20 1991-08-20 Mitsubishi Electric Corp Resin sealed type semiconductor device

Also Published As

Publication number Publication date
JPH05251609A (en) 1993-09-28

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Effective date: 19980303