JP2896579B2 - Circuit fabrication method for oxide superconductor - Google Patents
Circuit fabrication method for oxide superconductorInfo
- Publication number
- JP2896579B2 JP2896579B2 JP1198399A JP19839989A JP2896579B2 JP 2896579 B2 JP2896579 B2 JP 2896579B2 JP 1198399 A JP1198399 A JP 1198399A JP 19839989 A JP19839989 A JP 19839989A JP 2896579 B2 JP2896579 B2 JP 2896579B2
- Authority
- JP
- Japan
- Prior art keywords
- superconducting
- superconducting phase
- oxide
- molded body
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Manufacturing Of Electrical Connectors (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Description
【発明の詳細な説明】 （イ）技術分野 本発明は、レーザー照射により酸化物超電導成型体に
回路を作製する方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field The present invention relates to a method for producing a circuit on an oxide superconducting molded article by laser irradiation.
（ロ）従来技術 従来、いったん酸化物超電導成型体を作製し、その一
部を非超電導相にする方法としては各種あり、その代表
的なものに次の方法があるが、それぞれ多くの欠点があ
った。即ち、 （ａ）酸化物超電導成型体の所定個所に所定形状の非超
電導相を作製するために、該超電導成型体を加工してそ
の接合に非超電導物質を接合剤として使用し、その接合
部分が非超電導相となるようにする方法。(B) Conventional technology Conventionally, there are various methods for once manufacturing an oxide superconducting molded body and making a part thereof a non-superconducting phase. The following are typical methods, each of which has many disadvantages. there were. (A) In order to form a non-superconducting phase having a predetermined shape at a predetermined location of the oxide superconducting molded body, the superconducting molded body is processed, and a non-superconducting substance is used as a bonding agent for joining the superconducting molded body. Is a non-superconducting phase.
例えば、各リングの一部に切込を形成し、該リングに
は円電流が流れないように作製した超電導体のスリット
入りのリング数個を重ね合わせて全体としてコイル状と
し、超電導電流を流すために接合材として超電導粉を用
いて接合形成せしめて超電導電流が流れるようにし、一
方各リング相互間のその他の接触部分は非超電導物質で
接合して非超電導相を形成せしめることによって超電導
電流が流れないようにする。かくして、超電導電流がコ
イルの一端から他端に向って流れる。For example, a cut is formed in a part of each ring, and several rings with slits of a superconductor made so that a circular current does not flow through the rings are superposed to form a coil as a whole, and a superconducting current flows. Therefore, the superconducting current is formed by using superconducting powder as a joining material so that the superconducting current flows, while the other contact portions between the rings are joined with a non-superconducting material to form a non-superconducting phase, so that the superconducting current is formed. Avoid flowing. Thus, superconducting current flows from one end of the coil to the other.
この（ａ）法の場合は、超電導成型体どうしの接合部
分に非超電導相を形成せしめる方法であるが、該方法は
一体成型ができないので手数がかかり、高精度の回路の
作製は極めて難しい。In the case of the method (a), a non-superconducting phase is formed at the junction between the superconducting molded bodies. However, since this method cannot be integrally molded, it is troublesome, and it is extremely difficult to produce a highly accurate circuit.
（ｂ）酸化物超電導成型体の所望部分に所定形状の非超
電導相を形成せしめる場合、非超電導相としたい部分に
FeやCoの薄膜を形成させ、熱拡散により該部分の超電導
相を破壊して非超電導相を形成される方法。(B) When a non-superconducting phase having a predetermined shape is formed in a desired portion of the oxide superconducting molded body, the non-superconducting phase should be
A method in which a thin film of Fe or Co is formed and a non-superconducting phase is formed by destroying the superconducting phase in the portion by thermal diffusion.
この（ｂ）法は、FeやCoの拡散によって非超電導相を
形成させる訳であるが、その作製過程においてこの拡散
状態を断面観察する必要があるので、完全な非超電導相
を形成するには長時間を必要とし、しかも高精度の作製
が難しい。According to the method (b), a non-superconducting phase is formed by the diffusion of Fe or Co. However, it is necessary to observe a cross-section of the diffusion state during the fabrication process. It requires a long time, and it is difficult to produce with high precision.
（ｃ）酸化物の超電導成型体に非超電導相を形成させる
に際して、該成型体の表面にレジストを塗布した後、所
定部分のみのレジストを剥離して酸又はアルカリ液でエ
ッチングして溶解させることにより超電導電流を遮断す
る方法。(C) In forming a non-superconducting phase in a superconducting oxide molded body, after applying a resist on the surface of the molded body, removing only a predetermined portion of the resist and etching and dissolving the resist with an acid or alkali liquid. A method of interrupting superconducting current by using
この（ｃ）法は、上記の通り酸又はアルカリ液でエッ
チングするので、該溶液が成型体内に浸透して超電導相
特性を劣化させる等の欠点がある。This method (c) has a drawback that the solution is permeated into the molded body and deteriorates the superconducting phase characteristics because the etching is carried out with an acid or an alkali solution as described above.
（ハ）発明の開示 本発明は、上記のような従来の諸欠点を解消するため
に開発された全く新規な酸化物超電導体の回路作製法で
あって、酸化物超電導成型体にレーザーを照射すること
により被照射部分を分解又は溶融させ超電導相を破壊し
て非超電導相に変質させ、レーザーが照射されない部分
をもって回路を形成するものである。(C) Disclosure of the Invention The present invention is a completely novel method for producing a circuit of an oxide superconductor, which has been developed to solve the above-mentioned conventional drawbacks. By doing so, the irradiated portion is decomposed or melted, the superconducting phase is destroyed and transformed into a non-superconducting phase, and a circuit is formed with the portion not irradiated with the laser.
即ち、本発明法では酸化物超電導成型体の所定部分の
所定形状の非超電導相を形成させる場合、該部分にCO2
ガスレーザーやYAGレーザー等を使用し、レーザー光の
ビームスポット径とパワーを調節して照射することによ
り、該部分を加熱分解又は溶融させて所望形状に非超電
導相を形成させて、超電導電流を遮断するのである。That is, in the method of the present invention, when a non-superconducting phase having a predetermined shape is formed in a predetermined portion of an oxide superconducting molded body, CO 2
By using a gas laser or a YAG laser, etc., by adjusting the beam spot diameter and power of the laser beam and irradiating it, the part is heated or decomposed to form a non-superconducting phase in a desired shape, and the superconducting current is generated. Cut off.
本発明は酸化物超電導体にレーザーを照射して非超電
導相を形成させるに際して、成型体を完全に切断するの
ではなく、部分的に変質させるのみであるので、該部分
の接合力は全く失われないのである。In the present invention, when a non-superconducting phase is formed by irradiating a laser to an oxide superconductor, the molded body is not completely cut, but is only partially deteriorated. It is not done.
第３図にレーザー照射により超電導相が変質する状況
例を示したが、図中ｌはレーザービームを受けて溶融変
質した溶融部であり、ｓはレーザービームを受けて加熱
分解し変質した部分を示す固体部であって、レーザー光
を完全に貫通させないで所定部分のみの超電導相を破壊
して非超電導相を形成させるのである。FIG. 3 shows an example of a situation in which the superconducting phase is altered by laser irradiation. In the figure, 1 denotes a molten portion that has been melted and altered by receiving a laser beam, and s is a portion that has been altered by heating and decomposing by receiving a laser beam. In the solid portion shown, the superconducting phase of only a predetermined portion is destroyed without completely penetrating the laser beam, thereby forming a non-superconducting phase.
このように、超電導成型体を切断することなくその部
分を変質させるのみであるから、酸化物超電導成型体自
体の保有する強度等は全く知らないのである。また、レ
ーザー光被照射部以外の超電導相の特性を劣化させる心
配も全くないのである。As described above, since the superconducting molded body is only deteriorated without cutting, the strength and the like of the oxide superconducting molded body itself are not known at all. Further, there is no fear of deteriorating the characteristics of the superconducting phase other than the portion irradiated with the laser beam.
例えば、YBa2Cu3O7-xの酸化物超電導材料で成型した
厚さが3mmで内径が100mmφで長さが100mmの円筒形成型
体を所定速度で回転させながらかつその軸方向に上昇又
は下降移動するようにセットし、これに固定型CO2ガス
レーザー30wによりスポット径3mmφで照射すると、上記
円筒のスポット照射部分が溶融又は分解してYBa2Cu3O7-
x超電導相が変質し、Y2Ba1Cu1O5やBaCuO2あるいはCuO等
の非超電導相が形成されるのである。For example, while rotating a cylindrical forming body having a thickness of 3 mm, an inner diameter of 100 mm, and a length of 100 mm molded from a YBa 2 Cu 3 O 7- x oxide superconducting material at a predetermined speed and rising in the axial direction or When it is set so as to move down and is irradiated with a fixed CO 2 gas laser 30w with a spot diameter of 3 mmφ, the spot irradiated portion of the cylinder melts or decomposes and YBa 2 Cu 3 O 7-
The x superconducting phase is altered, and a non-superconducting phase such as Y 2 Ba 1 Cu 1 O 5 , BaCuO 2 or CuO is formed.
かくして、上記円筒形成型体に所定ピッチの螺線状の
非超電導相が形成されるため、超電導コイルが形成され
たことになる。Thus, since the spiral non-superconducting phase having a predetermined pitch is formed in the cylindrical forming body, a superconducting coil is formed.
上記の場合は固定型CO2ガスレーザーを使用したの
で、被照射成型体を所定の速度で回転させながら上昇移
動させなければならないが、走査型レーザーを使用すれ
ば成型体を固定しておいてレーザーを走査させてもよい
ことは勿論である。In the above case, a fixed CO 2 gas laser was used, so the irradiated body had to be moved upward while rotating at a predetermined speed, but if a scanning laser was used, the molded body was fixed. Of course, a laser may be scanned.
また、被照射酸化物超電導体ごとに溶融又は分解して
変質する温度が異なるので、予め相図を参照して加工シ
ステムにおけるレーザー光のビームスポット径，パワ
ー，熱吸収，移動速度，冷却速度等の設計条件を設定す
れば、目的とする非超電導相が形成できる。In addition, since the temperature at which the irradiated oxide superconductor melts or decomposes and changes is different for each oxide superconductor, the beam spot diameter, power, heat absorption, moving speed, cooling speed, etc., of the laser beam in the processing system are referred to in advance by referring to the phase diagram. By setting the above design conditions, a desired non-superconducting phase can be formed.
次に、本発明法を実施例により説明する。 Next, the method of the present invention will be described with reference to examples.
（ニ）実施例 実施例１ YBa2Cu3O7-x酸化物超電導材料で成型した厚さ4mm,内
径50mmφ，長さ100mmの円筒形成型体を周速度2mm/分で
回転させながらゆっくりと上昇移動するようにセット
し、固定型CO2ガスレーザー30wを用いて2mmスポットに
焦点を合わせ、円筒形成型体の外周面にレーザー光を貫
通させないようにしながらピッチ4mmの螺線状非超電導
相を形成すべく照射し、所定部分の超電導相を溶融・分
解して変質させてから急冷した。(D) Example Example 1 A cylinder formed of YBa 2 Cu 3 O 7- x oxide superconducting material having a thickness of 4 mm, an inner diameter of 50 mmφ, and a length of 100 mm was slowly rotated while rotating at a peripheral speed of 2 mm / min. Set to move upward, focus on a 2 mm spot using a fixed CO 2 gas laser 30 w, and make a spiral non-superconducting phase with a pitch of 4 mm while preventing the laser light from penetrating the outer peripheral surface of the cylindrical forming body. And quenched after melting and decomposing a predetermined portion of the superconducting phase to alter the quality.
その結果、レーザービームを照射した部分には完全に
非超電導相が形成され、目的とする超電導コイルの成型
体を作製することができた。As a result, a non-superconducting phase was completely formed in the portion irradiated with the laser beam, and a target superconducting coil molded body could be produced.
このコイルで流せる電流値は400A/cm2であり、バルク
で流せる電流値と同等であった。The current value that could be passed through this coil was 400 A / cm 2 , which was equivalent to the current value that could be passed through the bulk.
比較例 上記実施例１で供試したのと同じYBa2Cu3O7-x酸化物
超電導材料で成型した厚さ4mm,内径50mmφ，幅5mmのリ
ング状成型体を各リングの一部を切断して円電流が流れ
なくしたものを数個作製し、互いにコイル状になるよう
に切込み口をずらせて固定し、切断部分には超電導電流
を流すために上記リング成型体と同質の酸化物超電導粉
のペーストを塗布し、その他の部分（非超電導相とする
部分）には酸化ビスマス粉のペートストを塗布し、920
℃で10時間加熱処理して拡散接合させコイルを作製し
た。Comparative Example A ring-shaped molded body having a thickness of 4 mm, an inner diameter of 50 mmφ, and a width of 5 mm molded from the same YBa 2 Cu 3 O 7- x oxide superconducting material as used in Example 1 was cut in a part of each ring. Then, several circular holes were cut off so that the circular current did not flow. Apply paste of powder and apply paste of bismuth oxide powder to other parts (parts to be used as non-superconducting phase).
Heat treatment was performed at 10 ° C. for 10 hours to perform diffusion bonding to produce a coil.
その結果、拡散接合させたコイルでも一応は電流は流
れるが、その接合部分で流せる電流値は10A/cm2と極め
て小さく、従ってコイルとして流せる電流値も小さくて
このリングのみで流せる電流値も20A/cm2と著しく低下
した。As a result, although current flows temporarily even in a coil that has been diffusion bonded, the current value that can flow at the junction is extremely small at 10 A / cm 2 , so the current value that can flow as a coil is also small and the current value that can flow only with this ring is 20 A. / cm 2 .
（ホ）発明の結果 上述したように、本発明法によればレーザーのビーム
スポット径を調節し、酸化物超電導体の所定部分に照射
し、溶融又は分解により超電導相を変質させる温度まで
加熱することにより照射部分の超電導相を破壊して半導
体もしくは絶縁体等の非超電導相に変質させ、任意な回
路を特性を低下させることなく容易に作製することがで
きるのである。(E) Results of the Invention As described above, according to the method of the present invention, the beam spot diameter of the laser is adjusted, a predetermined portion of the oxide superconductor is irradiated, and the superconductor is heated to a temperature at which the superconducting phase is altered by melting or decomposition. As a result, the superconducting phase in the irradiated portion is broken and transformed into a non-superconducting phase such as a semiconductor or an insulator, and an arbitrary circuit can be easily manufactured without deteriorating the characteristics.
しかも、本発明は従来法のようなガスエッチングやウ
エットエッチング等を全く必要とせず、容易かつ短時間
で高精度に処理ができ、更にレーザー照射によって形成
された非超電導相が構造材として作用する利点もある。In addition, the present invention does not require any gas etching or wet etching as in the conventional method, can be easily and accurately performed in a short time, and the non-superconducting phase formed by laser irradiation acts as a structural material. There are advantages too.
なお、上記実施例ではＹ−Ba−Cu−Ｏ系の酸化物超電
導体の回路作製について説明したが、本発明法が他の酸
化物超電導体にも適用できることは勿論である。In the above embodiment, the circuit fabrication of the Y-Ba-Cu-O-based oxide superconductor has been described, but the method of the present invention can of course be applied to other oxide superconductors.
第１図は、本発明法により円筒形酸化物超電導成型体か
ら作製したコイル状回路を示す斜視図、第２図は同様に
平板型成型体から作製した回路を示す平面図、第３図は
レーザー照射により超電導相が溶融又は分解して変質す
る状況例を示す断面説明図である。 符号説明 １……円筒形酸化物超電導成型体、２……非超電導相 ３……超電導相、４……平板状酸化物超電導成型体 ５……CO2ガスレーザー、６……レーザービーム ｌ……溶融変質部、ｓ……加熱分解変質部FIG. 1 is a perspective view showing a coil-shaped circuit produced from a cylindrical oxide superconducting molded article by the method of the present invention, FIG. 2 is a plan view showing a circuit similarly produced from a flat molded article, and FIG. It is sectional explanatory drawing which shows the example of a situation in which a superconducting phase fuse | melts or decomposes and changes in quality by laser irradiation. Code Description 1 ...... cylindrical oxide superconductor molded body, 2 ...... non-superconducting phase 3 ...... superconducting phase, 4 ...... flat oxide superconductor molded body 5 ...... CO 2 gas laser, 6 ...... laser beam l ... ... Metal-altered part, s ... Heat-decomposed part
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭64−51685（ＪＰ，Ａ) 特開 平１−106492（ＪＰ，Ａ) 特開 平１−125002（ＪＰ，Ａ) 特開 昭64−17329（ＪＰ，Ａ) 特開 平１−183178（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) H01L 39/00 H01L 39/22 H01L 39/24 H01B 12/00 - 12/16 H01B 13/00 H01L 39/02 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-64-51685 (JP, A) JP-A-1-106492 (JP, A) JP-A-1-125002 (JP, A) JP-A 64-64 17329 (JP, A) JP-A-1-183178 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) H01L 39/00 H01L 39/22 H01L 39/24 H01B 12/00- 12/16 H01B 13/00 H01L 39/02
Claims (1)
化物超電導成型体に、該酸化物超電導材料に適合した加
工システムの設計条件に設定したレーザー光を照射する
ことにより、被照射部を溶融変質部及び加熱分解変質部
からなる非超電導相に変質させて所望の回路を形成する
とともに該非超電導相が構造材として作用することを特
徴とする酸化物超電導体の回路作製方法。An irradiation part is irradiated by irradiating a laser light set to a design condition of a processing system suitable for the oxide superconducting material to an oxide superconducting molded body formed into a predetermined shape of the oxide superconducting material. A method for producing a circuit for an oxide superconductor, characterized in that a desired circuit is formed by transforming into a non-superconducting phase composed of a melt-transformed portion and a thermally decomposed portion, and the non-superconducting phase acts as a structural material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1198399A JP2896579B2 (en) | 1989-07-31 | 1989-07-31 | Circuit fabrication method for oxide superconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1198399A JP2896579B2 (en) | 1989-07-31 | 1989-07-31 | Circuit fabrication method for oxide superconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0362978A JPH0362978A (en) | 1991-03-19 |
| JP2896579B2 true JP2896579B2 (en) | 1999-05-31 |
Family
ID=16390484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1198399A Expired - Fee Related JP2896579B2 (en) | 1989-07-31 | 1989-07-31 | Circuit fabrication method for oxide superconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2896579B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2842250B2 (en) * | 1994-10-27 | 1998-12-24 | 株式会社アッド | Environment maintenance equipment for warehouses and factories |
| JP2000170813A (en) | 1998-12-07 | 2000-06-23 | Sugatsune Ind Co Ltd | Rotary damper |
-
1989
- 1989-07-31 JP JP1198399A patent/JP2896579B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0362978A (en) | 1991-03-19 |
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