JPH01244676A - Manufacture of superconductive element - Google Patents
Manufacture of superconductive elementInfo
- Publication number
- JPH01244676A JPH01244676A JP63072383A JP7238388A JPH01244676A JP H01244676 A JPH01244676 A JP H01244676A JP 63072383 A JP63072383 A JP 63072383A JP 7238388 A JP7238388 A JP 7238388A JP H01244676 A JPH01244676 A JP H01244676A
- Authority
- JP
- Japan
- Prior art keywords
- microbridge
- solid solution
- temperature
- temperature superconducting
- mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000006104 solid solution Substances 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 9
- 239000012298 atmosphere Substances 0.000 claims abstract description 5
- 230000001590 oxidative effect Effects 0.000 claims abstract description 4
- 239000000203 mixture Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 8
- 239000000853 adhesive Substances 0.000 abstract description 5
- 229910052797 bismuth Inorganic materials 0.000 abstract description 5
- 239000011521 glass Substances 0.000 abstract description 4
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 3
- 239000002887 superconductor Substances 0.000 abstract description 3
- 238000002844 melting Methods 0.000 abstract description 2
- 230000008018 melting Effects 0.000 abstract description 2
- 239000000843 powder Substances 0.000 abstract description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 abstract 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 abstract 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 2
- 239000004593 Epoxy Substances 0.000 abstract 1
- 229910000019 calcium carbonate Inorganic materials 0.000 abstract 1
- 235000010216 calcium carbonate Nutrition 0.000 abstract 1
- 229910000018 strontium carbonate Inorganic materials 0.000 abstract 1
- LEDMRZGFZIAGGB-UHFFFAOYSA-L strontium carbonate Chemical compound [Sr+2].[O-]C([O-])=O LEDMRZGFZIAGGB-UHFFFAOYSA-L 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 description 2
- 150000001621 bismuth Chemical class 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 229910004247 CaCu Inorganic materials 0.000 description 1
- 230000005668 Josephson effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）本発明はビスマス系材料を用いた超電導素子の製
造法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (a) The present invention relates to a method for manufacturing a superconducting element using bismuth-based materials.
（ロ）従来の技術
昭和６３年２月に工業技術院金属材料研究所がＢ１５ｒ
ＣａＣｕ＊Ｏｘ で表わされる新しい酸化物材料が１
００に以上の高い温度で超電導状態になることを発表し
、希土類材料を用いない点で注目を浴びている。(b) Conventional technology In February 1986, the Agency of Industrial Science and Technology's Institute of Materials Research established B15r.
A new oxide material represented by CaCu*Ox is 1
It has been announced that it becomes superconducting at temperatures above 0.00C, and is attracting attention because it does not use rare earth materials.
ところで、このビスマス系材料は例えば希土類材料の場
合とは異なり、高温（約１０５Ｋ）及び低温（約８０Ｋ
）の超電導相が混在した超電導体となっている。また、
この高温相と低温相の混晶は非超電導相も含み乱雑に分
散しており、熱処理や製造条件を変えても混晶の比率が
変化するだけで、高温相のみの単相を得ることは非常に
困難であった。By the way, unlike rare earth materials, for example, this bismuth-based material can withstand high temperatures (approximately 105K) and low temperatures (approximately 80K).
) is a superconductor with a mixture of superconducting phases. Also,
This mixed crystal of high-temperature and low-temperature phases also includes non-superconducting phases and is randomly dispersed, so changing heat treatment or manufacturing conditions only changes the ratio of the mixed crystal, and it is not possible to obtain a single phase consisting only of the high-temperature phase. It was extremely difficult.
それゆえ、このビスマス系材料を用いて超電導素子を作
成しても、低温相が支配的となり高温相の素子を得るこ
とはできなかった。Therefore, even if a superconducting device is made using this bismuth-based material, the low-temperature phase becomes dominant, and a high-temperature phase device cannot be obtained.
尚、超電導素子としては、超電導臨界電流特性を利用し
た電流制限素子、成るいは粒界（Ｇｒａｉｎ Ｂｏｕ
ｎｄａｒｙ）で生じるバウンダリージョセフソン効果を
用いた弱結合素子、及びその弱結合部で電磁波や光によ
り超電導状態の不平衡を生じさせるセンサーなどがある
。In addition, as a superconducting element, a current limiting element using superconducting critical current characteristics, or a grain boundary (grain boundary)
There are weak-coupling elements that use the boundary Josephson effect produced by (ndary), and sensors that use electromagnetic waves or light to cause unbalance in the superconducting state at the weak-coupling portion.
（ハ）発明が解決しようとする課題 ′本発明は前述せ
るビスマス系材料の特異性を巧みに利用し、高温超電導
部分、低温超電導部分及び絶縁部分の三部分を猜極的に
形成することによって、用途に応じて高温相酸るいは低
温相を選択的に利用しうる多機能型の超電導素子を得る
ことを目的とするものである。(c) Problems to be solved by the invention 'The present invention skillfully utilizes the peculiarities of the bismuth-based material mentioned above, and by actively forming three parts: a high-temperature superconducting part, a low-temperature superconducting part, and an insulating part. The purpose of this invention is to obtain a multifunctional superconducting element that can selectively utilize a high temperature phase or a low temperature phase depending on the application.
（ニ）課題を解決するための手段
本発明による超電導素子の製造法は、Ｂｌ＊ＯｍとＳ
ｒ ＣＯａとＣａ ＣＯｓとＣｕＯとの混合物を高温溶
融径急冷して固溶体を得、該固溶体に酸化雰囲気中で高
エネルギービームを照射して局所的に８７０〜８８０℃
に加熱し、少なくとも該ビームを受けた個所を高温超電
導相とすると共にその高温超電導相に隣接して低温超電
導相を形成することを特徴とするものである。(d) Means for Solving the Problems The method for manufacturing a superconducting element according to the present invention is based on Bl*Om and S
r A mixture of COa, Ca COs and CuO is rapidly cooled to a high temperature melt diameter to obtain a solid solution, and the solid solution is irradiated with a high energy beam in an oxidizing atmosphere to locally heat the mixture to 870-880°C.
The method is characterized in that at least a portion receiving the beam is heated to a high temperature superconducting phase, and a low temperature superconducting phase is formed adjacent to the high temperature superconducting phase.
（ホ）作用
本発明法のように固溶体に酸化雰囲気中で高エネルギー
ビームを照射して局所的に８７０〜８８０″Ｃに加熱す
ると、少なくともビームを受けた個所は高温超電導状態
が得られ、この部分に隣接すの部分は低温超電導状態が
得られる。(e) Effect When a solid solution is irradiated with a high-energy beam in an oxidizing atmosphere and locally heated to 870 to 880''C as in the method of the present invention, at least the area that receives the beam becomes a high-temperature superconducting state. A low-temperature superconducting state is obtained in the part adjacent to the part.
尚、熱処理温度を８７０〜８８０℃に限定したのは８７
０°Ｃ以上でないと高温超電導状態が得られず、一方８
８０℃を越えると絶縁物が生成するという不都合を有す
るためである。In addition, the heat treatment temperature was limited to 870 to 880°C in 87
High-temperature superconducting state cannot be obtained unless the temperature is 0°C or higher;
This is because if the temperature exceeds 80° C., there is a problem that an insulator is formed.
また、高エネルギービームとしてはレーザ光や電子ビー
ムが適用しうる。Furthermore, a laser beam or an electron beam can be used as the high-energy beam.
（へ）実施例 以下本発明の一実施例を第１図に基づき説明する。(f) Example An embodiment of the present invention will be described below with reference to FIG.
本発明の第１の工程は、Ｂ１５ｏｎとＳｒＣ０ｍとＣａ
ＣＯ５とＣｕＯの各粉末を１：１：１：２のモル比で混
合し、この混合物を加圧成形した後、融点以上で熱処理
して溶融し、ついで１０”’Ｃ／ ｓｅｃの速度で室温
まで急冷して固溶体（１）を作成することにある。この
第１工程で得られた固溶体（１）は大気中で安定な微結
晶を均一に含む塊りであって、内部には気孔が極めて少
なく高密度′″（約５．２ｇ／ａｎ ” ）（７）状態
にある。The first step of the present invention is to combine B15on, SrC0m and Ca
CO5 and CuO powders were mixed at a molar ratio of 1:1:1:2, this mixture was pressure-molded, and then heat-treated above the melting point to melt it, and then cooled to room temperature at a rate of 10''C/sec. The solid solution (1) obtained in the first step is a lump uniformly containing microcrystals that are stable in the atmosphere, and there are pores inside. It has a very low density and a high density'' (approximately 5.2 g/an'') (7).
本発明の第２の工程は、前述の固溶体（１）をダイヤモ
ンドカッター或いは内周刃等を用いて厚さｏ、ｓｎｍ程
度の板状体（２）に切り出し、この板状体（２）の両面
を片側づつ鏡面研摩にかけて最終的にｌθ〜２００μ論
程度の厚さに仕上げた後、板状体（２）の片面を接着剤
により例えば結晶化ガラス板製の基台（３）に固定した
のちレーザ加工或いは超音波加工によって、ブリッジ山
数μ−〜数＋μ−のマイクロブリッジ状（４）に加工す
ることにある。In the second step of the present invention, the solid solution (1) described above is cut into a plate-shaped body (2) with a thickness of about o, sm using a diamond cutter or an inner peripheral blade, and this plate-shaped body (2) is cut out. After polishing both sides one side at a time to a final thickness of about lθ~200μ, one side of the plate-shaped body (2) was fixed to a base (3) made of, for example, a crystallized glass plate with an adhesive. Later, by laser processing or ultrasonic processing, it is processed into a microbridge shape (4) having bridge ridges of several μ− to several +μ−.
本発明の第３の工程は、前工程から接着剤を除いて得た
マイクロブリッジ型（５）が未だ超電導状態でないため
、これを超電導化する工程であり、レーザ（６）のビー
ム系を２μｍ程度に絞り、酸化雰囲気においてブリッジ
型（５）の一部を走査する、この走査の際、第２図に示
すようにレーザ照射部（ａ）のみ約数十分間、８７０℃
を保つようにビームの出力、走査速度を調整する。The third step of the present invention is to make the microbridge mold (5) obtained by removing the adhesive from the previous step superconducting since it is not yet in a superconducting state, and the beam system of the laser (6) is During this scanning, only the laser irradiated part (a) is heated to 870°C for about several tens of minutes as shown in Figure 2.
Adjust the beam output and scanning speed to maintain the
この工程によりレーザ照射部（ａ）は１００に級の高温
超電導状態が得られ、またその近傍部（ｂ）は第２図に
示す如く温度勾配によって８４０〜８７０″Ｃ程度の温
度が付与きれ８０に級の低温超電導状態が得られる。Through this step, the laser irradiated part (a) attains a high-temperature superconducting state of 100°C, and the neighboring part (b) is heated to a temperature of about 840 to 870''C due to the temperature gradient as shown in Figure 2. A low-temperature superconducting state on the order of
尚、第２図から理解されるようにレーザ照射部（ａ）と
その近傍部（ｂ）との境界を明確にするためには温度勾
配を急峻にすれば良く、それゆえレーザ光の照射は間欠
的に行なう方が好ましい、その理由は熱伝導が悪くなる
ためである。As can be understood from Fig. 2, in order to make the boundary between the laser irradiated part (a) and its neighboring part (b) clear, the temperature gradient needs to be made steep, and therefore the laser beam irradiation is It is preferable to carry out the process intermittently, since heat conduction becomes poor.
その後、このマイクロブリッジ型（５）をエポキシ系接
着剤により結晶化ガラス基板（７）に固定して超電導素
子を得る。Thereafter, this microbridge mold (5) is fixed to a crystallized glass substrate (7) using an epoxy adhesive to obtain a superconducting element.
（ト）発明の効果
上述した如く、本発明のように固溶体に局所的に８７０
〜８８０℃の温度で熱処理すると、固溶体の一部のみ高
温（１０５ｋ）の超電導状態が得られ、またその近傍部
は温度勾配によって８７０″Ｃより若干低めの温度が付
与され、低温（８０ｋ）の超電導状態が得られることに
なる。従って本発明法により得た素子は、用途に応じて
高温相酸るいは低温相を選択することにより多機能型の
超電導素子として利用することができるものであり、そ
の工業的価値は極めて大である。(g) Effects of the invention As mentioned above, as in the present invention, 870% is locally applied to a solid solution.
When heat-treated at a temperature of ~880°C, only a part of the solid solution becomes a high-temperature (105k) superconducting state, and the nearby part is given a temperature slightly lower than 870°C due to the temperature gradient, resulting in a low-temperature (80k) superconducting state. A superconducting state is obtained. Therefore, the device obtained by the method of the present invention can be used as a multifunctional superconducting device by selecting the high temperature phase or low temperature phase depending on the application. , its industrial value is extremely large.
図は本発明に係り、第１図は本発明法を説明するための
製造工程図、第２図は固溶体のレーザ照射部（ａ）とそ
の近傍部（ｂ）における温度勾配を示す図である。
（１〉・・・固溶体、（２）・・・板状体、（３）・・
・基台、（５）・・・マイクロブリッジ型、（７）・・
・基板、（ａ）・・・レーザ照射部（高温相）、（ｂ）
・・・レーザ照射部の近傍部〈低温相）。The figures relate to the present invention; FIG. 1 is a manufacturing process diagram for explaining the method of the present invention, and FIG. 2 is a diagram showing the temperature gradient in the laser irradiated part (a) of the solid solution and its neighboring part (b). . (1>... solid solution, (2)... plate-like body, (3)...
・Base, (5)...Micro bridge type, (7)...
・Substrate, (a)... Laser irradiation part (high temperature phase), (b)
... Near the laser irradiation part (low temperature phase).
Claims (1)
ＣｕＯとの混合物を高温溶融後急冷して固溶体を得、該
固溶体に酸化雰囲気中で高エネルギービームを照射して
局所的に８７０〜８８０℃に加熱し、少なくとも該ビー
ムを受けた個所を高温超電導相とすると共にその高温超
電導相に隣接して低温超電導相を形成することを特徴と
する超電導素子の製造法。(1) A mixture of Bi_2O_3, SrCO_3, CaCO_2, and CuO is melted at a high temperature and then rapidly cooled to obtain a solid solution, and the solid solution is irradiated with a high-energy beam in an oxidizing atmosphere to locally heat it to 870-880°C, and at least A method for manufacturing a superconducting element, which comprises forming a high-temperature superconducting phase at a location receiving the beam and forming a low-temperature superconducting phase adjacent to the high-temperature superconducting phase.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63072383A JPH01244676A (en) | 1988-03-25 | 1988-03-25 | Manufacture of superconductive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63072383A JPH01244676A (en) | 1988-03-25 | 1988-03-25 | Manufacture of superconductive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01244676A true JPH01244676A (en) | 1989-09-29 |
Family
ID=13487710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63072383A Pending JPH01244676A (en) | 1988-03-25 | 1988-03-25 | Manufacture of superconductive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01244676A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06111862A (en) * | 1991-06-08 | 1994-04-22 | Hoechst Ag | Solid substance composed of ceramic high- temperature superconducting material connected to metal conductor and its manufacture |
-
1988
- 1988-03-25 JP JP63072383A patent/JPH01244676A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06111862A (en) * | 1991-06-08 | 1994-04-22 | Hoechst Ag | Solid substance composed of ceramic high- temperature superconducting material connected to metal conductor and its manufacture |
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