JP2851717B2 - Sliding member - Google Patents

Sliding member

Info

Publication number
JP2851717B2
JP2851717B2 JP3084806A JP8480691A JP2851717B2 JP 2851717 B2 JP2851717 B2 JP 2851717B2 JP 3084806 A JP3084806 A JP 3084806A JP 8480691 A JP8480691 A JP 8480691A JP 2851717 B2 JP2851717 B2 JP 2851717B2
Authority
JP
Japan
Prior art keywords
sintered body
carbon
surface layer
silicon carbide
silicon nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3084806A
Other languages
Japanese (ja)
Other versions
JPH04293998A (en
Inventor
三郎 永野
孝一 上坪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP3084806A priority Critical patent/JP2851717B2/en
Priority to DE1992623528 priority patent/DE69223528T2/en
Priority to EP19920101552 priority patent/EP0497345B1/en
Publication of JPH04293998A publication Critical patent/JPH04293998A/en
Priority to US08/162,796 priority patent/US5462813A/en
Priority to US08/466,930 priority patent/US5571611A/en
Application granted granted Critical
Publication of JP2851717B2 publication Critical patent/JP2851717B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、高強度を有するととも
に摺動特性に優れ、メカニカルシールや軸受等に好適な
摺動部材に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sliding member having high strength and excellent sliding characteristics and suitable for a mechanical seal, a bearing and the like.

【0002】[0002]

【従来技術】炭化珪素や窒化珪素に代表される非酸化物
系セラミックスは、他のセラミックスや金属に比較し
て、硬度、強度、靱性および化学的安定性等に優れる材
料として注目され、たとえば、メカニカルシール部品、
軸受部品、薬品用バルブ部材として用いられている。
2. Description of the Related Art Non-oxide ceramics represented by silicon carbide and silicon nitride have attracted attention as materials having excellent hardness, strength, toughness, chemical stability and the like as compared with other ceramics and metals. Mechanical seal parts,
It is used as bearing parts and valve members for chemicals.

【0003】しかしながら、窒化珪素および炭化珪素単
体では十分な摺動特性が得られないことから、窒化珪素
粉末や炭化珪素粉末に対して、焼結助剤としてAl2
3 や周期律表第3a族元素酸化物、あるいは炭素および
4 C等を添加すると同時にグラファイトやBN等の固
体潤滑材を添加し、これを真空中あるいは不活性雰囲気
中で焼成することにより、窒化珪素や炭化珪素からなる
骨材中に前記固体潤滑材を均一分散させることにより、
焼結体表面の摺動特性を高めようとする試みが行われて
いる。
However, since silicon nitride and silicon carbide alone cannot provide sufficient sliding characteristics, Al 2 O 3 is used as a sintering aid for silicon nitride powder or silicon carbide powder.
By adding a solid lubricant such as graphite or BN at the same time as adding the element oxide of group 3 or the element of group 3a of the periodic table, or carbon and B 4 C, and baking this in a vacuum or in an inert atmosphere, By uniformly dispersing the solid lubricant in an aggregate made of silicon nitride or silicon carbide,
Attempts have been made to improve the sliding properties of the surface of the sintered body.

【0004】[0004]

【発明が解決しようとする問題点】摺動特性を高めるた
めには、焼結体表層部における固体潤滑材の量が多い方
が望ましいが、固体潤滑材を多量に添加すると、焼結体
自体の緻密化が阻害されるとともに、いわゆる骨材とし
てのセラミックス自体の強度が低くなるために摺動部材
として割れや欠け等が生じやすくなるという問題があっ
た。そのために固体潤滑材の添加量にもおのずと制限が
あった。
In order to enhance the sliding characteristics, it is desirable that the amount of the solid lubricant in the surface layer of the sintered body is large. And the strength of the ceramic itself as a so-called aggregate is reduced, so that the sliding member is liable to be cracked or chipped. Therefore, the amount of the solid lubricant added was naturally limited.

【0005】また製法上、固体潤滑材自体の分散を均一
に行う必要があり、場合によっては焼結体内部の固体潤
滑材が焼結体の破壊源となり、強度を低下させるという
問題がある。しかも窒化珪素をマトリックスとして固体
潤滑材を分散した焼結体では、その窒化珪素結晶の粒界
に焼結助剤として添加した金属酸化物が存在するために
耐薬品性が悪く、その使用範囲が限定されるという問題
もある。
[0005] In addition, it is necessary to uniformly disperse the solid lubricant itself in the manufacturing method, and in some cases, the solid lubricant inside the sintered body acts as a destruction source of the sintered body, resulting in a problem that the strength is reduced. Moreover, a sintered body in which a solid lubricant is dispersed using silicon nitride as a matrix has poor chemical resistance due to the presence of a metal oxide added as a sintering aid at the grain boundaries of the silicon nitride crystal, and its use range is limited. There is also the problem of being limited.

【0006】[0006]

【問題点を解決するための手段】本発明者等は、上記問
題点に対して検討を重ねた結果、炭化珪素および窒化珪
素を主体とする焼結体からなり、固体潤滑材として分散
含有する炭素を焼結体の内部より表層部に多量に存在さ
せるとともに、かかる系に対してさらに潤滑油を含浸さ
せることにより、焼結体自体の強度を低下させることな
く、表層部における摩擦係数を低減でき、摺動性を向上
することができ、これにより各種の摺動部材として信頼
性の高い安定した特性を発揮することができることを見
出したものである。
Means for Solving the Problems The inventors of the present invention have studied the above problems, and as a result, have formed a sintered body mainly composed of silicon carbide and silicon nitride and dispersedly contained as a solid lubricant. A large amount of carbon is present in the surface layer from the inside of the sintered body, and by further impregnating such a system with lubricating oil, the friction coefficient in the surface layer is reduced without reducing the strength of the sintered body itself. It has been found that slidability can be improved, and thereby, various kinds of sliding members can exhibit stable and highly reliable characteristics.

【0007】本発明は、セラミックス焼結体における摺
動特性が焼結体の表層部の構造および組織に支配される
特性であり、また焼結体内部はいわゆる摺動に対する支
持部材的な作用をなすという考え方から、摺動特性を大
きく向上させるために添加される固体潤滑材としての炭
素を図1に示すように焼結体の表層部から内部にかけて
の炭素が少なくなるようにしたことを特徴とする。
According to the present invention, the sliding characteristics of the ceramic sintered body are characteristics that are governed by the structure and structure of the surface layer portion of the sintered body, and the inside of the sintered body acts as a so-called support member for sliding. From the idea of doing so, the amount of carbon as a solid lubricant added to greatly improve the sliding characteristics is reduced from the surface layer to the inside of the sintered body as shown in FIG. And

【0008】本発明の焼結体からなる骨材は、炭化珪素
および窒化珪素との複合体からなるもので、それ自体強
度が高く、また摺動特性の点においても他のセラミック
スに比較して優れた性質を有するものである。また、固
体潤滑材としての炭素は、焼結体の表層部においてその
体積比率が5〜30%程度の割合で存在していることが
望ましく、5%より少ないと所望の摺動特性が得られ
ず、30%を超えると表層部における強度が低下するた
めに摺動面の欠損等が生じやすくなる。一方、焼結体内
部は、摺動特性に関与しないという観点から、実質的に
炭素が含有されていなくてもよく、骨材成分である炭化
珪素や窒化珪素からなることがよい。
[0008] The aggregate made of the sintered body of the present invention is made of a composite of silicon carbide and silicon nitride, has high strength per se, and has sliding characteristics as compared with other ceramics. It has excellent properties. In addition, carbon as a solid lubricant is preferably present at a volume ratio of about 5 to 30% in the surface layer portion of the sintered body, and if less than 5%, desired sliding characteristics can be obtained. On the other hand, if it exceeds 30%, the strength in the surface layer decreases, so that the sliding surface is likely to be damaged. On the other hand, the interior of the sintered body may not substantially contain carbon from the viewpoint that it does not contribute to the sliding characteristics, and may be made of silicon carbide or silicon nitride as an aggregate component.

【0009】しかしながら、焼結体表層部から内部にか
けて、その組成や組織が急変すると、その境界部分に特
性の相違により応力が発生しやすく、割れや欠け等を生
じることがあるために、表層部より内部にかけて図1に
示すように、固体潤滑材の量は徐々に少なくなるように
構成することがよい。
However, if the composition or the structure changes suddenly from the surface layer portion of the sintered body to the inside, stress is likely to be generated due to a difference in characteristics at the boundary portion, and cracks or chips may occur. As shown in FIG. 1, it is preferable that the amount of the solid lubricant gradually decreases toward the inside.

【0010】また、本発明によれば、上記構成からなる
焼結体中に潤滑油を含浸させることを大きな特徴とす
る。潤滑油を含浸させるために上記焼結体は適度の開気
孔を有していることが必要で、具体的には0.1〜5%
の開気孔率を有することが望ましい。含浸させる潤滑油
としては、パラフィン系オイル、シリコン系オイル、ナ
フテン系オイル、フッ素系オイルが挙げられる。なお、
焼結体中への含油量は、0.01〜1重量%であること
が望ましい。
Further, according to the present invention, it is a great feature that the sintered body having the above structure is impregnated with lubricating oil. In order to impregnate the lubricating oil, the sintered body needs to have an appropriate open pore, specifically, 0.1 to 5%
It is desirable to have an open porosity of Examples of the lubricating oil to be impregnated include paraffin oil, silicone oil, naphthene oil, and fluorine oil. In addition,
The oil content in the sintered body is desirably 0.01 to 1% by weight.

【0011】本発明の摺動部材を得る方法について説明
すると、従来のように炭化珪素や窒化珪素等の骨材成分
に対して炭素粉末を混合し焼成する方法では、均一組織
となり、本発明の構成である表層部と内部において炭素
の含有量の異なる組織は形成されない。
The method of obtaining the sliding member of the present invention will be described. In the conventional method of mixing and firing carbon powder with an aggregate component such as silicon carbide or silicon nitride, a uniform structure is obtained. No structure having a different carbon content is formed between the surface layer portion and the inside thereof.

【0012】そこで、本発明によれば、まず原料粉末と
して炭化珪素粉末を準備する。用いる炭化珪素粉末とし
てはα−SiC、β−SiCのいずれか、またはこれら
を混合して使用することもできる。炭化珪素粉末の平均
粒径は0.1〜2μm が適当である。また上記炭化珪
素粉末に対しては添加物として、カーボンブラックやグ
ラファイト等の炭素粉末あるいは熱分解により炭素を生
成しうるフェノール樹脂、コールタールピッチ、ショ糖
等の有機材料や、B4 C等の硼素含有化合物を10重量
%以下の割合で添加することができる。
Therefore, according to the present invention, silicon carbide powder is first prepared as a raw material powder. As the silicon carbide powder to be used, any of α-SiC and β-SiC, or a mixture thereof can be used. The average particle size of the silicon carbide powder is suitably from 0.1 to 2 μm. Further as additives for the silicon carbide powder, phenol resin, coal tar pitch capable of producing carbon from carbon powder or thermal decomposition, such as carbon black and graphite, and organic materials such as sucrose, B 4 C-like The boron-containing compound can be added at a ratio of 10% by weight or less.

【0013】上記炭化珪素粉末と、場合により上記添加
物を充分に添加混合した後、上記粉末にバインダー等を
添加し、周知の成形方法、たとえばプレス成形、押出成
形、鋳込み成形、冷間静水圧成形等により所望の形状に
成形する。成形体は、所望により200〜800℃で仮
焼することによりフェノール樹脂等の炭素生成化合物よ
り炭素を生成させることができる。
After sufficiently adding and mixing the above-mentioned silicon carbide powder and the above-mentioned additives in some cases, a binder or the like is added to the above-mentioned powder, and a known molding method, for example, press molding, extrusion molding, casting molding, cold isostatic pressing is performed. It is formed into a desired shape by molding or the like. If desired, the molded body can be calcined at 200 to 800 ° C. to generate carbon from a carbon-forming compound such as a phenol resin.

【0014】次に、上記のようにして得られた成形体を
焼成するが、本発明によれば、この焼成を下記数1
Next, the molded body obtained as described above is fired. According to the present invention, this firing is carried out by the following equation (1).

【数1】 3SiC+2N2 → Si3 4 +3C で示されるように炭化珪素と窒素の反応により窒化珪素
および炭素が生成可能な雰囲気中で焼成する。具体的に
は1000℃以上、特に1500℃以上の温度で雰囲気
中に窒素ガスを必須成分として含むとともに該窒素ガス
圧力が500気圧以上、特に1000気圧以上の加圧下
で焼成することにより数1の反応を進行させることがで
きる。
As shown by 3SiC + 2N 2 → Si 3 N 4 + 3C, firing is performed in an atmosphere in which silicon nitride and carbon can be generated by a reaction between silicon carbide and nitrogen. Specifically, nitrogen gas is contained as an essential component in the atmosphere at a temperature of 1000 ° C. or higher, especially 1500 ° C. or higher, and the nitrogen gas is fired under a pressure of 500 atm or more, particularly 1000 atm or more, so that The reaction can proceed.

【0015】この焼成によれば、内部および表層部とも
に高緻密化が達成されるとともに、焼結体の表層部にお
いて特に上記反応が活発に生じ、焼結体の表層部に炭素
が内部よりも多くなるという特異的焼結体が形成され
る。
According to this firing, high densification is achieved in both the inside and the surface layer, and the above-mentioned reaction particularly occurs actively in the surface layer of the sintered body, so that carbon is more present in the surface layer of the sintered body than in the inside. A specific sintered body that increases is formed.

【0016】この焼結のメカニズムについては定かでは
ないが、高温高圧下の窒素雰囲気中で、炭化珪素粒子の
表面から窒化珪素への反応が進行し、それに伴い体積膨
張が生じ、それによりある程度緻密化が進行し、一旦表
層部に緻密層が生じると焼結体内部への窒素ガスの進入
が抑制されるために、結果として表層部、内部ともに気
孔率10%以下の緻密体となるものの、表層部と内部に
おいてほぼ連続的に異なる組織が形成されると考えられ
る。
Although the mechanism of the sintering is not clear, the reaction of silicon carbide particles into silicon nitride proceeds from the surface of the silicon carbide particles in a nitrogen atmosphere under high temperature and high pressure, resulting in a volume expansion and, to a certain degree, a high density. When the formation progresses and a dense layer is once formed on the surface portion, the entry of nitrogen gas into the sintered body is suppressed, and as a result, the surface layer portion and the inside become a dense body with a porosity of 10% or less. It is considered that a different structure is formed almost continuously between the surface layer and the inside.

【0017】よって、上記焼成によれば、焼成温度、焼
成時間等を制御することにより表層部において炭素の生
成量を高めるとともに、焼結体内部において炭素の生成
を抑制することができる。望ましくは焼結体の表層部は
完全に反応を進行させ、窒化珪素と炭素から構成される
ことが望ましい。この場合、その表層部には窒化珪素を
骨材とし炭素が約26体積%を割合で均一に分散した組
織が形成される。
Therefore, according to the above-described firing, the amount of carbon generated in the surface layer portion can be increased by controlling the firing temperature, the firing time, and the like, and the generation of carbon in the sintered body can be suppressed. Desirably, the surface portion of the sintered body is allowed to completely react and is composed of silicon nitride and carbon. In this case, a structure in which silicon nitride is used as an aggregate and carbon is uniformly dispersed at a ratio of about 26% by volume is formed in the surface layer.

【0018】また、この焼結体の他の特徴としては、表
層部から内部にかけて骨材である炭化珪素および窒化珪
素の量比が変化することが挙げられ、炭化珪素/(窒化
珪素+炭化珪素)で表される組成比は表層部から内部に
かけて大きくなる。このような構成によれば、表層部は
窒化珪素的な特性、即ち耐熱衝撃性および靱性に優れた
特性を有する。また、通常の窒化珪素質焼結体によれ
ば、窒化珪素結晶粒子間に焼結助剤として用いられた金
属酸化物が粒界相として存在するが、この焼結体の表層
部では、窒化珪素結晶粒子間に金属酸化物が実質的に存
在しないことも大きな特徴であり、耐薬品性を高めるこ
とができ、摺動部材として適用範囲を広げることができ
る。
Another feature of the sintered body is that the ratio of the amounts of silicon carbide and silicon nitride, which are aggregates, changes from the surface layer portion to the inside, and the ratio is silicon carbide / (silicon nitride + silicon carbide). ) Increases from the surface layer portion to the inside. According to such a configuration, the surface layer has silicon nitride-like characteristics, that is, characteristics excellent in thermal shock resistance and toughness. According to a normal silicon nitride-based sintered body, the metal oxide used as a sintering aid exists as a grain boundary phase between silicon nitride crystal grains. Another major feature is that the metal oxide does not substantially exist between the silicon crystal particles, so that the chemical resistance can be improved and the application range as a sliding member can be expanded.

【0019】なお、炭素量が少なくとも20体積%以上
の表層部はその厚みが10〜2000μmであることが
望ましく、厚みが10μmより薄いと摺動特性の長期安
定性に欠け、2000μmより厚いと表層部の強度が低
下し欠け等が発生しやすくなる。
The surface portion having a carbon content of at least 20% by volume desirably has a thickness of 10 to 2000 μm. If the thickness is less than 10 μm, the long-term stability of the sliding characteristics is lacking. The strength of the portion is reduced, and chipping or the like is likely to occur.

【0020】一方、焼結体の内部は炭化珪素あるいは炭
化珪素と窒化珪素を主体として構成されることが望まし
く、内部において炭化珪素/(炭化珪素+窒化珪素)の
組成比率が0.2以上であることが望ましい。
On the other hand, the interior of the sintered body is preferably composed mainly of silicon carbide or silicon carbide and silicon nitride, and the composition ratio of silicon carbide / (silicon carbide + silicon nitride) is 0.2 or more. Desirably.

【0021】つぎに、上記の方法により得られた焼結体
に対して潤滑油を含浸させる。含浸させる方法として
は、焼結体を含浸させようとする潤滑油浴中に浸漬し、
80〜120℃程度に加熱し油の粘土を下げた状態で真
空中に放置して焼結体を脱泡し、その後潤滑油浴より取
り出すことにより潤滑油は焼結体中の開気孔中に含浸さ
れる。
Next, the sintered body obtained by the above method is impregnated with a lubricating oil. As a method of impregnation, immersion in a lubricating oil bath to impregnate the sintered body,
The lubricating oil is heated to about 80 to 120 ° C. and left in a vacuum with the oil clay lowered to defoam the sintered body. Thereafter, the lubricating oil is taken out of the lubricating oil bath, so that the lubricating oil is in the open pores in the sintered body. Impregnated.

【0022】[0022]

【作 用】本発明によれば、表層部における固体潤滑材
である炭素量を焼結体表層部のみに多く存在させるとと
もに潤滑油を含浸させることにより、摺動部材としての
使用時に潤滑油が摺動面に滲み出し、液体潤滑をも併用
することができるために、固体潤滑作用と液体潤滑作用
とを合わせ持つことができ、表層部における摩擦係数を
低くすることができる。また、表層部のみ炭素が多量に
存在することにより焼結体全体としての強度を低下させ
ることがなく、表層部において比較的多量の炭素が存在
しても内部における強度が高いことから摺動部材として
も安定した摺動特性を発揮することができる。しかも、
表層部から内部にかけての組織的な変化がほぼ連続的に
形成されていることから、焼結体内での特性の相違によ
り発生する応力を低減することができる。
According to the present invention, a large amount of carbon, which is a solid lubricant in the surface layer portion, is present only in the surface layer portion of the sintered body and impregnated with the lubricating oil. Since the liquid lubricant oozes out on the sliding surface and can be used in combination with liquid lubrication, it can have both solid lubricating action and liquid lubricating action, and can reduce the friction coefficient in the surface layer portion. Also, the presence of a large amount of carbon only in the surface layer portion does not reduce the strength of the sintered body as a whole, and the strength of the inside is high even if a relatively large amount of carbon is present in the surface layer portion. As a result, stable sliding characteristics can be exhibited. Moreover,
Since the structural change from the surface layer portion to the inside is formed almost continuously, the stress generated due to the difference in the characteristics in the sintered body can be reduced.

【0023】また、炭素を表層部において多量に存在さ
せることができるために、焼結体自体の熱伝導率を高め
ることができ、これにより摺動時に発生した熱を効率的
に放熱することもできる。さらに炭素を内部においても
適量存在させることにより焼結体全体の電気抵抗を小さ
くすることができ、これにより放電加工を行うことがで
きる。
In addition, since a large amount of carbon can be present in the surface layer, the thermal conductivity of the sintered body itself can be increased, and the heat generated during sliding can be efficiently radiated. it can. Furthermore, the electric resistance of the entire sintered body can be reduced by allowing an appropriate amount of carbon to be present in the inside, whereby electric discharge machining can be performed.

【0024】さらに、骨材として表層部の骨材を窒化珪
素を主体として形成することにより摺動部材表層部の耐
熱衝撃性を高めることができる。
Further, by forming the surface layer aggregate mainly composed of silicon nitride as the aggregate, the thermal shock resistance of the surface layer portion of the sliding member can be enhanced.

【0025】[0025]

【実施例】β−SiC粉末(平均粒径0.4μm、酸素
含有量0.1重量%)に対して、場合により表1に示す
ように各種の添加物を添加混合し、成形用バインダーと
してレゾール型フェノール樹脂20%溶液を適量添加
し、さらに溶媒としてアセトンを適量添加し、混練乾燥
後、篩を通して成形用顆粒を得た。この顆粒を金型プレ
スを用いて成形圧2000kg/cm2 で外径20m
m、厚み10mmの円板状成形体を作成した。次に成形
体を600℃の不活性雰囲気(N2 気流中) で仮焼し、
フェノール樹脂を炭化し、仮焼体の組成の分析を行っ
た。そして、この仮焼体を表1の条件で焼成し、試料N
o,1〜8を得た。
EXAMPLES As shown in Table 1, various additives were added to and mixed with β-SiC powder (average particle size 0.4 μm, oxygen content 0.1% by weight) as a binder for molding. An appropriate amount of a resol type phenol resin 20% solution was added, and an appropriate amount of acetone was further added as a solvent. After kneading and drying, the mixture was passed through a sieve to obtain granules for molding. The granules are pressed with a molding press at a molding pressure of 2000 kg / cm 2 and an outer diameter of 20 m.
m, a disk-shaped molded body having a thickness of 10 mm was prepared. Next, the molded body is calcined in an inert atmosphere (in a stream of N 2 ) at 600 ° C.
The composition of the calcined body was analyzed by carbonizing the phenol resin. Then, the calcined body was fired under the conditions shown in Table 1 to obtain a sample N
o, 1 to 8 were obtained.

【0026】得られた焼結体に対して、アルキメデス法
により焼結体比重および開気孔率を測定した。また、抗
折強度をJISR1601に基づき測定した。さらに焼
結体より表層部と焼結体内部より切り出し粉砕後、LE
CO法で全炭素、全窒素を測定し、窒素は窒化珪素とし
て計算し、残る珪素は炭化珪素として存在するとして結
合炭素を求め、残りを遊離炭素として計算で求めた。ま
た、焼結体の構成相をX線分析にて行った。なお、添加
物としてB4 Cを添加した試料においてはB4 Cも窒化
され、BNとなっているが添加量が微量であるためにX
線回折測定では検出されなかった。
The specific gravity and open porosity of the obtained sintered body were measured by the Archimedes method. Further, the bending strength was measured based on JISR1601. Furthermore, after cutting and pulverizing from the surface layer part and the inside of the sintered body from the sintered body, LE
Total carbon and total nitrogen were measured by the CO method, nitrogen was calculated as silicon nitride, the remaining silicon was calculated assuming that it was present as silicon carbide, and the remaining carbon was calculated as free carbon. The constituent phases of the sintered body were analyzed by X-ray analysis. In addition, in the sample to which B 4 C was added as an additive, B 4 C was also nitrided and became BN.
It was not detected by line diffraction measurement.

【0027】得られた各焼結体をφ50×t10に円板
形状に研磨し、表面をラップ仕上げした後に洗浄乾燥
後、パラフィン系極低流動点基油を用いた汎用潤滑油浴
中に浸漬し、減圧(20mmtorr)容器中で110
℃で1時間加熱した。含浸前後の重量変化より、試料の
含油量を求めた。
Each of the obtained sintered bodies is polished into a disk shape of φ50 × t10, the surface is lapped, washed and dried, and then immersed in a general-purpose lubricating oil bath using a paraffin type extremely low pour point base oil. And in a vacuum (20 mmtorr) vessel for 110
Heated at 0 ° C. for 1 hour. The oil content of the sample was determined from the change in weight before and after the impregnation.

【0028】次に、試料円板にSUJII鋼球を固定ピン
として接触させ、試料円板を回転させるボールオンディ
スク法にて摺動特性評価を行った。接触負荷と摩擦力を
測定し摩擦係数を算出した。
Next, the sliding characteristics were evaluated by a ball-on-disk method in which a SUJII steel ball was brought into contact with the sample disk as a fixing pin and the sample disk was rotated. The contact load and the frictional force were measured to calculate the friction coefficient.

【0029】[0029]

【表1】 [Table 1]

【0030】[0030]

【表2】 [Table 2]

【0031】表1およひ表2によれば、従来のSiC質
焼結体による摺動部材(試料No,4)は摩擦係数が0.
6程度であるのは対して、本発明の摺動部材はいずれも
摩擦係数が0.1程度の優れた特性を示した。また、比
較として潤滑油を含浸させなかった試料と比較しても優
れた摺動特性を示した。
According to Tables 1 and 2, the sliding member (sample No. 4) made of a conventional SiC sintered body has a friction coefficient of 0.1.
In contrast to the value of about 6, the sliding members of the present invention all exhibited excellent characteristics with a friction coefficient of about 0.1. Further, as a comparison, excellent sliding characteristics were shown as compared with a sample not impregnated with a lubricating oil.

【0032】以上、詳述した通り、本発明によれば、炭
化珪素および窒化珪素を骨材として、その焼結体表層部
に炭素を内部に比較して多く存在させるとともに潤滑油
を含浸させることにより、焼結体全体としての高強度を
維持しつつ、優れた摺動特性が得られる。また、固体潤
滑材としての炭素を表層部において多量に存在させるこ
とにより焼結体自体の熱伝導率および電気伝導率を高め
ることができ、それにより摺動時に発生した熱を効率的
に放熱することもできるとともに、放電加工を行うこと
もできる。
As described in detail above, according to the present invention, silicon carbide and silicon nitride are used as aggregates, and more carbon is present in the surface layer of the sintered body than in the interior and impregnated with lubricating oil. Thereby, excellent sliding characteristics can be obtained while maintaining the high strength of the entire sintered body. In addition, the thermal conductivity and electrical conductivity of the sintered body itself can be increased by allowing a large amount of carbon as a solid lubricant to be present in the surface layer, thereby efficiently radiating heat generated during sliding. And electrical discharge machining can be performed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の摺動部材における炭素量の表層部から
の深さに対する変化を示す図である。
FIG. 1 is a diagram showing a change in carbon amount with respect to a depth from a surface layer in a sliding member of the present invention.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 FI C10M 103/02 F16J 15/20 F16C 33/24 B23Q 1/26 Z F16J 15/20 C04B 35/56 101H // B23Q 1/26 35/58 102L C10N 30:00 40:02 50:08 (58)調査した分野(Int.Cl.6,DB名) C10M 111/00 C10M 101/02 C10M 103/00 C10M 103/02 F16C 33/24 C10N 40:02 C10N 50:08 C04B 35/565 C04B 35/584 F16J 15/20 B23Q 1/26──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 6 Identification code FI C10M 103/02 F16J 15/20 F16C 33/24 B23Q 1/26 Z F16J 15/20 C04B 35/56 101H // B23Q 1/26 35/58 102L C10N 30:00 40:02 50:08 (58) Fields investigated (Int. Cl. 6 , DB name) C10M 111/00 C10M 101/02 C10M 103/00 C10M 103/02 F16C 33/24 C10N 40:02 C10N 50:08 C04B 35/565 C04B 35/584 F16J 15/20 B23Q 1/26

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】炭化珪素および窒化珪素を主体とし、固体
潤滑材として炭素を分散含有する焼結体からなる摺動部
材であって、前記炭素が内部よりも表層部に多く存在す
るとともに、該摺動部材が0.1〜5%の開気孔率を有
し該開気孔内に潤滑油を含浸してなることを特徴とする
摺動部材。
1. A sliding member comprising a sintered body mainly composed of silicon carbide and silicon nitride and containing carbon as a solid lubricant in a dispersed manner, wherein said carbon is present in a surface layer more than in an interior thereof. A sliding member, wherein the sliding member has an open porosity of 0.1 to 5%, and the open pores are impregnated with a lubricating oil.
【請求項2】焼結体表層部における炭素量が5〜30体
積%である請求項1記載の摺動部材。
2. The sliding member according to claim 1, wherein the amount of carbon in the surface layer portion of the sintered body is 5 to 30% by volume.
【請求項3】焼結体内部が炭化珪素を主体とし、表層部
が少なくとも窒化珪素と炭素とを含有する請求項1記載
の摺動部材。
3. The sliding member according to claim 1, wherein the inside of the sintered body is mainly composed of silicon carbide, and the surface layer portion contains at least silicon nitride and carbon.
JP3084806A 1991-01-31 1991-03-25 Sliding member Expired - Fee Related JP2851717B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP3084806A JP2851717B2 (en) 1991-03-25 1991-03-25 Sliding member
DE1992623528 DE69223528T2 (en) 1991-01-31 1992-01-30 Sintered, ceramic composite material, process for its production and the same slide valve
EP19920101552 EP0497345B1 (en) 1991-01-31 1992-01-30 Composite ceramic sintered material, process for producing the same, and slider member using the same
US08/162,796 US5462813A (en) 1991-01-31 1993-12-07 Composite ceramic sintered material
US08/466,930 US5571611A (en) 1991-01-31 1995-06-06 Composite ceramic sintered material and slider member using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3084806A JP2851717B2 (en) 1991-03-25 1991-03-25 Sliding member

Publications (2)

Publication Number Publication Date
JPH04293998A JPH04293998A (en) 1992-10-19
JP2851717B2 true JP2851717B2 (en) 1999-01-27

Family

ID=13840962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3084806A Expired - Fee Related JP2851717B2 (en) 1991-01-31 1991-03-25 Sliding member

Country Status (1)

Country Link
JP (1) JP2851717B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5853506A (en) * 1997-07-07 1998-12-29 Ford Motor Company Method of treating metal working dies
JP2005154258A (en) * 2003-10-29 2005-06-16 Sumitomo Electric Ind Ltd Ceramic composite material and method for producing same
JP2005337129A (en) * 2004-05-27 2005-12-08 Toyota Industries Corp Sliding member and method for manufacturing sliding member
JP5968889B2 (en) * 2011-09-03 2016-08-10 イーグル工業株式会社 Sliding parts
JP6059008B2 (en) * 2012-12-27 2017-01-11 京セラ株式会社 Rotary joint

Also Published As

Publication number Publication date
JPH04293998A (en) 1992-10-19

Similar Documents

Publication Publication Date Title
US5976429A (en) Process for producing dense, self-sintered silicon carbide/carbon-graphite composites
US3859399A (en) Dense composite ceramic bodies and method for their production
EP1761475B1 (en) A process for the manufacturing of dense silicon carbide
US7166550B2 (en) Ceramic composite body of silicon carbide/boron nitride/carbon
US5462813A (en) Composite ceramic sintered material
JP2851717B2 (en) Sliding member
Vijayan et al. Low‐density open cellular silicon carbide foams from sucrose and silicon powder
CA1152536A (en) Dense sintered silicon carbide ceramic
JP2902796B2 (en) Ceramic composite sintered body and sliding member using the same
JP2801785B2 (en) Manufacturing method of ceramic composite sintered body
JP2784280B2 (en) Ceramic composite sintered body, method for producing the same, and sliding member
JP2738596B2 (en) Ceramic composite sintered body and its manufacturing method
JP4178236B2 (en) Silicon carbide-based low friction sliding material and manufacturing method thereof
JPS62148384A (en) Silicon carbide base composite material
JPH0733527A (en) Sliding part
JP3152872B2 (en) Sliding composite material
JPS6331433B2 (en)
JP2543093B2 (en) Sliding parts for seals
Belyakov et al. A Comparative Study of Methods for Obtaining Silicon Carbide Ceramic Materials
KR100243546B1 (en) Manufacturing method of silicon carbide sintered body
JPH0510303B2 (en)
JP3462386B2 (en) Slide gate plate
JPS6158861A (en) Silicon carbide material and manufacture
JPH075403B2 (en) Method for producing ceramic-carbon composite material
JPS6227030B2 (en)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees