JP2801455B2 - Silicon nitride sintered body - Google Patents

Silicon nitride sintered body

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Publication number
JP2801455B2
JP2801455B2 JP4010042A JP1004292A JP2801455B2 JP 2801455 B2 JP2801455 B2 JP 2801455B2 JP 4010042 A JP4010042 A JP 4010042A JP 1004292 A JP1004292 A JP 1004292A JP 2801455 B2 JP2801455 B2 JP 2801455B2
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JP
Japan
Prior art keywords
sintered body
silicon nitride
oxide
mol
rare earth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4010042A
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Japanese (ja)
Other versions
JPH05194036A (en
Inventor
政宏 佐藤
等 松之迫
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Kyocera Corp
Original Assignee
Kyocera Corp
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、ガスタービンやターボ
ロータ等の熱機関に好適な高温における抗折強度、耐酸
化性に優れた窒化珪素質焼結体及びその製造方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silicon nitride sintered body excellent in bending strength and oxidation resistance at a high temperature suitable for a heat engine such as a gas turbine or a turbo rotor, and a method for producing the same.

【0002】[0002]

【従来技術】従来から、窒化珪素質焼結体は高温におけ
る強度、硬度、熱的化学的安定性に優れることからエン
ジニアリングセラミックス、特に熱機関用材料として注
目されている。具体的な熱機関としてはターボロータや
ガスタービン用部品が挙げられ、これらに適用する場
合、焼結体に対し室温から約1200℃の範囲、部品に
よっては1400℃の高温において優れた機械的特性が
要求されている。
2. Description of the Related Art Conventionally, silicon nitride sintered bodies have been attracting attention as engineering ceramics, particularly as materials for heat engines, because of their excellent strength, hardness and thermochemical stability at high temperatures. Specific heat engines include components for turbo rotors and gas turbines, and when applied to these, have excellent mechanical properties in the range of room temperature to about 1200 ° C. for sintered bodies, and at high temperatures of 1400 ° C. for some components. Is required.

【0003】このような要求に対し、組成の点からは、
2 3 等の希土類元素酸化物の他、Al2 3 、Mg
O等の酸化物が焼結助剤として最も一般的に使用されて
いる。しかし、焼結体の高温特性を考慮した場合、Al
2 3 やMgOなどが含まれると焼結体の粒界に低融点
物質が生成されるために高温強度や高温耐酸化性が低下
する。これらの見地から上記の酸化物を実質的に含まな
いSi3 4 −RE2 3 (希土類元素酸化物)−Si
2 の単純三元系からなる組成も検討され、さらに焼成
条件の検討あるいは焼結体の熱処理等によって粒界にS
3 4 −RE2 3 −SiO2 等からなるアパタイ
ト、YAM等の結晶相を析出させることによって高温特
性を改良する試みも行われている。
[0003] In response to such requirements, from the viewpoint of composition,
In addition to rare earth element oxides such as Y 2 O 3 , Al 2 O 3 , Mg
Oxides such as O are most commonly used as sintering aids. However, considering the high temperature characteristics of the sintered body,
When 2 O 3 or MgO is contained, a low-melting substance is generated at the grain boundary of the sintered body, so that high-temperature strength and high-temperature oxidation resistance decrease. From these viewpoints, Si 3 N 4 —RE 2 O 3 (rare earth element oxide) —Si substantially free of the above oxides
The composition of a simple ternary system of O 2 has also been studied.
i 3 N 4 -RE 2 O 3 apatite consisting -SiO 2, etc., attempts have been made to improve the high temperature properties by precipitating a crystal phase such as YAM.

【0004】[0004]

【発明が解決しようとする問題点】しかしながら、Si
3 4 −RE2 3 (希土類元素酸化物)−SiO2
単純三元系において、その粒界に各種結晶相を析出した
焼結体は室温および1400℃の高温における強度の向
上あるいは耐酸化性に対する向上効果はある程度認めら
れるものの、中温域(700〜1000℃)における特
性、特に耐酸化性の劣化が激しいという欠点を有してい
る。
However, the problems to be solved by the invention
3 N 4 -RE 2 O 3 (rare earth oxide) in a simple ternary -SiO 2, sintered bodies precipitated various crystal phase in the grain boundaries is improved in strength at high temperatures of room temperature and 1400 ° C. or acid Although the effect of improving the oxidizing property is recognized to some extent, it has the disadvantage that the characteristics in the middle temperature range (700 to 1000 ° C.), particularly the oxidation resistance, are significantly deteriorated.

【0005】よって、本発明の目的は、優れた高温特性
を維持しつつ、中温域における耐酸化性を改善した窒化
珪素質焼結体を提供することを目的とするものである。
Accordingly, an object of the present invention is to provide a silicon nitride sintered body having improved oxidation resistance in a medium temperature range while maintaining excellent high temperature characteristics.

【0006】[0006]

【問題点を解決するための手段】本発明者等は、上記の
問題点に対して検討を加えた結果、上記単純三元系に対
してさらにクロムを添加し、これをクロム珪化物として
存在させることにより上記目的が達成されることを見出
した。
[Means for Solving the Problems] The present inventors have studied the above problems, and as a result, have added chromium to the above simple ternary system, which is present as chromium silicide. It has been found that the above-mentioned object is achieved by doing so.

【0007】即ち、本発明の窒化珪素質焼結体は、窒化
珪素70〜98モル%と、希土類元素酸化物1.0〜1
0モル%と、過剰酸素(SiO2 換量)25モル%以下
と、クロム化合物を酸化物換算で0.01〜5モル%と
からなり、過剰酸素(SiO2 換算量)/希土類元素酸
化物で表されるモル比が0.7より大きく、3以下の範
囲にあり、しかも前記クロムが珪化物として存在するこ
とを特徴とするものである。
That is, the silicon nitride sintered body of the present invention comprises 70 to 98 mol% of silicon nitride and 1.0 to 1 of rare earth element oxide.
0 mol%, excess oxygen (SiO 2 conversion amount) 25 mol% or less, and a chromium compound in an amount of 0.01 to 5 mol% in terms of oxide. Excess oxygen (SiO 2 conversion amount) / rare earth element oxide Is greater than 0.7 and less than or equal to 3, and the chromium is present as silicide.

【0008】以下、本発明を詳述する。本発明の焼結体
は、その組成が、窒化珪素70〜99モル%と、希土類
元素酸化物1.0〜10モル%と、過剰酸素(SiO2
換量)25モル%以下と、クロム化合物を酸化物換算で
0.01〜5モル%とからなる。なお、ここで過剰酸素
とは、焼結体の単位体積当たりに含まれる全酸素量から
希土類元素酸化物(RE2 3 )として化学量論組成で
混入した酸素を除いた酸素量で、具体的には窒化珪素原
料中の不純物酸素あるいはSiO2 として添加された酸
素から構成されるもので、いずれもSiO2 換算量を示
す。
Hereinafter, the present invention will be described in detail. The sintered body of the present invention has a composition of 70 to 99 mol% of silicon nitride, 1.0 to 10 mol% of rare earth element oxide, and excess oxygen (SiO 2
(Equivalent amount) of 25 mol% or less, and 0.01 to 5 mol% of chromium compound in terms of oxide. Here, the excess oxygen is an oxygen amount obtained by removing oxygen mixed in a stoichiometric composition as a rare earth oxide (RE 2 O 3 ) from the total oxygen amount contained per unit volume of the sintered body. More specifically, it is composed of impurity oxygen in a silicon nitride raw material or oxygen added as SiO 2 , and each of them indicates a SiO 2 equivalent amount.

【0009】なお、焼結体の組成を上記の範囲に限定し
たのは、窒化珪素、希土類元素酸化物、過剰酸素のいず
れかが前述の範囲を逸脱しても室温強度ならびに高温強
度が劣化するためであり、特にクロム化合物の量が0.
01モル%より少ないと焼結体の中温域における耐酸化
性の向上効果がなく、5モル%を越えると低融点のガラ
スが生成されやすく、高温特性が劣化するからである。
The reason why the composition of the sintered body is limited to the above range is that the room temperature strength and the high temperature strength are deteriorated even if any of silicon nitride, rare earth element oxide and excess oxygen deviates from the above range. In particular, when the amount of the chromium compound is 0.
If the amount is less than 01 mol%, the effect of improving the oxidation resistance in a medium temperature range of the sintered body is not obtained. If the amount exceeds 5 mol%, a glass having a low melting point is easily generated, and the high-temperature characteristics are deteriorated.

【0010】また、本発明の焼結体によれば、過剰酸素
(SiO2 換算量)/希土類元素酸化物で表されるモル
比が0.7より大きく、3以下の範囲にあることが重要
である。これは、このモル比が0.7以下では緻密化し
にくく、3を越えると高温強度が劣化するためである。
According to the sintered body of the present invention, it is important that the molar ratio expressed by excess oxygen (amount in terms of SiO 2 ) / oxide of the rare earth element is larger than 0.7 and equal to or smaller than 3. It is. This is because when the molar ratio is 0.7 or less, it is difficult to densify the resin, and when it exceeds 3, the high-temperature strength is deteriorated.

【0011】次に、本発明の窒化珪素質焼結体を作成す
る方法としては、原料粉末として窒化珪素粉末、希土類
元素酸化物粉末、クロム化合物、場合により酸化珪素粉
末を用い、前述した組成になるように秤量混合する。こ
の時の窒化珪素粉末は焼結性を促進するためBET比表
面積が3〜20m2 /g、α化率95%以上であること
が望ましい。また、窒化珪素粉末には不純物酸素含有量
が一般に0.8〜1.5重量%程度含有されるが、全体
の酸素量は酸化珪素の添加によって任意に調整できる。
なお、クロム化合物とは酸化物、窒化物、炭化物、珪化
物、硼化物等である。
Next, as a method for producing the silicon nitride sintered body of the present invention, a silicon nitride powder, a rare earth element oxide powder, a chromium compound, and optionally a silicon oxide powder are used as raw material powders, and Weigh and mix as needed. At this time, the silicon nitride powder desirably has a BET specific surface area of 3 to 20 m 2 / g and a pregelatinization ratio of 95% or more in order to promote sinterability. The silicon nitride powder generally contains an impurity oxygen content of about 0.8 to 1.5% by weight, but the total oxygen content can be arbitrarily adjusted by adding silicon oxide.
Note that the chromium compound is an oxide, a nitride, a carbide, a silicide, a boride, or the like.

【0012】上記の混合粉末に適宜バインダーを添加し
て造粒後、成形する。成形は周知の方法を採用でき、具
体的にはプレス成形、押し出し成形、鋳込み成形あるい
は射出成形等が採用できる。
A binder is appropriately added to the above mixed powder, granulated, and then molded. A well-known method can be employed for molding, and specifically, press molding, extrusion molding, casting molding, injection molding or the like can be employed.

【0013】このようにして得られた成形体はバインダ
ー除去した後、焼成する。焼成は、その焼成手段にもよ
るが1450〜2000℃の非酸化性雰囲気で焼成す
る。焼成手段としては窒素ガス圧力焼成法、熱間静水圧
焼成法等が好適である。また、この時にクロム化合物を
クロムの珪化物に変換するために、1450〜1850
℃程度で一旦保持すればよい。
The compact obtained in this way is calcined after removing the binder. The firing is performed in a non-oxidizing atmosphere at 1450 to 2000 ° C., depending on the firing means. As the firing means, a nitrogen gas pressure firing method, a hot isostatic pressure firing method, or the like is preferable. At this time, in order to convert the chromium compound into a chromium silicide, 1450-1850
What is necessary is just to hold once at about ° C.

【0014】さらに、上記焼成により粒界が結晶化する
ことがある。具体的にはアパタイト(RE5 Si3 12
N、RE10Si7 234 、RE4 Si4 9 4 )、
YAM(RE4 Si2 7 2 )、ワラストナイト(R
ESiO2 N)等が析出していることが望ましく、さら
に結晶化を促進するために1200〜1600℃の非酸
化性雰囲気中で熱処理すればよい。
Further, the above-mentioned calcination may crystallize grain boundaries. Specifically, apatite (RE 5 Si 3 O 12
N, RE 10 Si 7 O 23 N 4 , RE 4 Si 4 O 9 N 4 ),
YAM (RE 4 Si 2 O 7 N 2 ), wollastonite (R
Desirably, ESiO 2 N) or the like is precipitated, and heat treatment may be performed in a non-oxidizing atmosphere at 1200 to 1600 ° C. to promote crystallization.

【0015】これにより、本発明の焼結体は、組織的に
はβ−窒化珪素結晶を主体とし、その粒界にクロムの珪
化物が分散し、さらにそれらの粒界にはSi3 4 −R
2 3 −SiO2 系の結晶が析出した構造を有する。
この時のクロムの珪化物はクロム化合物の粒径を制御
し、0.1〜10μmの大きさで分布していることが望
ましい。これらの粒径は、クロム化合物の原料粒径によ
り制御できる。
[0015] Thus, the sintered body of the present invention is mainly composed of β-silicon nitride crystals, chromium silicide is dispersed in the grain boundaries, and Si 3 N 4 is further dispersed in the grain boundaries. -R
E 2 O 3 -SiO 2 system crystals having the structure precipitated.
At this time, the chromium silicide controls the particle diameter of the chromium compound and is preferably distributed in a size of 0.1 to 10 μm. These particle sizes can be controlled by the particle size of the raw material of the chromium compound.

【0016】本発明によれば、焼結体中の粒界の結晶性
を高める上で粒界に存在してガラス相を形成し易い酸化
物、具体的にはAl2 3 、MgO、CaO、Fe2
3 等の酸化物が焼結体全量中、0.05重量%以下であ
ることが望ましい。また、希土類元素酸化物としては、
2 3 が一般的であるが、Yb2 3 、Er2 3
Ho2 3 、Dy2 3 等の重希土類元素酸化物を用い
る方が色ムラ等の発生を防止するとともに安定した特性
の焼結体を得ることができる点で望ましい。
According to the present invention, an oxide which is present at the grain boundary and easily forms a glass phase to enhance the crystallinity of the grain boundary in the sintered body, specifically, Al 2 O 3 , MgO, CaO , Fe 2 O
It is desirable that the oxide such as 3 is 0.05% by weight or less in the total amount of the sintered body. In addition, as the rare earth element oxide,
Y 2 is O 3 is generally, Yb 2 O 3, Er 2 O 3,
It is desirable to use heavy rare earth element oxides such as Ho 2 O 3 and Dy 2 O 3 in that the occurrence of color unevenness and the like can be prevented and a sintered body having stable characteristics can be obtained.

【0017】[0017]

【作用】本発明によれば、Si3 4 −RE2 3 −S
iO2 の組成に対しクロム化合物を加えることが重要で
ある。従来Si3 4 −RE2 3 −SiO2 の3元系
組成物は、1200℃を越える高温特性は優れるもの
の、700〜1000℃における耐酸化性が劣ることが
知られている。これは、この温度域では、焼結体表面に
保護膜を生成しないため粒界相が、破壊的に酸化される
ためと考えられている。この問題に対し本発明者等は、
クロム化合物を加えることより解決した。すなわち加え
られたクロム化合物を焼結体中に珪化物とし、粒界に残
存させる。すると、中温域の酸化性雰囲気で、このクロ
ム珪化物が焼結体の表面にてアモルファスの保護膜を形
成し、続く酸化を防ぐのである。また、このクロム珪化
物は、高温域においても粒界と反応することがないため
高温特性を劣化させることはない。
According to the present invention, Si 3 N 4 —RE 2 O 3 —S
It is important to add a chromium compound to the composition of iO 2 . Conventionally, it is known that a ternary composition of Si 3 N 4 —RE 2 O 3 —SiO 2 has excellent high-temperature properties exceeding 1200 ° C., but has poor oxidation resistance at 700 to 1000 ° C. This is considered to be because, in this temperature range, no protective film is formed on the surface of the sintered body, so that the grain boundary phase is destructively oxidized. In response to this problem, the present inventors
The problem was solved by adding a chromium compound. That is, the added chromium compound is converted into a silicide in the sintered body and remains at the grain boundary. Then, in an oxidizing atmosphere in a medium temperature range, the chromium silicide forms an amorphous protective film on the surface of the sintered body and prevents subsequent oxidation. Further, since the chromium silicide does not react with the grain boundaries even in a high temperature range, it does not deteriorate the high temperature characteristics.

【0018】以下、本発明を次の例で説明する。Hereinafter, the present invention will be described with reference to the following examples.

【0019】[0019]

【実施例】【Example】

実施例1 原料粉末として、窒化珪素粉末(BET比表面積5m2
/g、α化率95%、不純物酸素量1.0重量%)と、
平均粒径が1μmの各種希土類酸化物と、平均粒径が1
〜2μmの各種クロム化合物、あるいはSiO2 粉末を
用いて、表1に示す組成に成るように調合し混合後、1
t/cm2 でプレス成形した。
Example 1 As a raw material powder, silicon nitride powder (BET specific surface area 5 m 2
/ G, pregelatinization rate 95%, impurity oxygen amount 1.0% by weight),
Various rare earth oxides having an average particle size of 1 μm and an average particle size of 1
Using various chromium compounds or SiO 2 powders having a composition shown in Table 1 and mixing them,
Press molding was performed at t / cm 2 .

【0020】得られた成形体をSiO2 粉末を炉内に設
置した50atmの窒素ガス雰囲気下で1600℃で2
時間保持後、さらに1900℃で1時間で焼成した。
The obtained compact was heated at 1600 ° C. under a nitrogen gas atmosphere of 50 atm in which SiO 2 powder was placed in a furnace.
After holding for a time, it was further fired at 1900 ° C. for 1 hour.

【0021】各焼結体に対し、JISR1601に従
い、室温、1400℃における4点曲げ抗折強度および
900℃で24時間の耐酸化性試験を行い、試験後の酸
化重量増を測定した。その測定結果は表1に示した。
Each sintered body was subjected to a four-point bending strength at room temperature and 1400 ° C. and an oxidation resistance test at 900 ° C. for 24 hours in accordance with JISR1601, and the increase in oxidized weight after the test was measured. The measurement results are shown in Table 1.

【0022】[0022]

【表1】 [Table 1]

【0023】表1によれば、クロム化合物が無添加の試
料No.13,14および、添加してもその量が少ない試
料No.16では、いずれも1400℃における強度は高
いものの、中温域における重量増が大きい。また、クロ
ム化合物の添加量が5モル%を越える試料No.15,1
7では、1400℃の強度が劣化した。さらに、希土類
元素の酸化物換算量、SiO2 /RE2 3 モル比が本
発明の範囲を逸脱する試料No.18〜23では、高温強
度が不充分であったり、緻密化されない等の問題があっ
た。
According to Table 1, Samples Nos. 13 and 14 to which no chromium compound was added and Sample No. 16 which had a small amount of chromium compound added had a high strength at 1400 ° C. Large weight increase. Sample Nos. 15 and 1 in which the amount of the chromium compound added exceeded 5 mol%.
In No. 7, the strength at 1400 ° C. was deteriorated. Furthermore, in Samples Nos. 18 to 23, in which the amount of rare earth elements in terms of oxide and the molar ratio of SiO 2 / RE 2 O 3 are out of the range of the present invention, problems such as insufficient high-temperature strength and densification are not obtained. was there.

【0024】これに対して、本発明の焼結体は、いずれ
も1400℃における強度が600MPa以上、900
℃における酸化重量増が0.3mg/cm2 以下の優れ
た特性を示した。
On the other hand, each of the sintered bodies of the present invention has a strength at 1400 ° C. of 600 MPa or more and 900 MPa or more.
It exhibited excellent properties with an increase in oxidation weight at 0.3 ° C. of 0.3 mg / cm 2 or less.

【0025】また、表中、充分に緻密化している焼結体
に対してX線回折測定を行ったところ、クロム化合物は
いずれも平均粒径が1〜5μmの珪化物として存在して
いることを確認した。また、その他の結晶相として、表
中、試料No.1〜17についてはアパタイトが析出して
おり、試料No.20についてはYAM相が析出してい
た。試料No.18については結晶相が検出されなかっ
た。
In the table, when the X-ray diffraction measurement was performed on the sufficiently compacted sintered body, it was found that all the chromium compounds were present as silicides having an average particle size of 1 to 5 μm. It was confirmed. In the table, apatite was precipitated for Samples Nos. 1 to 17 and YAM phase was precipitated for Sample No. 20 as other crystal phases. No crystal phase was detected in sample No. 18.

【0026】[0026]

【発明の効果】以上詳述した通り、本発明の窒化珪素質
焼結体によれば、Si3 4 −RE2 3 (希土類元素
酸化物)−SiO2 の単純3元系にクロム化合物を添加
することにより、1400℃の高温における高温強度を
維持しつつ、中温域の耐酸化性を向上させることができ
る。
As described in detail above, according to the silicon nitride sintered body of the present invention, a chromium compound is added to a simple ternary system of Si 3 N 4 —RE 2 O 3 (rare earth element oxide) —SiO 2 . By adding, it is possible to improve oxidation resistance in a medium temperature range while maintaining high-temperature strength at a high temperature of 1400 ° C.

【0027】よって、ターボロータやガスタービン用部
品等の熱機関用部品をはじめとして各種の高温構造材料
として応用をさらに拡げることができる。
Therefore, the application of the present invention to various high-temperature structural materials including heat engine parts such as turbo rotor and gas turbine parts can be further expanded.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】窒化珪素を70〜98モル%と、希土類元
素を酸化物換算で1.0〜10モル%と、過剰酸素をS
iO2 換算量で25モル%以下と、クロム(Cr)を酸
化物換算で0.01〜5モル%の割合で含有し、前記過
剰酸素のSiO2 換算量の希土類元素の酸化物換算量に
対するモル比が0.7より大きく、3以下であり、且つ
前記クロムが珪化物として分散していることを特徴とす
る窒化珪素質焼結体。
(1) 70 to 98 mol% of silicon nitride, 1.0 to 10 mol% of a rare earth element in terms of oxide, and excess oxygen
It contains chromium (Cr) in an amount of 0.01 to 5 mol% in terms of oxide in terms of iO 2 equivalent of 25 mol% or less, and the excess oxygen in terms of SiO 2 in relation to oxide equivalent of rare earth element in terms of oxide. A silicon nitride-based sintered body characterized in that the molar ratio is greater than 0.7 and is 3 or less, and the chromium is dispersed as silicide.
JP4010042A 1992-01-23 1992-01-23 Silicon nitride sintered body Expired - Lifetime JP2801455B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4010042A JP2801455B2 (en) 1992-01-23 1992-01-23 Silicon nitride sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4010042A JP2801455B2 (en) 1992-01-23 1992-01-23 Silicon nitride sintered body

Publications (2)

Publication Number Publication Date
JPH05194036A JPH05194036A (en) 1993-08-03
JP2801455B2 true JP2801455B2 (en) 1998-09-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP4010042A Expired - Lifetime JP2801455B2 (en) 1992-01-23 1992-01-23 Silicon nitride sintered body

Country Status (1)

Country Link
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Also Published As

Publication number Publication date
JPH05194036A (en) 1993-08-03

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