JP2792638B2 - Package for storing semiconductor elements - Google Patents

Package for storing semiconductor elements

Info

Publication number
JP2792638B2
JP2792638B2 JP4267296A JP26729692A JP2792638B2 JP 2792638 B2 JP2792638 B2 JP 2792638B2 JP 4267296 A JP4267296 A JP 4267296A JP 26729692 A JP26729692 A JP 26729692A JP 2792638 B2 JP2792638 B2 JP 2792638B2
Authority
JP
Japan
Prior art keywords
resin
semiconductor element
insulating
external lead
insulating base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4267296A
Other languages
Japanese (ja)
Other versions
JPH06120360A (en
Inventor
信康 合田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP4267296A priority Critical patent/JP2792638B2/en
Publication of JPH06120360A publication Critical patent/JPH06120360A/en
Application granted granted Critical
Publication of JP2792638B2 publication Critical patent/JP2792638B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、半導体素子を収容する
ための半導体素子収納用パッケージの改良に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a semiconductor device housing package for housing a semiconductor device.

【0002】[0002]

【従来の技術】従来、半導体素子を収容するための半導
体素子収納用パッケージは、図2 に示すようにアルミナ
セラミックス等の電気絶縁材料から成り、その上面略中
央部に半導体素子が搭載される搭載部11a を有する絶縁
基体11と、同じく電気絶縁材料から成り、前記絶縁基体
11の半導体素子搭載部11a を囲繞するように中央部に開
口Aを有する絶縁枠体12と、内部に収容する半導体素子
を外部電気回路に電気的に接続するための複数個の外部
リード端子13とから構成されており、絶縁基体11の上面
外周部に、例えばエポキシ樹脂等から成る樹脂ペースト
14a をスクリーン印刷法を用いて印刷塗布し、次に前記
絶縁基体11の上面に外部リード端子13を載置するととも
にこれを約150℃の温度に加熱し、樹脂ペースト14a
を熱硬化させることによって絶縁基体11の上面に外部リ
ード端子13を固定させ、しかる後、絶縁枠体12の下面に
同じくエポキシ樹脂等から成る樹脂ペースト14b を印刷
塗布するとともにこれを前記外部リード端子13が固定さ
れた絶縁基体11の上面に載置し、絶縁枠体12の下面に塗
布した樹脂ペースト14b を約150℃の温度で熱硬化さ
せることによって製作されている。
2. Description of the Related Art Conventionally, a semiconductor element housing package for housing a semiconductor element is made of an electrically insulating material such as alumina ceramics as shown in FIG. An insulating substrate 11 having a portion 11a;
An insulating frame body 12 having an opening A at the center so as to surround the semiconductor element mounting portion 11a, and a plurality of external lead terminals 13 for electrically connecting the semiconductor element housed therein to an external electric circuit. And a resin paste made of, for example, epoxy resin,
14a is applied by printing using a screen printing method, and then external lead terminals 13 are placed on the upper surface of the insulating base 11 and heated to a temperature of about 150 ° C. to form a resin paste 14a.
The external lead terminals 13 are fixed to the upper surface of the insulating base 11 by heat curing, and thereafter, a resin paste 14b made of epoxy resin or the like is also printed and applied to the lower surface of the insulating frame 12 and the external lead terminals 13 13 is mounted on the upper surface of the insulating base 11 to which is fixed, and the resin paste 14b applied to the lower surface of the insulating frame 12 is thermally cured at a temperature of about 150 ° C.

【0003】かかる従来の半導体素子収納用パッケージ
は絶縁枠体12の開口A内に位置する絶縁基体11の半導体
素子搭載部11a に半導体素子15を固定するとともに該半
導体素子15の各電極をボンディングワイヤ16を介して外
部リード端子13に接続させ、しかる後、絶縁枠体12の開
口A内にエポキシ樹脂等の充填材を充填し、半導体素子
15を気密に封止することによって最終製品としての半導
体装置となる。
In such a conventional package for accommodating a semiconductor element, a semiconductor element 15 is fixed to a semiconductor element mounting portion 11a of an insulating base 11 located in an opening A of an insulating frame 12, and each electrode of the semiconductor element 15 is connected to a bonding wire. 16 and then connected to the external lead terminal 13, and thereafter, a filler such as epoxy resin is filled in the opening A of the insulating frame 12, and the semiconductor element
A semiconductor device as a final product is obtained by hermetically sealing 15.

【0004】また前記従来の半導体素子収納用パッケー
ジは外部リード端子13の一端が外部電気回路に良好に電
気的接続されるよう屈曲されており、該外部リード端子
13の一端を外部電気回路に電気的に接続することによっ
て内部に収容される半導体素子15が外部電気回路と接続
されることとなる。
In the conventional package for accommodating a semiconductor element, one end of the external lead terminal 13 is bent so as to be well connected to an external electric circuit.
By electrically connecting one end of 13 to an external electric circuit, the semiconductor element 15 housed inside is connected to the external electric circuit.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、この従
来の半導体素子収納用パッケージは一般に絶縁基体11と
絶縁枠体12の外形寸法が同一となっており、絶縁枠体12
の下面に樹脂ペースト14b を印刷塗布するとともにこれ
を外部リード端子13が固定された絶縁基体11の上面に載
置して絶縁基体1 と絶縁枠体12とを接着固定した場合、
絶縁枠体12の下面に塗布した樹脂ペースト14b が絶縁枠
体12の重みによる押圧力によって絶縁基体11と絶縁枠体
12の外側に流出し、半導体素子収納用パッケージに外観
不良を発生してしまう。
However, in this conventional package for housing a semiconductor element, the outer dimensions of the insulating base 11 and the insulating frame 12 are generally the same.
When the resin paste 14b is printed and applied to the lower surface of the substrate and the resin paste 14b is placed on the upper surface of the insulating substrate 11 to which the external lead terminals 13 are fixed, and the insulating substrate 1 and the insulating frame 12 are bonded and fixed,
The resin paste 14b applied to the lower surface of the insulating frame 12 is pressed by the weight of the insulating frame 12 with the insulating base 11 and the insulating frame.
It leaks to the outside of 12 and causes a defective appearance in the semiconductor element storage package.

【0006】また絶縁基体11の外側に樹脂が流出すると
外部リード端子13を外部電気回路に良好に接続し得るよ
うに屈曲させた際、外部リード端子13を屈曲させる力が
絶縁基体11等の外側に流出した樹脂を引っ張って外部リ
ード端子13より剥離させ、外部リード端子13と樹脂との
間に隙間を形成してしまう。そのためこの半導体素子収
納用パッケージにおいては外部リード端子13と該外部リ
ード端子13を絶縁基体11及び絶縁枠体12に固定する樹脂
との間に形成される隙間を通して半導体素子の電極や半
導体素子に接続されるボンディングワイヤに大気中に含
まれる水分等が接触し、半導体素子の電極や半導体素子
に接続されるボンディングワイヤに腐食を招来して半導
体素子を長期間にわたり正常、且つ安定に作動させるこ
とができないという欠点も有していた。
Further, when the resin flows out of the insulating base 11 and the external lead terminals 13 are bent so that the external lead terminals 13 can be connected well to an external electric circuit, a force for bending the external lead terminals 13 is applied to the outside of the insulating base 11 or the like. The resin that has flowed out of the terminal is pulled and separated from the external lead terminal 13, and a gap is formed between the external lead terminal 13 and the resin. Therefore, in this package for housing semiconductor elements, the external lead terminals 13 are connected to the electrodes and the semiconductor elements of the semiconductor element through a gap formed between the resin fixing the external lead terminals 13 to the insulating base 11 and the insulating frame 12. The moisture and the like contained in the air come into contact with the bonding wire to be formed, causing corrosion of the electrode of the semiconductor element and the bonding wire connected to the semiconductor element, thereby allowing the semiconductor element to operate normally and stably for a long period of time. It also had the disadvantage that it could not be done.

【0007】[0007]

【目的】本発明は上記欠点に鑑み案出されたもので、そ
の目的は半導体素子の各電極や該電極に接続されるボン
ディングワイヤに腐食を発生するのを皆無とし、半導体
素子を長期間にわたり正常、且つ安定に作動させること
ができる半導体素子収納用パッケージを提供することに
ある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned drawbacks, and has as its object to eliminate corrosion of each electrode of a semiconductor element and a bonding wire connected to the electrode, and to provide a semiconductor element for a long period of time. An object of the present invention is to provide a semiconductor element housing package that can be operated normally and stably.

【0008】[0008]

【課題を解決するための手段】本発明は半導体素子が搭
載される搭載部を有する絶縁基体と、前記搭載部を囲繞
し、内部に半導体素子を収容する空所を形成する絶縁枠
体とを、その間に外部リード端子を挟んで樹脂製接着剤
を介し接着して成る半導体素子収納用パッケージであっ
て、前記絶縁枠体の外周縁が絶縁基体の外周縁より少な
くとも0.5mm 以上内側に位置することを特徴とするもの
である。
According to the present invention, there is provided an insulating base having a mounting portion on which a semiconductor element is mounted, and an insulating frame surrounding the mounting portion and forming a space for accommodating the semiconductor element therein. A semiconductor element housing package formed by bonding an external lead terminal therebetween with a resin adhesive therebetween, wherein an outer peripheral edge of the insulating frame is located at least 0.5 mm or more inward from an outer peripheral edge of the insulating base. It is characterized by the following.

【0009】[0009]

【作用】絶縁枠体の外周縁を絶縁基体の外周縁より少な
くとも0.5mm 以上内側に位置させたので絶縁基体上に絶
縁枠体を該絶縁枠体に印刷塗布させた樹脂ペーストを介
して接着固定させる際、樹脂ペーストが絶縁基体の外側
に流出することは一切なく、その結果、外部リード端子
を絶縁基体の外側で屈曲させたとしても樹脂は引っ張ら
れることなく外部リード端子に強固に接着し、これによ
って半導体素子の電極や該電極に接続されるボンディン
グワイヤに大気中に含まれる水分等が接触するのを皆無
として半導体素子を長期間にわたり正常、且つ安定に作
動させることが可能となる。
Since the outer peripheral edge of the insulating frame is located at least 0.5 mm or more inside the outer peripheral edge of the insulating base, the insulating frame is bonded and fixed on the insulating base via a resin paste which is printed and applied to the insulating frame. In doing so, the resin paste does not flow out of the insulating base at all, as a result, even if the external lead terminal is bent outside the insulating base, the resin is firmly adhered to the external lead terminal without being pulled, This makes it possible to operate the semiconductor element normally and stably for a long period of time without any contact of the moisture and the like contained in the air with the electrodes of the semiconductor element and the bonding wires connected to the electrodes.

【0010】[0010]

【実施例】次に本発明を添付図面に基づき詳細に説明す
る。図1は、本発明の半導体素子収納用パッケージの一
実施例を示し、1は電気絶縁材料から成る絶縁基体、2
は同じく電気絶縁材料から成る絶縁枠体である。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. FIG. 1 shows an embodiment of a package for accommodating a semiconductor element according to the present invention, in which 1 is an insulating base made of an electrically insulating material;
Is an insulating frame also made of an electrically insulating material.

【0011】前記絶縁基体1 はその上面略中央部に半導
体素子3 を搭載するための搭載部1aを有しており、該搭
載部1aには半導体素子3 が樹脂等から成る接着剤を介し
て接着固定される。
The insulating substrate 1 has a mounting portion 1a for mounting the semiconductor element 3 at a substantially central portion of the upper surface thereof, and the semiconductor element 3 is mounted on the mounting portion 1a via an adhesive made of resin or the like. Adhesively fixed.

【0012】前記絶縁基体1は、窒化アルミニウム質焼
結体、酸化アルミニウム質焼結体、ムライト質焼結体、
炭化珪素質焼結体、ガラスセラミックス焼結体等の電気
絶縁材料から成り、例えば窒化アルミニウム質セラミッ
クスから成る場合、窒化アルミニウム粉末、イットリア
粉末等の原料粉末を絶縁基体1に対応した形状を有する
プレス型内に充填するとともに一定圧力を印加して成形
し、しかる後、前記成形体を約1800℃の温度で焼成する
ことによって製作される。
The insulating substrate 1 is made of an aluminum nitride sintered body, an aluminum oxide sintered body, a mullite sintered body,
When it is made of an electrically insulating material such as a silicon carbide sintered body or a glass ceramic sintered body, and is made of, for example, aluminum nitride ceramic, a raw material powder such as aluminum nitride powder, yttria powder or the like is pressed into a shape corresponding to the insulating base 1. It is manufactured by filling in a mold and molding by applying a constant pressure, and then firing the molded body at a temperature of about 1800 ° C.

【0013】また、前記絶縁基体1の上面には外部リー
ド端子4 が樹脂製接着剤5aを介して接着固定されてお
り、該外部リード端子4 の一端には半導体素子3 の各電
極がボンディングワイヤ6 を介して電気的に接続され、
また他端側は外部電気回路に電気的に接続される。
An external lead terminal 4 is adhered and fixed to the upper surface of the insulating base 1 via a resin adhesive 5a, and one end of the external lead terminal 4 is connected to each electrode of the semiconductor element 3 by a bonding wire. 6 electrically connected via
The other end is electrically connected to an external electric circuit.

【0014】前記外部リード端子4 はコバール金属( 鉄
ーニッケルーコバルト合金) 、42アロイ( 鉄ーニッケル
合金) 等の鉄合金や銅、ニッケル、硅素、亜鉛等から成
る銅合金から成り、例えばコバール金属のインゴット(
塊) を圧延加工法や打ち抜き加工法等、従来周知の金属
加工法を採用することによって所定の板状に形成され
る。
The external lead terminal 4 is made of an iron alloy such as Kovar metal (iron-nickel-cobalt alloy), 42 alloy (iron-nickel alloy), or a copper alloy made of copper, nickel, silicon, zinc or the like. Ingot (
The lump is formed into a predetermined plate shape by employing a conventionally known metal working method such as a rolling method or a punching method.

【0015】尚、前記外部リード端子4 はその表面に
銀、アルミニウム等がメッキや蒸着、クラッド法により
0.5 乃至20.0μm の厚みに被着されており、外部リード
端子4に対するボンディングワイヤ5 の接合が強固なも
のとなるようになっている。
The external lead terminal 4 has a surface coated with silver, aluminum, or the like by plating, vapor deposition, or cladding.
It is attached to a thickness of 0.5 to 20.0 μm so that the bonding of the bonding wire 5 to the external lead terminal 4 is strong.

【0016】また前記外部リード端子4 を絶縁基体1 の
上面に接着固定する樹脂製接着剤5aはビスフェノール
A型エポキシ樹脂、ノボラック型エポキシ樹脂、クリシ
ジルエステル型エポキシ樹脂、クリシジルアミン型エポ
キシ樹脂、鎖状脂肪族エポキシ樹脂、脂環式エポキシ樹
脂、複素環型エポキシ樹脂等のエポキシ樹脂やポリイミ
ド、フェノール樹脂、シリコーン、ウレタン等の樹脂か
ら成り、先ず、前記絶縁基体1の上面外周部に、例えば
ビスフェノールA型エポキシ樹脂に硬化剤としてのイミ
ダゾールを添加混合して得た樹脂ペーストをスクリーン
印刷法を用いて印刷塗布し、次に前記絶縁基体1の上面
に外部リード端子4 を載置するとともにこれを約15
0℃の温度に加熱し、樹脂ペーストを熱硬化させること
によって絶縁基体1の上面に外部リード端子4 を接着固
定する。
The resin adhesive 5a for bonding and fixing the external lead terminals 4 to the upper surface of the insulating base 1 is made of bisphenol A type epoxy resin, novolak type epoxy resin, cricidyl ester type epoxy resin, cricidylamine type epoxy resin, A chain aliphatic epoxy resin, an alicyclic epoxy resin, an epoxy resin such as a heterocyclic epoxy resin, or a resin such as a polyimide, a phenol resin, a silicone, a urethane, and the like. A resin paste obtained by adding and mixing imidazole as a curing agent to a bisphenol A type epoxy resin is applied by printing using a screen printing method, and then external lead terminals 4 are placed on the upper surface of the insulating base 1 and About 15
The external lead terminals 4 are bonded and fixed to the upper surface of the insulating base 1 by heating to a temperature of 0 ° C. and thermally curing the resin paste.

【0017】前記上面に外部リード端子4 が接着固定さ
れた絶縁基体1 は更にその上面に絶縁枠体2 が樹脂製接
着剤5bを介して接着固定されている。
The insulating base 1 with the external lead terminals 4 bonded and fixed to the upper surface is further provided with an insulating frame 2 bonded and fixed to the upper surface thereof via a resin adhesive 5b.

【0018】前記絶縁枠体2 はその中央部に開口Bが形
成されており、絶縁基体1の半導体素子が固定される搭
載部1aを囲繞するような枠状となっている。この絶縁枠
体2はその中央部の開口Bと絶縁基体1上面とで半導体
素子3 を内部に収容するための空所を形成する。
The insulating frame 2 has an opening B at the center thereof, and has a frame shape surrounding the mounting portion 1a to which the semiconductor element of the insulating base 1 is fixed. The insulating frame 2 forms a space for accommodating the semiconductor element 3 therein by the opening B at the center and the upper surface of the insulating base 1.

【0019】前記絶縁枠体2 は窒化アルミニウム質焼結
体、酸化アルミニウム質焼結体、ムライト質焼結体、炭
化珪素質焼結体、ガラスセラミックス焼結体等の電気絶
縁材料から成り、前述の絶縁基体1 と同様の方法、具体
的には窒化アルミニウム粉末、イットリア粉末等の原料
粉末を絶縁枠体2 に対応した形状を有するプレス型内に
充填するとともに一定圧力を印加して成形し、しかる
後、前記成形体を約1800℃の温度で焼成することによっ
て製作される。
The insulating frame 2 is made of an electrically insulating material such as an aluminum nitride sintered body, aluminum oxide sintered body, mullite sintered body, silicon carbide sintered body, glass ceramic sintered body, etc. A method similar to that of the insulating substrate 1 of the above, specifically, a raw material powder such as aluminum nitride powder and yttria powder is filled into a press mold having a shape corresponding to the insulating frame body 2 and molded by applying a constant pressure, Thereafter, the compact is manufactured by firing at a temperature of about 1800 ° C.

【0020】また前記絶縁枠体2 はその下面外周部に、
例えばビスフェノールA型エポキシ樹脂に硬化剤として
のイミダゾールを添加混合して得た樹脂ペーストをスク
リーン印刷法を用いて印刷塗布し、次にこれを前記上面
に外部リード端子4 を固定した絶縁基体1 上に載置する
とともに樹脂ペーストを約150℃の温度に加熱し、熱
硬化させることによって絶縁基体1の上面に接着固定さ
れる。
The insulating frame 2 has an outer peripheral portion on the lower surface thereof.
For example, a resin paste obtained by adding and mixing imidazole as a curing agent to a bisphenol A type epoxy resin is applied by printing using a screen printing method, and then this is applied on the insulating substrate 1 on which the external lead terminals 4 are fixed on the upper surface. And the resin paste is heated to a temperature of about 150 ° C. and thermally cured to be adhered and fixed to the upper surface of the insulating base 1.

【0021】更に前記絶縁枠体2 はその外周縁が絶縁基
体1 の外周縁に対し、幅Xだけ内側に位置するように絶
縁基体1より若干小さな外形寸法となっている。
Further, the insulating frame 2 has an outer dimension slightly smaller than the insulating base 1 so that its outer peripheral edge is located inside the outer peripheral edge of the insulating base 1 by a width X.

【0022】前記絶縁枠体2 はその外周縁が絶縁基体1
の外周縁より内側に位置するようになっていることから
絶縁基体1 上に絶縁枠体2 を接着固定する際、絶縁枠体
2 の下面に印刷塗布させた樹脂製接着剤5bとなる樹脂ぺ
ーストが絶縁枠体2 の重みによる押圧力によって絶縁基
体1 の外側に多量に流出することはなく、半導体素子収
納用パッケージに外観不良を発生することはない。
The outer peripheral edge of the insulating frame 2 is an insulating base 1
When the insulating frame 2 is bonded and fixed on the insulating base 1, the insulating frame
A large amount of the resin paste, which becomes the resin adhesive 5b printed and applied to the lower surface of 2, does not flow out of the insulating base 1 due to the pressing force of the weight of the insulating frame 2, so that the external appearance of the semiconductor device package No failure occurs.

【0023】また同時に絶縁基体1 の外側に樹脂製接着
剤5bが多量に流出するのが皆無であることから外部リー
ド端子4 を外部電気回路に良好に接続し得るように屈曲
させたとしても、樹脂製接着剤5bが外部リード端子4 を
屈曲させる力で引っ張られて外部リード端子より剥離す
ることはなく、その結果、外部リード端子4 と樹脂製接
着剤5bとの接着を強固とし、外部リード端子4 と樹脂製
接着剤5bとの間に隙間が形成されるのを有効に防止する
ことができる。
At the same time, since there is no possibility that a large amount of the resin adhesive 5b flows out of the insulating base 1, even if the external lead terminals 4 are bent so that they can be connected well to an external electric circuit, The resin adhesive 5b is not pulled off by the force to bend the external lead terminal 4 and is separated from the external lead terminal. As a result, the adhesion between the external lead terminal 4 and the resin adhesive 5b is strengthened, and the external lead It is possible to effectively prevent a gap from being formed between the terminal 4 and the resin adhesive 5b.

【0024】尚、前記絶縁枠体2 はその外周縁を絶縁基
体1 の外周縁に対し、幅Xだけ内側に位置するようにな
しているが、幅Xの値がX<0.5mm となると絶縁基体1
に絶縁枠体2 を接着固定する際、絶縁枠体2 の下面に印
刷塗布した樹脂製接着剤5bとなる樹脂ぺーストが絶縁枠
体2 の重みによる押圧力によって絶縁基体1 の外側に多
量に流出し、外観不良や半導体素子の電極及び該電極に
接続されるボンディングワイヤに腐食を招来してしま
う。従って、前記幅Xの値はX≧0.5mm の範囲に特定さ
れる。
The insulating frame 2 is arranged such that its outer peripheral edge is located inside the outer peripheral edge of the insulating base 1 by a width X, but when the value of the width X becomes X <0.5 mm, the insulating frame 2 becomes insulated. Substrate 1
When the insulating frame 2 is bonded and fixed on the insulating frame 2, a large amount of resin paste serving as the resin adhesive 5b printed on the lower surface of the insulating frame 2 is applied to the outside of the insulating base 1 by the pressing force of the weight of the insulating frame 2. It leaks out and causes corrosion of the poor appearance and the electrodes of the semiconductor element and the bonding wires connected to the electrodes. Therefore, the value of the width X is specified in the range of X ≧ 0.5 mm.

【0025】かくして、本発明の半導体素子収納用パッ
ケージによれば、絶縁基体1 の半導体素子搭載部1aに半
導体素子3 を接着剤を介して固定するとともに該半導体
素子3 の各電極をボンディングワイヤ6 を介して外部リ
ード端子4 に接続し、最後に絶縁枠体2 の開口B内に樹
脂充填剤7 を充填させ、半導体素子3 を気密に封止する
ことによって最終製品としての半導体装置となる。
Thus, according to the package for accommodating a semiconductor element of the present invention, the semiconductor element 3 is fixed to the semiconductor element mounting portion 1a of the insulating base 1 via an adhesive, and each electrode of the semiconductor element 3 is connected to the bonding wire 6a. Then, a resin filler 7 is filled in the opening B of the insulating frame 2 and the semiconductor element 3 is hermetically sealed, thereby completing the semiconductor device as a final product.

【0026】前記半導体素子3 を気密に封止するための
樹脂充填剤7 はエポキシ樹脂、ポリイミド、フェノール
樹脂、シリコーン等の樹脂が使用され、絶縁枠体2 の開
口B内にエポキシ樹脂等の樹脂ペーストを充填させると
ともにこれを約150℃の温度で熱硬化させることによ
って絶縁枠体2の開口B内に半導体素子3 を気密封止す
るようにして配される。
As the resin filler 7 for hermetically sealing the semiconductor element 3, a resin such as an epoxy resin, a polyimide, a phenol resin, or a silicone is used, and a resin such as an epoxy resin is provided in the opening B of the insulating frame 2. The semiconductor element 3 is hermetically sealed in the opening B of the insulating frame 2 by filling the paste and thermally curing the paste at a temperature of about 150 ° C.

【0027】また前記樹脂充填剤7 はその内部に粒径
0.1〜50.0μmの酸化硅素、酸化アルミニウム、
窒化アルミニウム、炭酸カルシウム、酸化マグネシウム
等の絶縁物粉末から成るフィラーを樹脂100重量部に
対して50〜400重量部分散させておくと樹脂充填剤
7 の透湿性を向上させ、内部に収容する半導体素子を外
部環境からより強固に守ることができる。従って前記樹
脂充填剤7 には粒径0.1〜50.0μmの酸化硅素、
酸化アルミニウム、窒化アルミニウム、炭酸カルシウ
ム、酸化マグネシウム等酸化硅素等の絶縁物粉末から成
るフィラーを樹脂100重量に対して50〜400重量
部分散させておくことが好ましい。
The resin filler 7 contains silicon oxide, aluminum oxide having a particle size of 0.1 to 50.0 μm,
A resin filler is prepared by dispersing 50 to 400 parts by weight of a filler made of an insulating powder such as aluminum nitride, calcium carbonate, and magnesium oxide with respect to 100 parts by weight of the resin.
7 can improve the moisture permeability, and can more firmly protect the semiconductor element housed therein from the external environment. Accordingly, the resin filler 7 contains silicon oxide having a particle size of 0.1 to 50.0 μm,
It is preferable that 50 to 400 parts by weight of a filler made of an insulating powder such as silicon oxide such as aluminum oxide, aluminum nitride, calcium carbonate, and magnesium oxide is dispersed with respect to 100 parts by weight of the resin.

【0028】更に必要であれば、樹脂充填剤7 にカーボ
ンブラック等の着色剤を含有させ、樹脂充填剤7 を着色
しておいてもよい。
If necessary, a colorant such as carbon black may be added to the resin filler 7 so that the resin filler 7 is colored.

【0029】尚、本発明は上述の実施例に限定されるも
のではなく、本発明の要旨を逸脱しない範囲であれば種
々の変更は可能であり、例えば樹脂製接着剤5a、5bにカ
ーボンブラック等の着色剤を樹脂100重量部に対して
0.5〜3.0重量部含有させて着色しておけば樹脂製
接着剤5a、5bと外部リード端子4 とのコントラストが大
きくなって外部リード端子4 と半導体素子3 の電極とを
自動ボンダーを使用して正確、且つ高速にワイヤボンド
接続することが可能となる。
It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention. For example, the resin adhesives 5a and 5b may be made of carbon black. If 0.5 to 3.0 parts by weight of a coloring agent is added to 100 parts by weight of the resin and colored, the contrast between the resin adhesives 5a and 5b and the external lead terminals 4 increases, and the external leads The terminal 4 and the electrode of the semiconductor element 3 can be accurately and rapidly wire-bonded using an automatic bonder.

【0030】また前記樹脂製接着剤5a、5bにフィラーと
して粒径0.1〜50.0μmの酸化硅素、酸化アルミ
ニウム、窒化アルミニウム、炭酸カルシウム、酸化マグ
ネシウム等の絶縁物粉末を樹脂100容量部に対して5
0〜400容量部分散させておけば樹脂製接着剤5a、5b
の透湿性を大幅に向上させることができる。
Further, an insulating powder such as silicon oxide, aluminum oxide, aluminum nitride, calcium carbonate, magnesium oxide or the like having a particle size of 0.1 to 50.0 μm as a filler is added to the resin adhesives 5a and 5b in a resin volume of 100 parts by volume. 5 for
Resin adhesives 5a, 5b if 0 to 400 parts by volume are dispersed
Can significantly improve the moisture permeability.

【0031】[0031]

【発明の効果】本発明の半導体素子収納用パッケージに
よれば、絶縁枠体の外周縁を絶縁基体の外周縁より少な
くとも0.5mm 以上内側に位置させたことから絶縁基体上
に絶縁枠体を接着固定する際、絶縁枠体の下面に印刷塗
布させた樹脂製接着剤である樹脂ぺーストが絶縁枠体の
重みによる押圧力によって絶縁基体の外側に多量に流出
することはなく、半導体素子収納用パッケージに外観不
良が発生するのを有効に防止することができる。
According to the semiconductor device housing package of the present invention, since the outer peripheral edge of the insulating frame is located at least 0.5 mm or more inside the outer peripheral edge of the insulating base, the insulating frame is bonded to the insulating base. At the time of fixing, a large amount of resin paste, which is a resin adhesive printed and applied to the lower surface of the insulating frame, does not flow out of the insulating base due to the pressing force due to the weight of the insulating frame, and is used for housing semiconductor elements. It is possible to effectively prevent the appearance defect from occurring in the package.

【0032】また同時に絶縁基体の外側に樹脂製接着剤
が多量に流出するのが皆無であることから外部リード端
子を外部電気回路に良好に接続し得るように屈曲させた
としても、樹脂製接着剤が外部リード端子を屈曲させる
力で引っ張られて外部リード端子より剥離することもな
く、その結果、外部リード端子と樹脂製接着剤との接着
を強固とし、外部リード端子と樹脂製接着剤との間に隙
間が形成されるのを有効に防止することができる。
At the same time, since a large amount of resin adhesive does not flow out of the insulating base, even if the external lead terminals are bent so that they can be connected well to an external electric circuit, the resin adhesive can be used. The agent is not pulled by the force to bend the external lead terminal and peels off from the external lead terminal. As a result, the adhesion between the external lead terminal and the resin adhesive is strengthened, and the external lead terminal and the resin adhesive are A gap can be effectively prevented from being formed between them.

【0033】従って、本発明の半導体素子収納用パッケ
ージによれば半導体素子の電極及び該電極に接続される
ボンディングワイヤに大気中に含まれる水分等が接触す
ることはなく、半導体素子の電極等に腐食を招来するの
が皆無となって半導体素子を長期間にわたり正常、且つ
安定に作動させることが可能となる。
Therefore, according to the semiconductor device housing package of the present invention, moisture and the like contained in the air do not come into contact with the electrodes of the semiconductor device and the bonding wires connected to the electrodes. It is possible to operate the semiconductor element normally and stably for a long time without causing any corrosion.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の半導体素子収納用パッケージの一実施
例を示す断面図である。
FIG. 1 is a cross-sectional view showing one embodiment of a semiconductor element storage package according to the present invention.

【図2】従来の半導体素子収納用パッケージの断面図で
ある。
FIG. 2 is a cross-sectional view of a conventional semiconductor element storage package.

【符号の説明】[Explanation of symbols]

1・・・・・・・絶縁基体 1a・・・・・・半導体素子搭載部 2・・・・・・・絶縁枠体 3・・・・・・・半導体素子 4・・・・・・・外部リード端子 5a 、5b・・・樹脂製接着剤 DESCRIPTION OF SYMBOLS 1 ... Insulating base 1a ... Semiconductor element mounting part 2 ... Insulating frame 3 ... Semiconductor element 4 ... External lead terminals 5a, 5b: resin adhesive

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) H01L 23/00 - 23/10 H01L 23/28 - 23/30 H01L 21/56──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 6 , DB name) H01L 23/00-23/10 H01L 23/28-23/30 H01L 21/56

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】半導体素子が搭載される搭載部を有する絶
縁基体と、前記搭載部を囲繞し、内部に半導体素子を収
容する空所を形成する絶縁枠体とを、その間に外部リー
ド端子を挟んで樹脂製接着剤を介して接着して成る半導
体素子収納用パッケージであって、前記絶縁枠体の外周
縁が絶縁基体の外周縁より少なくとも0.5mm以上内
側に位置し、かつ前記樹脂製接着剤には、粒径が0.1
乃至50μmの絶縁物フィラーを樹脂100容量部に対
し50乃至400容量部含有させたことを特徴とする半
導体素子収納用パッケージ。
An insulating base having a mounting portion on which a semiconductor element is mounted, an insulating frame surrounding the mounting portion and forming a space for accommodating the semiconductor element therein, and external lead terminals interposed therebetween. A semiconductor element housing package which is sandwiched and adhered via a resin adhesive, wherein an outer peripheral edge of the insulating frame is located at least 0.5 mm or more inside an outer peripheral edge of an insulating base, and the resin The adhesive has a particle size of 0.1
50 to 50 μm of insulating filler per 100 parts by volume of resin
And 50 to 400 parts by volume .
JP4267296A 1992-10-06 1992-10-06 Package for storing semiconductor elements Expired - Fee Related JP2792638B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4267296A JP2792638B2 (en) 1992-10-06 1992-10-06 Package for storing semiconductor elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4267296A JP2792638B2 (en) 1992-10-06 1992-10-06 Package for storing semiconductor elements

Publications (2)

Publication Number Publication Date
JPH06120360A JPH06120360A (en) 1994-04-28
JP2792638B2 true JP2792638B2 (en) 1998-09-03

Family

ID=17442864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4267296A Expired - Fee Related JP2792638B2 (en) 1992-10-06 1992-10-06 Package for storing semiconductor elements

Country Status (1)

Country Link
JP (1) JP2792638B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102217059A (en) * 2011-06-03 2011-10-12 华为技术有限公司 Insulating ring, insulating assembly and package for packaging
CN109037161A (en) * 2018-06-15 2018-12-18 华为技术有限公司 A kind of flange and semiconductor power device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59193033A (en) * 1983-04-15 1984-11-01 Matsushita Electric Ind Co Ltd Sealing of semiconductor element
JPS6132528A (en) * 1984-07-25 1986-02-15 Hitachi Micro Comput Eng Ltd Manufacture of semiconductor device
JPS63126238A (en) * 1986-11-15 1988-05-30 Matsushita Electric Works Ltd Manufacture of semiconductor package
JPH02102563A (en) * 1988-10-12 1990-04-16 Shindengen Electric Mfg Co Ltd Semiconductor device and manufacture thereof
JPH02194633A (en) * 1989-01-24 1990-08-01 Matsushita Electric Ind Co Ltd Method and device for manufacturing semiconductor device
JPH0354848A (en) * 1989-07-21 1991-03-08 Matsushita Electric Works Ltd Chip carrier

Also Published As

Publication number Publication date
JPH06120360A (en) 1994-04-28

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