JP2726485B2 - キャパシティブセンサ - Google Patents

キャパシティブセンサ

Info

Publication number
JP2726485B2
JP2726485B2 JP1070780A JP7078089A JP2726485B2 JP 2726485 B2 JP2726485 B2 JP 2726485B2 JP 1070780 A JP1070780 A JP 1070780A JP 7078089 A JP7078089 A JP 7078089A JP 2726485 B2 JP2726485 B2 JP 2726485B2
Authority
JP
Japan
Prior art keywords
sensor
thermocouple
electrode
sheath
conductive surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1070780A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01277604A (ja
Inventor
ジル・ベイエール
カルロス・ロドリゲス
サミュン・アルビジャ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of JPH01277604A publication Critical patent/JPH01277604A/ja
Application granted granted Critical
Publication of JP2726485B2 publication Critical patent/JP2726485B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/04—Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies
    • G01K13/08—Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies in rotary movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Testing Of Engines (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
JP1070780A 1988-03-25 1989-03-24 キャパシティブセンサ Expired - Lifetime JP2726485B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8803939 1988-03-25
FR8803939A FR2629196B1 (fr) 1988-03-25 1988-03-25 Capteur capacitif

Publications (2)

Publication Number Publication Date
JPH01277604A JPH01277604A (ja) 1989-11-08
JP2726485B2 true JP2726485B2 (ja) 1998-03-11

Family

ID=9364643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1070780A Expired - Lifetime JP2726485B2 (ja) 1988-03-25 1989-03-24 キャパシティブセンサ

Country Status (6)

Country Link
US (1) US4950084A (de)
EP (1) EP0334441B1 (de)
JP (1) JP2726485B2 (de)
CA (1) CA1307322C (de)
DE (1) DE68904334T2 (de)
FR (1) FR2629196B1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5359491A (en) * 1991-11-27 1994-10-25 U.S. Philips Corporation Capacitive sensor comprising a conductive front surface for forming a capacitor plate, and a coaxial cable shielded by a mineral insulator
US5363051A (en) * 1992-11-23 1994-11-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Steering capaciflector sensor
DE4442238C1 (de) * 1994-11-28 1996-04-04 Precitec Gmbh Verfahren zur thermischen Bearbeitung eines Werkstücks, insbesondere mittels Laserstrahlung
GB9608111D0 (en) * 1996-04-19 1996-06-26 Bicc Plc Gap Measurement Device
FR2750489B1 (fr) * 1996-06-26 1998-08-28 Philips Electronics Nv Dispositif du type capteur capacitif composite
GB2406381B (en) * 2003-09-27 2005-10-12 Future Technology Sensors
GB2416848A (en) * 2004-07-30 2006-02-08 Rolls Royce Plc Capacitive measurement of rotor blade speed and vibration
JP4736693B2 (ja) * 2005-10-12 2011-07-27 株式会社Ｉｈｉ 膜厚計測装置及び方法
US7810993B2 (en) * 2007-02-06 2010-10-12 Chevron U.S.A. Inc. Temperature sensor having a rotational response to the environment
GB0713108D0 (en) * 2007-07-06 2007-08-15 Rolls Royce Plc Displacement measurement arrangement
DE102007051027A1 (de) * 2007-10-25 2009-04-30 Mtu Aero Engines Gmbh Strömungsmaschine, Spaltmesssystem und Verfahren zum Ermitteln eines Rotorspaltes
DE102008006833A1 (de) * 2008-01-30 2009-08-06 Mtu Aero Engines Gmbh Sonde für eine kapazitive Sensoreinrichtung und Spaltmesssystem
US8093913B2 (en) 2008-04-24 2012-01-10 Ihi Corporation Film thickness measurement device and method
FR2948997B1 (fr) 2009-08-07 2012-04-20 Nanotec Solution Capteur de pression capacitif integrant une mesure de temperature compatible avec les milieux chauds.
US9417048B2 (en) * 2012-10-31 2016-08-16 General Electric Company Capacitive sensor device and method of manufacture
US10260980B2 (en) * 2013-09-27 2019-04-16 Rosemount Inc. Pressure sensor with mineral insulated cable
GB2522210B (en) 2014-01-16 2018-10-10 Weston Aerospace Ltd Engine probe
US10465553B2 (en) 2017-06-06 2019-11-05 General Electric Company Sheathing for fluid probe
GB2579671B (en) * 2018-12-12 2022-12-14 Weston Aerospace Ltd A probe for monitoring a moving engine element

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1040804B (de) * 1955-02-25 1958-10-09 Siemens Ag Luftspaltmesseinrichtung
DE1004387B (de) * 1955-08-29 1957-03-14 Siemens Ag Einrichtung zur induktiven Messung des Radial- oder Axialspieles rotierender Maschinen, insbesondere von Dampfturbinen
US2842738A (en) * 1956-04-05 1958-07-08 Ford Motor Co Capacitance probe
US3391576A (en) * 1965-03-13 1968-07-09 Hitachi Ltd Thermometric device for rotating structures
IT992864B (it) * 1972-08-22 1975-09-30 Maschf Augsburg Nuernberg Ag Apparato per determinare senza contatto esattamente e continua mente la temperatura di superfici
US4063167A (en) * 1976-06-07 1977-12-13 Avco Corporation Blade tip clearance measuring apparatus
US4130019A (en) * 1977-06-09 1978-12-19 Nitschke John Stephen Self-compensating thermocouple reading circuit
GB2071852A (en) * 1980-03-12 1981-09-23 Rolls Royce Capacitance frequency modulation probe for blade tip clearance measurement
DE3433351C1 (de) * 1984-09-11 1986-01-02 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Kapazitives Messsystem zur Messung des Abstandes zwischen zwei relativ zueinander beweglichen Teilen
DE3617373A1 (de) * 1986-05-23 1987-11-26 Mtu Muenchen Gmbh Kapazitives messsystem

Also Published As

Publication number Publication date
FR2629196A1 (fr) 1989-09-29
DE68904334T2 (de) 1993-07-29
US4950084A (en) 1990-08-21
FR2629196B1 (fr) 1991-05-31
EP0334441B1 (de) 1993-01-13
JPH01277604A (ja) 1989-11-08
CA1307322C (en) 1992-09-08
DE68904334D1 (de) 1993-02-25
EP0334441A1 (de) 1989-09-27

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