JP2725605B2 - Manufacturing method of printed wiring board - Google Patents

Manufacturing method of printed wiring board

Info

Publication number
JP2725605B2
JP2725605B2 JP6177869A JP17786994A JP2725605B2 JP 2725605 B2 JP2725605 B2 JP 2725605B2 JP 6177869 A JP6177869 A JP 6177869A JP 17786994 A JP17786994 A JP 17786994A JP 2725605 B2 JP2725605 B2 JP 2725605B2
Authority
JP
Japan
Prior art keywords
hole
substrate
filling material
forming
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP6177869A
Other languages
Japanese (ja)
Other versions
JPH0846322A (en
Inventor
秀雄 菊地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP6177869A priority Critical patent/JP2725605B2/en
Publication of JPH0846322A publication Critical patent/JPH0846322A/en
Application granted granted Critical
Publication of JP2725605B2 publication Critical patent/JP2725605B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は印刷配線板の製造方法に
関し、特に孔壁の導体めっき層により表裏両面の導体パ
ターンを接続する印刷配線板の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printed wiring board, and more particularly to a method for manufacturing a printed wiring board in which conductor patterns on both front and back surfaces are connected by a conductor plating layer on a hole wall.

【0002】[0002]

【従来の技術】従来、この種の印刷配線板材料を安価に
提供し、また印刷配線板を安く早く、容易に製造する方
法が特開昭61−107788号公報に開示されてい
る。この従来の技術は、図14に示す様に、基板1の基
準格子点に孔2を設け、この全ての孔2の壁面と基板1
の表裏両面の全面に導体めっき層3を形成して印刷配線
板用ユニバーサル基板とし、このユニバーサル基板にエ
ッチングレジストを印刷し必要な孔2の壁面の導体めっ
き層3と表裏両面の導体パターン4を残して他の部分を
エッチングし印刷配線板を製造するものである。
2. Description of the Related Art Conventionally, Japanese Patent Application Laid-Open No. 61-107788 discloses a method of providing a printed wiring board material of this kind at a low cost and manufacturing a printed wiring board cheaply, quickly and easily. According to this conventional technique, as shown in FIG. 14, holes 2 are provided at reference grid points of a substrate 1 and the wall surfaces of all the holes 2 are
A conductive plating layer 3 is formed on the entire surface of the front and back surfaces to form a universal substrate for a printed wiring board. An etching resist is printed on this universal substrate to form a conductor plating layer 3 on the wall surface of the required hole 2 and a conductor pattern 4 on both front and back surfaces. The remaining portion is etched to manufacture a printed wiring board.

【0003】また、他の例としてハイブリッドICおよ
びLSIを実装するのに適したスルーホールを具備した
セラミック配線板とその製造方法が特開昭61−229
389号公報に開示されている。この従来の技術は、図
15に示す様に、セラミックス製の基板1の基準格子点
に孔2を設け、不要な孔2に電気絶縁材料の穴埋め材7
を充填した後に必要な孔2の壁面と表裏両面に導体めっ
き層3を形成し、これをエッチングして導体パターン4
を形成して印刷配線板を製造するものである。ここで
は、穴埋め材7を充填する方法として、感光性樹脂から
成る穴埋め材7を全ての孔2に充填した後露光現像処理
により必要な孔2を開口する技術も開示されている。
As another example, a ceramic wiring board having through holes suitable for mounting a hybrid IC and an LSI and a method of manufacturing the same are disclosed in Japanese Patent Application Laid-Open No. 61-229.
No. 389. In this conventional technique, as shown in FIG. 15, a hole 2 is provided at a reference grid point of a ceramic substrate 1 and a hole filling material 7 made of an electrically insulating material is provided in an unnecessary hole 2.
After filling, a conductor plating layer 3 is formed on the wall surface of the required hole 2 and on both front and back surfaces, and this is etched to form a conductor pattern 4.
To manufacture a printed wiring board. Here, as a method of filling the filling material 7, a technique of filling the filling material 7 made of a photosensitive resin into all the holes 2 and then opening the necessary holes 2 by exposure and development processing is also disclosed.

【0004】[0004]

【発明が解決しようとする課題】この従来の全ての孔の
壁面と表裏両面全体に導体めっき層を形成したユニバー
サル基板を用いる方法では、基準格子点の全ての位置に
孔が形成されているので、必要な孔以外の孔と重なる位
置には導体パターンが形成できないため配線密度が低く
なるという欠点がある。
In this conventional method using a universal substrate having a conductor plating layer formed on the entire wall surface and both front and back surfaces of the holes, the holes are formed at all positions of the reference grid points. In addition, since a conductor pattern cannot be formed at a position overlapping with a hole other than a necessary hole, there is a disadvantage that a wiring density is reduced.

【0005】一方、セラミックス製の基板を用いる方法
では、セラミックス製の基板に汎用の金型を使用して安
価に孔を形成する方法であり、プラスチック製の基板、
例えばガラスエポキシ樹脂やポリイミド樹脂やフェノー
ル樹脂等の基板に適用する場合は、1mmから2mm程
度の厚みの基板の場合、その厚み以下の直径の孔を金型
で打ち抜くのが困難であり高密度に孔を形成できず配線
密度が低くなるという欠点がある。
On the other hand, in the method using a ceramic substrate, holes are formed inexpensively using a general-purpose mold on the ceramic substrate.
For example, when applied to a substrate made of glass epoxy resin, polyimide resin, phenol resin, or the like, in the case of a substrate having a thickness of about 1 mm to 2 mm, it is difficult to punch a hole having a diameter less than the thickness with a mold, so that There is a disadvantage that holes cannot be formed and the wiring density is reduced.

【0006】本発明の目的は、汎用性が高く、高密度配
線が得られる印刷配線板の製造方法を提供することにあ
る。
An object of the present invention is to provide a method of manufacturing a printed wiring board having high versatility and capable of obtaining high-density wiring.

【0007】[0007]

【課題を解決するための手段】この問題を解決するた
め、第1の発明の印刷配線板の製造方法は、薄板に格子
上に規則的に該薄板の厚さ程度の小径の孔を形成する工
程と、該孔に穴埋め材を充填する工程と、前記薄板を複
数枚重ね接着剤で接着して積層し前記穴埋め材が充填さ
れ積層された前記孔を有する基板を作成する工程と、該
基板の前記穴埋め材を前記孔から剥離し該孔を開口する
工程と、該孔の壁面と前記基板の表裏両面に導体をめっ
きし導体めっき層を形成する工程とを有することを特徴
とする
Means for Solving the Problems To solve this problem,
The method of manufacturing a printed wiring board according to the first aspect of the present invention includes the steps of: regularly forming a small-diameter hole having a thickness of about the thickness of the thin plate on a grid in the thin plate; and filling the hole with a filling material. A step of forming a substrate having the holes filled with the hole-filling material and laminating by laminating and laminating a plurality of the thin plates with an adhesive, and peeling the hole-filling material of the substrate from the holes to open the holes; wherein the step, further comprising the step of forming a plated conductor on both sides of the substrate and wall surfaces of the hole conductor plating layer
And

【0008】[0008]

【0009】[0009]

【0010】[0010]

【0011】また、前記薄板に小径口を形成する工程と
して、ガラス繊維を平行に並べそれを直角方向の樹脂の
帯群で固定する工程を用いることも出来る。
A step of forming a small-diameter opening in the thin plate;
And lay out the glass fibers in parallel and put it in the right angle resin
It is also possible to use a step of fixing with a band group.

【0012】また、前記孔を開口する工程が下記の工程
のうちの少くともいずれか1つの工程を含む。
Further, the step of opening the hole includes at least one of the following steps.

【0013】(a)基板全面に導体めっき層を形成する
工程と、開口する孔の位置の前記導体めっき層をエッチ
ング除去し該導体めっき層をマスクとして穴埋め材を剥
離する工程。
(A) A step of forming a conductor plating layer on the entire surface of the substrate, and a step of removing the conductor plating layer at the position of the opening by etching and removing the filling material using the conductor plating layer as a mask.

【0014】(b)開口する孔の位置以外の基板全面に
樹脂を印刷する工程と、該樹脂をマスクとして穴埋め材
を剥離する工程。
(B) A step of printing a resin on the entire surface of the substrate except for the positions of the holes to be opened, and a step of peeling the filling material using the resin as a mask.

【0015】(c)一旦基板の穴埋め材を全部剥離した
後に開口する孔以外の孔に前記穴埋め材を充填する工
程。
(C) a step of filling the hole-filling material into holes other than the holes that are opened after the hole-filling material of the substrate is once peeled off.

【0016】さらに導体めっき層を形成する工程が下記
の工程のうち少くともいずれか1つの工程を含む。
Further, the step of forming the conductor plating layer includes at least one of the following steps.

【0017】(a)孔壁と基板全面に導体めっき層を形
成する工程と、エッチングレジストを印刷しエッチング
して導体パターンを形成する工程。
(A) A step of forming a conductor plating layer on the hole walls and the entire surface of the substrate, and a step of printing and etching an etching resist to form a conductor pattern.

【0018】(b)導体パターンの逆版のパターンのめ
っきレジスを印刷する工程と、該めっきレジストをマ
スクとして孔壁と基板全面に導体めっきを行い導体パタ
ーンを形成する工程。
[0018] (b) a step of printing a plating registry reverse version of the pattern of the conductive pattern, forming a conductive pattern performs conductor plated hole wall and the entire surface of the substrate to the plating resist as a mask.

【0019】第2の発明の印刷配線板の製造方法は、
刷配線板を孔を縦割りして溝とする面で分割した形状の
細板で、この溝に穴埋め材を充填した溝を有する複数枚
細板作成する。この溝は前記細板の長手方向に直角
方向の複数の帯となる。この細板を複数枚、溝を合わせ
て孔を形成する様に接着する事で前記孔に穴埋め材を充
填した基板を作成する工程とを有する。そして、該基板
の前記穴埋め材を前記孔から剥離し該孔を開口する工程
と、該孔壁と前記基板の表裏両面に導体をめっきし導体
めっき層を形成する工程とを有する。ここで、前記基板
を作成する工程が下記の工程のうちの少なくともいずれ
か1つの工程を含む。
The method of manufacturing a printed wiring board of the second invention, indicia
The shape of the printed wiring board divided vertically by dividing the hole into grooves
In thin plate, creating a plurality of Hosoban having grooves filled with filling material in the groove. This groove is perpendicular to the longitudinal direction of the thin plate
There are multiple bands in the direction. Align the grooves with multiple thin plates
The hole is filled with a filling material by bonding to form a hole.
Creating a loaded substrate. Then, the method includes a step of peeling the hole filling material of the substrate from the hole to open the hole, and a step of plating a conductor on the hole wall and both the front and back surfaces of the substrate to form a conductor plating layer. Here, the step of forming the substrate includes at least one of the following steps.

【0020】(a)前記細板をこの細板の長手方向に波
状を凹凸を有する細板を作成する工程とその凹部分を溝
とし穴埋め材を充填する工程と、この細板を凹部分を対
向させて複数枚重ねて接着する工程。
(A) The thin plate is waved in the longitudinal direction of the thin plate.
Of forming a thin plate with irregularities and grooves
And filling the hole with the filling material.
A process in which a plurality of sheets are stacked and adhered .

【0021】(b)細板に穴埋め材を印刷しそれぞれ平
行な凸状のパターンを形成する工程と、該細板に樹脂を
塗布し複数枚重ねて接着し積層する工程。
(B) A step of printing a hole filling material on a thin plate to form a parallel convex pattern, and a step of applying a resin to the thin plate, bonding a plurality of sheets, and laminating.

【0022】また、孔を開口する工程が下記の工程のう
ちの少くともいずれか1つの工程を含む。
In addition, the step of opening the hole includes at least one of the following steps.

【0023】(a)基板全面に導体めっき層を形成する
工程と、開口する孔の位置の前記導体めっき層をエッチ
ング除去し該導体めっき層をマスクとして穴埋め材を剥
離する工程。
(A) A step of forming a conductor plating layer over the entire surface of the substrate, and a step of removing the conductor plating layer at the position of the hole to be opened by etching and removing the filling material using the conductor plating layer as a mask.

【0024】(b)開口する孔の位置以外の基板全面に
樹脂を印刷する工程と、該樹脂をマスクとして穴埋め材
を剥離する工程。
(B) A step of printing a resin on the entire surface of the substrate except for the positions of the holes to be opened, and a step of peeling the filling material using the resin as a mask.

【0025】(c)一旦基板の穴埋め材を全部剥離した
後に開口する孔以外の孔に前記穴埋め材を充填する工
程。
(C) a step of filling the hole-filling material into holes other than the holes that are opened after the hole-filling material on the substrate is once peeled off.

【0026】さらに、導体めっき層を形成する工程が下
記の工程のうちの少くともいずれか1つの工程を含む。
Further, the step of forming the conductor plating layer includes at least one of the following steps.

【0027】(a)孔壁と基板全面に導体めっき層を形
成する工程と、エッチングレジストを印刷しエッチング
して導体パターンを形成する工程。
(A) A step of forming a conductor plating layer on the hole wall and the entire surface of the substrate, and a step of printing and etching an etching resist to form a conductor pattern.

【0028】(b)導体パターンの逆版のパターンのめ
っきレジストを印刷する工程と、該めっきレジストをマ
スクとして孔壁と基板全面に導体めっきを行い導体パタ
ーンを形成する工程。
(B) A step of printing a plating resist having a reverse pattern of the conductor pattern and a step of forming a conductor pattern by plating the hole walls and the entire surface of the substrate using the plating resist as a mask.

【0029】第3の発明の印刷配線板の製造方法は、孔
に穴埋め材を充填した基板に導体パターンを形成する工
程と、該基板と前記穴と対応する位置に前記穴埋め材を
充填した孔を有する薄板を交互に重ねて接着し積層して
積層された穴に前記穴埋め材を充填した基板を作成する
工程と、該基板の前記穴埋め材を前記孔から剥離し該孔
を開口する工程と、該孔壁と前記基板の表裏両面に導体
をめっきし導体めっき層を形成する工程とを有する。こ
こで、前記孔を開口する工程が下記の工程を含む。
According to a third aspect of the present invention, there is provided a method for manufacturing a printed wiring board, comprising: forming a conductive pattern on a substrate having holes filled with a hole filling material; and forming a hole filled with the holes filling material at positions corresponding to the substrate and the holes. A step of creating a substrate filled with the hole-filling material in the stacked holes by laminating and bonding thin plates having alternately, and a step of peeling the hole-filling material of the substrate from the hole and opening the hole. Forming a conductor plating layer by plating a conductor on both sides of the hole wall and the substrate. Here, the step of opening the hole includes the following steps.

【0030】(a)基板全面に導体めっき層を形成する
工程と、開口する孔の位置の前記導体めっき層をエッチ
ング除去し該導体めっき層をマスクとして穴埋め材を剥
離する工程。
(A) A step of forming a conductive plating layer on the entire surface of the substrate, and a step of removing the conductive plating layer at the position of the opening hole by etching and removing the filling material using the conductive plating layer as a mask.

【0031】また、導体めっき層を形成する工程が下記
の工程を含む。
The step of forming the conductor plating layer includes the following steps.

【0032】(a)孔壁と基板全面に導体めっき層を形
成する工程と、エッチングレジストを印刷しエッチング
して導体パターンを形成する工程。
(A) A step of forming a conductor plating layer on the hole wall and the entire surface of the substrate, and a step of printing and etching an etching resist to form a conductor pattern.

【0033】第4の発明の印刷配線板の製造方法は、孔
に穴埋め材を充填した基板に導体パターンを形成する工
程と、該基板の開口する孔以外の部分に樹脂を印刷し被
覆する工程と、該樹脂をマスクとして前記穴埋め材を前
記孔から剥離し該孔を開口する工程と、該樹脂の表面に
さらに導体パターンを形成する工程とを有する。ここ
で、導体めっき層を形成する工程が下記の工程を含む。
A method of manufacturing a printed wiring board according to a fourth aspect of the present invention includes a step of forming a conductive pattern on a substrate having holes filled with a hole filling material, and a step of printing and coating a resin on portions other than the holes to be opened of the substrate. And a step of peeling the filling material from the hole using the resin as a mask and opening the hole, and a step of further forming a conductor pattern on the surface of the resin. Here, the step of forming the conductor plating layer includes the following steps.

【0034】(a)孔壁と基板全面に導体めっき層を形
成する工程と、エッチングレジストを印刷しエッチング
して導体パターンを形成する工程。
(A) A step of forming a conductor plating layer on the hole walls and the entire surface of the substrate, and a step of printing and etching an etching resist to form a conductor pattern.

【0035】第5の発明の印刷配線板の製造方法は、そ
れぞれ対向する位置に孔を有する複数枚の薄板を接着し
て積層し積層された孔に導電性穴埋め材を充填した基板
を製作する工程と、表裏導通孔となる以外の前記孔の前
記導電性穴埋め材の表面をエッチングし電気絶縁性穴埋
め材で充填する工程と、該基板の全面に導体をめっきし
前記導電性穴埋め材に接続する導体めっき層を形成する
工程とを有する。
According to a fifth aspect of the present invention, there is provided a printed wiring board manufacturing method in which a plurality of thin plates having holes at opposing positions are bonded and laminated, and a substrate is formed in which the laminated holes are filled with a conductive filling material. A step of etching the surface of the conductive filling material other than the front and back conduction holes and filling the surface with the electrically insulating filling material, and plating a conductor over the entire surface of the substrate and connecting to the conductive filling material. Forming a conductive plating layer to be formed.

【0036】第6の発明の印刷配線板の製造方法は、そ
れぞれ対向する位置に穴を有する複数枚の薄板を接着し
て積層し積層された孔で表裏導通孔となる孔に導電性穴
埋め材を充填した基板を製作する工程と、前記表裏導通
孔となる以外の前記孔を電気絶縁性穴埋め材で充填する
工程と、前記基板の全面に導体をめっきし前記導電性穴
埋め材に接続する導体めっき層を形成する工程とを有す
る。
A method of manufacturing a printed wiring board according to a sixth aspect of the present invention is a method of manufacturing a printed wiring board, comprising: bonding and laminating a plurality of thin plates each having a hole at a position facing each other; Manufacturing a substrate filled with, a step of filling the holes other than the front and back conduction holes with an electrically insulating filling material, and a conductor for plating a conductor over the entire surface of the substrate and connecting to the conductive filling material Forming a plating layer.

【0037】[0037]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Next, embodiments of the present invention will be described with reference to the drawings.

【0038】図1(a)〜(d)は本発明の第1の実施
例を説明する工程順に示した一部断面斜視図および断面
図、図2(a)〜(d)は本発明の第1の実施例を説明
する工程順に示した断面図である。本発明の第1の実施
例は、まず、図1(a)に示す様に、0.05から0.
4mm程度の厚みのエポキシ樹脂やポリイミド樹脂やフ
ェノール樹脂の薄板6を金型で打ち抜きその厚みと同程
度の直径の孔2を形成する。この薄板6は、セラミック
スの薄板を硬化前に型で打ち抜いて作成することも出
来、また、ガラスや樹脂液を型に流し込み硬化させて作
成することも出来、紫外線硬化形のドライフィルムにパ
ターンを露光・現像して製作することも出来る。
FIGS. 1 (a) to 1 (d) are partially perspective views and sectional views showing a first embodiment of the present invention in the order of steps for explaining the first embodiment. FIGS. 2 (a) to 2 (d) show the present invention. FIG. 3 is a cross-sectional view illustrating a first embodiment in the order of steps. In the first embodiment of the present invention, first, as shown in FIG.
A thin plate 6 of an epoxy resin, a polyimide resin, or a phenol resin having a thickness of about 4 mm is punched out with a mold to form a hole 2 having a diameter substantially equal to the thickness of the thin plate. The thin plate 6 can be formed by punching out a thin plate of ceramics with a mold before curing, or can be formed by pouring glass or a resin liquid into a mold and curing it. It can also be manufactured by exposure and development.

【0039】次に、図1(b)に示す様、この薄板6の
孔2に穴埋め材7をスキージで塗布・充填した後に硬化
させる。穴埋め材7としては、熱硬化タイプで硬化後に
溶剤剥離が可能な穴埋めインク(アルカリ剥離タイプの
ロジン編成マレイン樹脂,ロジン編成フェノール樹脂,
アクリル共重合体,スチレン・マレイン酸樹脂など)を
充填し熱硬化させる。また、これらの樹脂にアクリル酸
エステルモノマーと光重合開始剤,増感剤を加えた紫外
線硬化形穴埋め材7を用い紫外線照射を行い硬化させる
ことも出来る。他の穴埋め剤7としては、ポリ塩化ビニ
ルあるいはポリアクリロニトリル,合成アミド,酢酸セ
ルロース等の溶剤への溶解物を充填し乾燥固化させるこ
ともできる。次に、図1(c)に示す様に、この様にし
て作成した薄板6に接着剤8(エポキシ樹脂系統,フェ
ノール樹脂系統,ポリイミド樹脂系統等の接着剤)を印
刷し、積層して接着し基板1を作成する。あるいは、
硬化させた樹脂で薄板6を作成し、薄板6を積層してプ
レス装置で加熱加圧し接着硬化させ基板1を作成するこ
とも出来る。また、基板1は、対向する位置に孔2を有
する薄板6を接着剤8にて接着して積層し積層された孔
2に穴埋め剤7を充填することによっても得られる。
Next, as shown in FIG. 1B, a hole filling material 7 is applied and filled into the hole 2 of the thin plate 6 with a squeegee and then cured. The filling material 7 is a thermosetting type ink which can be stripped of a solvent after being cured (alkali peeling type rosin knitting male resin, rosin knitting phenol resin,
(Acrylic copolymer, styrene / maleic resin, etc.) and heat cured. Further, these resins can be cured by irradiating ultraviolet rays using an ultraviolet-curable filling material 7 in which an acrylate monomer, a photopolymerization initiator, and a sensitizer are added. As the other filling agent 7, a solution in a solvent such as polyvinyl chloride or polyacrylonitrile, synthetic amide, or cellulose acetate can be filled and dried and solidified. Next, as shown in FIG. 1C, an adhesive 8 (an adhesive of an epoxy resin system, a phenol resin system, a polyimide resin system, or the like) is printed on the thin plate 6 prepared in this manner, laminated, and bonded. Then, a substrate 1 is prepared. Alternatively, the thin plate 6 may be formed from a semi- cured resin, the thin plates 6 may be laminated, and heated and pressed by a press device to bond and cure to form the substrate 1. The substrate 1 can also be obtained by laminating thin plates 6 having holes 2 at opposing positions with an adhesive 8 and filling the laminated holes 2 with a filling material 7.

【0040】次に、図1(d)に示す様に、基板1の表
面に銅を数ミクロン蒸着し、その後に、基板1を下記に
組成を示す無電解銅めっき浴に浸して、基板1の表裏両
面に数ミクロンの銅めっき層3−1を被覆する。
Next, as shown in FIG. 1D, copper is deposited on the surface of the substrate 1 to a thickness of several microns, and then the substrate 1 is immersed in an electroless copper plating bath having the composition shown below. Is coated with a copper plating layer 3-1 of several microns on both sides.

【0041】 硫酸銅 0.06モル/リットル EDTA 0.12モル/リットル HCHO 0.3モル/リットル NaOH 0.35モル/リットル 添加剤 適量 めっき液温度72度摂氏,pH 12.4 その後に基板1を下記に組成を示す電解銅めっき浴に浸
し、電流密度は10アンペア/6.45cm2 で106
分めっきを施し厚み25μm程度の銅めっき層3−2を
被覆し導体めっき層3を形成する。
Copper sulfate 0.06 mol / l EDTA 0.12 mol / l HCHO 0.3 mol / l NaOH 0.35 mol / l Additive proper amount Plating solution temperature 72 ° C, pH 12.4 Was immersed in an electrolytic copper plating bath having the following composition, and the current density was 10 amps / 6.45 cm 2 ,
The conductor plating layer 3 is formed by performing plating and covering the copper plating layer 3-2 having a thickness of about 25 μm.

【0042】 銅 22〜38g/リットル ピロリン酸塩 150〜250g/リットル 硝酸塩 5〜10g/リットル アンモニア 1〜3g/リットル オルソリン酸塩 10〜13オンス/ガロン以下 次に、図2(a)に示す様に、開口する孔2の位置に窓
をあけた形のエッチングレジストを基板1の表裏両面に
印刷する。エッチングレジストは、スクリーン印刷で形
成するか、感光性レジスト(E.I.Dupont製の
リストン1015等)を露光・現像して形成する。その
後、この基板1を塩化第二鉄溶液に浸し銅の導体めっき
層3をエッチングする。次に、図2(b)に示す様に、
銅の導体めっき層3をマスクとして、これから露出した
穴埋め材7を溶解剥離し孔2を開口する。穴埋め材7が
穴埋めインクの場合は、2から3%程度の水酸化ナトリ
ウム溶液で溶解剥離し孔2を開口する。穴埋め材7がポ
リ塩化ビニルの場合はVC−VDC共重合物等で、ポリ
アクリロニトリルの場合はクレゾールあるいはギ酸で、
合成ポリアミドの場合はギ酸アミドで、酢酸セルロース
の場合はアセトンあるいはエチルアルコールとエチルエ
ーテルの混合液で溶解剥離する。次に、図2(c)に示
す様に、この基板1を無電解銅めっき浴に浸し数ミクロ
ンの銅めっき層3−1(図示せず)を被覆した後に電解
銅めっき浴に浸し、電流密度10アンペア/6.45c
2 で106分間のめっきを施し基板1の表裏両面と孔
2壁面に25μm程度の銅めっき層3−3を被覆し導体
めっき層3を形成する。
Copper 22-38 g / l Pyrophosphate 150-250 g / l Nitrate 5-10 g / l Ammonia 1-3 g / l Orthophosphate 10-13 oz / gal or less Next, as shown in FIG. Next, an etching resist having a window formed at the position of the opening 2 is printed on both the front and back surfaces of the substrate 1. The etching resist is formed by screen printing or by exposing and developing a photosensitive resist (such as RISTON 1015 manufactured by EI Dupont). Thereafter, the substrate 1 is immersed in a ferric chloride solution to etch the copper conductor plating layer 3. Next, as shown in FIG.
Using the copper conductor plating layer 3 as a mask, the hole-filling material 7 exposed from this is dissolved and peeled to open the hole 2. If the filling material 7 is filling ink, the hole 2 is opened by dissolving and dissolving with a sodium hydroxide solution of about 2 to 3%. When the filling material 7 is polyvinyl chloride, it is a VC-VDC copolymer or the like, and when the filling material 7 is polyacrylonitrile, it is cresol or formic acid.
In the case of synthetic polyamide, formic acid amide is used, and in the case of cellulose acetate, acetone or a mixed solution of ethyl alcohol and ethyl ether is used for dissolution and peeling. Next, as shown in FIG. 2C, the substrate 1 is immersed in an electroless copper plating bath to cover a copper plating layer 3-1 (not shown) of several microns, and then immersed in an electrolytic copper plating bath. Density 10 amps / 6.45c
A copper plating layer 3-3 of about 25 μm is coated on both the front and back surfaces of the substrate 1 and the wall surface of the hole 2 by plating for 106 minutes at m 2 to form a conductor plating layer 3.

【0043】次に、図2(d)に示す様に、銅の導体め
っき層3の表裏両面にエッチングレジストを印刷した後
この基板1を塩化第二鉄溶液に浸し、銅の導体めっき層
3をエッチングして導体パターン4を形成する。
Next, as shown in FIG. 2D, an etching resist is printed on both the front and back surfaces of the copper conductor plating layer 3, and then the substrate 1 is immersed in a ferric chloride solution to form the copper conductor plating layer 3. Is etched to form a conductor pattern 4.

【0044】図3(a)〜(e)は本発明の第2の実施
例を説明する工程順に示した断面図である。本発明の第
2の実施例は、まず、図3(a)に示す様に、図1
(a)〜(c)に示す第1の実施例と同様の工程で、孔
2に穴埋め材7を充填した基板1を作成する。次に、図
3(b)に示す様に、基板1の表裏両面の孔2を開口す
る部分以外の全面にスクリーン印刷でエポキシ樹脂、あ
るいはポリイミド樹脂、あるいはフェノール樹脂などの
樹脂14を印刷し被覆する。あるいは、この樹脂14と
して光硬化性の樹脂を基板1に接着させパターンを露光
・現像することにより基板1を被覆することもできる。
FIGS. 3A to 3E are sectional views showing a second embodiment of the present invention in the order of steps for explaining the same. In the second embodiment of the present invention, first, as shown in FIG.
The substrate 1 in which the holes 2 are filled with the filling material 7 is prepared by the same steps as those of the first embodiment shown in FIGS. Next, as shown in FIG. 3 (b), a resin 14 such as an epoxy resin, a polyimide resin, or a phenol resin is printed on the entire surface of the substrate 1 except for the portions where the holes 2 are opened on the front and rear surfaces by screen printing. I do. Alternatively, a photocurable resin may be adhered to the substrate 1 as the resin 14, and the pattern may be exposed and developed to cover the substrate 1.

【0045】次に、図3(c)に示す様に、この樹脂1
4をマスクとして、これから露出した穴埋め材7を図2
(b)に示す第1の実施例と同様の工程で溶解剥離し孔
2を開口する。次に、図3(d)に示す様に、図2
(c)に示す第1の実施例と同様の工程で、基板1の表
裏両面と孔2壁面に導体めっき層3を形成し、図3
(e)に示す様に、この導体めっき層3をエッチングし
導体パターン4を形成する。第2の実施例は、導体めっ
き工程が一度で済む利点がある。
Next, as shown in FIG.
Using the mask 4 as a mask, the exposed filling material 7 is
In the same process as in the first embodiment shown in FIG. Next, as shown in FIG.
3C, the conductor plating layer 3 was formed on both the front and back surfaces of the substrate 1 and the wall surface of the hole 2 by the same process as in the first embodiment shown in FIG.
As shown in (e), the conductor plating layer 3 is etched to form a conductor pattern 4. The second embodiment has the advantage that only one conductor plating step is required.

【0046】図4(a)〜(d)は本発明の第3の実施
例を説明する工程順に示した断面図である。本発明の第
3の実施例は、まず、図4(a)に示す様に、図1
(a)〜(c)に示す第1の実施例と同様の工程で、孔
2に穴埋め材7を充填した基板1を作成する。次に、
埋め材7の充填箇所を選択的に形成するにあたり、穴埋
め材7の剥離処理に耐えるレジストは金属めっきあるい
は強い硬化樹脂レジストなど特殊なレジストが必要とい
う問題があるため穴埋め材7の選択的剥離は行わず先ず
穴埋め材7を全部溶解剥離する。次に、図4(c)に示
す様に、改めて、開口すべき孔2以外の孔2に穴埋め材
7をスクリーン印刷で充填した基板1を作成する。ま
た、穴埋め材7の溶解剥離後に感光性ドライフィルムレ
ジストを接着し露光・現像して開口すべき孔2を被覆
し、それ以外の孔2にスキージで穴埋め材7を充填した
後にドライフィルムレジストを剥離して基板1を作成す
ることも出来る。次に、図4(d)に示す様に、図2
(c),(d)に示す第1の実施例と同様の工程で、基
板1の表裏両面と孔2壁面に導体めっき層3を形成しエ
ッチングして導体パターン4を作成する。第3の実施例
は、樹脂14を使用しない簡単な構造に出来る利点があ
る。
FIGS. 4A to 4D are sectional views showing a third embodiment of the present invention in the order of steps for explaining the third embodiment. In the third embodiment of the present invention, first, as shown in FIG.
The substrate 1 in which the holes 2 are filled with the filling material 7 is prepared by the same steps as those of the first embodiment shown in FIGS. Then the hole
In selectively forming a filling portion of the filling material 7, a hole is filled.
The resist that resists the peeling process of the metal 7 is metal plating or
Requires special resist such as strong cured resin resist
Because of the problem, selective removal of the filling material 7 is not performed first.
The entire filling material 7 is dissolved and peeled off. Next, as shown in FIG. 4C, a substrate 1 is prepared in which the holes 2 other than the holes 2 to be opened are filled with the filling material 7 by screen printing. Also, after dissolving and removing the filling material 7, a photosensitive dry film resist is adhered, exposed and developed to cover the hole 2 to be opened, and the remaining holes 2 are filled with the filling material 7 with a squeegee, and then the dry film resist is removed. The substrate 1 can also be formed by peeling. Next, as shown in FIG.
In the same steps as in the first embodiment shown in FIGS. 1C and 1D, the conductor plating layer 3 is formed on the front and back surfaces of the substrate 1 and the wall surface of the hole 2 and etched to form the conductor pattern 4. The third embodiment has an advantage that a simple structure without using the resin 14 can be obtained.

【0047】図5(a)〜(c)は本発明の第4の実施
例を説明する工程順に示した断面図である。本発明の第
4の実施例は、まず、図5(a)に示すように、図3
(a)〜(c)に示す第2の実施例と同様の工程で孔2
を開口した基板1を作成する。次に、図5(b)に示す
様に、導体パターンの逆版の模様にめっきレジスト15
(サンノプコ(株)社のノプコキュアF等)を印刷す
る。次に、図5(c)に示す様に、無電解銅めっき浴に
数時間浸し、銅のめっき厚25ミクロン程度の導体パタ
ーン4を形成する。第4の実施例は、無電解銅めっきを
するため、基板1の小径の孔2の奥深い位置にも表面と
同等のめっき厚で導体めっき層3を形成出来る利点があ
る。
FIGS. 5A to 5C are sectional views showing a fourth embodiment of the present invention in the order of steps for explaining the fourth embodiment. In the fourth embodiment of the present invention, first, as shown in FIG.
The holes 2 are formed in the same steps as in the second embodiment shown in FIGS.
A substrate 1 having an opening is formed. Next, as shown in FIG. 5B, the plating resist 15 is applied to the reverse pattern of the conductor pattern.
(Such as Nopco Cure F from San Nopco Co., Ltd.). Next, as shown in FIG. 5C, the conductor pattern 4 is immersed in an electroless copper plating bath for several hours to form a copper plating thickness of about 25 μm. In the fourth embodiment, since the electroless copper plating is performed, there is an advantage that the conductor plating layer 3 can be formed at a deep position of the small-diameter hole 2 of the substrate 1 with the same plating thickness as the surface.

【0048】図6(a)〜(d)は本発明の第5の実施
例を説明する工程順に示した断面図である。本発明の第
5の実施例は、まず、図5(a)に示す様に、0.05
から0.01mm程度の厚みのガラス繊維布あるいは天
然繊維紙などの布16にプレスでその厚み程度の直径の
孔2を格子状に打ち抜く。次に、図6(b)に示す様
に、この布16に熱硬化性のエポキシ樹脂あるいはポリ
イミド樹脂,フェノール樹脂など樹脂17を含浸させ、
これを複数枚重ね樹脂17を加熱硬化させ一体化成形す
ることにより基板1を作成する。
FIGS. 6A to 6D are cross-sectional views showing a fifth embodiment of the present invention in the order of processes. In the fifth embodiment of the present invention, first, as shown in FIG.
A hole 2 having a diameter about the same thickness as that of a glass fiber cloth or a natural fiber paper having a thickness of about 0.01 mm is punched out in a lattice shape by a press. Next, as shown in FIG. 6B, the cloth 16 is impregnated with a resin 17 such as a thermosetting epoxy resin or a polyimide resin or a phenol resin.
The substrate 1 is formed by stacking a plurality of the resin layers 17 by heating and curing and integrally forming the resin.

【0049】次に、図6(c)に示す様に、基板1の開
口すべき孔2以外の孔2に穴埋め材7をスクリーン印刷
し充填する。次に、図6(d)に示す様に、図2
(c),(d)に示す第1の実施例と同様の工程で基板
1の表裏両面と孔2壁面に銅めっき層3を形成し、エッ
チングして孔2の壁面の導体めっき層3と表裏両面の導
体パターン4を形成する。
Next, as shown in FIG. 6C, a hole filling material 7 is screen-printed and filled in the holes 2 other than the holes 2 to be opened in the substrate 1. Next, as shown in FIG.
The copper plating layer 3 is formed on both the front and back surfaces of the substrate 1 and the wall surface of the hole 2 in the same steps as in the first embodiment shown in FIGS. The conductor patterns 4 on both front and back sides are formed.

【0050】第5の実施例は、布16全体に樹脂17を
含浸し基板1を形成するので、樹脂17の冷却収縮に伴
う基板1の反り捻れ等の変形が少ない利点がある。
In the fifth embodiment, since the substrate 1 is formed by impregnating the resin 17 into the entire cloth 16, there is an advantage that deformation such as warpage of the substrate 1 due to cooling and shrinkage of the resin 17 is small.

【0051】図7は本発明の第6の実施例に用いる基板
の斜視図である。本発明の第6の実施例は、まず、図7
に示す様に、第1のガラス繊維18−1の群を平行に並
べ、第1のガラス繊維18−1に直角に第2のガラス繊
維18−2の群を並べ、その上から第2のガラス繊維1
8−2に直角に、すなわち、第1のガラス繊維18−1
の群に重なる位置に第3のガラス繊維18−3の群を並
べる。同様にその上に第4のガラス繊維18の群、第5
のガラス繊維18の群、第6のガラス繊維18の群を交
互に直角に重ねたガラス格子19を作成する。このガラ
ス格子19に樹脂17を含浸し、ガラス格子19に垂直
に高速気流を吹き抜け、ガラス格子19の間隙の樹脂1
7を吹き飛ばし孔2を形成した後、樹脂17を熱硬化さ
せ基板1を作成する。この基板1の孔2に図6(c),
(d)に示す第5の実施例と同様の工程で、穴埋め材7
を充填し、その後、基板1の表裏両面と孔2の壁面に導
体めっき層3を形成してエッチングし導体パターン4を
形成する。第6の実施例は、孔2の壁面が1つのガラス
繊維18と樹脂17だけの薄い壁である高密度の孔2を
作成できるので、配線密度をより高密度にできる利点が
ある。
FIG. 7 is a perspective view of a substrate used in the sixth embodiment of the present invention. In the sixth embodiment of the present invention, first, FIG.
As shown in the figure, the group of the first glass fibers 18-1 is arranged in parallel, the group of the second glass fibers 18-2 is arranged at right angles to the first glass fiber 18-1, and the second Glass fiber 1
8-2, that is, the first glass fiber 18-1
The group of the third glass fibers 18-3 is arranged at a position overlapping the group. Similarly, the fourth group of glass fibers 18 and the fifth group
A glass lattice 19 is formed by alternately stacking groups of glass fibers 18 and groups of sixth glass fibers 18 at right angles. The glass grid 19 is impregnated with the resin 17, and a high-speed airflow is blown through the glass grid 19 vertically.
After the holes 7 are blown off to form the holes 2, the resin 17 is thermally cured to form the substrate 1. In FIG. 6 (c),
In the same process as in the fifth embodiment shown in FIG.
Thereafter, a conductor plating layer 3 is formed on both the front and back surfaces of the substrate 1 and the wall surfaces of the holes 2 and etched to form a conductor pattern 4. The sixth embodiment has an advantage that the wiring density can be further increased because the wall 2 of the hole 2 can be formed as a high-density hole 2 having only one glass fiber 18 and a resin 17 as a thin wall.

【0052】図8は本発明の第7の実施例に用いる基板
の分解斜視図である。本発明の第7の実施例は、まず、
図8に示す様に、ガラス繊維18の群を平行に並べ、ガ
ラス繊維18の群に直角に樹脂20の帯群を印刷し半硬
化させ薄板6を形成する。この薄板6の孔2に図1
(b)に示す第1の実施例と同様の工程で穴埋め材7を
スクリーン印刷で充填し硬化する。次に、この様にして
作成した薄板6に接着剤8を印刷し、薄板6をガラス繊
維18が互いに直角に重なる様に重ね合わせ接着する。
次に、図2(a)〜(d)に示す第1の実施例と同様の
工程で、基板1の表裏両面に導体パターン4と孔2の壁
面に導体めっき層3を形成する。
FIG. 8 is an exploded perspective view of a substrate used in the seventh embodiment of the present invention. In the seventh embodiment of the present invention, first,
As shown in FIG. 8, a group of glass fibers 18 are arranged in parallel, and a band group of resin 20 is printed at right angles to the group of glass fibers 18 and semi-cured to form a thin plate 6. The hole 2 of this thin plate 6
The filling material 7 is filled by screen printing and hardened in the same process as in the first embodiment shown in FIG. Next, the adhesive 8 is printed on the thin plate 6 thus formed, and the thin plate 6 is overlapped and bonded so that the glass fibers 18 are overlapped at right angles to each other.
Next, in the same steps as in the first embodiment shown in FIGS. 2A to 2D, the conductor pattern 4 and the conductor plating layer 3 are formed on the wall surfaces of the holes 2 on both the front and back surfaces of the substrate 1.

【0053】第7の実施例は、ガラス繊維18の群を樹
脂20で固定した薄板6を使用するため、重ね合わせが
容易である利点がある。
In the seventh embodiment, since the thin plate 6 in which the group of the glass fibers 18 is fixed with the resin 20 is used, there is an advantage that the lamination is easy.

【0054】図9(a)〜(c)は本発明の第8の実施
例を説明する工程順に示した断面図である。本発明の第
8の実施例は、まず、図9(a)に示す様に、図1
(a)〜(d)に示す第1の実施例と同様の工程で、
0.4から0.05mm程度の直径の孔2に穴埋め材7
を充填した1から0.1mm程度の厚みの基板1を作成
し、その表裏両面に導体めっき層3を形成する。
FIGS. 9A to 9C are sectional views showing the order of steps for explaining the eighth embodiment of the present invention. In the eighth embodiment of the present invention, first, as shown in FIG.
In the same steps as in the first embodiment shown in (a) to (d),
Filling material 7 into hole 2 having a diameter of about 0.4 to 0.05 mm
A substrate 1 having a thickness of about 1 to 0.1 mm filled with is formed, and a conductor plating layer 3 is formed on both front and back surfaces.

【0055】次に、この基板1にエッチングレジストを
印刷し、これをマスクにして導体めっき層3をエッチン
グし導体パターン4を形成する。この時点で基板1の穴
埋め材7はそのまま残す。次に、図9(b)に示す様に
複数枚の基板1と、穴埋め材7で充填した半硬化状態の
樹脂の薄板6を交互に重ね、プレス装置で加熱加圧し接
着硬化させる。次に、図9(c)に示す様に、図2
(b)〜(d)に示す第1の実施例と同様の工程で、孔
2の壁面に導体めっき層3と表裏両面に導体パターン4
を形成する。第8の実施例は、小径の孔2を有する多層
印刷配線板を容易に作成出来る利点がある。
Next, an etching resist is printed on the substrate 1 and the conductive plating layer 3 is etched using the resist as a mask to form a conductive pattern 4. At this time, the filling material 7 of the substrate 1 is left as it is. Next, as shown in FIG. 9B, a plurality of substrates 1 and thin plates 6 of a resin in a semi-cured state filled with a filling material 7 are alternately stacked, and are heated and pressed by a press device to be cured. Next, as shown in FIG.
In the same steps as in the first embodiment shown in (b) to (d), the conductor plating layer 3 is provided on the wall surface of the hole 2 and the conductor pattern 4 is provided on both front and back surfaces.
To form The eighth embodiment has an advantage that a multilayer printed wiring board having a small-diameter hole 2 can be easily formed.

【0056】図10(a)〜(c)は本発明の第9の実
施例を説明する工程順に示した断面図である。本発明の
第9の実施例は、まず、図10(a)に示す様に、図9
(a)に示す第8の実施例と同様の工程で、0.4から
0.05mm程度の直径の孔2に穴埋め材7を充填しそ
の表裏両面に導体パターン4を形成した2から0.1m
m程度の厚みの基板1を作製する。次に、図10(b)
に示す様にスクリーン印刷で孔2を開口する部分以外の
全面に樹脂14を印刷し被覆する。ここで、孔2を開口
する部分の穴埋め材7に重ねるようにスクリーン印刷で
穴埋め材7を印刷し、その後にそれ以外の全面に樹脂1
4を印刷する事もできる。
FIGS. 10A to 10C are sectional views showing a ninth embodiment of the present invention in the order of steps for explaining the ninth embodiment. In the ninth embodiment of the present invention, first, as shown in FIG.
In the same process as in the eighth embodiment shown in (a), a hole filling material 7 is filled in a hole 2 having a diameter of about 0.4 to 0.05 mm, and a conductive pattern 4 is formed on both front and back surfaces. 1m
The substrate 1 having a thickness of about m is manufactured. Next, FIG.
As shown in (1), the resin 14 is printed and coated on the entire surface except the portion where the hole 2 is opened by screen printing. Here, the filling material 7 is printed by screen printing so as to overlap the filling material 7 in the portion where the hole 2 is opened, and then the resin 1 is applied to the entire other surface.
4 can also be printed.

【0057】次に、図10(c)に示す様に、樹脂14
から露出した部分の穴埋め材7を剥離し孔2を開口し、
この孔2の壁面と樹脂14の表裏両面に導体めっき層3
を形成する。この表裏両面にエッチングレジストを印刷
し導体めっき層3をエッチングして導体パターン4を形
成する。第9の実施例は、プレス装置が不要であるので
多層印刷配線板を容易に形成できる利点がある。
Next, as shown in FIG.
The hole-filling material 7 at the portion exposed from is peeled off to open the hole 2,
The conductor plating layer 3 is formed on the wall surface of the hole 2 and on both front and back surfaces of the resin 14.
To form An etching resist is printed on both front and back surfaces, and the conductor plating layer 3 is etched to form a conductor pattern 4. The ninth embodiment has an advantage that a multilayer printed wiring board can be easily formed because a press device is unnecessary.

【0058】図11(a),(b)は本発明の第10の
実施例を説明する工程順に示した断面斜視図である。本
発明の第10の実施例は、まず、図11(a)に示す様
に、2から0.1mm程度の幅で厚みが0.2から0.
05mm程度の樹脂の細板を作成し、これに数ミリメー
トルから0.1mm程度のピッチで凸部を持つ治具を押
し合て加圧し数mmから0.1mmピッチの波状の凹凸
形状に曲げた細板22を作成する。細板22はセラミッ
クス製の薄板6を硬化前に型の形状を転写して凹凸を形
成することができ、また、等ピッチの凸部を持つ治具で
溝を掘り凹凸を形成することもでき、あるいは、ガラス
や樹脂液を型に流し込み硬化させて凹凸を形成すること
もできる。次に、細板22の両面とも凹部に穴埋め材7
をスキージで充填させる。次に、図11(b)に示す様
に、この細板22に接着剤8を印刷し多数枚の細板22
を接着させ積層して細板22の面に垂直な側面を持ち穴
埋め材7を充填した形の基板1を作成する。次に、図1
(d)〜図2(b)に示す第1の実施例,図3(b),
(c)に示す第2の実施例または図4(b),(c)に
示す第3の実施例と同様の工程で孔2を開口し、図2
(c),(d)に示す第1の実施例または図5(b),
(c)に示す第4の実施例と同様の工程で導体パターン
4を形成し印刷配線板を作成する。第10の実施例は孔
2の中間に接着層が無いため孔2の亀裂断層を生じにく
い利点がある。
FIGS. 11A and 11B are sectional perspective views showing a tenth embodiment of the present invention in the order of steps for explaining the tenth embodiment. In the tenth embodiment of the present invention, first, as shown in FIG. 11A, the width is about 2 to 0.1 mm and the thickness is 0.2 to 0.1 mm.
A resin thin plate of about 05 mm was created, and a jig having convex parts was pressed against this at a pitch of about several millimeters to 0.1 mm, pressed and bent into a wavy uneven shape of several mm to 0.1 mm pitch. A thin plate 22 is created. The thin plate 22 can form irregularities by transferring the shape of the mold before hardening the ceramic thin plate 6, and can also form irregularities by digging a groove with a jig having convex parts of equal pitch. Alternatively, irregularities can be formed by pouring glass or resin liquid into a mold and curing it. Next, on both sides of the thin plate 22, the filling material 7
With a squeegee. Next, as shown in FIG. 11 (b), the adhesive 8 is printed on
To form a substrate 1 having a side surface perpendicular to the surface of the thin plate 22 and filled with the filling material 7. Next, FIG.
(D) to the first embodiment shown in FIG. 2 (b), FIG. 3 (b),
The hole 2 is opened in the same process as in the second embodiment shown in FIG. 4C or the third embodiment shown in FIGS.
The first embodiment shown in (c) and (d) or FIG.
A conductor pattern 4 is formed in the same process as in the fourth embodiment shown in FIG. The tenth embodiment has an advantage that a crack fault in the hole 2 hardly occurs because there is no adhesive layer in the middle of the hole 2.

【0059】図12(a)〜(c)は本発明の第11の
実施例を説明する工程順に示した断面斜視図である。本
発明の第11の実施例は、まず、図12(a)に示す様
に、2から0.1mm程度の幅で厚みが0.2から0.
05mm程度の細板22を作成し、これに穴埋め材7を
0.2から0.05mm程度の厚みに塗布する。次に、
図12(b)に示す様に、細板22の穴埋め材7を長手
方向に数mmから0.1mm程度のピッチで凸部を持つ
治具で掻き取り、数mmから0.1mmピッチの穴埋め
材7のパターンを有する細板22を作製する。次に、図
12(c)に示す様に、この細板22に樹脂23を塗布
し多数枚の細板22を接着させ細板22の面に垂直な側
面を持ち穴埋め材7を充填した形の基板1を作成する。
次に、第11の実施例と同様の工程で孔2を開口して導
体パターン4を形成し印刷配線板を作成する。第11の
実施例は型を用いないので製造が簡単である利点があ
る。
FIGS. 12A to 12C are sectional perspective views showing the eleventh embodiment of the present invention in the order of steps for explaining the same. In the eleventh embodiment of the present invention, first, as shown in FIG. 12A, the width is about 2 to 0.1 mm and the thickness is 0.2 to 0.1 mm.
A thin plate 22 having a thickness of about 05 mm is formed, and a hole filling material 7 is applied to the thin plate 22 to a thickness of about 0.2 to 0.05 mm. next,
As shown in FIG. 12 (b), the hole filling material 7 of the thin plate 22 is scraped in the longitudinal direction with a jig having a convex portion at a pitch of about several mm to 0.1 mm, and filled with a pitch of several mm to 0.1 mm. A thin plate 22 having a pattern of the material 7 is manufactured. Next, as shown in FIG. 12C, a resin 23 is applied to the thin plate 22 and a large number of the thin plates 22 are adhered to each other. The substrate 1 is prepared.
Next, in the same process as in the eleventh embodiment, the holes 2 are opened to form the conductor patterns 4 to form a printed wiring board. The eleventh embodiment has an advantage that the manufacturing is simple because no mold is used.

【0060】図13(a)〜(d)は本発明の第12の
実施例を説明する工程順に示した断面図である。本発明
の第12の実施例は、まず、図13(a)に示す様に、
それぞれ対向する位置に孔を有する複数枚の薄板を接着
して積層し、積層された孔に穴埋め材を充填する。本実
施例では、穴埋め材として銅ペースト等の導電性穴埋め
材7−1を用い、導電性穴埋め材7−1を充填した基板
1を作成する。次に、図13(b)に示す様に、基板1
にエッチングレジストを印刷し表裏導通孔2−1以外の
孔2の導電性穴埋め材7−1をエッチングする。
FIGS. 13A to 13D are sectional views showing a twelfth embodiment of the present invention in the order of steps for explaining the twelfth embodiment. In the twelfth embodiment of the present invention, first, as shown in FIG.
A plurality of thin plates having holes at opposing positions are laminated by bonding, and the laminated holes are filled with a filling material. In the present embodiment, a conductive filling material 7-1 such as a copper paste is used as a filling material, and a substrate 1 filled with the conductive filling material 7-1 is prepared. Next, as shown in FIG.
Then, the conductive filling material 7-1 in the holes 2 other than the front and back conduction holes 2-1 is etched.

【0061】次に、13(c)に示す様に、エッチング
した導電性穴埋め材7−1の孔2の穴埋めインク等の電
気絶縁性穴埋め材7−2を充填する。次に図13(d)
に示す様に、図2(c),(d)に示す第1の実施例と
同様に加工し導体パターン4を形成し印刷配線板を作成
する。第12の実施例は、表裏を導通する導電体の電流
容量を大きくできる利点がある。
Next, as shown in FIG. 13 (c), an electrically insulating filling material 7-2 such as ink for filling the holes 2 of the etched conductive filling material 7-1 is filled. Next, FIG.
As shown in FIG. 2, a conductor pattern 4 is formed by processing in the same manner as in the first embodiment shown in FIGS. The twelfth embodiment has the advantage that the current capacity of the conductor conducting between the front and back can be increased.

【0062】本発明の第13の実施例は、まず図13
(a)に示す第12の実施例と同様の工程で積層された
孔に穴埋め材を充填する。本実施例では、穴埋め材とし
て銅ペーストあるいは銀ペースト等の導電性穴埋め材7
−1を用い、導電性穴埋め材7−1を充填した基板1を
作成する。次に、図3(b)に示す第2の実施例と同様
の工程で基板1の表裏両面に、表裏を導通する部分以外
の全面にエポキシ樹脂、あるいはポリイミド樹脂、ある
いはフェノール樹脂などの電気絶縁性の樹脂14を印刷
し被覆する。次に、図2(c),(d)に示す第1の実
施例と同様に加工して基板1の表裏両面に導体めっき層
3を形成して導体パターン4を作成する。第13の実施
例は、導電性穴埋め材7−1のエッチング工程と絶縁性
穴埋め材7−2の充填工程を無くし手順が簡易である利
点がある。
The thirteenth embodiment of the present invention first
A hole filling material is filled in the stacked holes in the same process as in the twelfth embodiment shown in FIG. In this embodiment, the conductive filler 7 such as copper paste or silver paste is used as the filler.
-1, a substrate 1 filled with the conductive filling material 7-1 is prepared. Next, in the same process as that of the second embodiment shown in FIG. 3 (b), an electric insulating material such as an epoxy resin, a polyimide resin, or a phenol resin is formed on both the front and back surfaces of the substrate 1 except for a portion conducting between the front and back surfaces. Resin 14 is printed and coated. Next, processing is performed in the same manner as in the first embodiment shown in FIGS. 2C and 2D to form a conductor pattern 4 by forming a conductor plating layer 3 on both the front and back surfaces of the substrate 1. The thirteenth embodiment has an advantage that the steps of etching the conductive filling material 7-1 and filling the insulating filling material 7-2 are eliminated, and the procedure is simple.

【0063】[0063]

【発明の効果】以上説明した様に本発明は、ドリルによ
る切削加工や金型による抜き加工等の機械加工を用いな
いで、印刷技術による穴開け加工を主体としているの
で、合成樹脂を主成分とする基板を用いてもその板厚よ
りも十分に小さい小径の孔を高密度に形成でき、高密度
な配線を実現できる効果がある。
As described above, the present invention mainly uses a synthetic resin as a main component because it mainly uses a punching process by a printing technique without using a mechanical process such as a cutting process using a drill or a punching process using a die. Even if a substrate is used, it is possible to form small-diameter holes sufficiently smaller than the thickness of the substrate at a high density, and it is possible to realize a high-density wiring.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)〜(d)は本発明の第1の実施例を説明
する工程順に示した一部断面斜視図および断面図であ
る。
FIGS. 1 (a) to 1 (d) are a partial cross-sectional perspective view and a cross-sectional view illustrating a first embodiment of the present invention in the order of steps for explaining the same.

【図2】(a)〜(d)は本発明の第1の実施例を説明
する工程順に示した断面図である。
FIGS. 2A to 2D are cross-sectional views showing a first embodiment of the present invention in the order of steps for explaining the first embodiment.

【図3】(a)〜(e)は本発明の第2の実施例を説明
する工程順に示した断面図である。
3 (a) to 3 (e) are cross-sectional views shown in the order of steps for explaining a second embodiment of the present invention.

【図4】(a)〜(d)は本発明の第3の実施例を説明
する工程順に示した断面図である。
FIGS. 4A to 4D are cross-sectional views shown in the order of steps for explaining a third embodiment of the present invention.

【図5】(a)〜(c)は本発明の第4の実施例を説明
する工程順に示した断面図である。
FIGS. 5A to 5C are cross-sectional views illustrating a fourth embodiment of the present invention in the order of steps for explaining the same.

【図6】(a)〜(d)は本発明の第5の実施例を説明
する工程順に示した断面図である。
FIGS. 6A to 6D are cross-sectional views illustrating a fifth embodiment of the present invention in the order of steps for explaining the same.

【図7】本発明の第6の実施例に用いる基板の斜視図で
ある。
FIG. 7 is a perspective view of a substrate used in a sixth embodiment of the present invention.

【図8】本発明の第7の実施例に用いる基板の分解斜視
図である。
FIG. 8 is an exploded perspective view of a substrate used in a seventh embodiment of the present invention.

【図9】(a)〜(c)は本発明の第8の実施例を説明
する工程順に示した断面図である。
FIGS. 9A to 9C are cross-sectional views shown in the order of steps for explaining an eighth embodiment of the present invention.

【図10】(a)〜(c)は本発明の第9の実施例を説
明する工程順に示した断面図である。
FIGS. 10A to 10C are cross-sectional views showing a ninth embodiment of the present invention in the order of steps for explaining the ninth embodiment.

【図11】(a),(b)は本発明の第10の実施例を
説明する工程順に示した断面斜視図である。
FIGS. 11 (a) and 11 (b) are cross-sectional perspective views showing a tenth embodiment of the present invention in the order of steps for explaining the tenth embodiment.

【図12】(a)〜(c)は本発明の第11の実施例を
説明する工程順に示した断面斜視図である。
FIGS. 12 (a) to 12 (c) are cross-sectional perspective views shown in the order of steps for explaining an eleventh embodiment of the present invention.

【図13】(a)〜(d)は本発明の第12の実施例を
説明する工程順に示した断面図である。
FIGS. 13A to 13D are cross-sectional views illustrating a twelfth embodiment of the present invention in the order of steps for explaining the twelfth embodiment.

【図14】従来の印刷配線板の製造方法の一例を説明す
る断面図である。
FIG. 14 is a cross-sectional view illustrating an example of a conventional method for manufacturing a printed wiring board.

【図15】従来の印刷配線板の製造方法の他の例を説明
する断面図である。
FIG. 15 is a cross-sectional view illustrating another example of a conventional method for manufacturing a printed wiring board.

【符号の説明】[Explanation of symbols]

1 基板 2 孔 2−1 表裏導通孔 3 導体めっき層 3−1,3−2,3−3 銅めっき層 4 導体パターン 6 薄板 7 穴埋め材 7−1 導電性穴埋め材 7−2 電気絶縁性穴埋め材 8 接着材 14,17,20,23 樹脂 15 めっきレジスト 16 布 18 ガラス繊維 18−1 第1のガラス繊維 18−2 第2のガラス繊維 18−3 第3のガラス繊維 19 ガラス格子 22 細板 DESCRIPTION OF SYMBOLS 1 Substrate 2 hole 2-1 Front and back conduction hole 3 Conductor plating layer 3-1, 3-2, 3-3 Copper plating layer 4 Conductor pattern 6 Thin plate 7 Filler 7-1 Conductive filler 7-2 Electrical insulation filler Material 8 Adhesive 14, 17, 20, 23 Resin 15 Plating resist 16 Cloth 18 Glass fiber 18-1 First glass fiber 18-2 Second glass fiber 18-3 Third glass fiber 19 Glass lattice 22 Thin plate

Claims (9)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 薄板に格子状に規則的に該薄板の厚さ程
度の小径の孔を形成する工程と、該孔に穴埋め材を充填
する工程と、前記薄板を複数枚重ね接着剤で接着して積
層し前記穴埋め材が充填され積層された前記孔を有する
基板を作成する工程と、該基板の前記穴埋め材を前記孔
から剥離し該孔を開口する工程と、該孔の壁面と前記基
板の表裏両面に導体をめっきし導体めっき層を形成する
工程とを有することを特徴とする印刷配線板の製造方
法。
1. A step of regularly forming a small-diameter hole having a thickness of about the thickness of a thin plate in a thin plate, a step of filling a hole filling material into the hole, and bonding the plurality of thin plates with an adhesive. Forming a substrate having the holes filled and filled with the hole-filling material, and laminating the hole-filling material of the substrate from the holes to open the holes; Plating a conductor on both sides of the substrate to form a conductor plating layer.
【請求項2】 前記薄板に小径の孔を形成する工程が、
ガラス繊維を平行に並べこのガラス繊維のそれぞれを直
角方向の樹脂の帯群で固定する工程を有する事を特徴と
する請求項1記載の印刷配線板の製造方法。
2. The step of forming a small-diameter hole in the thin plate,
2. The method for manufacturing a printed wiring board according to claim 1, further comprising a step of arranging the glass fibers in parallel and fixing each of the glass fibers with a group of resin bands in a perpendicular direction.
【請求項3】 孔に穴埋め材を充填した基板に導体パタ
ーンを形成する工程と、複数のこの基板の間に前記孔を
対応する位置に前記穴埋め材を充填した孔を有する薄板
を挟んで接着し積層して積層された孔に前記穴埋め材を
充填した基板を作成する工程と、該基板の前記穴埋め材
を前記孔から剥離し該孔を開口する工程と、該孔の壁面
と前記基板の表裏両面に導体めっきし導体めっき層を形
成する工程とを有することを特徴とする印刷配線板の製
造方法。
3. A step of forming a conductor pattern on a substrate having holes filled with a filling material, and bonding a thin plate having holes filled with the filling material at positions corresponding to the holes between a plurality of substrates. Forming a substrate in which the hole filling material is filled in the laminated holes, and a step of peeling the hole filling material of the substrate from the hole to open the hole; and forming a wall surface of the hole and the substrate. Forming a conductor plating layer by conducting conductor plating on both front and back surfaces.
【請求項4】 薄板に格子状に規則的に前記薄板の厚さ
程度の小径の孔を形成する工程と、該孔に穴埋め材を充
填する工程と、該薄板を複数枚重ねて接着して積層し前
記穴埋め材が充填され積層された前記小径の孔を有する
基板を作成する工程と、該基板に導体パターンを形成す
る工程と、該基板の開口する孔以外の部分に樹脂を印刷
し被覆する工程と、該基板の開口する孔以外の部分に樹
脂を印刷し被覆する工程と、該樹脂をマスクとして前記
穴埋め材を前記穴から剥離し該孔を開口する工程と、該
樹脂の表面と該孔の壁面に更に導体めっき層を形成する
工程とを有する事を特徴とする印刷配線板の製造方法。
4. A step of regularly forming a small-diameter hole having a thickness of about the thickness of the thin plate in a thin plate, a step of filling a hole filling material in the hole, and laminating and bonding a plurality of the thin plates. A step of forming a substrate having the small-diameter holes laminated and filled with the hole-filling material, a step of forming a conductor pattern on the substrate, and printing and coating a resin on portions of the substrate other than the holes to be opened. a step of the steps of the portion other than the holes opening in the substrate resin by printing coated, a step of opening the stripped pores the filling material to the resin as a mask from the holes, and the surface of the resin Forming a conductor plating layer on the wall surface of the hole.
【請求項5】 前記孔を開口する工程が、基板全面に導
体めっき層を形成する工程と、開口する孔の位置の前記
導体めっき層をエッチング除去し該導体めっき層をマス
クとして穴埋め材を剥離する工程とを有する事を特徴と
する請求項1または請求項3記載の印刷配線板の製造方
法。
5. The step of forming a hole includes forming a conductor plating layer on the entire surface of the substrate, etching the conductor plating layer at the position of the hole to be removed, and stripping the filling material using the conductor plating layer as a mask. claim 1 or claim 3 a method of manufacturing a printed wiring board according to characterized in that a step of.
【請求項6】 前記孔を開口する工程が、開口する前記
孔の位置以外の基板全面に樹脂を印刷する工程と、該樹
脂をマスクとして穴埋め材を剥離する工程とを有する事
を特徴とする請求項1または請求項3記載の印刷配線板
の製造方法。
6. The method according to claim 1, wherein the step of opening the hole includes a step of printing a resin on the entire surface of the substrate other than the position of the hole to be opened, and a step of peeling off the filling material using the resin as a mask. A method for manufacturing a printed wiring board according to claim 1 .
【請求項7】 前記孔を開口する工程が、一旦基板の穴
埋め材を全部剥離した跡に開口する前記孔以外の孔に前
記穴埋め材を充填する工程とを有する事を特徴とする請
求項1または請求項3記載の印刷配線板の製造方法。
7. The method according to claim 1, wherein the step of opening the hole includes the step of filling the hole filling material into holes other than the hole that is opened at the mark where the hole filling material on the substrate has been completely removed. A method for manufacturing a printed wiring board according to claim 3 .
【請求項8】 前記導体めっき層を形成する工程が、孔
壁と基板全面に前記導体めっき層を形成する工程と、エ
ッチングレジストを印刷しエッチングして導体パターン
を形成する工程とを有する事を特徴とする請求項1,請
求項3または請求項4記載の印刷配線板の製造方法。
8. The method according to claim 1, wherein the step of forming the conductor plating layer includes a step of forming the conductor plating layer on the hole walls and the entire surface of the substrate, and a step of printing and etching an etching resist to form a conductor pattern. claim 1, claim 3 or claim 4 method of manufacturing a printed wiring board, wherein.
【請求項9】 前記導体めっき層を形成する工程が、導
体パターンの逆版のパターンのめっきレジストを印刷す
る工程と、該めっきレジストをマスクとして孔壁と基板
全面に導体をめっきし導体パターンを形成する工程とを
有する事を特徴とする請求項1,請求項3または請求項
記載の印刷配線板の製造方法。
9. The step of forming the conductor plating layer includes the step of printing a plating resist having a reverse pattern of the conductor pattern, and plating the conductor on the hole wall and the entire surface of the substrate using the plating resist as a mask to form the conductor pattern. claim 1, claim 3 or claim, characterized in that a step of forming
5. The method for producing a printed wiring board according to item 4 .
JP6177869A 1994-07-29 1994-07-29 Manufacturing method of printed wiring board Expired - Fee Related JP2725605B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6177869A JP2725605B2 (en) 1994-07-29 1994-07-29 Manufacturing method of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6177869A JP2725605B2 (en) 1994-07-29 1994-07-29 Manufacturing method of printed wiring board

Publications (2)

Publication Number Publication Date
JPH0846322A JPH0846322A (en) 1996-02-16
JP2725605B2 true JP2725605B2 (en) 1998-03-11

Family

ID=16038492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6177869A Expired - Fee Related JP2725605B2 (en) 1994-07-29 1994-07-29 Manufacturing method of printed wiring board

Country Status (1)

Country Link
JP (1) JP2725605B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001129800A (en) * 1999-11-04 2001-05-15 Japan Science & Technology Corp Substrate with field-through and manufacturing method therefor
CN109275285A (en) * 2018-11-16 2019-01-25 江门崇达电路技术有限公司 A kind of the via hole method improving Reliability of PCB

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113675U (en) * 1984-01-06 1985-08-01 日本電気株式会社 hybrid integrated circuit board
JPS6112262U (en) * 1984-06-27 1986-01-24 富士通株式会社 Ceramic substrate for printed wiring board
JPS61107788A (en) * 1984-10-31 1986-05-26 株式会社日立製作所 Universal material for printed wiring board and manufacture of printed circuit board using the same
JPS63185092A (en) * 1987-01-27 1988-07-30 三菱電機株式会社 Manufacture of printed circuit board

Also Published As

Publication number Publication date
JPH0846322A (en) 1996-02-16

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