JP2714160B2 - Wet whetstone with pedestal and method of manufacturing the same - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wet grindstone with a pedestal comprising a combination of a wet whetstone which needs to be immersed in a liquid such as water when used and a plate-shaped pedestal, and a method of manufacturing the same.

2. Description of the Related Art For example, in a polishing process of an aluminum substrate for a magnetic disk or the like, a wet grinding wheel, that is, a grinding wheel that needs to be immersed in water or the like before starting use, may be used as a grinding wheel attached to a polishing apparatus. Such a wet-type grindstone is generally adhered to a plate-shaped pedestal, and attached to a polishing apparatus via this pedestal.

Conventionally, the adhesion of the wet grinding stone to the pedestal as described above has been performed in a dry state before immersion in water or the like due to the simplicity of the operation.

Problems to be Solved by the Invention However, when the wet-type grindstone is bonded to the pedestal in a dry state, there are the following disadvantages. That is, when the wet grinding wheel has a property of expanding in volume by impregnation with water or the like, for example, a grinding wheel based on polyvinyl alcohol (PVA), if the wet grinding wheel is immersed in water or the like upon use after bonding to the base, The volume of the grindstone tends to expand due to the impregnation. However, since the expansion rates of the whetstone and the pedestal are different, there is a disadvantage that the pedestal (200) is warped as shown in FIG. Therefore, when such a wet grindstone with a pedestal is attached to the surface plate (210) of the polishing apparatus as shown in FIG. 8, a gap (220) is generated between the surface plate (210) and the pedestal (200). When the polishing is performed in this state, the pedestal (200) operates like a leaf spring according to the processing pressure. Therefore, the pressing force applied from the wet grinding wheel (230) to the workpiece (240) is uneven. As a result, there arises a problem that an abrasive product having good straightness and flatness cannot be obtained.

The present invention has been made in view of such technical background, and provides a wet grindstone with a pedestal capable of preventing warpage of the pedestal and thereby obtaining an abrasive product excellent in straightness and flatness, and a method of manufacturing the same. It is intended for.

Means for Solving the Problems In order to achieve the above object, the present invention is not to bond a wet whetstone to a pedestal in a dry state, but to bond the wet whetstone in a state of being impregnated with a liquid such as water in advance and expanding its volume. That is.

That is, the present invention is characterized in that a wet whetstone (1), which expands in volume by impregnation with a liquid such as water, is adhered to a plate-shaped pedestal (2) in a state of being impregnated with a liquid in advance. In producing a wet whetstone with a pedestal by bonding a wet whetstone (1) that expands in volume by impregnation of a whetstone and a liquid such as water to a plate-shaped pedestal (2), the whetstone (1) is impregnated with a liquid in advance. The gist of the present invention is a method of manufacturing a wet grindstone with a pedestal, which is bonded to the pedestal (2) in a state.

The volume of the wet grinding wheel (1) expands due to impregnation with water or the like.
In this state, since the pedestal (2) is adhered to the pedestal (2), the pedestal (2) no longer warps due to the volume expansion of the grindstone.

Embodiment Next, an embodiment of the present invention will be described.

1 and 2, (1) is a wet grinding wheel,
(2) is a pedestal. The wet grindstone (1) is formed based on a synthetic resin such as PVA, and has a property of causing volume expansion when impregnated with a liquid such as water. on the other hand,
The pedestal (2) is made of an aluminum plate having a thickness of about 10 mm.

The wet whetstone (1) is bonded to the pedestal (2) to form a wet whetstone with a pedestal (3). Impregnated. Due to this impregnation, the volume of the grindstone (1) is expanded to a maximum as compared with the dry state (indicated by a chain line in FIG. 1).
In this state, it is adhered to the pedestal (2). The bonding means is not particularly limited, and a known adhesive or the like may be used.

As shown in FIG. 2, the pedestal-type wet grindstone (3) manufactured as described above is mounted on a polishing machine mounting platen (4).
Attach it with screws or other means. Since the wet grinding wheel (1) is already immersed in water or the like, it is not necessary to immerse it again. Moreover, since the wet grinding wheel (1) is adhered to the pedestal (2) in a state where its volume is expanded, the pedestal (2) does not warp, so that the pedestal (2) is as shown in FIG. Close contact with the surface plate (4) without gaps.

The polishing is performed by moving one or both of the grindstone (1) and the workpiece (5) while supplying a polishing liquid to the polishing surface in a state where the grindstone (1) is pressed against the workpiece (5). . Since the pedestal (2) is not warped, the grindstone (1) is pressed against the object to be polished with a uniform pressure, and good polishing is performed. The wet grindstone (1) is usually used after being impregnated with water or the like, and then always maintained in the impregnated state, and rarely becomes dry again during use. Incidentally, as shown in FIG. 3, a trapezoidal wet grinding wheel (1 ') having a short side (l ₁ ): 55 mm, a long side (l ₂ ): 170 mm, and a thickness (t ₁ ): 50 mm is immersed in water. After the, the thickness (t _2): 'was adhered to, pedestal (2 10mm of the base (2)' warping of the) was hardly observed. On the other hand, when a wet grindstone (1 ") having the same shape was adhered to the pedestal (2") in a dry state and impregnated with water, the pedestal (2 ") was convex on the grindstone side as shown in FIG. Warpage, and the pedestal (2 ")
The difference (h) between the most warped portion and the edge was about 1 mm.

FIG. 5 and FIG. 6 show an example of a plane polishing machine using the whetstone with a pedestal according to the present invention. In the figure, (A) is a plane polishing machine, which comprises a pair of upper and lower opposed platens (10) and (20), and a vertical wet type with a pedestal (2) attached to the inner surface of each platen. Grinding wheels (1), (1), a sun gear (50) arranged between the grinding wheels (1), (1) at the axis of the grinding wheel, and an inner gear arranged concentrically outside the sun gear (50). A toothed gear (60), and one or more thin plate spur gear-shaped workpiece holders arranged so that the outer peripheral surface is meshed with any of the sun gear (50) and the internal gear (60). (7
0). Further, a plurality of holes are formed in each of the retainers (70), and the disc-shaped object to be polished (B) is held in the holes in such a state. Further, the upper and lower platens (10) and (20) are connected to the first motor (11) via the drive shafts (10a) and (20a) and the sprockets (10b) and (20b).
0), and is rotated by the drive of the motor (110). The upper platen (10) is supported by a cylinder (not shown) so as to be able to move up and down, and at the lowering position shown in FIG.
0a ') to apply a rotational force in a direction opposite to that of the lower platen (20). Meanwhile, sun gear (50)
Is the second through the drive shaft (50a) and sprocket (50b)
The motor (120) and the internal gear (60)
a) and the third motor (13) via the sprocket (60b).
0) connected to each of these motors (120)
By the drive of (130), they rotate at different rotation speeds,
Thus, the retainer (70) can revolve while rotating in a planetary gear shape. In addition, upper and lower surface plate (10)
(20), sun gear (50) and internal gear (60)
The desired ratio is set in advance so that both surfaces of the object to be polished (B) can be processed equally.

In the above plane polishing machine, first, the work (B) to be polished is set on the work holder (70), and then the upper and lower platens (10) and (20).
To bring the wet grinding stones (1) and (1) into pressure contact with the object (B) to be polished with a predetermined pressure. Next, the first to third motors (110), (120), (130) are driven, and the upper and lower platens (10), (2)
0), rotate the sun gear (50) and the internal gear (60).
Due to the rotation of the sun gear (50) and the internal gear (60), the workpiece holder (70) revolves around the center of rotation of the vertical wet-type grindstone (1) while revolving, and rotates. ) (1)
The polishing of the object (B) to be polished is performed by the action described above.

In the illustrated plane polishing machine, as shown in FIG. 6, a donut-shaped aluminum disk is used as a pedestal (2) for bonding the wet-type grindstone (1), while the wet-type grindstone (1) has a plurality of fan-shaped grindstones. Each of the unit grinding wheels (1a) is immersed in water or the like, and is then arranged in a donut shape along the pedestal (2) and adhered to the pedestal (2).

Effect of the Invention According to the present invention, a wet whetstone is bonded to a pedestal in a state where the volume is expanded by impregnating with a liquid such as water in advance as described above. Therefore, when the wet grinding wheel is adhered to the pedestal in a dry state and then impregnated with water or the like, the pedestal warpage caused by the volume expansion of the grinding wheel can be eliminated. As a result, a uniform pressing force can be applied from the grindstone to the entire processing surface of the object to be polished at the time of polishing, and a polished product excellent in straightness and flatness can be provided.

[Brief description of the drawings]

FIG. 1 is a front view showing a wet whetstone with a pedestal according to an embodiment of the present invention in a state before bonding the whetstone and the pedestal, and FIG. 2 is a surface plate of a polishing machine using the wet whetstone with a pedestal of FIG. FIG. 3 is a perspective view of a wet grindstone with a pedestal used in a test for confirming the occurrence of warpage, and FIG. 4 is a front view of a conventional wet grindstone also used in the confirmation test. Fig. 5 is a front partial cross-sectional view of a plane polishing machine using the product of the present invention, Fig. 6 is a perspective view of a main part showing a use state of the polishing machine of Fig. 5, and Fig. 7 is a conventional wet type with a base. Figure 8 is a front view of the whetstone.
It is a front sectional view showing the state where the whetstone of the figure was attached to the surface plate of a grinding machine. (1) ... wet grinding wheel, (2) ... pedestal, (3) ... wet grinding wheel with pedestal.

Claims (2)

(57) [Claims] 1. A wet grindstone with a pedestal, characterized in that a wet grindstone (1), which expands in volume by impregnation with a liquid such as water, is bonded to a plate-shaped pedestal (2) in a state of being impregnated with a liquid in advance. . 2. A method of manufacturing a wet whetstone with a pedestal by bonding a wet whetstone (1), which expands in volume by impregnation with a liquid such as water, to a plate-shaped pedestal (2), impregnating the whetstone (1) with a liquid in advance. A method for manufacturing a wet grindstone with a pedestal, wherein the method is bonded to the pedestal (2) in this state.