JP2694705B2 - Synthetic grindstone for high-purity aluminum substrate polishing - Google Patents

Synthetic grindstone for high-purity aluminum substrate polishing

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Publication number
JP2694705B2
JP2694705B2 JP3039538A JP3953891A JP2694705B2 JP 2694705 B2 JP2694705 B2 JP 2694705B2 JP 3039538 A JP3039538 A JP 3039538A JP 3953891 A JP3953891 A JP 3953891A JP 2694705 B2 JP2694705 B2 JP 2694705B2
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JP
Japan
Prior art keywords
grindstone
polishing
synthetic
resin
abrasive grains
Prior art date
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JP3039538A
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Japanese (ja)
Other versions
JPH04256581A (en
Inventor
敢 佐藤
勝 中村
洋司 富田
武 山崎
Original Assignee
鐘紡株式会社
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、例えばコンピュータ用
外部記憶装置に用いるアルミニウム合金製ディスク原盤
(以下、「アルミディスク」と略称する)等、比較的軟
質の金属の平面を精密研磨するための合成砥石に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is for precision polishing a flat surface of a relatively soft metal such as an aluminum alloy disk master (hereinafter abbreviated as "aluminum disk") used for an external storage device for a computer. Regarding synthetic whetstones.

【0002】[0002]

【従来の技術】コンピュータの外部記憶装置として、リ
ジッドディスクドライブがあり、その記憶媒体として
は、平坦かつ平滑な非磁性体基盤上に磁性体微粒子を被
着したメモリーディスクが通常使用されている。かかる
メモリーディスクに使用される円盤状をした基盤は、そ
の表面を、傷や凹凸、起伏等の欠点のない、全体の平坦
度の極めてすぐれた、鏡面状態にまで精密に仕上げる必
要がある。
2. Description of the Related Art There is a rigid disk drive as an external storage device of a computer, and as the storage medium, a memory disk in which magnetic fine particles are coated on a flat and smooth non-magnetic substrate is usually used. The disk-shaped substrate used for such a memory disk is required to have its surface precisely finished to a mirror-like state with excellent flatness without defects such as scratches, unevenness, and undulations.

【0003】従来、メモリーディスクに使用される基盤
としては、アルミ合金製のものが一般に用いられ、その
標準材は、純度99%程度のアルミニウムを約96%と
マグネシウムを約4%との合金よりなるものであった。
Conventionally, a base made of an aluminum alloy has been generally used as a base for a memory disk, and a standard material thereof is an alloy of about 96% aluminum having a purity of about 99% and about 4% magnesium. It was.

【0004】最近になり、外部記憶装置の小型化、大容
量化に伴ない、合金原料としてのアルミニウムの純度を
より高くするのが有効であることが見出され、アルミニ
ウムの純度が99.9%、好ましくは99.99%とい
った高純度のものと、マグネシウムとの合金製の基盤
(以下、「高純材アルミ基盤」という)が用いられるよ
うになった。
Recently, it has been found that it is effective to increase the purity of aluminum as an alloy raw material in accordance with the miniaturization and large capacity of an external storage device, and the purity of aluminum is 99.9. %, Preferably 99.99%, and a base made of an alloy of magnesium (hereinafter referred to as “high-purity aluminum base”) have come to be used.

【0005】上述の如き基盤の表面仕上げ加工に供する
砥石としては、連続微細気孔を具え、砥粒粒子をポリビ
ニルアセタール系樹脂と熱硬化性樹脂によって結合し、
かつ表面硬度(H)と砥粒番手(G)とが特定の式を満
足する関係にある研磨用砥石(特開昭61−18277
4号公報、特開昭61−192480号公報)が知られ
ている。
As the grindstone to be used for the surface finishing of the substrate as described above, it has continuous fine pores, and the abrasive grains are bonded by polyvinyl acetal resin and thermosetting resin,
In addition, a grinding wheel having a surface hardness (H) and an abrasive grain count (G) satisfying a specific expression (Japanese Patent Laid-Open No. 61-18277).
4 and Japanese Patent Laid-Open No. 61-192480).

【0006】上記公知砥石は、標準材による基盤の表面
を精密に仕上げるには好ましいものであった。しかしな
がら、高純材基盤は標準材基盤に比べ、軟質かつ粘性の
高い物性であって、従来の砥石を用いて研磨した場合、
研磨速度が低く、砥石表面の目づまりが発生しやすいた
め、研磨効率、生産性が極めて低いものとなる。高純材
基盤を高精度で効率よく研磨しうる合成砥石は、未だ満
足すべきものが提案されていないのが現状である。
The above-mentioned known grindstone is preferable for precisely finishing the surface of the base made of the standard material. However, the high-purity substrate is softer and more viscous than the standard substrate, and when polished with a conventional grindstone,
Since the polishing rate is low and the surface of the grindstone is likely to be clogged, the polishing efficiency and productivity are extremely low. At present, there is no proposal of a synthetic grindstone capable of polishing a highly pure material substrate with high accuracy and efficiency.

【0007】[0007]

【発明が解決しようとする課題】本発明者等は、上述の
事情に鑑み鋭意研究した結果、高純材基盤を効率よく精
密研磨する砥石に必要とされる要件を見出し、本発明を
完成したものであって、本発明の目的は、高純材基盤に
対し、平坦性,平滑性に優れた精密表面加工ができ、か
つ高い研磨速度と研磨力の持続性の良好な研磨をし得る
合成砥石を提供するにある。
DISCLOSURE OF THE INVENTION The inventors of the present invention have conducted intensive studies in view of the above circumstances, and as a result, found the requirements for a grindstone for efficiently and precisely polishing a high-purity material substrate, and completed the present invention. Therefore, an object of the present invention is to provide a synthetic grindstone capable of precision surface processing excellent in flatness and smoothness on a high-purity material substrate, and capable of polishing with a high polishing rate and durability of polishing power. It is in.

【0008】[0008]

【課題を解決するための手段】本発明の目的は、砥粒粒
子を合成樹脂にて結合した連続微細気孔を有する三次元
網状組織を具えた構造体であって、前記合成樹脂がポリ
ビニルアセタール系樹脂と熱硬化性樹脂の硬化体よりな
り、前記砥粒粒子の占める体積(VA)と前記合成樹脂
の占める体積(VR)との比(VA/VR)が0.6〜
1.3で、その気孔率が70〜85%で、かつ乾燥時と
湿潤時との寸法変化が2.0%以下であることを特徴と
する高純材アルミ基盤研磨用合成砥石によって達成され
る。
An object of the present invention is to provide a structure having a three-dimensional network structure having continuous fine pores in which abrasive grains are bonded by a synthetic resin, wherein the synthetic resin is a polyvinyl acetal-based structure. It is made of a cured product of resin and thermosetting resin, and the ratio (VA / VR) of the volume (VA) occupied by the abrasive particles and the volume (VR) occupied by the synthetic resin is 0.6 to.
1.3, the porosity is 70 to 85%, and the dimensional change between dry and wet is 2.0% or less.

【0009】本発明の合成砥石は、連続微細気孔を具え
た三次元網状組織をなす構造体である。その平均気孔径
は200μm以下、好ましくは100μm以下、更に好
ましくは25μm以下で、均一性のよいものが好適であ
る。気孔径が大き過ぎるものは、構造部の方が疎となり
過ぎて、研磨作業に際し、その部分に極圧がかかり、研
磨面に不規則模様や局部的条痕が発生する。
The synthetic grindstone of the present invention is a structure having a three-dimensional network structure having continuous fine pores. The average pore diameter is 200 μm or less, preferably 100 μm or less, more preferably 25 μm or less, and one having good uniformity is suitable. If the pore diameter is too large, the structural portion becomes too sparse, and extreme pressure is applied to the portion during the polishing work, and an irregular pattern or local scratches are generated on the polishing surface.

【0010】本発明に用いられる砥粒粒子としては、例
えば炭化珪素、熔融アミルナ、エメリー、ガーネット、
ダイヤモンド、窒化ケイ素、酸化クロム、酸化セリウム
等の微細粒子をあげることが出来るが、就中炭化珪素が
本発明の目的に対し好適である。また砥粒粒子の大きさ
は、番手が1000番以上、好ましくは1500番以上
の高番手品である。ここで砥粒の番手とは、JIS規格
R6001に記載された粒度に分級されたものであっ
て、平均粒径に対して規格内の分散を有するものであ
る。
The abrasive grains used in the present invention include, for example, silicon carbide, fused amylna, emery, garnet,
Fine particles of diamond, silicon nitride, chromium oxide, cerium oxide and the like can be mentioned, but silicon carbide is preferable for the purpose of the present invention. The size of the abrasive grains is a high count product having a count of 1000 or more, preferably 1500 or more. Here, the grain count of the abrasive grains is classified into the grain size described in JIS standard R6001, and has a dispersion within the standard with respect to the average grain size.

【0011】上記砥粒粒子を結合する合成樹脂として
は、ポリビニルアセタール(以下、「PVAt」と略記
する)系樹脂のほかに、熱硬化性樹脂の硬化体が併用さ
れる。PVAt系樹脂は、微細砥粒を保持する力にすぐ
れ、砥粒粒子が合成砥石から簡単に脱落したり、散失し
たりするのを効果的に防止する性質がある。また、熱硬
化性樹脂は、合成砥石の必要とする硬さ、脆さ及び寸法
安定性を付与するものである。
As the synthetic resin for binding the above-mentioned abrasive grains, a polyvinyl acetal (hereinafter abbreviated as "PVAt") type resin and a cured body of a thermosetting resin are used together. The PVAt resin has an excellent ability to hold fine abrasive grains and has a property of effectively preventing the abrasive grains from easily falling off from the synthetic grindstone or scattering. Further, the thermosetting resin imparts the hardness, brittleness and dimensional stability required for the synthetic grindstone.

【0012】上記熱硬化性樹脂としては、例えばメラミ
ン系樹脂、ウレタン系樹脂、フェノール系樹脂、エポキ
シ系樹脂、尿素系樹脂等を挙げることができ、これらを
単独または2種以上を併用してもよい。本発明において
はメラミン系樹脂とフェノール系樹脂を併用したものが
好適である。熱硬化性樹脂の種類と量は、合成砥石に求
められる硬度、脆さ及び寸法安定性に応じ適宜選定すれ
ばよい。
Examples of the thermosetting resin include melamine-based resins, urethane-based resins, phenol-based resins, epoxy-based resins, urea-based resins and the like. These may be used alone or in combination of two or more. Good. In the present invention, a combination of a melamine resin and a phenol resin is suitable. The type and amount of the thermosetting resin may be appropriately selected according to the hardness, brittleness and dimensional stability required for the synthetic grindstone.

【0013】本発明において、前記砥粒粒子と前記合成
樹脂との混合割合は、それぞれの占める体積をVA 、V
R としたとき、その体積比VA /VR (以下、「分散密
度」という)は、0.6〜1.3であり、好ましくは
0.6〜1.2である。従来実用されているアルミディ
スク用合成砥石の分散密度が、0.6よりも小さい、通
常0.5以下であることを考えれば極めて大きい値とい
える。即ち、本発明者等は、高純材基盤の表面を高精度
に仕上げるには、砥粒粒子と合成樹脂との割合に下限と
上限があり、本発明の範囲内においてはじめて可能とな
ることを見出したものである。
In the present invention, the mixing ratio of the abrasive grains and the synthetic resin is such that the volume occupied by each is V A , V.
When R , the volume ratio V A / V R (hereinafter referred to as “dispersion density”) is 0.6 to 1.3, and preferably 0.6 to 1.2. Considering that the dispersion density of the conventionally used synthetic grindstone for aluminum disks is smaller than 0.6, usually 0.5 or less, it can be said to be an extremely large value. That is, the present inventors have found that in order to finish the surface of the high-purity material substrate with high accuracy, the ratio between the abrasive particles and the synthetic resin has a lower limit and an upper limit, and it is possible for the first time within the scope of the present invention. It is a thing.

【0014】上記分散密度が0.6未満の場合は、高純
材基盤に対し充分な研磨速度が得られず、効率のよい研
磨ができない。しかも、結合材である合成樹脂により、
表面が不必要に摩擦されるために、被研磨体の表面が異
常光沢を有し、更に平坦度等の形状精度も低下する。一
方、分散密度が1.3より大きい場合は、表面が粗く仕
上り、必要とされる精度の表面に仕上げることができな
い。
If the dispersion density is less than 0.6, a sufficient polishing rate cannot be obtained for a highly pure substrate, and efficient polishing cannot be achieved. Moreover, due to the synthetic resin that is the binder,
Since the surface is rubbed unnecessarily, the surface of the object to be polished has an abnormal gloss, and further, the shape accuracy such as flatness is lowered. On the other hand, when the dispersion density is larger than 1.3, the surface is roughened and the surface cannot be finished to the required accuracy.

【0015】本発明の合成砥石は、連続気孔を有する多
孔質構造であり、連続気孔とすることで、研磨に伴う熱
を速やかに放散し、蓄熱を防ぐことができる。更に、気
孔は研磨に用いる研磨液を保持すると共に、研磨作用面
から脱落した砥粒、研磨屑細片等を一時的に把持し、作
用面に悪影響を与えることを防止するという極めて重要
な役割がある。
The synthetic grindstone of the present invention has a porous structure having continuous pores, and by forming the continuous pores, the heat associated with polishing can be quickly dissipated, and heat accumulation can be prevented. Further, the pores have a very important role of holding the polishing liquid used for polishing and temporarily holding the abrasive grains, polishing debris, etc., which have fallen off the polishing surface, and preventing the polishing surface from being adversely affected. There is.

【0016】上述の如き作用を十分に行い、かつ高精度
の表面研磨を達成するには、その気孔率を70〜85容
量%とする必要がある。気孔率が70容量%より小さい
場合には、脱落した砥粒や研磨屑等の把持容量が十分で
なく、目づまりの進行がはやく、高精度で連続研磨でき
るバッチ数が低下する。このため、研磨面の更新(ドレ
ッシング)作業の頻度が増大し、生産性が著しく低下す
る。
In order to sufficiently perform the above-mentioned actions and achieve highly accurate surface polishing, the porosity thereof needs to be 70 to 85% by volume. When the porosity is less than 70% by volume, the grasping capacity for the lost abrasive grains and polishing debris is not sufficient, the clogging progresses rapidly, and the number of batches that can be continuously polished with high accuracy decreases. For this reason, the frequency of renewal (dressing) work of the polishing surface is increased, and the productivity is significantly reduced.

【0017】一方、気孔率が85%より大きい場合は、
合成砥石としての機械的強度が不足し、砥石自体の磨耗
が著しく、砥石作用面の形状が狂い易くなり、本発明の
目的が達成できない。
On the other hand, when the porosity is larger than 85%,
The mechanical strength as a synthetic grindstone is insufficient, the grindstone itself is significantly worn, and the shape of the working surface of the grindstone is apt to change, and the object of the present invention cannot be achieved.

【0018】本発明の合成砥石は、乾燥時と湿潤時との
寸法変化、所謂膨潤率が2.0%以下である。ここで言
う膨潤率(Ds)とは、乾燥時の寸法(Td)に対する
湿潤時の寸法(Tw)を測定し、式 Ds=(Tw−Td)/Td×100 で求められる値である。
The synthetic grindstone of the present invention has a so-called swelling ratio of 2.0% or less in dimensional change between dry and wet. The swelling ratio (Ds) referred to here is a value obtained by measuring the dimension (Tw) in the wet state with respect to the dimension (Td) in the dry state and using the equation Ds = (Tw-Td) / Td × 100.

【0019】上記膨潤率が2.0%より大きい場合に
は、砥粒に対する結合力、即ち抱合力が高過ぎて、切刃
の研磨力を喪失してからも脱落せず、合成砥石構造内に
留まることになる。その結果、合成砥石は砥石としての
十分な研磨力を失ない、研磨速度が低下するのみなら
ず、研磨面に異常な光沢を与え、更に砥石の目づまり現
象も促進することとなる。
When the swelling ratio is more than 2.0%, the binding force to the abrasive grains, that is, the tie force, is too high and the cutting edge does not fall off even after the polishing force of the cutting edge is lost. Will remain. As a result, the synthetic grindstone does not lose sufficient polishing power as a grindstone, not only reduces the polishing rate, but also imparts an abnormal luster to the polished surface and further accelerates the clogging phenomenon of the grindstone.

【0020】通常、PVAt系樹脂を結合剤とした合成
砥石は、膨潤率の極めて大きいものである。また、PV
At系樹脂に熱硬化性樹脂を併用した膨潤率の低いもの
も知られているが、熱硬化性樹脂を併用する理由は、主
として砥石に必要な硬さと脆さを賦与することにあっ
た。このため、かかる合成砥石を製造するに際し、膨潤
率は従来ほとんど考慮されておらず、一般に膨潤率は2
%より大きいものであった。
Usually, a synthetic grindstone using a PVAt resin as a binder has an extremely large swelling rate. Also, PV
There is also known a resin having a low swelling ratio in which a thermosetting resin is used in combination with an At resin, but the reason for using the thermosetting resin in combination is mainly to impart hardness and brittleness required for a grindstone. Therefore, when manufacturing such a synthetic whetstone, the swelling ratio has not been considered so far, and the swelling ratio is generally 2%.
Was greater than%.

【0021】即ち、本発明においては、熱硬化性樹脂の
種類と量は、膨潤率を2.0%以下となるように選定す
ることが極めて肝要である。
That is, in the present invention, it is extremely important to select the type and amount of the thermosetting resin so that the swelling rate is 2.0% or less.

【0022】本発明にかかる砥石は例えば次の如き方法
にて製造される。
The grindstone according to the present invention is manufactured, for example, by the following method.

【0023】即ち、平均重合度300〜2000の完全
ケン化または部分ケン化のポリビニルアルコールあるい
はその変性体の一種又は二種以上を温水に溶解して水溶
液となし、それに熱硬化性樹脂のプレポリマーあるいは
前駆体の水溶液、非水溶性溶液、エマルジョンまたはそ
の粉末を所定加え、更に必要に応じてその触媒を加え
た後、均一に攪拌し、更に所定量の砥粒粒子と架橋剤と
してのアルデヒド類、触媒としての酸類、及び気孔生成
剤としての澱粉類等を加え、均一粘稠スラリーを調製
し、これを所望の型枠に注型する。
That is, one or two or more of completely saponified or partially saponified polyvinyl alcohol having an average degree of polymerization of 300 to 2000 or a modified product thereof is dissolved in hot water to form an aqueous solution, and a thermosetting resin prepolymer. or an aqueous solution of the precursor, non-aqueous solvent mixture was added a predetermined amount of the emulsion or a powder, after which the catalyst was added, if necessary, uniformly stirred, further predetermined amount of the abrasive grains particles as a crosslinking agent Aldehydes, acids as a catalyst, starches as a pore-forming agent, etc. are added to prepare a uniform viscous slurry, which is cast in a desired mold.

【0024】上述の方法において、砥粒粒子の配合量
は、砥粒の比重を考慮し、合成樹脂との混合割合が本発
明の範囲内となるよう適宜選定すればよい。また気孔形
成材の配合量は、得られる合成砥石の気孔率が70〜8
5容量%となるよう適宜選定すればよい。
In the above-mentioned method, the blending amount of the abrasive grains may be appropriately selected in consideration of the specific gravity of the abrasive grains so that the mixing ratio with the synthetic resin is within the range of the present invention. The porosity of the obtained synthetic grindstone is 70 to 8 when the amount of the pore forming material is mixed.
It may be appropriately selected so as to be 5% by volume.

【0025】然る後、40〜100℃の温度にて均一昼
夜反応固化を行った後取出し、水洗して気孔形成材およ
び未反応のアルデヒド類、酸類を除去して中間体を得
る。得られた中間体は形態的には砥石の形をしている
が、樹脂の硬化反応はまだ進んでおらず、物性的には不
十分である。
After that, the reaction solidification is carried out at a temperature of 40 to 100 ° C. for a whole day and night, and the product is taken out and washed with water to remove the pore-forming material and unreacted aldehydes and acids to obtain an intermediate. The obtained intermediate is morphologically in the shape of a grindstone, but the curing reaction of the resin has not yet proceeded and the physical properties are insufficient.

【0026】次に、この中間体を乾燥した後、樹脂を硬
化させるため、熱処理(キュアリング)を行う。熱処理
条件は、使用した熱硬化性樹脂の種類及び量によって適
宜設定すればよいが、一般的には100〜180℃で約
30時間程度施すことで、硬化反応はほぼ達成される。
Next, after drying this intermediate, heat treatment (curing) is performed to cure the resin. The heat treatment conditions may be appropriately set depending on the type and amount of the thermosetting resin used, but generally, the curing reaction is almost achieved by performing the heat treatment at 100 to 180 ° C. for about 30 hours.

【0027】樹脂が硬化することにより、砥石として必
要な硬さ、脆さ及び寸法安定性が付与され、本発明の合
成砥石が得られる。
By hardening the resin, the hardness, brittleness and dimensional stability necessary for the grindstone are imparted, and the synthetic grindstone of the present invention is obtained.

【0028】上述の製造方法において、熱硬化性樹脂は
前述の如く反応原液の調製時に混合しても良いが、中間
体を得た後に、その前駆体の水溶液を中間体に含浸せし
め、これをキュアリングしても良い。また、2種以上の
熱硬化性樹脂を併用する場合は、一方の樹脂を反応原液
中に加え、他方の樹脂を後含浸で施与してもよく、特に
限定されるものではない。特に、メラミン系樹脂を用い
る場合には、中間体に含浸せしめる方法が好適である。
In the above-mentioned production method, the thermosetting resin may be mixed at the time of preparing the reaction stock solution as described above. However, after the intermediate is obtained, the aqueous solution of the precursor is impregnated into the intermediate, which is then added. Can be cured. Further, when two or more thermosetting resins are used in combination, one resin may be added to the reaction stock solution and the other resin may be applied by post-impregnation, and there is no particular limitation. In particular, when a melamine-based resin is used, a method of impregnating the intermediate is suitable.

【0029】前述の如くして得られた砥石は所望の形状
に成形された後、例えば両面ラッピング式研磨機等、極
めて精密な装置に装着して用いられる。
The grindstone obtained as described above is shaped into a desired shape and then mounted on an extremely precise device such as a double-sided lapping grinder.

【0030】[0030]

【実施例】以下、実施例により本発明を詳述する。な
お、その前に本実施例において使用した研磨装置、測定
機器、被研磨体等は次の通りである。
EXAMPLES The present invention will be described in detail below with reference to examples. Prior to that, the polishing apparatus, the measuring instrument, the object to be polished and the like used in this example are as follows.

【0031】 ○研磨装置………スピードファム社製両面研磨機 (型式3FDL−16B−4SSG−4D) ○表面粗さ計……東京精密製表面粗さ計 (型式サーフコム553A) ○結合度測定機…東京工機製 大越式砥石結合度試験機 ○硬度計…………ロックウェル硬度計(松沢精機製)○ Polishing device ………… Speedfam double-sided polishing machine (model 3FDL-16B-4SSG-4D) ○ Surface roughness meter …… Tokyo Seimitsu surface roughness meter (model Surfcom 553A) ○ Coupling degree measuring machine … Tokyo Koki's Ogoshi-type grindstone bond tester ○ Hardness tester ………… Rockwell hardness tester (Matsuzawa Seiki)

【0032】○被研磨材………JIS規格A5586に
記載の純度99.9%以上の高純度アルミニウム96%
とマグネシウム4%からなるアルミニウム合金製環状板
(神戸製鋼所製)。
Material to be polished: 96% high-purity aluminum with a purity of 99.9% or more according to JIS standard A5586
Aluminum alloy ring plate (made by Kobe Steel) consisting of 4% magnesium and magnesium.

【0033】また、研磨条件及び測定条件は下記の通り
である。
The polishing conditions and measurement conditions are as follows.

【0034】<研磨条件> ○圧力、研磨時間……50g/cm2 にて0.5分研磨
の後100g/cm2 にて3分研磨 ○上部定盤回転数……23.6r.p.m.(左回り) ○下部定盤回転数……60.0r.p.m.(右回り) ○キャリアー回転数…自転 4.8rpm(左回り) 公転 19.3rpm(右回り) ○研磨液………………ベルクーラント#3001(鐘紡
製)1%水溶液 ○研磨液供給量………5l/分
<Polishing conditions> ○ Pressure, polishing time: polishing at 50 g / cm 2 for 0.5 minutes and then at 100 g / cm 2 for 3 minutes ○ Upper surface plate rotation speed: 23.6 r. p. m. (Counterclockwise) ○ Lower platen rotation speed …… 60.0r. p. m. (Clockwise) ○ Carrier rotation speed… Spinning 4.8 rpm (counterclockwise) Revolution 19.3 rpm (clockwise) ○ Polishing liquid ………… Bell coolant # 3001 (Kanebo) 1% aqueous solution ○ Polishing liquid supply amount ……… 5 l / min

【0035】<表面精度測定条件> ○Ra、Rmax・カットオフ値…0.8mm以上 ・測定長…………2.5mm ○WCM ・カットオフ値…0.8mm以下 ・測定位置………円周の半径方向に内周端より外周端まで。 なお、ここでいうRa,Rmax,WCMについては、次
式で表わされるパラメータである。Ra…中心線平均粗
<Surface accuracy measurement conditions> ○ Ra, Rmax ・ Cutoff value… 0.8 mm or more ・ Measurement length ………… 2.5 mm ○ W CM・ Cutoff value… 0.8 mm or less ・ Measurement position ……… From the inner edge to the outer edge in the radial direction of the circumference. Note that Ra, Rmax, and W CM referred to here are parameters represented by the following equations. Ra ... center line average roughness

【数1】 f(x)は粗さ曲線を示す。 Rmax…最大粗さ Rmax=Pmax−Vmax Pmax:粗さ曲線における最大山高さ Vmin:粗さ曲線における最大谷深さ WCM…ろ波最大うねり WCM=W1 −W2 1 :ろ波うねり曲線における最大山高さ W2 :ろ波うねり曲線における最大谷深さ(Equation 1) f (x) shows a roughness curve. Rmax ... maximum roughness Rmax = Pmax-Vmax Pmax: maximum peak height in the roughness curve Vmin: up to a maximum valley depth W CM ... filtering in the roughness curve undulation W CM = W 1 -W 2 W 1: filtered waviness Maximum peak height on curve W 2 : Maximum valley depth on filtered wave curve

【0036】<表面硬度測定条件> ロックウェルスーパーフィシャル15−Yスケール使用 荷重 1.5kg 測定子 1/2インチ鋼球<Surface hardness measurement conditions> Rockwell Superficial 15-Y scale use load 1.5 kg probe 1/2 inch steel ball

【0037】<結合度測定条件>荷重7kgを用い、J
IS R−6240法に準拠した方法で測定した。
<Condition measuring conditions> Using a load of 7 kg, J
It measured by the method based on ISR-6240 method.

【0038】(実施例1〜5、比較例1〜6)砥粒とし
て、炭化珪素粉末の1500番(平均粒径7.2〜8.
6μm)及び3000番(平均粒径3.5〜4.5μ
m)のものを選定した。
(Examples 1 to 5, Comparative Examples 1 to 6) As abrasive grains, silicon carbide powder No. 1500 (average grain size 7.2 to 8.
6 μm) and No. 3000 (average particle size 3.5 to 4.5 μm)
m) was selected.

【0039】重合度500及び1700の部分ケン化ポ
リビニルアルコールを水溶液となし、これに気孔形成材
としてのコーンスターチ、架橋剤としてのホルムアルデ
ヒド水溶液、メラミン樹脂SM−700(昭和高分子
(株)製)の水溶液及びフェノール樹脂PR−961A
(住友ベークライト(株)製)を所定量加えた後、前述
の砥粒を所定量混合し、更に触媒としての塩酸を加えて
攪拌混合し、均一なスラリー状液を調製した。
A partially saponified polyvinyl alcohol having a degree of polymerization of 500 and 1700 was made into an aqueous solution, and cornstarch as a pore-forming material, an aqueous formaldehyde solution as a cross-linking agent, and melamine resin SM-700 (manufactured by Showa High Polymer Co., Ltd.) were used. Aqueous solution and phenol resin PR-961A
(Sumitomo Bakelite Co., Ltd.) was added in a predetermined amount, the above-mentioned abrasive grains were mixed in a predetermined amount, hydrochloric acid as a catalyst was further added, and the mixture was stirred and mixed to prepare a uniform slurry liquid.

【0040】このスラリー液を所定の型枠に注型し、6
0℃にて1昼夜反応固化せしめた。しかる後、型枠より
反応生成物を取り出し、水洗いしてコーンスターチ及び
未反応のホルムアルデヒドと塩酸等を除却したのち乾燥
して、合成砥石の中間体を得た。これを155℃の温度
にて約9時間熱処理したのち、所定形状に成形して合成
砥石とした。
This slurry liquid was cast into a predetermined mold, and 6
The reaction was solidified at 0 ° C for one day. Thereafter, the reaction product was taken out from the mold, washed with water to remove corn starch, unreacted formaldehyde, hydrochloric acid and the like, and then dried to obtain an intermediate of a synthetic grindstone. This was heat-treated at a temperature of 155 ° C. for about 9 hours and then molded into a predetermined shape to obtain a synthetic grindstone.

【0041】得られた合成砥石を研磨装置に取り付け、
被研磨材として前記高純材アルミ基盤を所定条件にて研
磨した。所定時間研磨した後、被研磨材の表面形状を検
査した。
The obtained synthetic grindstone was attached to a polishing device,
The high-purity aluminum substrate as a material to be polished was polished under predetermined conditions. After polishing for a predetermined time, the surface shape of the material to be polished was inspected.

【0042】また、砥石面の目詰まり状態等確認の為、
砥石面のドレッシング作業なしで、10バッチ連続して
研磨し、その時の砥面の状態および研磨の状態を検査し
た。
Further, in order to confirm the clogging state of the grindstone surface,
Polishing was performed continuously for 10 batches without dressing work on the surface of the grindstone, and the state of the grinding surface and the state of polishing at that time were inspected.

【0043】得られた合成砥石の組成及び物性、並びに
研磨試験の結果は実施例が表1〜表4、比較例が表5〜
表8の通りであった。
The composition and physical properties of the obtained synthetic grindstone and the results of the polishing test are shown in Tables 1 to 4 in Examples and Tables 5 to 5 in Comparative Examples.
The results are shown in Table 8.

【0044】[0044]

【表1】 [Table 1]

【0045】[0045]

【表2】 [Table 2]

【0046】[0046]

【表3】 [Table 3]

【0047】[0047]

【表4】 [Table 4]

【0048】[0048]

【表5】 [Table 5]

【0049】[0049]

【表6】 [Table 6]

【0050】[0050]

【表7】 [Table 7]

【0051】[0051]

【表8】 [Table 8]

【0052】表1〜表4より明らかな如く、本発明の合
成砥石は、難研削性の材料である高純材アルミ基盤に対
しても優れた表面研磨加工ができ、かつ研磨速度が高
く、研磨力の持続性も良好であった。
As is clear from Tables 1 to 4, the synthetic grindstone of the present invention is capable of excellent surface polishing processing even on a highly pure aluminum base material which is a material that is difficult to grind, and has a high polishing rate and polishing power. The persistence of was also good.

【0053】一方、砥粒粒子と合成樹脂との体積比(V
A /VR)が0.6より小さい合成砥石(比較例1)は
研磨速度が小さく、かつ砥石の目詰まりがし易いもので
あった。また体積比(VA /VR )が1.3より大きい
もの(比較例2)は、砥石の磨耗が大きく、耐久性に欠
けていた。
On the other hand, the volume ratio of the abrasive particles to the synthetic resin (V
The synthetic grindstone ( A / V R ) of less than 0.6 (Comparative Example 1) had a low polishing rate and was easily clogged with the grindstone. Further, in the case where the volume ratio (V A / V R ) was larger than 1.3 (Comparative Example 2), the grindstone was greatly worn and lacked in durability.

【0054】また、膨潤率が2.0%より大きい合成砥
石(比較例3,6)は、研磨速度が小さく、かつ表面精
度、特にろ波最大うねり(WCM)が大きくなった。
Further, the synthetic grindstones having a swelling ratio of more than 2.0% (Comparative Examples 3 and 6) had a low polishing rate and had a large surface accuracy, especially the maximum waviness (W CM ) of the filtered wave.

【0055】更に、気孔率が70容量%より小さい合成
砥石(比較例4)は、研磨面に異常な条痕が発生しやす
く、砥石の目詰まりが極めて早く起った。気孔率が85
容量%より大きいもの(比較例5)は、表面精度、特に
ろ波最大うねり(WCM)が極めて大きく、かつ砥石の磨
耗も早く耐久性に欠けるものであった。
Further, in the synthetic grindstone having a porosity of less than 70% by volume (Comparative Example 4), abnormal scratches were easily generated on the polished surface, and the clogging of the grindstone occurred extremely quickly. Porosity is 85
Those having a capacity of more than% by volume (Comparative Example 5) had extremely large surface accuracy, especially the maximum waviness (W CM ) of the filtered wave, and the wheel was worn quickly and lacked in durability.

【0056】[0056]

【発明の効果】本発明の合成砥石は、アルミディスクに
対し、表面精度に優れた研磨を効率よく行うことができ
る。また目詰まりをしにくく研磨力の持続性が良好であ
り、従来品に比べ砥石の表面更新(ドレッシング)回数
を低減することができ、作業効率が向上するとともに安
定した品質の研磨が可能であり、製品の歩留りも格段に
向上する。
EFFECTS OF THE INVENTION The synthetic grindstone of the present invention can efficiently polish an aluminum disk with excellent surface accuracy. In addition, clogging is less likely to occur and the durability of the polishing power is good, the number of surface renewal (dressing) of the grindstone can be reduced compared to the conventional product, the work efficiency is improved, and stable quality polishing is possible. The product yield is also significantly improved.

【0057】本発明の合成砥石は、特に極めて難研削材
とされている高純度アルミニウムとマグネシウムからな
る合金を素材とした高純材アルミ基盤に対してその効果
を発揮するものであり、従来品に見られない高精度かつ
持続性に優れた表面研磨加工ができる。
The synthetic grindstone of the present invention exerts its effect particularly on a high-purity aluminum base made of an alloy of high-purity aluminum and magnesium, which is extremely difficult to grind. It is possible to perform surface polishing processing with high precision and excellent durability.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 砥粒粒子を合成樹脂にて結合した連続微
細気孔を有する三次元網状組織を具えた構造体であっ
て、前記合成樹脂がポリビニルアセタール系樹脂と熱硬
化性樹脂の硬化体よりなり、前記砥粒粒子の占める体積
( VA )と前記合成樹脂の占め体積(VR)との比
(VA/VR)が0.6〜1.3で、その気孔率が70
〜85%で、かつ乾燥時と湿潤時との寸法変化が2.0
%以下であることを特徴とする高純材アルミ基盤研磨用
合成砥石。
1. A structure having a three-dimensional network structure having continuous fine pores in which abrasive particles are bonded with a synthetic resin, wherein the synthetic resin is a cured product of a polyvinyl acetal resin and a thermosetting resin. The ratio (VA / VR) of the volume (VA) occupied by the abrasive grains and the volume (VR) occupied by the synthetic resin is 0.6 to 1.3, and the porosity thereof is 70.
~ 85%, and the dimensional change between dry and wet is 2.0
% Or less, a synthetic grindstone for polishing aluminum substrate of high purity material.
JP3039538A 1991-02-08 1991-02-08 Synthetic grindstone for high-purity aluminum substrate polishing Expired - Fee Related JP2694705B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3039538A JP2694705B2 (en) 1991-02-08 1991-02-08 Synthetic grindstone for high-purity aluminum substrate polishing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3039538A JP2694705B2 (en) 1991-02-08 1991-02-08 Synthetic grindstone for high-purity aluminum substrate polishing

Publications (2)

Publication Number Publication Date
JPH04256581A JPH04256581A (en) 1992-09-11
JP2694705B2 true JP2694705B2 (en) 1997-12-24

Family

ID=12555830

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2694705B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101546694B1 (en) * 2008-06-23 2015-08-25 생-고뱅 어브레이시브즈, 인코포레이티드 High porosity superabrasive resin products and method of manufacture

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06312375A (en) * 1993-04-28 1994-11-08 Noritake Dia Kk Manufacture of resin bond wheel having vent hole structure and grinding method using the same
EP1043378B1 (en) 1999-04-09 2006-02-15 Tosoh Corporation Molded abrasive product and polishing wheel using it
JPWO2001085394A1 (en) * 2000-05-10 2004-01-08 株式会社ノリタケカンパニーリミテド Phenolic resin porous whetstone and method for producing the same
JP2001348271A (en) 2000-06-01 2001-12-18 Tosoh Corp Polishing compact and polishing surface plate using the same
JP2002018724A (en) 2000-07-03 2002-01-22 Tosoh Corp Polishing molding and polishing surface plate using the same
JP4986590B2 (en) * 2006-12-04 2012-07-25 クレトイシ株式会社 Resinoid grinding wheel
WO2011056671A2 (en) 2009-10-27 2011-05-12 Saint-Gobain Abrasives, Inc. Resin bonded abrasive
US9266220B2 (en) 2011-12-30 2016-02-23 Saint-Gobain Abrasives, Inc. Abrasive articles and method of forming same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2504525B2 (en) * 1988-06-29 1996-06-05 株式会社神戸製鋼所 Grinding wheel for grinding aluminum materials
JPH02185374A (en) * 1989-01-13 1990-07-19 Kanebo Ltd Synthetic grindstone

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101546694B1 (en) * 2008-06-23 2015-08-25 생-고뱅 어브레이시브즈, 인코포레이티드 High porosity superabrasive resin products and method of manufacture

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