JP2687931B2 - Substrate transfer device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer device,
In particular, the present invention relates to a substrate transport device that transports a substrate by supporting a substrate end surface and a back surface on a roller.

[0002]

2. Description of the Related Art Conventionally, a substrate transfer apparatus of this type has a purpose of transferring a substrate for single-wafer processing of the substrate and carrying it out to a next process unit, as described in JP-A-5-279860. It is used.

FIG. 2 is a block diagram showing the carrying process. FIG.
In the above, there is a motor 11 on the outer side surface of the processing unit 9, and the motor 11 is indirectly connected to a plurality of transport rollers 8 installed on the inner side surface by a gear or belt not shown. Further, 1 indicates the substrate, and 10 indicates the transport direction.

FIG. 4 is a front view showing a conventional substrate transfer device. In FIG. 4, the transport roller 8 has the roller 3 fixed to the shaft 2 by a spanning method.

Next, the operation will be described with reference to FIGS.
The motor 11 shown in FIG. 2 rotates, and the transmission roller 8 is rotated by transmitting it by a gear or a belt.
The substrate 1 is supported by the substrate end surface contact portion 13 and the substrate back surface contact portion 14 of the roller 3 shown in FIG. 4, and the transport roller 8 rotates to carry the substrate 1 into the processing unit 9. After the substrate 1 is transferred into the processing unit 9, for example, UV or drying processing is performed, and after the processing is completed, it is transferred to the next unit by the transfer roller 8.

[0006]

However, in the above-mentioned conventional substrate transfer apparatus, as shown in FIG. 4, the contact between the end surface portion of the roller 3 and the substrate 1 due to the sliding of the substrate 1 in the width direction causes the substrate 1 to move more than the roller 3. When 1 is hard, the substrate end surface contact portion 13 of the roller 3 is scraped to generate dust 12, which adheres to the substrate back surface contact portion 14. If the roller 3 is harder than the substrate 1, the end face of the substrate is scraped to generate dust 12.
Similarly, it adheres to the back surface contact portion 14 of the substrate.

As a result, the substrate back surface contact portion 1 of the roller 3
The dust 12 adhering to the substrate 4 adheres to the substrate 1 when the substrate 1 is conveyed, which contaminates the substrate 1 and deteriorates the product quality.

It is an object of the present invention to provide a substrate transfer device which prevents dust from adhering to the substrate due to contact between the substrate and the roller.

[0009]

In order to achieve the above object, a substrate transfer device according to the present invention is a substrate transfer device having a transfer roller, an air nozzle, and an exhaust unit, and the transfer roller is a substrate. The end face of the substrate is applied to the end face contact part, the back face of the substrate is supported on the back face contact part of the substrate, and the substrate is fed by rotating, and the air nozzle blows air to the contact part between the transfer roller and the substrate. Then, the dust generated on the contact portion is wiped off, and the exhaust unit discharges the dust wiped off by the air blowing of the air nozzle.

Further, the transport roller has an escape groove in the circumferential direction, and the air nozzle wipes the dust by blowing the dust into the escape groove of the transport roller.

Further, the transport roller has a substrate back surface contact portion for supporting the substrate back surface, which is adjacent to the escape groove.

The transport roller has a substrate rear surface contact portion having a planar shape.

Further, the transport roller is such that the contact portion on the back surface of the substrate has an arc shape.

[0014]

The dust generated at the contact portion between the transport roller and the substrate is wiped by blowing air to prevent the dust from adhering to the substrate.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1) FIG. 1 is a sectional view showing Embodiment 1 of the present invention.

In the figure, the substrate transfer apparatus according to the present invention is
Conveyor roller 8, air nozzle 4, exhaust unit 6
And

Explaining the function of each component, the transport roller 8 has a shaft 2 that supports the roller 3 in accordance with the widthwise interval of the substrate 1 by a spun ring method. It is rotatably supported, and receives the driving force of a motor or the like to rotate the roller 3 to feed the substrate 1.

Further, the transport roller 8 has a tapered substrate end surface contact portion 13 formed on the side surface of the roller 3, and a planar substrate back surface contact portion 14 formed inside the substrate end surface contact portion 13. The end surface of the substrate 1 is applied to the contact portion 13, and the back surface of the substrate 1 is supported by the contact portion 14 on the back surface of the substrate to rotate so that the substrate 1 is fed.

Further, the transport roller 8 is the backside contact portion 1 of the substrate.
The circumferential surface of the roller 3 adjacent to 4 is recessed to provide an escape groove 15 in the circumferential direction.

The air nozzle 4 is arranged above the area where the end surface of the substrate 1 is applied to the contact portion 13 of the roller 3, with its outlet facing downward, and blows air 5 to bring the substrate 1 into contact with the roller 3. The dust 12 generated by the above is blown down into the escape groove 15 to wipe the dust 12.

The exhaust unit 6 has an exhaust chamber 6a installed so as to surround the lower portion of the transport roller 8 and an exhaust pipe 6b connected to the bottom of the exhaust chamber 6a. 6a is exhausted, and the dust 12 blown down into the escape groove 15 of the transport roller 8 is discharged.

Next, the operation will be described with reference to FIGS.
The motor 11 shown in FIG. 2 rotates, and the transmission roller 8 is rotated by transmitting it by a gear or a belt.

The substrate 1 is supported by the substrate end surface contact portion 13 of the roller 3 shown in FIG. 1 and the substrate back surface contact portion 14 other than the escape groove 15, and the substrate 1 is carried into the processing unit 9 by the rotation of the transport roller 8. To do.

After the substrate 1 is transferred into the processing unit 9, for example, UV or drying processing is performed, and after the processing is completed, it is transferred to the next unit by the transfer roller 8.

After the substrate 1 is conveyed, while the conveying roller 8 is rotated, the nozzle 4 blows air 5 onto the roller 3 for several minutes, and dust 1 attached to the end face portion, the escape groove 15, etc.
2 is peeled off, and the exhaust unit 6 discharges in the exhaust flow direction 7.

Therefore, according to this embodiment, dust generated when the substrate 1 is transported is wiped from the transport roller,
As a result, the dust can be prevented from adhering to the substrate.

(Second Embodiment) FIG. 3 is a front view showing a second embodiment of the present invention. In this embodiment shown in FIG. 3, the peripheral surface of the substrate back surface contact portion 14 excluding the clearance groove 15 of the substrate back surface contact portion 14 of the roller 3 is formed into an arc shape. Therefore, according to this embodiment, not only the same effects as in Embodiment 1 can be obtained, but also the contact area between the substrate 1 and the roller 3 is reduced, so that the adhesion of dust 12 can be further reduced. Have advantages.

[0029]

As described above, according to the present invention, the dust caused by the contact between the substrate and the roller is wiped by blowing air, so that the dust can be prevented from adhering to the substrate.

Further, by providing an escape groove in the contact portion of the back surface of the roller of the roller and blowing off the dust into the escape groove to remove the dust, it is possible to capture the dust caused by the contact between the substrate and the end surface portion of the roller. It is possible to reliably prevent the adherence of.

Further, since the escape groove of the roller and the substrate are not in contact with each other, dust temporarily attached to the escape groove portion is discharged by a downflow method using an air nozzle and an exhaust unit. Is possible,
It is possible to reduce the occurrence rate of contamination by dust on the substrate to 0%.

[Brief description of the drawings]

FIG. 1 is a front view showing a first embodiment of the present invention.

FIG. 2 is a configuration diagram showing a carrying process.

FIG. 3 is a front view showing a second embodiment of the present invention.

FIG. 4 is a front view showing a conventional substrate transfer device.

[Explanation of symbols]

 1 Substrate 2 Shaft 3 Roller 4 Air Nozzle 5 Air 6 Exhaust Unit 8 Conveying Roller 13 Substrate End Face Contact Part 14 Substrate Backside Contact Part 15 Escape Groove

Claims (5)

(57) [Claims] 1. A substrate transfer device having a transfer roller, an air nozzle, and an exhaust unit, wherein the transfer roller applies the end face of the substrate to the contact part of the substrate end face and supports the back surface of the substrate on the contact part of the back surface of the substrate. , Is to feed the substrate by rotating, the air nozzle blows air to the contact portion between the transfer roller and the substrate, and wipes dust generated in the contact portion. A substrate transfer device, which discharges dust wiped by blowing air from a nozzle. 2. The transport roller has an escape groove in the circumferential direction, and the air nozzle wipes the dust by blowing dust into the escape groove of the transport roller. Item 2. The substrate transfer apparatus according to Item 1. 3. The substrate transfer device according to claim 2, wherein the transfer roller has a substrate back surface contact portion which supports the substrate back surface and is adjacent to the escape groove. 4. The substrate transfer device according to claim 3, wherein the transfer roller has a substrate back surface contact portion having a planar shape. 5. The substrate carrying device according to claim 3, wherein the carrying roller has a substrate back surface contact portion having an arc shape.