JPS6417440A - Wafer transfer device - Google Patents
Wafer transfer deviceInfo
- Publication number
- JPS6417440A JPS6417440A JP17279987A JP17279987A JPS6417440A JP S6417440 A JPS6417440 A JP S6417440A JP 17279987 A JP17279987 A JP 17279987A JP 17279987 A JP17279987 A JP 17279987A JP S6417440 A JPS6417440 A JP S6417440A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cover
- discharged
- wafer transfer
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To improve quality of a wafer, by forming a wafer transfer path on an upper side of a device cover which covers a wafer cassette and a structure part and by equipping the device cover with an exhaustion means. CONSTITUTION:A wafer transfer path is formed on an upper side of a cover device 10 which covers a wafer cassette and a structure part. An exhaustion means, by which air inside the cover 10 is discharged to a maintenance region 15, is formed in the cover 10. Thereupon, dust generated upon the operating of an air cylinder 2, an air valve 3, a vacuum valve 4, and the like is collected in a tube connector 6 through an air tube 5, and it is attracted by a propeller fan 13, and it is discharged to the maintenance region 15 with the duct 16 in between. Accordingly the dust can be discharged without the dust stuck on the wafer 7. Quality of the wafer 7 can be hence improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17279987A JPS6417440A (en) | 1987-07-13 | 1987-07-13 | Wafer transfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17279987A JPS6417440A (en) | 1987-07-13 | 1987-07-13 | Wafer transfer device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6417440A true JPS6417440A (en) | 1989-01-20 |
Family
ID=15948582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17279987A Pending JPS6417440A (en) | 1987-07-13 | 1987-07-13 | Wafer transfer device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6417440A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08330380A (en) * | 1995-05-31 | 1996-12-13 | Nec Corp | Substrate carrier |
-
1987
- 1987-07-13 JP JP17279987A patent/JPS6417440A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08330380A (en) * | 1995-05-31 | 1996-12-13 | Nec Corp | Substrate carrier |
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