JPS641237A - Dust particle removing apparatus - Google Patents
Dust particle removing apparatusInfo
- Publication number
- JPS641237A JPS641237A JP62156160A JP15616087A JPS641237A JP S641237 A JPS641237 A JP S641237A JP 62156160 A JP62156160 A JP 62156160A JP 15616087 A JP15616087 A JP 15616087A JP S641237 A JPS641237 A JP S641237A
- Authority
- JP
- Japan
- Prior art keywords
- particles
- air
- cavity
- impact
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title abstract 7
- 239000000428 dust Substances 0.000 title abstract 3
- 230000005611 electricity Effects 0.000 abstract 2
- 230000003068 static effect Effects 0.000 abstract 2
- 230000001133 acceleration Effects 0.000 abstract 1
- 238000007664 blowing Methods 0.000 abstract 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
Abstract
PURPOSE: To effectively remove dust particles by applying an impact simultaneously upon vibration to isolate the particles in the cavity of an electronic component and blowing ionized air.
CONSTITUTION: With an opening disposed downside an electronic component 1 is secured to a sample attaching jig 2, a vibration is applied by a vibration generator 4 having an acceleration sensor 3 to isolate dust particles in the cavity of the component, and an impact is simultaneously applied by an impact applying machine 5. The isolated particles are attached to the inner wall of the cavity by means of static electricity, but ionized air is blown by an ionization air blower 7 through an air filter 6 to suck and exhaust floated particles together with air to an exhaust duct 8. Thus, the particles are effectively removed without influence of the static electricity.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-156160A JPH011237A (en) | 1987-06-23 | Foreign particle removal device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-156160A JPH011237A (en) | 1987-06-23 | Foreign particle removal device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS641237A true JPS641237A (en) | 1989-01-05 |
| JPH011237A JPH011237A (en) | 1989-01-05 |
Family
ID=
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5141072A (en) * | 1989-05-30 | 1992-08-25 | Honda Giken Kogyo Kabushiki Kaisha | Apparatus for controlling the distribution of drive power for four-wheel-drive motor vehicles |
| US5152362A (en) * | 1990-04-20 | 1992-10-06 | Nissan Motor Co., Ltd. | Driving torque distribution control system for vehicle |
| CN102698985A (en) * | 2012-06-27 | 2012-10-03 | 湖南三德科技发展有限公司 | Automatic dust removing method for sample preparation and dust removing system thereof |
| US9659795B2 (en) | 2012-01-27 | 2017-05-23 | Mitsubishi Electric Corporation | Foreign matter removal device and foreign matter removal method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5141072A (en) * | 1989-05-30 | 1992-08-25 | Honda Giken Kogyo Kabushiki Kaisha | Apparatus for controlling the distribution of drive power for four-wheel-drive motor vehicles |
| US5152362A (en) * | 1990-04-20 | 1992-10-06 | Nissan Motor Co., Ltd. | Driving torque distribution control system for vehicle |
| US9659795B2 (en) | 2012-01-27 | 2017-05-23 | Mitsubishi Electric Corporation | Foreign matter removal device and foreign matter removal method |
| CN102698985A (en) * | 2012-06-27 | 2012-10-03 | 湖南三德科技发展有限公司 | Automatic dust removing method for sample preparation and dust removing system thereof |
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