JPS641237A - Dust particle removing apparatus - Google Patents

Dust particle removing apparatus

Info

Publication number
JPS641237A
JPS641237A JP62156160A JP15616087A JPS641237A JP S641237 A JPS641237 A JP S641237A JP 62156160 A JP62156160 A JP 62156160A JP 15616087 A JP15616087 A JP 15616087A JP S641237 A JPS641237 A JP S641237A
Authority
JP
Japan
Prior art keywords
particles
air
cavity
impact
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62156160A
Other languages
Japanese (ja)
Other versions
JPH011237A (en
Inventor
Minoru Tejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62156160A priority Critical patent/JPS641237A/en
Publication of JPH011237A publication Critical patent/JPH011237A/en
Publication of JPS641237A publication Critical patent/JPS641237A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To effectively remove dust particles by applying an impact simultaneously upon vibration to isolate the particles in the cavity of an electronic component and blowing ionized air.
CONSTITUTION: With an opening disposed downside an electronic component 1 is secured to a sample attaching jig 2, a vibration is applied by a vibration generator 4 having an acceleration sensor 3 to isolate dust particles in the cavity of the component, and an impact is simultaneously applied by an impact applying machine 5. The isolated particles are attached to the inner wall of the cavity by means of static electricity, but ionized air is blown by an ionization air blower 7 through an air filter 6 to suck and exhaust floated particles together with air to an exhaust duct 8. Thus, the particles are effectively removed without influence of the static electricity.
COPYRIGHT: (C)1989,JPO&Japio
JP62156160A 1987-06-23 1987-06-23 Dust particle removing apparatus Pending JPS641237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156160A JPS641237A (en) 1987-06-23 1987-06-23 Dust particle removing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156160A JPS641237A (en) 1987-06-23 1987-06-23 Dust particle removing apparatus

Publications (2)

Publication Number Publication Date
JPH011237A JPH011237A (en) 1989-01-05
JPS641237A true JPS641237A (en) 1989-01-05

Family

ID=15621660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156160A Pending JPS641237A (en) 1987-06-23 1987-06-23 Dust particle removing apparatus

Country Status (1)

Country Link
JP (1) JPS641237A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5141072A (en) * 1989-05-30 1992-08-25 Honda Giken Kogyo Kabushiki Kaisha Apparatus for controlling the distribution of drive power for four-wheel-drive motor vehicles
US5152362A (en) * 1990-04-20 1992-10-06 Nissan Motor Co., Ltd. Driving torque distribution control system for vehicle
CN102698985A (en) * 2012-06-27 2012-10-03 湖南三德科技发展有限公司 Automatic dust removing method for sample preparation and dust removing system thereof
US9659795B2 (en) 2012-01-27 2017-05-23 Mitsubishi Electric Corporation Foreign matter removal device and foreign matter removal method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5141072A (en) * 1989-05-30 1992-08-25 Honda Giken Kogyo Kabushiki Kaisha Apparatus for controlling the distribution of drive power for four-wheel-drive motor vehicles
US5152362A (en) * 1990-04-20 1992-10-06 Nissan Motor Co., Ltd. Driving torque distribution control system for vehicle
US9659795B2 (en) 2012-01-27 2017-05-23 Mitsubishi Electric Corporation Foreign matter removal device and foreign matter removal method
CN102698985A (en) * 2012-06-27 2012-10-03 湖南三德科技发展有限公司 Automatic dust removing method for sample preparation and dust removing system thereof

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